JP2009164297A5 - - Google Patents

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Publication number
JP2009164297A5
JP2009164297A5 JP2007341123A JP2007341123A JP2009164297A5 JP 2009164297 A5 JP2009164297 A5 JP 2009164297A5 JP 2007341123 A JP2007341123 A JP 2007341123A JP 2007341123 A JP2007341123 A JP 2007341123A JP 2009164297 A5 JP2009164297 A5 JP 2009164297A5
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JP
Japan
Prior art keywords
intensity distribution
linearly polarized
light intensity
light
polarized light
Prior art date
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Application number
JP2007341123A
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English (en)
Japanese (ja)
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JP2009164297A (ja
JP5032972B2 (ja
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Priority claimed from JP2007341123A external-priority patent/JP5032972B2/ja
Priority to JP2007341123A priority Critical patent/JP5032972B2/ja
Priority to EP08866265.5A priority patent/EP2225770B1/en
Priority to KR1020107016424A priority patent/KR101179939B1/ko
Priority to PCT/JP2008/072723 priority patent/WO2009084409A1/en
Priority to US12/681,895 priority patent/US8373914B2/en
Priority to TW097150077A priority patent/TWI391989B/zh
Publication of JP2009164297A publication Critical patent/JP2009164297A/ja
Publication of JP2009164297A5 publication Critical patent/JP2009164297A5/ja
Publication of JP5032972B2 publication Critical patent/JP5032972B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007341123A 2007-12-28 2007-12-28 計算機ホログラム、生成方法及び露光装置 Expired - Fee Related JP5032972B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2007341123A JP5032972B2 (ja) 2007-12-28 2007-12-28 計算機ホログラム、生成方法及び露光装置
US12/681,895 US8373914B2 (en) 2007-12-28 2008-12-08 Computer generated hologram including plural isotropic and anisotropic cells for forming combined intensity distribution, generation method, and exposure apparatus
KR1020107016424A KR101179939B1 (ko) 2007-12-28 2008-12-08 계산기 홀로그램, 생성 방법 및 노광 장치
PCT/JP2008/072723 WO2009084409A1 (en) 2007-12-28 2008-12-08 Computer generated hologram, generation method, and exposure apparatus
EP08866265.5A EP2225770B1 (en) 2007-12-28 2008-12-08 Computer generated hologram, generation method, and exposure apparatus
TW097150077A TWI391989B (zh) 2007-12-28 2008-12-22 全像，產生方法，及曝光設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007341123A JP5032972B2 (ja) 2007-12-28 2007-12-28 計算機ホログラム、生成方法及び露光装置

Publications (3)

Publication Number Publication Date
JP2009164297A JP2009164297A (ja) 2009-07-23
JP2009164297A5 true JP2009164297A5 (https=) 2011-02-10
JP5032972B2 JP5032972B2 (ja) 2012-09-26

Family

ID=40824130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007341123A Expired - Fee Related JP5032972B2 (ja) 2007-12-28 2007-12-28 計算機ホログラム、生成方法及び露光装置

Country Status (6)

Country Link
US (1) US8373914B2 (https=)
EP (1) EP2225770B1 (https=)
JP (1) JP5032972B2 (https=)
KR (1) KR101179939B1 (https=)
TW (1) TWI391989B (https=)
WO (1) WO2009084409A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5078764B2 (ja) * 2008-06-10 2012-11-21 キヤノン株式会社 計算機ホログラム、露光装置及びデバイスの製造方法
JP5078765B2 (ja) * 2008-06-10 2012-11-21 キヤノン株式会社 計算機ホログラム、露光装置及びデバイスの製造方法
JP5167032B2 (ja) 2008-08-27 2013-03-21 キヤノン株式会社 計算機ホログラム、露光装置及びデバイスの製造方法
US8531747B2 (en) 2009-06-24 2013-09-10 Canon Kabushiki Kaisha Hologram, hologram data generation method, and exposure apparatus
JP5527074B2 (ja) * 2009-11-16 2014-06-18 セイコーエプソン株式会社 偏光素子及びプロジェクター
JP5526851B2 (ja) * 2010-02-19 2014-06-18 セイコーエプソン株式会社 偏光素子及びプロジェクター
JP5463947B2 (ja) * 2010-02-19 2014-04-09 セイコーエプソン株式会社 偏光素子及びプロジェクター
US9116303B2 (en) * 2010-03-05 2015-08-25 Canon Kabushiki Kaisha Hologram with cells to control phase in two polarization directions and exposure apparatus
JP2013186350A (ja) * 2012-03-08 2013-09-19 Canon Inc 回折光学素子の構造データの算出方法、プログラムおよび製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3246615B2 (ja) * 1992-07-27 2002-01-15 株式会社ニコン 照明光学装置、露光装置、及び露光方法
JP3371846B2 (ja) * 1999-04-06 2003-01-27 日本電気株式会社 ホログラム素子
JP3958163B2 (ja) 2002-09-19 2007-08-15 キヤノン株式会社 露光方法
US7414786B2 (en) * 2004-01-12 2008-08-19 University Of Rochester System and method converting the polarization state of an optical beam into an inhomogeneously polarized state
JP4332460B2 (ja) 2004-04-02 2009-09-16 キヤノン株式会社 照明光学系及び当該照明光学系を有する露光装置
JP2006005319A (ja) 2004-06-21 2006-01-05 Canon Inc 照明光学系及び方法、露光装置及びデバイス製造方法
KR100684872B1 (ko) * 2004-08-03 2007-02-20 삼성전자주식회사 빛의 편광을 공간적으로 제어하는 광학 시스템 및 이를제작하는 방법
JP2006196715A (ja) * 2005-01-13 2006-07-27 Nikon Corp 光束変換素子、照明光学装置、露光装置、および露光方法
US7599069B2 (en) * 2005-05-06 2009-10-06 The University Of Chicago Vector beam generator using a passively phase stable optical interferometer
JP5173309B2 (ja) 2007-07-31 2013-04-03 キヤノン株式会社 ホログラム、露光装置及びデバイス製造方法
US8531747B2 (en) * 2009-06-24 2013-09-10 Canon Kabushiki Kaisha Hologram, hologram data generation method, and exposure apparatus

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