JP2009146998A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2009146998A JP2009146998A JP2007320962A JP2007320962A JP2009146998A JP 2009146998 A JP2009146998 A JP 2009146998A JP 2007320962 A JP2007320962 A JP 2007320962A JP 2007320962 A JP2007320962 A JP 2007320962A JP 2009146998 A JP2009146998 A JP 2009146998A
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
【解決手段】半導体基板20上に設けられ凹部を有する絶縁膜の上に、溶剤と有機成分とを含む溶液を塗布して塗膜を形成する工程と、前記塗膜を、前記有機成分の架橋が終了しない第1の温度でベークして有機膜11前駆体を得る工程と、前記有機膜前駆体を、第1の樹脂粒子および水溶性高分子を含有する第1のスラリーを用いて研磨して、表面を平坦化する工程と、前記表面が平坦化された有機膜前駆体を、前記第1の樹脂粒子より平均粒子径の小さな第2の樹脂粒子および水溶性高分子を含有する第2のスラリーを用いて研磨して前記凹部内に残置し、前記絶縁膜を露出する工程とを具備することを特徴とする。
【選択図】図6
Description
前記塗膜を、前記有機成分の架橋が終了しない第1の温度でベークして有機膜前駆体を得る工程と、
前記有機膜前駆体を、第1の樹脂粒子および水溶性高分子を含有する第1のスラリーを用いて研磨して、表面を平坦化する工程と、
前記表面が平坦化された有機膜前駆体を、前記第1の樹脂粒子より平均粒子径の小さな第2の樹脂粒子および水溶性高分子を含有する第2のスラリーを用いて研磨して前記凹部内に残置し、前記絶縁膜を露出する工程と
を具備することを特徴とする。
スチレン92重量部、メタクリル酸4重量部、ヒドロキシエチルアクリレート4重量部、ラウリル硫酸アンモニウム0.1重量部、過硫酸アンモニウム0.5重量部、およびイオン交換水400重量部を、容量2リットルのフラスコに収容した。窒素ガス雰囲気下で攪拌しながら70℃に昇温し、6時間重合させた。これによってカルボキシル基を表面に有し、平均粒子径200nmのPST粒子が得られた。
スチレン77重量部、アクリル酸3重量部、ジビニルベンゼン20重量部、ドデシルベンゼンスルホン酸アンモニウム2.0重量部、過硫酸アンモニウム1.0重量部、およびイオン交換水400重量部を、容量2リットルのフラスコに収容した。窒素ガス雰囲気下で攪拌しながら70℃に昇温し、6時間重合させた。これによって、カルボキシル基を有し、平均粒子径50nmの架橋PST粒子が得られた。
PST粒子の平均粒子径を100nmに変更した以外はスラリー1と同様にして、スラリー3を得た。
PST粒子の平均粒子径を300nmに変更した以外はスラリー1と同様にして、スラリー4を得た。
PST粒子の平均粒子径を30nmに変更した以外はスラリー2と同様にして、スラリー5を得た。
PST粒子の平均粒子径を70nmに変更した以外はスラリー2と同様にして、スラリー6を得た。
4…有機系絶縁膜; 5…第1のハードマスク; 6…第2のハードマスク
7…第3のハードマスク; 8a,8b…配線溝パターン; 9…有機膜前駆体
10…段差; 11…有機膜; 12…第2の有機膜; 13…下層膜
14…中間層; 15…レジスト膜; 16…接続孔; 17…配線溝
18…CuDD配線; 20…半導体基板; 22…樹脂粒子; 23…水溶性高分子
30…ターンテーブル; 31…研磨布; 32…半導体ウェハー
33…トップリング; 34…水供給ノズル; 35…スラリー供給ノズル
36…ドレッサー; 37…スラリー。
Claims (5)
- 半導体基板上に設けられ凹部を有する絶縁膜の上に、溶剤と有機成分とを含む溶液を塗布して塗膜を形成する工程と、
前記塗膜を、前記有機成分の架橋が終了しない第1の温度でベークして有機膜前駆体を得る工程と、
前記有機膜前駆体を、第1の樹脂粒子および水溶性高分子を含有する第1のスラリーを用いて研磨して、表面を平坦化する工程と、
前記表面が平坦化された有機膜前駆体を、前記第1の樹脂粒子より平均粒子径の小さな第2の樹脂粒子および水溶性高分子を含有する第2のスラリーを用いて研磨して前記凹部内に残置し、前記絶縁膜を露出する工程と
を具備することを特徴とする半導体装置の製造方法。 - 前記研磨に引き続いて前記有機膜前駆体を前記第1の温度より高い第2の温度でベークして前記溶剤を除去し、前記凹部内に埋め込まれた第1の有機膜を得る工程と、
前記第1の有機膜および前記絶縁膜の上に塗布法により第2の有機膜を形成して、第1および第2の有機膜からなる下層膜を得る工程と、
前記下層膜の上に中間層およびレジスト膜を順次形成する工程と、
前記レジスト膜をパターン露光する工程と
をさらに具備することを特徴とする請求項1に記載の半導体装置の製造方法。 - 前記絶縁膜は、半導体基板上に、少なくとも有機系絶縁膜、無機材料を含む第1のハードマスク、および無機材料を含む第2のハードマスクを介して形成された無機材料を含む第3のハードマスクであり、前記凹部は、前記有機系絶縁膜に転写されるべき配線溝のパターンであって、前記第2のハードマスクを底面に露出して前記第3のハードマスクに形成され、
前記前記第1の樹脂粒子の平均粒子径は100nm以上300nm以下であり、前記第2の樹脂粒子の平均粒子径は10nm以上70nm以下であることを特徴とする請求項2に記載の半導体装置の製造方法。 - 前記レジスト膜にホールのパターンを形成する工程と、
前記ホールのパターンを転写して前記有機系絶縁膜に接続孔を形成するとともに、前記下層膜を除去して配線溝のパターンを得る工程と、
前記配線溝のパターンを前記有機系絶縁膜に転写して、前記ホールと連通する配線溝を形成する工程と、
前記ホールおよび前記配線溝内にデュアルダマシン配線を形成する工程と
をさらに具備することを特徴とする請求項3に記載の半導体装置の製造方法。 - 前記中間層を形成する前に、前記下層膜を250℃以上400℃以下の温度でベークする工程をさらに具備することを特徴とする請求項2ないし4のいずれか1項に記載の半導体装置の製造方法。
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JP2018170505A (ja) * | 2017-03-29 | 2018-11-01 | ローム アンド ハース エレクトロニック マテリアルズ シーエムピー ホウルディングス インコーポレイテッド | カチオン性粒子含有スラリー及びスピンオン炭素膜のcmpのためのその使用方法 |
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