JP2009164310A - Electronic parts repair equipment and electronic parts repairing method - Google Patents

Electronic parts repair equipment and electronic parts repairing method Download PDF

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JP2009164310A
JP2009164310A JP2007341456A JP2007341456A JP2009164310A JP 2009164310 A JP2009164310 A JP 2009164310A JP 2007341456 A JP2007341456 A JP 2007341456A JP 2007341456 A JP2007341456 A JP 2007341456A JP 2009164310 A JP2009164310 A JP 2009164310A
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electronic component
heating
laser beam
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Takayuki Yamada
隆行 山田
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Sharp Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide electronic parts repair equipment and an electronic parts repairing method that can easily repair minute electronic parts that are highly densely mounted using laser heating. <P>SOLUTION: At an tip part of a heating and suction head 35 of the electronic parts repair equipment, there is prepared an optical waveguide 40 for setting an irradiation direction of a laser beam 21 transmitted from within an optical fiber 31 to surely irradiate the laser beam to a target part to be repaired. The optical waveguide 40 is constructed such that the laser beam is emitted from the tip surface 35a that is in contact with the target repaired part at the tip part. Further, there is prepared a suction hole 23 inside the optical waveguide 40 that extends in parallel with the transmission direction of the laser beam, and one opening of the suction hole 23 is prepared at the tip surface 35a. The other opening of the suction hole 23 is in contact with a vacuum suction hose 36, and it is so constructed that the internal cavity of the suction hole 23 becomes vacuum by a vacuum source. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、はんだなどの熱可塑性接合材を用いて電子回路基板上に電子部品を実装した際に、接合不良などが発生した電子部品をリペアする電子部品リペア装置および電子部品リペア方法に関する。   The present invention relates to an electronic component repair apparatus and an electronic component repair method for repairing an electronic component in which a bonding failure or the like has occurred when an electronic component is mounted on an electronic circuit board using a thermoplastic bonding material such as solder.

近年、携帯情報端末、モバイル機器などの小型薄型化、軽量化が急激に進んでおり、それに伴い表面実装用の小型電子部品(チップ部品)に関しても、サイズ1005(1.0mm×0.5mm)から0603(0.6mm×0.3mm)へ、さらには0402(0.4mm×0.2mm)へと小型化が進んでいる。加えて、チップ部品の実装には、プリント基板の配線パターンや電極パッドの配置を工夫して無駄なスペースの無い高密度実装基板設計が求められており、例えばチップ部品では実装間隔が0.2mm程度の実装が行われている。   In recent years, miniaturization, thinning, and weight reduction of portable information terminals, mobile devices, and the like have rapidly progressed, and accordingly, a small electronic component (chip component) for surface mounting also has a size of 1005 (1.0 mm × 0.5 mm). From 0603 to 0.603 (0.6 mm × 0.3 mm), further down to 0402 (0.4 mm × 0.2 mm). In addition, the mounting of chip components requires a high-density mounting board design that eliminates wasted space by devising the layout of printed circuit board wiring patterns and electrode pads. For example, a chip component has a mounting interval of 0.2 mm. A degree of implementation has been made.

チップ部品をプリント配線基板にはんだ付けする従来の方法は、プリント配線基板表面の実装位置にチップ部品を取り付けるためのランドを形成し、印刷マスクを用いてはんだペーストをランドの全面に印刷、塗布し、この上にチップ部品を載置したのちリフロー加熱してはんだ付けするものである。   The conventional method of soldering chip components to a printed wiring board is to form lands for mounting chip components at mounting positions on the surface of the printed wiring board, and then print and apply solder paste to the entire surface of the lands using a printing mask. Then, after placing the chip component thereon, reflow heating is performed for soldering.

図5は、はんだ付けの接合不良の一例を示す模式図である。図5は、チップ部品を実装した実装面を平面視した図である。   FIG. 5 is a schematic diagram illustrating an example of a soldering joint failure. FIG. 5 is a plan view of a mounting surface on which chip components are mounted.

上記のように、プリント配線基板12の表面に高密度実装を行う場合、リフロー加熱時にはんだの一部がランド上から流れ出し、隣接する電子チップ部品11間に、はんだボールやはんだブリッジ13を生じさせ、部品同士を短絡させてしまうという不良が生じる可能性がある。また、部品搭載機の搭載精度などの問題から、部品搭載時の部品位置ズレ14などにより隣接部品と接触したり、あるいは隣接部品のランドにはんだ付けされてしまう可能性がある。   As described above, when high-density mounting is performed on the surface of the printed wiring board 12, part of the solder flows out from the land during reflow heating, and solder balls and solder bridges 13 are generated between the adjacent electronic chip components 11. There is a possibility that defects such as short-circuiting parts occur. Further, due to problems such as mounting accuracy of the component mounting machine, there is a possibility that the component will be brought into contact with the adjacent component or soldered to the land of the adjacent component due to the component misalignment 14 when mounting the component.

このような接合不良が起こった場合のリペア方法として、不良実装部品の交換、位置ずれの補正、はんだブリッジの除去などがある。これは、一旦プリント配線基板12表面に実装したチップ部品を取り外し、はんだ残渣を除去した後、はんだペーストを再度供給し、その後に修理したチップ部品または新しいチップ部品を取り付ける、リペア工程と呼ばれる工程が必要とされる。   As a repair method when such a bonding failure occurs, replacement of defective mounting parts, correction of misalignment, removal of a solder bridge, and the like are available. This is a process called a repair process in which a chip component once mounted on the surface of the printed wiring board 12 is removed, a solder residue is removed, a solder paste is supplied again, and then a repaired chip component or a new chip component is attached. Needed.

