JP2009198839A - 揺動体装置 - Google Patents

揺動体装置 Download PDF

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Publication number
JP2009198839A
JP2009198839A JP2008040752A JP2008040752A JP2009198839A JP 2009198839 A JP2009198839 A JP 2009198839A JP 2008040752 A JP2008040752 A JP 2008040752A JP 2008040752 A JP2008040752 A JP 2008040752A JP 2009198839 A JP2009198839 A JP 2009198839A
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JP
Japan
Prior art keywords
drive
frequency
amplitude
driving
drive signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008040752A
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English (en)
Japanese (ja)
Other versions
JP2009198839A5 (https=
Inventor
Kazufumi Konuma
和文 小沼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2008040752A priority Critical patent/JP2009198839A/ja
Priority to US12/372,711 priority patent/US7855606B2/en
Priority to CNA2009100078749A priority patent/CN101515067A/zh
Publication of JP2009198839A publication Critical patent/JP2009198839A/ja
Publication of JP2009198839A5 publication Critical patent/JP2009198839A5/ja
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2008040752A 2008-02-22 2008-02-22 揺動体装置 Withdrawn JP2009198839A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008040752A JP2009198839A (ja) 2008-02-22 2008-02-22 揺動体装置
US12/372,711 US7855606B2 (en) 2008-02-22 2009-02-17 Oscillator device
CNA2009100078749A CN101515067A (zh) 2008-02-22 2009-02-20 振荡器装置和共振频率检测方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008040752A JP2009198839A (ja) 2008-02-22 2008-02-22 揺動体装置

Publications (2)

Publication Number Publication Date
JP2009198839A true JP2009198839A (ja) 2009-09-03
JP2009198839A5 JP2009198839A5 (https=) 2011-04-07

Family

ID=40997713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008040752A Withdrawn JP2009198839A (ja) 2008-02-22 2008-02-22 揺動体装置

Country Status (3)

Country Link
US (1) US7855606B2 (https=)
JP (1) JP2009198839A (https=)
CN (1) CN101515067A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102723999B (zh) * 2012-07-12 2014-04-02 上海师范大学 基于卡文迪许扭秤的引力通信装置及其方法
CN103885271B (zh) * 2012-12-19 2015-11-11 光宝科技股份有限公司 投影控制方法以及微机电投影装置
CN104640050A (zh) * 2013-11-11 2015-05-20 西格玛艾尔科技股份有限公司 喇叭共振频率的测定方法及利用其的测定装置
US12052925B2 (en) 2016-01-23 2024-07-30 Liat Keng KANG Method and device for driving a piezoelectric device
JP6820484B2 (ja) * 2018-04-19 2021-01-27 シンフォニアテクノロジー株式会社 振動系の制御装置およびワーク搬送装置
JP7587994B2 (ja) * 2021-01-28 2024-11-21 浜松ホトニクス株式会社 アクチュエータデバイスの製造方法
EP4323647A1 (en) * 2021-04-14 2024-02-21 Cambridge Mechatronics Limited Sma actuator assembly

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3097164B2 (ja) 1991-03-29 2000-10-10 神鋼電機株式会社 共振々動周波数の測定方法及びその測定器
US6024840A (en) 1997-08-08 2000-02-15 Arco Chemical Technology, L.P. Propylene oxide purification
US6569109B2 (en) * 2000-02-04 2003-05-27 Olympus Optical Co., Ltd. Ultrasonic operation apparatus for performing follow-up control of resonance frequency drive of ultrasonic oscillator by digital PLL system using DDS (direct digital synthesizer)
JP2002277811A (ja) * 2001-03-22 2002-09-25 Olympus Optical Co Ltd 光スキャナ駆動装置および方法
US6838661B2 (en) * 2002-03-08 2005-01-04 Lexmark International, Inc. Torsion oscillator stabilization including maintaining the amplitude of the oscillator without changing its drive frequency
JP2005241482A (ja) 2004-02-27 2005-09-08 Canon Inc 光偏向器、光偏向器における偏向手段の共振周波数を検出する検出装置及び方法
JP2005292627A (ja) 2004-04-02 2005-10-20 Ricoh Co Ltd 光走査装置
JP2008134601A (ja) * 2006-11-01 2008-06-12 Canon Inc 画像形成装置

Also Published As

Publication number Publication date
CN101515067A (zh) 2009-08-26
US7855606B2 (en) 2010-12-21
US20090212874A1 (en) 2009-08-27

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