JP2009111243A5 - - Google Patents

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Publication number
JP2009111243A5
JP2009111243A5 JP2007283377A JP2007283377A JP2009111243A5 JP 2009111243 A5 JP2009111243 A5 JP 2009111243A5 JP 2007283377 A JP2007283377 A JP 2007283377A JP 2007283377 A JP2007283377 A JP 2007283377A JP 2009111243 A5 JP2009111243 A5 JP 2009111243A5
Authority
JP
Japan
Prior art keywords
seal ring
electrostatic chuck
protrusions
projections
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007283377A
Other languages
English (en)
Japanese (ja)
Other versions
JP5126662B2 (ja
JP2009111243A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007283377A priority Critical patent/JP5126662B2/ja
Priority claimed from JP2007283377A external-priority patent/JP5126662B2/ja
Publication of JP2009111243A publication Critical patent/JP2009111243A/ja
Publication of JP2009111243A5 publication Critical patent/JP2009111243A5/ja
Application granted granted Critical
Publication of JP5126662B2 publication Critical patent/JP5126662B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007283377A 2007-10-31 2007-10-31 静電チャック Active JP5126662B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007283377A JP5126662B2 (ja) 2007-10-31 2007-10-31 静電チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007283377A JP5126662B2 (ja) 2007-10-31 2007-10-31 静電チャック

Publications (3)

Publication Number Publication Date
JP2009111243A JP2009111243A (ja) 2009-05-21
JP2009111243A5 true JP2009111243A5 (enExample) 2010-12-16
JP5126662B2 JP5126662B2 (ja) 2013-01-23

Family

ID=40779402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007283377A Active JP5126662B2 (ja) 2007-10-31 2007-10-31 静電チャック

Country Status (1)

Country Link
JP (1) JP5126662B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6119430B2 (ja) 2013-05-31 2017-04-26 住友大阪セメント株式会社 静電チャック装置
JP6782157B2 (ja) * 2016-12-20 2020-11-11 日本特殊陶業株式会社 静電チャック
JP6627936B1 (ja) 2018-08-30 2020-01-08 住友大阪セメント株式会社 静電チャック装置および静電チャック装置の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03163848A (ja) * 1989-11-22 1991-07-15 Hitachi Ltd 真空吸着台
JP2001185607A (ja) * 1999-12-27 2001-07-06 Canon Inc 基板吸着保持装置およびデバイス製造方法
US6664549B2 (en) * 2000-01-28 2003-12-16 Hitachi Tokyo Electronics Co., Ltd. Wafer chuck, exposure system, and method of manufacturing semiconductor device
JP4094262B2 (ja) * 2001-09-13 2008-06-04 住友大阪セメント株式会社 吸着固定装置及びその製造方法
JP4288694B2 (ja) * 2001-12-20 2009-07-01 株式会社ニコン 基板保持装置、露光装置及びデバイス製造方法
JP4061131B2 (ja) * 2002-06-18 2008-03-12 キヤノンアネルバ株式会社 静電吸着装置

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