リペア工程では、一般に、リペア対象部品10およびその周辺のはんだ接合部をはんだの溶融温度以上に加熱し、はんだを溶融させてチップ部品を取り外し、プリント配線基板表面のランド上に残ったはんだを、はんだ吸引器、銅編み線にフラックスをコーティングしたウィックに吸収させるなどの方法で除去し、糸はんだあるいははんだペーストをランド上に新たに供給して、加熱することによりチップ部品の再実装が行われる。このときの加熱方法としては、はんだごて、熱風の吹き付け、ハロゲンランプ、レーザなどを利用する。   In the repair process, in general, the repair target component 10 and its surrounding solder joint are heated to a temperature higher than the melting temperature of the solder, the solder is melted, the chip component is removed, and the solder remaining on the land on the surface of the printed wiring board is removed. It is removed by a method such as a solder aspirator, a copper knitted wire coated with a flux-coated wick, and then re-mounted with chip solder by supplying new solder or solder paste onto the land and heating. . As a heating method at this time, a soldering iron, hot air blowing, a halogen lamp, a laser, or the like is used.

リペア工程で用いられるリペア装置は、基板保持ステージ、加熱吸着ヘッドを備え、チップ部品を対象としてリペア対象部品とその周辺を加熱することではんだを溶融させ、吸着によりリペア対象部品を除去する。リペア対象部品除去後のはんだ残存量をレーザ変位系により測定し、適切なはんだ量を塗布してリペアを行う(特許文献1参照)。   The repair device used in the repair process includes a substrate holding stage and a heating suction head, and heats the repair target component and its periphery for the chip component, thereby melting the solder and removing the repair target component by suction. The remaining amount of solder after the repair target component is removed is measured by a laser displacement system, and an appropriate amount of solder is applied to perform repair (see Patent Document 1).

また、特許文献2には、リペア対象部品の真上から真空チャックすることでリペア対象部品を保持し、レーザ光をリペア対象部品の斜め上方から照射することによって、はんだを溶融させてリペア対象部品を除去するリペア装置が開示されている。   Further, in Patent Document 2, the repair target component is held by vacuum chucking directly above the repair target component, and the solder is melted by irradiating laser light obliquely from above the repair target component. A repair device that removes the problem is disclosed.

特開2004−241574号公報JP 2004-241574 A 特開平5−235538号公報JP-A-5-235538

従来のリペア装置では下記に示すような問題点が存在する。
高密度にチップ部品が実装されたプリント配線基板において、接合不良となったリペア対象部品をリペアする際に、熱風などの加熱源を用いるとリペア対象部品の周囲も加熱されるため、基板へのダメージや、周辺のはんだ接合部の酸化、はんだ接合部内の金属間化合物の成長によって周辺のはんだ接合部の接合強度が低下し、信頼性が低下するという問題がある。
The conventional repair device has the following problems.
When repairing a repair target component that has been bonded poorly on a printed wiring board with chip components mounted at high density, if a heating source such as hot air is used, the area around the repair target component is also heated. Due to damage, oxidation of the peripheral solder joints, and growth of intermetallic compounds in the solder joints, there is a problem that the joint strength of the peripheral solder joints is lowered and reliability is lowered.

また、レーザを用いた局所加熱の場合、リペア対象部品が微小になると部品吸着機構がリペア対象部品を吸着固定した状態でレーザ光を照射しようとしても、この吸着機構によって光路が遮断されてしまうためにはんだを加熱できない。   In addition, in the case of local heating using a laser, if the part to be repaired becomes minute, even if the part suction mechanism attempts to irradiate the laser beam with the part to be repaired sucked and fixed, the optical path is blocked by this suction mechanism. Can not heat the solder.

また、吸着機構を避けてリペア対象部品の斜め上方からレーザ光をはんだ接合部に照射しようとした場合、図6の模式図に示すように、リペア対象部品10に隣接する大型部品20がレーザ光の光路を遮断して加熱できず、さらにリペア対象部品10の加熱と吸着を同時に行う必要があるため、部品吸着ノズル22の吸着孔23と斜め方向から照射するレーザ光21の照射位置24との間に高い相対位置精度が要求されるという問題がある。   Further, when it is attempted to irradiate the solder joint portion with the laser beam obliquely from above the repair target component while avoiding the suction mechanism, the large component 20 adjacent to the repair target component 10 is irradiated with the laser beam as shown in the schematic diagram of FIG. Since it is necessary to simultaneously heat and suck the component 10 to be repaired, the suction hole 23 of the component suction nozzle 22 and the irradiation position 24 of the laser beam 21 radiating from an oblique direction must be performed. There is a problem that high relative position accuracy is required between them.

本発明の目的は、レーザ加熱により高密度実装された微小な電子部品を容易にリペアすることが可能である電子部品リペア装置および電子部品リペア方法を提供することである。   An object of the present invention is to provide an electronic component repair apparatus and an electronic component repair method capable of easily repairing minute electronic components mounted with high density by laser heating.

本発明は、電子部品を熱可塑性接合材で実装した基板を保持する基板保持ステージと、
レーザ光源と、
除去対象となる電子部品にレーザ光を照射するようにレーザ光源からレーザ光を伝送するとともに、当該電子部品を吸着する加熱吸着ヘッドとを具備し、
加熱吸着ヘッドによって前記電子部品にレーザ光を照射して当該電子部品を加熱し、熱可塑性接合部材を溶融させるとともに、当該電子部品を吸着して除去するように構成されることを特徴とする電子部品リペア装置である。
The present invention includes a substrate holding stage for holding a substrate on which an electronic component is mounted with a thermoplastic bonding material,
A laser light source;
The laser beam is transmitted from the laser light source so as to irradiate the electronic component to be removed with the laser beam, and a heating suction head that sucks the electronic component is provided.
An electronic device configured to irradiate the electronic component with a laser beam by a heating suction head to heat the electronic component, melt the thermoplastic bonding member, and suck and remove the electronic component. This is a parts repair device.

