JP2009156581A - 傾斜検出素子 - Google Patents
傾斜検出素子 Download PDFInfo
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- JP2009156581A JP2009156581A JP2007331484A JP2007331484A JP2009156581A JP 2009156581 A JP2009156581 A JP 2009156581A JP 2007331484 A JP2007331484 A JP 2007331484A JP 2007331484 A JP2007331484 A JP 2007331484A JP 2009156581 A JP2009156581 A JP 2009156581A
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Abstract
【解決手段】本発明は以上のような課題を解決するため、固定部2に対して変位する変位部3を有し、重力加速度によって変位部3が変位し、これに伴う固定部2と変位部3との間の静電容量の変化で変位部3の変位量を測定するようにし、固定部2に複数の外部接続端子11、12を設け、その外部接続端子の1つ12を固定部2に対し揺動可能にするようにした。これによって、加速度センサが実装される基板との間に、線膨張率の差があっても、外部接続端子12が揺動し、大きな力が固定部2に加わることがなく、破損を免れる。
【選択図】図1
Description
2 固定部
3 変位部
4 幅狭部
5 溝
6 対向部
7 変位電極
8 固定電極
9,10 導電薄膜
11,12,14 外部接続端子
13,15 狭幅部
Claims (4)
- 固定部に対して変位する変位部を有し、重力加速度によって変位部が変位し、これに伴う固定部と変位部との間の静電容量の変化で変位部の変位量を測定するようにし、前記固定部に複数の外部接続端子を設け、その外部接続端子の1つ以外を前記固定部に対し揺動可能にした傾斜検出素子。
- 固定部の外部接続端子を3つ並列して設け、中央の外部接続端子を固定部に固定し、中央の外部接続端子の両側の外部接続端子を揺動可能にした請求項1記載の傾斜検出素子。
- 固定部を構成する材料は単一の結晶板より固定部と変位部及び幅狭部はそれぞれ一体に形成されている請求項1又は2記載の傾斜検出素子。
- 結晶板は三方晶系の結晶より形成されている請求項1又は2記載の傾斜検出素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007331484A JP4686747B2 (ja) | 2007-12-25 | 2007-12-25 | 傾斜検出素子 |
Applications Claiming Priority (1)
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JP2007331484A JP4686747B2 (ja) | 2007-12-25 | 2007-12-25 | 傾斜検出素子 |
Publications (2)
Publication Number | Publication Date |
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JP2009156581A true JP2009156581A (ja) | 2009-07-16 |
JP4686747B2 JP4686747B2 (ja) | 2011-05-25 |
Family
ID=40960783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007331484A Active JP4686747B2 (ja) | 2007-12-25 | 2007-12-25 | 傾斜検出素子 |
Country Status (1)
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JP (1) | JP4686747B2 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05149967A (ja) * | 1991-11-28 | 1993-06-15 | Omron Corp | 半導体加速度センサ |
JPH0594956U (ja) * | 1992-05-26 | 1993-12-24 | 株式会社コパル | 接続端子部材 |
JP2004333133A (ja) * | 2003-04-30 | 2004-11-25 | Mitsubishi Electric Corp | 慣性力センサ |
JP2006349563A (ja) * | 2005-06-17 | 2006-12-28 | Mitsubishi Electric Corp | 慣性力センサ |
-
2007
- 2007-12-25 JP JP2007331484A patent/JP4686747B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05149967A (ja) * | 1991-11-28 | 1993-06-15 | Omron Corp | 半導体加速度センサ |
JPH0594956U (ja) * | 1992-05-26 | 1993-12-24 | 株式会社コパル | 接続端子部材 |
JP2004333133A (ja) * | 2003-04-30 | 2004-11-25 | Mitsubishi Electric Corp | 慣性力センサ |
JP2006349563A (ja) * | 2005-06-17 | 2006-12-28 | Mitsubishi Electric Corp | 慣性力センサ |
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JP4686747B2 (ja) | 2011-05-25 |
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