JP2009122078A - 外観検査装置 - Google Patents

外観検査装置 Download PDF

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Publication number
JP2009122078A
JP2009122078A JP2007299414A JP2007299414A JP2009122078A JP 2009122078 A JP2009122078 A JP 2009122078A JP 2007299414 A JP2007299414 A JP 2007299414A JP 2007299414 A JP2007299414 A JP 2007299414A JP 2009122078 A JP2009122078 A JP 2009122078A
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JP
Japan
Prior art keywords
unit
inspection
wafer
imaging
inspection apparatus
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Pending
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JP2007299414A
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English (en)
Japanese (ja)
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JP2009122078A5 (enExample
Inventor
Osamu Nagami
理 永見
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Olympus Corp
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Olympus Corp
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Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2007299414A priority Critical patent/JP2009122078A/ja
Publication of JP2009122078A publication Critical patent/JP2009122078A/ja
Publication of JP2009122078A5 publication Critical patent/JP2009122078A5/ja
Pending legal-status Critical Current

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JP2007299414A 2007-11-19 2007-11-19 外観検査装置 Pending JP2009122078A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007299414A JP2009122078A (ja) 2007-11-19 2007-11-19 外観検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007299414A JP2009122078A (ja) 2007-11-19 2007-11-19 外観検査装置

Publications (2)

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JP2009122078A true JP2009122078A (ja) 2009-06-04
JP2009122078A5 JP2009122078A5 (enExample) 2011-01-06

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Family Applications (1)

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JP2007299414A Pending JP2009122078A (ja) 2007-11-19 2007-11-19 外観検査装置

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JP (1) JP2009122078A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011069624A (ja) * 2009-09-24 2011-04-07 Hitachi High-Technologies Corp 表面検査装置およびその方法
CN113970548A (zh) * 2021-09-09 2022-01-25 联宝(合肥)电子科技有限公司 一种扫描装置及视觉检测系统
CN115015276A (zh) * 2022-08-01 2022-09-06 华兴智慧(北京)科技有限公司 一种高端设备制造用工件斜面检测装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007292606A (ja) * 2006-04-25 2007-11-08 Olympus Corp 表面検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007292606A (ja) * 2006-04-25 2007-11-08 Olympus Corp 表面検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011069624A (ja) * 2009-09-24 2011-04-07 Hitachi High-Technologies Corp 表面検査装置およびその方法
CN113970548A (zh) * 2021-09-09 2022-01-25 联宝(合肥)电子科技有限公司 一种扫描装置及视觉检测系统
CN113970548B (zh) * 2021-09-09 2023-09-01 联宝(合肥)电子科技有限公司 一种扫描装置及视觉检测系统
CN115015276A (zh) * 2022-08-01 2022-09-06 华兴智慧(北京)科技有限公司 一种高端设备制造用工件斜面检测装置

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