また本発明は、加熱吸着ヘッドは、レーザ光を伝送する光導波路を備え、
前記光導波路は、その内部に設けられた空孔を真空状態にすることで空孔の開口に接する電子部品を真空吸着することを特徴とする。
In the present invention, the heating adsorption head includes an optical waveguide for transmitting laser light,
The optical waveguide is characterized in that an electronic component in contact with the opening of the hole is vacuum-sucked by making the hole provided therein vacuum.

また本発明は、加熱吸着ヘッドは、レーザ光をレンズによって伝送する光学手段を備え、
前記光学手段は、レンズ周辺を覆うケースを備え、ケースの内部空間を真空状態にすることでケースに設けられた開口に接する電子部品を真空吸着することを特徴とする。
According to the present invention, the heating adsorption head includes optical means for transmitting laser light through a lens,
The optical means includes a case that covers the periphery of the lens, and vacuum-sucks an electronic component that is in contact with an opening provided in the case by bringing the internal space of the case into a vacuum state.

また本発明は、熱可塑性接合材で基板に実装された除去対象となる電子部品に対し、加熱吸着ヘッドによって、レーザ光源からレーザ光を伝送して当該電子部品にレーザ光を照射し、当該電子部品を加熱して熱可塑性接合部材を溶融させるとともに、当該電子部品を吸着して除去することを特徴とする電子部品リペア方法である。   In addition, the present invention is directed to an electronic component to be removed, which is mounted on a substrate with a thermoplastic bonding material, by transmitting a laser beam from a laser light source by a heating adsorption head and irradiating the electronic component with the laser beam. An electronic component repair method comprising heating a component to melt a thermoplastic joining member and adsorbing and removing the electronic component.

本発明によれば、基板保持ステージに保持された基板上に実装された電子部品のうち、除去対象となる電子部品にレーザ光を照射するように加熱吸着ヘッドがレーザ光をレーザ光源から伝送するとともに、除去対象となる電子部品を吸着する。レーザ光の照射によって除去対象となる電子部品は加熱され、吸着されて基板上から除去される。   According to the present invention, among the electronic components mounted on the substrate held on the substrate holding stage, the heating suction head transmits the laser light from the laser light source so that the electronic component to be removed is irradiated with the laser light. At the same time, the electronic component to be removed is sucked. The electronic component to be removed is heated by being irradiated with the laser beam, and is sucked and removed from the substrate.

これにより、除去対象となる電子部品のみを局所的に加熱することができ、加熱と同時に電子部品の吸着を行うことができる。レーザ光を直接電子部品にまで伝送することで、レーザ光を大型部品や部品吸着機構が遮断して加熱できないといった問題が発生しない。さらに、レーザ光の伝送構造と電子部品の吸着構造とが一体となっているので、レーザ光照射位置と部品吸着位置の高い相対位置精度が要求されないので、容易にリペアを行うことができる。   Thereby, only the electronic component used as a removal object can be heated locally, and adsorption | suction of an electronic component can be performed simultaneously with a heating. By transmitting the laser beam directly to the electronic component, there is no problem that the laser beam cannot be heated by the large component or the component suction mechanism being cut off. Furthermore, since the laser light transmission structure and the electronic component suction structure are integrated, high relative positional accuracy between the laser light irradiation position and the component suction position is not required, and repair can be easily performed.

また本発明によれば、加熱吸着ヘッドは、レーザ光を伝送する光導波路を備えており、光導波路の内部に設けられた空孔を真空状態にすることで空孔の開口に接する電子部品を真空吸着する。   Further, according to the present invention, the heating adsorption head includes an optical waveguide that transmits laser light, and an electronic component that is in contact with the opening of the hole is formed by evacuating the hole provided inside the optical waveguide. Vacuum adsorption.

これにより、さらに容易にリペアを行うことができ、さらには、空孔内の真空度の変化によって、電子部品が取り外しできたかどうかを判断することができる。   As a result, the repair can be performed more easily, and further, it can be determined whether or not the electronic component has been removed by the change in the degree of vacuum in the hole.

また本発明によれば、加熱吸着ヘッドは、レーザ光をレンズによって伝送する光学手段を備えており、レンズ周辺を覆うケースの内部空間を真空状態にすることでケースに設けられた開口に接する電子部品を真空吸着する。   Further, according to the present invention, the heating / adsorption head includes an optical unit that transmits laser light through a lens, and an electron in contact with an opening provided in the case by bringing the internal space of the case covering the periphery of the lens into a vacuum state. Vacuum adsorption of parts.

これにより、真空吸着孔をレーザ伝送経路の外側に配置することによって、レーザ光の損失を防止することができる。   Thereby, the loss of a laser beam can be prevented by disposing the vacuum suction hole outside the laser transmission path.

また本発明によれば、熱可塑性接合材で基板に実装された電子部品のうち、除去対象となる電子部品に対し、加熱吸着ヘッドによって、レーザ光源からレーザ光を伝送して当該電子部品にレーザ光を照射し、当該電子部品を加熱して熱可塑性接合部材を溶融させるとともに、当該電子部品を吸着して除去する。   According to the present invention, among the electronic components mounted on the substrate with the thermoplastic bonding material, the laser light is transmitted from the laser light source to the electronic component to be removed by the heating suction head, and the laser is transmitted to the electronic component. Light is irradiated, the electronic component is heated to melt the thermoplastic joining member, and the electronic component is adsorbed and removed.

