JP2009164355A5 - - Google Patents

Download PDF

Info

Publication number
JP2009164355A5
JP2009164355A5 JP2008000804A JP2008000804A JP2009164355A5 JP 2009164355 A5 JP2009164355 A5 JP 2009164355A5 JP 2008000804 A JP2008000804 A JP 2008000804A JP 2008000804 A JP2008000804 A JP 2008000804A JP 2009164355 A5 JP2009164355 A5 JP 2009164355A5
Authority
JP
Japan
Prior art keywords
center
scanning
axis direction
blades
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008000804A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009164355A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008000804A priority Critical patent/JP2009164355A/ja
Priority claimed from JP2008000804A external-priority patent/JP2009164355A/ja
Priority to TW097150699A priority patent/TW200942979A/zh
Priority to US12/349,439 priority patent/US8094289B2/en
Priority to KR1020090000605A priority patent/KR20090076806A/ko
Publication of JP2009164355A publication Critical patent/JP2009164355A/ja
Publication of JP2009164355A5 publication Critical patent/JP2009164355A5/ja
Pending legal-status Critical Current

Links

JP2008000804A 2008-01-07 2008-01-07 走査露光装置およびデバイス製造方法 Pending JP2009164355A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008000804A JP2009164355A (ja) 2008-01-07 2008-01-07 走査露光装置およびデバイス製造方法
TW097150699A TW200942979A (en) 2008-01-07 2008-12-25 Scanning exposure apparatus and device manufacturing method
US12/349,439 US8094289B2 (en) 2008-01-07 2009-01-06 Scanning exposure apparatus and device manufacturing method
KR1020090000605A KR20090076806A (ko) 2008-01-07 2009-01-06 주사노광장치 및 디바이스 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008000804A JP2009164355A (ja) 2008-01-07 2008-01-07 走査露光装置およびデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2009164355A JP2009164355A (ja) 2009-07-23
JP2009164355A5 true JP2009164355A5 (enExample) 2011-02-03

Family

ID=40844297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008000804A Pending JP2009164355A (ja) 2008-01-07 2008-01-07 走査露光装置およびデバイス製造方法

Country Status (4)

Country Link
US (1) US8094289B2 (enExample)
JP (1) JP2009164355A (enExample)
KR (1) KR20090076806A (enExample)
TW (1) TW200942979A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6015930B2 (ja) * 2012-12-07 2016-10-26 株式会社ニコン 露光方法及び露光装置、並びにデバイス製造方法
CN106462085B (zh) 2014-06-23 2019-05-17 Asml荷兰有限公司 光刻设备和方法
JP6771997B2 (ja) * 2016-08-24 2020-10-21 キヤノン株式会社 露光装置、露光方法、および物品製造方法
JP6970548B2 (ja) * 2016-09-09 2021-11-24 キヤノン株式会社 照明光学系、露光装置、及び物品製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5854671A (en) * 1993-05-28 1998-12-29 Nikon Corporation Scanning exposure method and apparatus therefor and a projection exposure apparatus and method which selectively chooses between static exposure and scanning exposure
JP3093528B2 (ja) 1993-07-15 2000-10-03 キヤノン株式会社 走査型露光装置
JPH0737776A (ja) * 1993-07-19 1995-02-07 Nikon Corp 走査型露光装置
JPH08250402A (ja) * 1995-03-15 1996-09-27 Nikon Corp 走査型露光方法及び装置
KR100210569B1 (ko) * 1995-09-29 1999-07-15 미따라이 하지메 노광방법 및 노광장치, 그리고 이를 이용한 디바이스제조방법
JP2000232049A (ja) * 1999-02-09 2000-08-22 Canon Inc 露光装置およびデバイス製造方法
JP2002110529A (ja) * 2000-10-03 2002-04-12 Nikon Corp 投影露光装置及び該装置を用いたマイクロデバイス製造方法
JP4581639B2 (ja) * 2003-11-13 2010-11-17 株式会社ニコン 可変スリット装置、照明装置、露光装置、及びデバイスの製造方法
US7119883B2 (en) * 2004-10-13 2006-10-10 Asml Holding N.V. Correcting variations in the intensity of light within an illumination field without distorting the telecentricity of the light
US7375353B2 (en) * 2005-09-13 2008-05-20 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
JP2009164356A (ja) * 2008-01-07 2009-07-23 Canon Inc 走査露光装置およびデバイス製造方法

Similar Documents

Publication Publication Date Title
JP2020166243A (ja) 直描露光装置
TWI695235B (zh) 圖案描繪裝置及元件製造方法
JP2004363590A5 (enExample)
JP2008171960A5 (enExample)
JP2008199034A5 (enExample)
KR20080043047A (ko) 새도우 모아레를 이용한 3차원형상 측정장치
EP2261739A3 (en) Method and apparatus for creating overlapping patterns on a substrate
JP2011029655A5 (enExample)
JP2016001308A5 (ja) 露光装置、およびデバイス製造方法
JP2010020017A5 (enExample)
JP2009164355A5 (enExample)
JP2009257972A5 (enExample)
KR101358287B1 (ko) 레이저 빔 스캔 장치의 캘리브레이션 시스템
EP2020620A3 (en) Adjustment method, exposure method, device manufacturing method, and exposure apparatus
JP2010204588A5 (enExample)
JP2005012169A5 (enExample)
JP2019140288A5 (enExample)
JP2005085991A5 (enExample)
TW200707100A (en) Process for forming permanent pattern
JP2005191495A5 (enExample)
TW200942979A (en) Scanning exposure apparatus and device manufacturing method
CN105209977B (zh) 曝光装置
JP2014110408A5 (enExample)
JP2001332473A5 (enExample)
JP5689535B2 (ja) リソグラフィ装置及びデバイス製造方法