JP2009133722A5 - - Google Patents

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Publication number
JP2009133722A5
JP2009133722A5 JP2007310109A JP2007310109A JP2009133722A5 JP 2009133722 A5 JP2009133722 A5 JP 2009133722A5 JP 2007310109 A JP2007310109 A JP 2007310109A JP 2007310109 A JP2007310109 A JP 2007310109A JP 2009133722 A5 JP2009133722 A5 JP 2009133722A5
Authority
JP
Japan
Prior art keywords
guide hole
reinforcing member
flange portion
center
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007310109A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009133722A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007310109A priority Critical patent/JP2009133722A/ja
Priority claimed from JP2007310109A external-priority patent/JP2009133722A/ja
Priority to TW097142527A priority patent/TWI388838B/zh
Priority to KR1020107010747A priority patent/KR101164012B1/ko
Priority to US12/745,306 priority patent/US8319511B2/en
Priority to EP08854285A priority patent/EP2216656A4/en
Priority to CN200880118543.6A priority patent/CN101883986B/zh
Priority to PCT/JP2008/070111 priority patent/WO2009069440A1/ja
Publication of JP2009133722A publication Critical patent/JP2009133722A/ja
Publication of JP2009133722A5 publication Critical patent/JP2009133722A5/ja
Pending legal-status Critical Current

Links

JP2007310109A 2007-11-30 2007-11-30 プローブ装置 Pending JP2009133722A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2007310109A JP2009133722A (ja) 2007-11-30 2007-11-30 プローブ装置
TW097142527A TWI388838B (zh) 2007-11-30 2008-11-04 探針裝置
KR1020107010747A KR101164012B1 (ko) 2007-11-30 2008-11-05 프로브 장치
US12/745,306 US8319511B2 (en) 2007-11-30 2008-11-05 Probe device having a structure for being prevented from deforming
EP08854285A EP2216656A4 (en) 2007-11-30 2008-11-05 PROBE
CN200880118543.6A CN101883986B (zh) 2007-11-30 2008-11-05 探针装置
PCT/JP2008/070111 WO2009069440A1 (ja) 2007-11-30 2008-11-05 プローブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007310109A JP2009133722A (ja) 2007-11-30 2007-11-30 プローブ装置

Publications (2)

Publication Number Publication Date
JP2009133722A JP2009133722A (ja) 2009-06-18
JP2009133722A5 true JP2009133722A5 (enExample) 2011-01-20

Family

ID=40678342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007310109A Pending JP2009133722A (ja) 2007-11-30 2007-11-30 プローブ装置

Country Status (7)

Country Link
US (1) US8319511B2 (enExample)
EP (1) EP2216656A4 (enExample)
JP (1) JP2009133722A (enExample)
KR (1) KR101164012B1 (enExample)
CN (1) CN101883986B (enExample)
TW (1) TWI388838B (enExample)
WO (1) WO2009069440A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5277827B2 (ja) * 2008-09-22 2013-08-28 東京エレクトロン株式会社 プローブ装置
TWI435083B (zh) * 2010-07-27 2014-04-21 Mpi Corp Combination probe head for vertical probe card and its assembly alignment method
JP2012182378A (ja) * 2011-03-02 2012-09-20 Tokyo Electron Ltd プローブカードの位置決め機構及び検査装置
JP2013137281A (ja) * 2011-12-28 2013-07-11 Seiko Epson Corp プローブ装置
JP5952645B2 (ja) * 2012-06-06 2016-07-13 東京エレクトロン株式会社 ウエハ検査用インターフェース及びウエハ検査装置
KR101569303B1 (ko) * 2012-06-22 2015-11-13 아사히 가세이 일렉트로닉스 가부시끼가이샤 프로브 카드 고정 장치, 프로브 검사 장치 및 프로브 카드
US9000455B2 (en) * 2013-03-10 2015-04-07 Tsmc Solid State Lighting Ltd. Shadow mask assembly
CN105122338A (zh) * 2013-03-29 2015-12-02 夏普株式会社 有源矩阵基板和显示装置
JP2015125037A (ja) * 2013-12-26 2015-07-06 株式会社エンプラス 通電治具
CN104360510B (zh) * 2014-11-24 2018-02-16 合肥鑫晟光电科技有限公司 一种检测用探针块及其检测装置
JP6484137B2 (ja) * 2014-11-26 2019-03-13 株式会社日本マイクロニクス プローブ及び接触検査装置
JP7075725B2 (ja) * 2017-05-30 2022-05-26 株式会社日本マイクロニクス 電気的接続装置
KR102673906B1 (ko) * 2018-11-02 2024-06-10 세메스 주식회사 카드 홀더 및 이를 포함하는 프로브 스테이션
JP7566493B2 (ja) * 2020-05-27 2024-10-15 株式会社日本マイクロニクス 接続装置
JP2024017497A (ja) * 2022-07-28 2024-02-08 株式会社日本マイクロニクス 電気的接続装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2684126B2 (ja) * 1991-06-05 1997-12-03 松下電器産業株式会社 プリント基板自動調整検査ステーション
US6762612B2 (en) * 2001-06-20 2004-07-13 Advantest Corp. Probe contact system having planarity adjustment mechanism
DE102004023987B4 (de) * 2004-05-14 2008-06-19 Feinmetall Gmbh Elektrische Prüfeinrichtung
DE102004027887B4 (de) * 2004-05-28 2010-07-29 Feinmetall Gmbh Prüfeinrichtung zur elektrischen Prüfung eines Prüflings
JP2006010629A (ja) 2004-06-29 2006-01-12 Tokyo Electron Ltd 平行調整機構を備えたプローブカード
US7285968B2 (en) * 2005-04-19 2007-10-23 Formfactor, Inc. Apparatus and method for managing thermally induced motion of a probe card assembly
JP4472593B2 (ja) * 2005-07-12 2010-06-02 東京エレクトロン株式会社 プローブカード
DE102006054734A1 (de) * 2005-12-05 2007-06-06 Feinmetall Gmbh Elektrische Prüfvorrichtung für die Prüfung eines elektrischen Prüflings sowie entsprechendes Verfahren
JP4842640B2 (ja) 2005-12-28 2011-12-21 日本発條株式会社 プローブカードおよび検査方法
KR200433761Y1 (ko) 2006-09-27 2006-12-12 박영호 셀프-클린칭 타입 파스너
KR20080030124A (ko) * 2006-09-29 2008-04-04 (주) 미코티엔 프로브 카드
US7471078B2 (en) * 2006-12-29 2008-12-30 Formfactor, Inc. Stiffener assembly for use with testing devices

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