これにより、除去対象となる電子部品のみを局所的に加熱することができ、加熱と同時に電子部品の吸着を行うことができる。レーザ光を直接電子部品にまで伝送することで、レーザ光を大型部品や部品吸着機構が遮断して加熱できないといった問題が発生しない。さらに、レーザ光の伝送構造と電子部品の吸着構造とが一体となっているので、レーザ光照射位置と部品吸着位置の高い相対位置精度が要求されないので、容易にリペアを行うことができる。   Thereby, only the electronic component used as a removal object can be heated locally, and adsorption | suction of an electronic component can be performed simultaneously with a heating. By transmitting the laser beam directly to the electronic component, there is no problem that the laser beam cannot be heated by the large component or the component suction mechanism being cut off. Furthermore, since the laser light transmission structure and the electronic component suction structure are integrated, high relative positional accuracy between the laser light irradiation position and the component suction position is not required, and repair can be easily performed.

以下では本発明の実施の形態を説明する。
図1は、本発明の実施の一形態であるリペア装置の構成を示す外観図である。図1に示すように、本発明のリペア装置は、リペアの対象となる微小電子部品が実装されたプリント配線基板(以下では単に「実装基板」という)を保持する基板保持ステージ32と、基板保持ステージ32に保持された状態の実装基板から、リペア対象部品を除去する加熱吸着ヘッド35とを備える。
Hereinafter, embodiments of the present invention will be described.
FIG. 1 is an external view showing a configuration of a repair device according to an embodiment of the present invention. As shown in FIG. 1, the repair apparatus of the present invention includes a substrate holding stage 32 that holds a printed wiring board (hereinafter simply referred to as “mounting board”) on which microelectronic components to be repaired are mounted, and a substrate holding stage. A heating suction head 35 for removing a repair target component from the mounting substrate held by the stage 32 is provided.

なお、本発明のリペア装置によるリペアの対象となるのは、熱可塑性の接合材によって基板表面に実装された電子部品である。熱可塑性の接合材は、たとえば、はんだなどの合金や他の金属、樹脂、導電性接着材、ガラスなど所定の温度以上で軟化、溶融することで接合性が失われ、電子部品が基板から容易に取り外し可能な材料であればよい。また、リペア対象の電子部品についても、チップ抵抗、チップコンデンサなど種々の電子部品を対象とすることができる。リペアする際に電子部品自身を加熱することで接合材を溶融させることになるので、リペア可能な接合材と電子部品の組み合わせとしては、接合材の溶融温度以上の高温であっても特性変化などが発生しない電子部品であればよい。   It is to be noted that an electronic component mounted on the substrate surface by a thermoplastic bonding material is a target of repair by the repair device of the present invention. Thermoplastic bonding materials, for example, alloys such as solder, other metals, resins, conductive adhesives, glass, etc. are softened and melted at a predetermined temperature or higher, so that bonding properties are lost, and electronic components can be easily removed from the board. Any material can be used as long as it is removable. In addition, various electronic components such as chip resistors and chip capacitors can be targeted for repaired electronic components. Since the bonding material is melted by heating the electronic component itself when repairing, the combination of the bonding material that can be repaired and the electronic component can change characteristics even at a temperature higher than the melting temperature of the bonding material. Any electronic component that does not generate any problem may be used.

基板保持ステージ32は、さらにx−y−θステージ33上に設けられる。x−y−θステージ33は、水平面内をx方向、x方向に直交するy方向に摺動可能に構成され、さらに中央に回転中心を有し、鉛直方向の回転軸まわりに回転可能に構成される。これにより、基板保持ステージ32を、x−y−θステージ33と同様にx方向、y方向に直線移動させ、さらに回転軸まわりに所定の角度θ角変位させることができる。加熱吸着ヘッド35は、zステージ34に設けられることにより、z方向(鉛直方向)にのみ移動可能に構成される。すなわち、加熱吸着ヘッド35は、水平面内で位置変位しないように構成される。   The substrate holding stage 32 is further provided on the xy-θ stage 33. The xy-θ stage 33 is configured to be slidable in the x direction and the y direction perpendicular to the x direction in a horizontal plane, and further has a rotation center in the center and is configured to be rotatable about a vertical rotation axis. Is done. As a result, the substrate holding stage 32 can be linearly moved in the x and y directions similarly to the xy-θ stage 33 and further displaced by a predetermined angle θ around the rotation axis. The heat adsorption head 35 is configured to be movable only in the z direction (vertical direction) by being provided on the z stage 34. That is, the heating / adsorption head 35 is configured not to be displaced in the horizontal plane.

したがって、加熱吸着ヘッド35とリペア対象部品との位置合わせは、x−y−θステージ33により平面方向を調整し、zステージ34により高さ方向を調整して行う。   Therefore, the positioning of the heating suction head 35 and the repair target component is performed by adjusting the plane direction with the xy-θ stage 33 and adjusting the height direction with the z stage 34.

位置合わせについては、基板保持ステージ32に保持された実装基板を撮影可能なカメラを設け、撮影画像が映し出されるモニタを見ながら作業者がx−y−θステージ33およびzステージ34を操作して行うように構成されていてもよいし、カメラで撮影された画像に対して画像処理を施し、リペア対象部品を位置検出して自動でステージを移動させるように構成されていてもよい。   For alignment, a camera capable of photographing the mounting substrate held on the substrate holding stage 32 is provided, and an operator operates the xy-θ stage 33 and the z stage 34 while looking at a monitor on which a photographed image is displayed. You may be comprised so that it may be performed, and it may be comprised so that image processing may be performed with respect to the image image | photographed with the camera, a repair target component may be detected, and a stage may be moved automatically.

