JP2009095826A5 - - Google Patents

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Publication number
JP2009095826A5
JP2009095826A5 JP2008245726A JP2008245726A JP2009095826A5 JP 2009095826 A5 JP2009095826 A5 JP 2009095826A5 JP 2008245726 A JP2008245726 A JP 2008245726A JP 2008245726 A JP2008245726 A JP 2008245726A JP 2009095826 A5 JP2009095826 A5 JP 2009095826A5
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JP
Japan
Prior art keywords
coating nozzle
coating
reflected light
inspection method
columnar flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2008245726A
Other languages
English (en)
Japanese (ja)
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JP2009095826A (ja
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Publication date
Application filed filed Critical
Priority to JP2008245726A priority Critical patent/JP2009095826A/ja
Priority claimed from JP2008245726A external-priority patent/JP2009095826A/ja
Publication of JP2009095826A publication Critical patent/JP2009095826A/ja
Publication of JP2009095826A5 publication Critical patent/JP2009095826A5/ja
Withdrawn legal-status Critical Current

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JP2008245726A 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 Withdrawn JP2009095826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008245726A JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007247933 2007-09-25
JP2008245726A JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Publications (2)

Publication Number Publication Date
JP2009095826A JP2009095826A (ja) 2009-05-07
JP2009095826A5 true JP2009095826A5 (enExample) 2011-09-29

Family

ID=40699336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008245726A Withdrawn JP2009095826A (ja) 2007-09-25 2008-09-25 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法

Country Status (1)

Country Link
JP (1) JP2009095826A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5285916B2 (ja) * 2008-01-09 2013-09-11 東レ株式会社 塗布ノズル検査装置および検査方法ならびに塗液の塗布方法
US20150262848A1 (en) 2014-03-11 2015-09-17 SCREEN Holdings Co., Ltd. Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle
JP6353780B2 (ja) * 2014-12-17 2018-07-04 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6541491B2 (ja) * 2015-07-29 2019-07-10 株式会社Ｓｃｒｅｅｎホールディングス 流下判定方法、流下判定装置および吐出装置
JP6649957B2 (ja) 2015-09-24 2020-02-19 ギガフォトン株式会社 極端紫外光生成装置
JP6553487B2 (ja) * 2015-11-10 2019-07-31 株式会社Ｓｃｒｅｅｎホールディングス 吐出判定方法および吐出装置
KR101906288B1 (ko) * 2016-12-22 2018-12-06 삼성디스플레이 주식회사 하향식 기판 에칭장치
KR101998965B1 (ko) * 2017-11-01 2019-07-10 주식회사 포스코 감지유닛, 이를 포함하는 노즐검사장치 및 노즐검사방법

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