JP2009122078A5 - - Google Patents

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Publication number
JP2009122078A5
JP2009122078A5 JP2007299414A JP2007299414A JP2009122078A5 JP 2009122078 A5 JP2009122078 A5 JP 2009122078A5 JP 2007299414 A JP2007299414 A JP 2007299414A JP 2007299414 A JP2007299414 A JP 2007299414A JP 2009122078 A5 JP2009122078 A5 JP 2009122078A5
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JP
Japan
Prior art keywords
unit
inspection
inspection object
imaging
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007299414A
Other languages
English (en)
Japanese (ja)
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JP2009122078A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007299414A priority Critical patent/JP2009122078A/ja
Priority claimed from JP2007299414A external-priority patent/JP2009122078A/ja
Publication of JP2009122078A publication Critical patent/JP2009122078A/ja
Publication of JP2009122078A5 publication Critical patent/JP2009122078A5/ja
Pending legal-status Critical Current

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JP2007299414A 2007-11-19 2007-11-19 外観検査装置 Pending JP2009122078A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007299414A JP2009122078A (ja) 2007-11-19 2007-11-19 外観検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007299414A JP2009122078A (ja) 2007-11-19 2007-11-19 外観検査装置

Publications (2)

Publication Number Publication Date
JP2009122078A JP2009122078A (ja) 2009-06-04
JP2009122078A5 true JP2009122078A5 (enExample) 2011-01-06

Family

ID=40814374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007299414A Pending JP2009122078A (ja) 2007-11-19 2007-11-19 外観検査装置

Country Status (1)

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JP (1) JP2009122078A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5303412B2 (ja) * 2009-09-24 2013-10-02 株式会社日立ハイテクノロジーズ 検査装置、およびウエハチャックの清掃方法
CN113970548B (zh) * 2021-09-09 2023-09-01 联宝(合肥)电子科技有限公司 一种扫描装置及视觉检测系统
CN115015276B (zh) * 2022-08-01 2022-10-28 华兴智慧(北京)科技有限公司 一种高端设备制造用工件斜面检测装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007292606A (ja) * 2006-04-25 2007-11-08 Olympus Corp 表面検査装置

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