加熱吸着ヘッド35は、局所加熱するためのレーザ光源であるレーザ光発振器30に、光ファイバ31を介して接続され、詳細は後述するが、その内部に設けられた光導波路によって、リペア対象部品と接触する先端部分までレーザ光が伝送される。また、加熱吸着ヘッド35は、その先端部分でリペア対象部品を真空吸着するために、真空吸引ホース36を介して真空ポンプなどの真空源に接続される。   The heating adsorption head 35 is connected to a laser light oscillator 30 that is a laser light source for local heating via an optical fiber 31, and will be described later in detail. Laser light is transmitted to the tip portion that comes into contact. Further, the heating suction head 35 is connected to a vacuum source such as a vacuum pump via a vacuum suction hose 36 in order to vacuum-suck the repair target component at its tip portion.

なお、加熱吸着ヘッド35に接続される真空源を、真空吸引ホース36を介して基板保持ステージ32に接続し、基板保持ステージ32内に設けられた複数の吸着孔を用いて真空吸着による実装基板の保持を行ってもよい。   In addition, the vacuum source connected to the heating suction head 35 is connected to the substrate holding stage 32 via the vacuum suction hose 36, and a mounting substrate by vacuum suction using a plurality of suction holes provided in the substrate holding stage 32. May be held.

加熱吸着ヘッド35は、その先端部分において、レーザ光によるリペア対象部品の加熱と真空吸着とを行うことにより、レーザ光が遮蔽されることなく確実にリペア対象部品を加熱することができ、レーザ光照射位置と部品吸着位置とを位置合わせする必要がないので、高密度実装された微小な電子部品であっても容易にリペアすることができる。   The heating and suction head 35 can heat the repair target component with laser light at the tip portion and heat the vacuum to be repaired without blocking the laser beam. Since it is not necessary to align the irradiation position and the component suction position, even a minute electronic component mounted with high density can be easily repaired.

加熱吸着ヘッド35の先端部分は、リペア対象部品を加熱する際にレーザ光を照射する面積が、部品面積の50%以上となるように構成し、レーザ光照射によりリペア対象部品の全体を加熱するような形状がより好ましい。   The tip portion of the heating adsorption head 35 is configured such that the area irradiated with the laser beam when heating the repair target component is 50% or more of the component area, and the entire repair target component is heated by the laser beam irradiation. Such a shape is more preferable.

また上記レーザ光の出力はリペア対象部品10のサイズ、ワークの種類によって適宜変更可能であるが、リペア対象部品が微小サイズ(1005、0603、0402など)であることから、1〜40Wとすることが好ましい。レーザ光の種類は、リペア対象部品を加熱することが可能であれば特に限定されず、YAGレーザ、半導体レーザ、その他のレーザであってもよい。   Further, the output of the laser light can be appropriately changed depending on the size of the repair target component 10 and the type of workpiece. However, since the repair target component is a minute size (1005, 0603, 0402, etc.), it is set to 1 to 40 W. Is preferred. The type of the laser beam is not particularly limited as long as the repair target component can be heated, and may be a YAG laser, a semiconductor laser, or another laser.

図2は、加熱吸着ヘッド35の先端部分の拡大図である。
加熱吸着ヘッド35の先端部分には、光ファイバ31内によって伝送されたレーザ光21の照射方向を定め、レーザ光を確実にリペア対象部品に照射するための光導波路40が設けられる。光導波路40は、レーザ光が、この先端部分のリペア対象部品と接触する先端面35aから出射されるように構成される。さらに、光導波路40内には、レーザ光の伝送方向と平行に延びる吸着孔23が設けられ、吸着孔23の一方の開口は、先端面35aに設けられる。吸着孔23の他方の開口は、真空吸引ホース36と接続し、真空源によって吸着孔23の内部空洞が真空状態となるように構成される。
FIG. 2 is an enlarged view of the front end portion of the heating suction head 35.
An optical waveguide 40 for determining the irradiation direction of the laser light 21 transmitted through the optical fiber 31 and for reliably irradiating the repair target component with the laser light is provided at the tip portion of the heating adsorption head 35. The optical waveguide 40 is configured such that laser light is emitted from the distal end surface 35a that contacts the repair target component at the distal end portion. Further, the suction hole 23 extending in parallel with the laser light transmission direction is provided in the optical waveguide 40, and one opening of the suction hole 23 is provided in the distal end surface 35a. The other opening of the suction hole 23 is connected to the vacuum suction hose 36 and is configured such that the internal cavity of the suction hole 23 is brought into a vacuum state by a vacuum source.

