WO2009069440A1 - プローブ装置 - Google Patents
プローブ装置 Download PDFInfo
- Publication number
- WO2009069440A1 WO2009069440A1 PCT/JP2008/070111 JP2008070111W WO2009069440A1 WO 2009069440 A1 WO2009069440 A1 WO 2009069440A1 JP 2008070111 W JP2008070111 W JP 2008070111W WO 2009069440 A1 WO2009069440 A1 WO 2009069440A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- guide hole
- reinforcing member
- fixed
- outer circumference
- collar
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020107010747A KR101164012B1 (ko) | 2007-11-30 | 2008-11-05 | 프로브 장치 |
EP08854285A EP2216656A4 (en) | 2007-11-30 | 2008-11-05 | PROBE |
CN200880118543.6A CN101883986B (zh) | 2007-11-30 | 2008-11-05 | 探针装置 |
US12/745,306 US8319511B2 (en) | 2007-11-30 | 2008-11-05 | Probe device having a structure for being prevented from deforming |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007310109A JP2009133722A (ja) | 2007-11-30 | 2007-11-30 | プローブ装置 |
JP2007-310109 | 2007-11-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009069440A1 true WO2009069440A1 (ja) | 2009-06-04 |
Family
ID=40678342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/070111 WO2009069440A1 (ja) | 2007-11-30 | 2008-11-05 | プローブ装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8319511B2 (ja) |
EP (1) | EP2216656A4 (ja) |
JP (1) | JP2009133722A (ja) |
KR (1) | KR101164012B1 (ja) |
CN (1) | CN101883986B (ja) |
TW (1) | TWI388838B (ja) |
WO (1) | WO2009069440A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5277827B2 (ja) * | 2008-09-22 | 2013-08-28 | 東京エレクトロン株式会社 | プローブ装置 |
TWI435083B (zh) * | 2010-07-27 | 2014-04-21 | Mpi Corp | Combination probe head for vertical probe card and its assembly alignment method |
JP2012182378A (ja) * | 2011-03-02 | 2012-09-20 | Tokyo Electron Ltd | プローブカードの位置決め機構及び検査装置 |
JP2013137281A (ja) * | 2011-12-28 | 2013-07-11 | Seiko Epson Corp | プローブ装置 |
JP5952645B2 (ja) * | 2012-06-06 | 2016-07-13 | 東京エレクトロン株式会社 | ウエハ検査用インターフェース及びウエハ検査装置 |
JP5816749B2 (ja) * | 2012-06-22 | 2015-11-18 | 旭化成エレクトロニクス株式会社 | プローブカード固定装置、プローブ検査装置 |
US9000455B2 (en) * | 2013-03-10 | 2015-04-07 | Tsmc Solid State Lighting Ltd. | Shadow mask assembly |
WO2014156434A1 (ja) * | 2013-03-29 | 2014-10-02 | シャープ株式会社 | アクティブマトリクス基板、及び表示装置 |
JP2015125037A (ja) * | 2013-12-26 | 2015-07-06 | 株式会社エンプラス | 通電治具 |
JP6369286B2 (ja) * | 2014-10-23 | 2018-08-08 | 富士通株式会社 | プロセス間通信プログラム、解放要求方法、および並列演算装置 |
CN104360510B (zh) * | 2014-11-24 | 2018-02-16 | 合肥鑫晟光电科技有限公司 | 一种检测用探针块及其检测装置 |
JP6484137B2 (ja) * | 2014-11-26 | 2019-03-13 | 株式会社日本マイクロニクス | プローブ及び接触検査装置 |
JP7075725B2 (ja) * | 2017-05-30 | 2022-05-26 | 株式会社日本マイクロニクス | 電気的接続装置 |
JP2021188947A (ja) * | 2020-05-27 | 2021-12-13 | 株式会社日本マイクロニクス | 光学的接続子保持構造及び接続装置 |
JP2024017497A (ja) * | 2022-07-28 | 2024-02-08 | 株式会社日本マイクロニクス | 電気的接続装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04359500A (ja) * | 1991-06-05 | 1992-12-11 | Matsushita Electric Ind Co Ltd | プリント基板自動調整検査ステーション |
WO2007007544A1 (ja) * | 2005-07-12 | 2007-01-18 | Tokyo Electron Limited | プローブカード |
JP2007158345A (ja) * | 2005-12-05 | 2007-06-21 | Feinmetall Gmbh | 被験電気部品の検査のための電気検査装置ならびに検査方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6762612B2 (en) * | 2001-06-20 | 2004-07-13 | Advantest Corp. | Probe contact system having planarity adjustment mechanism |
DE102004023987B4 (de) * | 2004-05-14 | 2008-06-19 | Feinmetall Gmbh | Elektrische Prüfeinrichtung |
DE102004027887B4 (de) * | 2004-05-28 | 2010-07-29 | Feinmetall Gmbh | Prüfeinrichtung zur elektrischen Prüfung eines Prüflings |
JP2006010629A (ja) | 2004-06-29 | 2006-01-12 | Tokyo Electron Ltd | 平行調整機構を備えたプローブカード |
US7285968B2 (en) * | 2005-04-19 | 2007-10-23 | Formfactor, Inc. | Apparatus and method for managing thermally induced motion of a probe card assembly |
JP4842640B2 (ja) | 2005-12-28 | 2011-12-21 | 日本発條株式会社 | プローブカードおよび検査方法 |
KR200433761Y1 (ko) | 2006-09-27 | 2006-12-12 | 박영호 | 셀프-클린칭 타입 파스너 |
KR20080030124A (ko) * | 2006-09-29 | 2008-04-04 | (주) 미코티엔 | 프로브 카드 |
US7471078B2 (en) * | 2006-12-29 | 2008-12-30 | Formfactor, Inc. | Stiffener assembly for use with testing devices |
-
2007
- 2007-11-30 JP JP2007310109A patent/JP2009133722A/ja active Pending
-
2008
- 2008-11-04 TW TW097142527A patent/TWI388838B/zh not_active IP Right Cessation
- 2008-11-05 KR KR1020107010747A patent/KR101164012B1/ko not_active IP Right Cessation
- 2008-11-05 EP EP08854285A patent/EP2216656A4/en not_active Withdrawn
- 2008-11-05 WO PCT/JP2008/070111 patent/WO2009069440A1/ja active Application Filing
- 2008-11-05 US US12/745,306 patent/US8319511B2/en not_active Expired - Fee Related
- 2008-11-05 CN CN200880118543.6A patent/CN101883986B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04359500A (ja) * | 1991-06-05 | 1992-12-11 | Matsushita Electric Ind Co Ltd | プリント基板自動調整検査ステーション |
WO2007007544A1 (ja) * | 2005-07-12 | 2007-01-18 | Tokyo Electron Limited | プローブカード |
JP2007158345A (ja) * | 2005-12-05 | 2007-06-21 | Feinmetall Gmbh | 被験電気部品の検査のための電気検査装置ならびに検査方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20100071103A (ko) | 2010-06-28 |
US8319511B2 (en) | 2012-11-27 |
KR101164012B1 (ko) | 2012-07-18 |
EP2216656A4 (en) | 2013-03-20 |
EP2216656A1 (en) | 2010-08-11 |
TW200935065A (en) | 2009-08-16 |
JP2009133722A (ja) | 2009-06-18 |
CN101883986A (zh) | 2010-11-10 |
US20100301888A1 (en) | 2010-12-02 |
CN101883986B (zh) | 2013-06-26 |
TWI388838B (zh) | 2013-03-11 |
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