ここで、光ファイバ31は1本であっても良いし複数本であってもよい。そして光導波路40は、石英、半導体材料、ポリマーなどからなるものを用い、より好ましくは低損失で光を伝送できる石英系の材料が好ましい。また、光導波路40外表面は伝送するレーザ光が外部に漏出しないように、金属などのめっき層を設けることが好ましい。ここで、光導波路40の直径、吸着孔23の開口径は、リペア対象部品のサイズにより変更可能とすることが好ましく、例えば、リペア対象部品のサイズが0402の場合は、光導波路40の直径300μm、吸着孔の開口径100μmとし、サイズが0603の場合は、光導波路40の直径400μm、吸着孔の開口径150μmとするが、この値に限定するものではない。また、光導波路40先端部分には、リペア対象部品の加熱温度を測定するための熱電対を具備することが好ましい。   Here, the optical fiber 31 may be one or plural. The optical waveguide 40 is made of quartz, a semiconductor material, a polymer, or the like, and more preferably a quartz-based material that can transmit light with low loss. Moreover, it is preferable to provide a plating layer of metal or the like on the outer surface of the optical waveguide 40 so that the transmitted laser light does not leak to the outside. Here, it is preferable that the diameter of the optical waveguide 40 and the opening diameter of the suction hole 23 can be changed according to the size of the repair target component. For example, when the size of the repair target component is 0402, the diameter of the optical waveguide 40 is 300 μm. When the opening diameter of the suction hole is 100 μm and the size is 0603, the diameter of the optical waveguide 40 is 400 μm and the opening diameter of the suction hole is 150 μm. However, the present invention is not limited to this value. Moreover, it is preferable to provide the thermocouple for measuring the heating temperature of repair object components in the optical waveguide 40 front-end | tip part.

図3は、他の実施形態の加熱吸着ヘッド35の先端部分の拡大図である。
加熱吸着ヘッド35として、レーザ光21の照射方向を定め、レーザ光を確実にリペア対象部品に照射する構成は、同じであるが本実施形態では、光導波路40の代わりに、光学系レンズ41およびケース42からなる光学手段を用いることによってリペア対象部品にレーザ光を照射する。
FIG. 3 is an enlarged view of the tip portion of the heating and suction head 35 of another embodiment.
The configuration of the heating adsorption head 35 that determines the irradiation direction of the laser light 21 and reliably irradiates the repair target component with the laser light is the same, but in this embodiment, instead of the optical waveguide 40, the optical lens 41 and By using the optical means comprising the case 42, the repair target component is irradiated with laser light.

光学系レンズ41は、内部空間に固定して配置可能なケース42で覆われ、ケース42の光ファイバ31との接続面からは、光学系レンズ41にレーザ光が入射するように、光ファイバ31の先端がケース42内に挿入される。   The optical system lens 41 is covered with a case 42 that can be fixedly disposed in the internal space, and the optical fiber 31 so that laser light is incident on the optical system lens 41 from the connection surface with the optical fiber 31 of the case 42. Is inserted into the case 42.

ケース42内の光学系レンズ41は、光学系レンズ41に入射されたレーザ光が、1または複数のレンズによって、ケース42の光ファイバ31との接続面とは反対側のリペア対象部品への接触面において、レーザ光の照射面積が、部品面積の50%以上となるように構成される。たとえば、サイズが0402の部品の場合、レーザ光の照射部分の直径が250μm以上となるようにすれば、照射面積を部品面積の50%以上とすることができる。   In the optical system lens 41 in the case 42, the laser light incident on the optical system lens 41 is brought into contact with the repair target component on the opposite side of the connection surface with the optical fiber 31 of the case 42 by one or a plurality of lenses. On the surface, the laser light irradiation area is configured to be 50% or more of the component area. For example, in the case of a component having a size of 0402, the irradiation area can be 50% or more of the component area if the diameter of the laser light irradiation portion is 250 μm or more.

このリペア対象部品への接触面には開口が設けられ、開口はケース42の内部空間と外部とを連通させるための開口であり、ケース42の内部空間を真空吸着ホース36によって真空状態とすることで、リペア対象部品を吸着する。   An opening is provided in the contact surface to the repair target part, and the opening is an opening for communicating the internal space of the case 42 with the outside, and the internal space of the case 42 is brought into a vacuum state by the vacuum suction hose 36. Then, the part to be repaired is sucked.

このような真空吸着孔をレーザ伝送経路の外側に配置した構成とすることで、光ファイバ31から加熱吸着ヘッド先端にレーザ光を伝送する際に損失が起こるといった問題が発生しないので好ましい。   It is preferable to adopt such a configuration in which such vacuum suction holes are arranged outside the laser transmission path, since there is no problem of loss occurring when laser light is transmitted from the optical fiber 31 to the tip of the heating suction head.

以下では、リペア工程について説明する。
実装基板12を基板保持ステージ32上に保持し、加熱吸着ヘッド35先端の光導波路40とリペア対象部品10とを位置合わせして接触させる。
Below, a repair process is demonstrated.
The mounting substrate 12 is held on the substrate holding stage 32, and the optical waveguide 40 at the tip of the heating suction head 35 and the repair target component 10 are aligned and brought into contact with each other.

接触した状態でレーザ光を発振させ、加熱吸着ヘッド35からレーザ光をリペア対象部品10に照射して加熱し、接合部を溶融させる。レーザ加熱と同時に真空吸引によりリペア対象部品10を吸着保持し、接合材による接合力が真空吸引力よりも低下すると、リペア対象部品10が基板12から取り外すことができる。   Laser light is oscillated in the contacted state, and the repair target component 10 is irradiated with the laser light from the heating adsorption head 35 and heated to melt the bonded portion. When the repair target component 10 is sucked and held by vacuum suction simultaneously with the laser heating and the bonding force by the bonding material is lower than the vacuum suction force, the repair target component 10 can be detached from the substrate 12.

このとき、吸着孔23内の真空度は上昇するので、検出手段により真空度を検出することでリペア対象部品10の取り外しが完了したことを判断することができる。   At this time, since the degree of vacuum in the suction hole 23 increases, it can be determined that the removal of the repair target component 10 has been completed by detecting the degree of vacuum by the detection means.

次に、新しい電子部品11を加熱吸着ヘッド35の先端に真空吸着させ、リペア対象部品10を除去後のランドに接合材を塗布する。加熱吸着ヘッド35と実装対象のランドとを位置合わせし、接触させる。接触させた状態で、レーザ光を発振し、新しい電子部品11を加熱して接合材を溶融させ、真空吸着を終了する。こうすることでリペア工程が完了する。   Next, the new electronic component 11 is vacuum-sucked to the tip of the heating suction head 35, and the bonding material is applied to the land after the repair target component 10 is removed. The heating suction head 35 and the land to be mounted are aligned and brought into contact with each other. In the state of contact, the laser beam is oscillated, the new electronic component 11 is heated to melt the bonding material, and the vacuum suction is finished. This completes the repair process.

本発明によるリペア装置を用いた実施例を以下に示す。
図4は、実施例の加熱吸着ヘッド35と、これを用いたリペア方法を示す模式図である。
An embodiment using the repair device according to the present invention will be described below.
FIG. 4 is a schematic diagram illustrating the heating and suction head 35 of the embodiment and a repair method using the same.

本実施例では、0603サイズの電子部品11を、部品実装間隔0.2mmにて大型部品20と隣接させて基板12に表面実装を行った。ここで使用したはんだ材料はいずれもSn−3Ag−0.5Cuであり、リフローによりはんだ接合を行った。   In this example, the electronic component 11 of 0603 size was surface-mounted on the substrate 12 adjacent to the large component 20 with a component mounting interval of 0.2 mm. The solder material used here was Sn-3Ag-0.5Cu, and soldering was performed by reflow.

リペア対象部品10は、大型部品20に隣接した0603サイズの電子部品とした。ここで、使用した加熱吸着ヘッド35の構成は、図2に示した光導波路40を用いたものである。リペア装置の全体構成は、図1に示した通りである。   The repair target component 10 was an electronic component of 0603 size adjacent to the large component 20. Here, the configuration of the heating and suction head 35 used is that using the optical waveguide 40 shown in FIG. The overall configuration of the repair device is as shown in FIG.

加熱吸着ヘッド35先端の光導波路40は、光導波路40の直径を400μmとし、吸着孔の開口径150μmとした。光導波路40の材質は石英を用い、外表面はアルミニウムめっきした。このような構造とすることでリペア対象部品10の上面の50%程度の面積にレーザ光を照射し、加熱することができる。   The optical waveguide 40 at the tip of the heating adsorption head 35 has an optical waveguide 40 diameter of 400 μm and an adsorption hole opening diameter of 150 μm. The material of the optical waveguide 40 was quartz, and the outer surface was plated with aluminum. With such a structure, an area of about 50% of the upper surface of the repair target component 10 can be irradiated with laser light and heated.

リペア工程は、まず基板12を基板保持ステージ32上に搭載し、真空吸着により保持する。その後、x−y−θステージ33とzステージ34を操作し、加熱吸着ヘッド35先端の光導波路40とリペア対象部品10とを位置合わせして接触させる。   In the repair process, the substrate 12 is first mounted on the substrate holding stage 32 and held by vacuum suction. Thereafter, the xy-θ stage 33 and the z stage 34 are operated to align and contact the optical waveguide 40 at the tip of the heating suction head 35 and the repair target component 10.

接触した状態でレーザ光を発振させ、光ファイバ31、光導波路40を通じてレーザ光をリペア対象部品10に照射して加熱し、はんだ接合部を溶融させる。ここで本実施例ではレーザ光としてYAGレーザを用い、出力を1.5Wとした。そして、レーザ加熱と同時に真空吸引によりリペア対象部品10を吸着保持し、はんだの接合力が真空吸引力よりも低下したとき、真空吸引力によりリペア対象部品10が基板12から取り外され、吸着孔23内の真空度は上昇する。この真空度上昇を真空吸引ホース36の先に具備した圧力検出手段により検出することによりリペア対象部品10の取り外しが完了したことを判断し、その後、zステージ34を操作して、基板上からリペア対象部品10を除去した。なお、レーザ加熱開始から真空度が上昇するまで約0.5秒間であった。   Laser light is oscillated in contact, and the repair target component 10 is irradiated and heated through the optical fiber 31 and the optical waveguide 40 to melt the solder joint. Here, in this example, a YAG laser was used as the laser beam, and the output was 1.5 W. Then, the repair target component 10 is sucked and held by vacuum suction simultaneously with laser heating, and when the solder bonding force is lower than the vacuum suction force, the repair target component 10 is removed from the substrate 12 by the vacuum suction force and the suction hole 23 is removed. The degree of vacuum increases. By detecting the increase in the degree of vacuum by the pressure detecting means provided at the tip of the vacuum suction hose 36, it is determined that the removal of the repair target component 10 is completed, and thereafter, the z stage 34 is operated to repair from the substrate. The target part 10 was removed. It was about 0.5 seconds from the start of laser heating until the degree of vacuum increased.

そして、新しい0603サイズの電子部品11を加熱吸着ヘッド35の先端に真空吸着させ、リペア対象部品10を除去した後のランドにはんだペーストをディスペンサーにより塗布した。部品除去の際と同様にx−y−θステージ33とzステージ34を操作しながら加熱吸着ヘッド35とリペア対象部品除去後のランドとの位置合わせをし、接触させた。この状態で、レーザ光を発振し、新しい電子部品11を加熱して約0.5秒後、はんだを溶融させた状態で真空吸着を終了し、zステージ34を上昇させた。こうすることでリペア工程が完了した。なお本実施例では部品の再実装時に部品取り外し時と同様にYAGレーザを用い、レーザ出力を1.5Wとした。   Then, the new 0603 size electronic component 11 was vacuum-sucked to the tip of the heating suction head 35, and the solder paste was applied to the land after the repair target component 10 was removed by a dispenser. As in the case of component removal, the heat adsorption head 35 and the land after removal of the repair target component were aligned and brought into contact while operating the xy-θ stage 33 and the z stage 34. In this state, the laser beam was oscillated, the new electronic component 11 was heated, and about 0.5 seconds later, the vacuum suction was finished in a state where the solder was melted, and the z stage 34 was raised. By doing so, the repair process was completed. In this example, a YAG laser was used at the time of component re-mounting as in the case of component removal, and the laser output was 1.5 W.

このように、本発明のリペア装置における加熱吸着ヘッドを用いることにより、サイズの小さな電子部品が狭隣接に高密度実装された実装基板においても容易かつ効率的にリペアを行うことができる。   As described above, by using the heating and suction head in the repair device of the present invention, it is possible to easily and efficiently repair a mounting substrate in which small-sized electronic components are densely mounted adjacent to each other.

本発明の実施の一形態であるリペア装置の構成を示す外観図である。It is an external view which shows the structure of the repair apparatus which is one Embodiment of this invention. 加熱吸着ヘッド35の先端部分の拡大図である。FIG. 4 is an enlarged view of a tip portion of a heating suction head 35. 他の実施形態の加熱吸着ヘッド35の先端部分の拡大図である。It is an enlarged view of the front-end | tip part of the heating suction head 35 of other embodiment. 実施例の加熱吸着ヘッド35と、これを用いたリペア方法を示す模式図である。It is a schematic diagram which shows the heating adsorption head 35 of an Example, and the repair method using this. はんだ付けの接合不良の一例を示す模式図である。It is a schematic diagram which shows an example of the joining defect of soldering. 従来のリペア装置によるリペア方法を示す模式図である。It is a schematic diagram which shows the repair method by the conventional repair apparatus.

符号の説明Explanation of symbols

10 リペア対象部品
11 電子部品
12 プリント配線基板
13 ブリッジ
20 大型部品
21 レーザ光
22 部品吸着ノズル
23 吸着孔
24 照射位置
30 レーザ光発振器
31 光ファイバ
32 基板保持ステージ
33 x−y−θステージ
34 zステージ
35 加熱吸着ヘッド
36 真空吸引ホース
40 光導波路
41 光学系レンズ
DESCRIPTION OF SYMBOLS 10 Repair object 11 Electronic component 12 Printed wiring board 13 Bridge 20 Large component 21 Laser light 22 Component adsorption nozzle 23 Adsorption hole 24 Irradiation position 30 Laser light oscillator 31 Optical fiber 32 Substrate holding stage 33 xy-θ stage 34 z stage 35 Heat Suction Head 36 Vacuum Suction Hose 40 Optical Waveguide 41 Optical System Lens

Claims (4)

電子部品を熱可塑性接合材で実装した基板を保持する基板保持ステージと、
レーザ光源と、
除去対象となる電子部品にレーザ光を照射するようにレーザ光源からレーザ光を伝送するとともに、当該電子部品を吸着する加熱吸着ヘッドとを具備し、
加熱吸着ヘッドによって前記電子部品にレーザ光を照射して当該電子部品を加熱し、熱可塑性接合部材を溶融させるとともに、当該電子部品を吸着して除去するように構成されることを特徴とする電子部品リペア装置。
A substrate holding stage for holding a substrate on which an electronic component is mounted with a thermoplastic bonding material;
A laser light source;
The laser beam is transmitted from the laser light source so as to irradiate the electronic component to be removed with the laser beam, and a heating suction head that sucks the electronic component is provided.
An electronic device configured to irradiate the electronic component with a laser beam by a heating suction head to heat the electronic component, melt the thermoplastic bonding member, and suck and remove the electronic component. Parts repair device.
加熱吸着ヘッドは、レーザ光を伝送する光導波路を備え、
前記光導波路は、その内部に設けられた空孔を真空状態にすることで空孔の開口に接する電子部品を真空吸着することを特徴とする請求項1記載の電子部品リペア装置。
The heat adsorption head includes an optical waveguide that transmits laser light,
2. The electronic component repair device according to claim 1, wherein the optical waveguide vacuum-sucks an electronic component in contact with the opening of the hole by bringing the hole provided therein into a vacuum state.
加熱吸着ヘッドは、レーザ光をレンズによって伝送する光学手段を備え、
前記光学手段は、レンズ周辺を覆うケースを備え、ケースの内部空間を真空状態にすることでケースに設けられた開口に接する電子部品を真空吸着することを特徴とする請求項1記載の電子部品リペア装置。
The heating adsorption head includes optical means for transmitting laser light through a lens,
2. The electronic component according to claim 1, wherein the optical means includes a case that covers the periphery of the lens, and vacuum-sucks the electronic component that contacts the opening provided in the case by making the internal space of the case into a vacuum state. Repair device.
熱可塑性接合材で基板に実装された除去対象となる電子部品に対し、加熱吸着ヘッドによって、レーザ光源からレーザ光を伝送して当該電子部品にレーザ光を照射し、当該電子部品を加熱して熱可塑性接合部材を溶融させるとともに、当該電子部品を吸着して除去することを特徴とする電子部品リペア方法。   With respect to the electronic component to be removed mounted on the substrate with the thermoplastic bonding material, a laser beam is transmitted from the laser light source by the heating adsorption head, and the electronic component is irradiated with the laser beam to heat the electronic component. An electronic component repair method comprising melting a thermoplastic joining member and adsorbing and removing the electronic component.
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