JP2009095826A - 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 - Google Patents
塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 Download PDFInfo
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- JP2009095826A JP2009095826A JP2008245726A JP2008245726A JP2009095826A JP 2009095826 A JP2009095826 A JP 2009095826A JP 2008245726 A JP2008245726 A JP 2008245726A JP 2008245726 A JP2008245726 A JP 2008245726A JP 2009095826 A JP2009095826 A JP 2009095826A
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008245726A JP2009095826A (ja) | 2007-09-25 | 2008-09-25 | 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 |
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| Application Number | Priority Date | Filing Date | Title |
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| JP2007247933 | 2007-09-25 | ||
| JP2008245726A JP2009095826A (ja) | 2007-09-25 | 2008-09-25 | 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 |
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| Publication Number | Publication Date |
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| JP2009095826A true JP2009095826A (ja) | 2009-05-07 |
| JP2009095826A5 JP2009095826A5 (enExample) | 2011-09-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2008245726A Withdrawn JP2009095826A (ja) | 2007-09-25 | 2008-09-25 | 塗布ノズル検査装置および検査方法ならびに塗布ノズルを用いた塗布方法 |
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| JP (1) | JP2009095826A (enExample) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009160546A (ja) * | 2008-01-09 | 2009-07-23 | Toray Ind Inc | 塗布ノズル検査装置および検査方法ならびに塗液の塗布方法 |
| JP2016115863A (ja) * | 2014-12-17 | 2016-06-23 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理方法 |
| KR20170015180A (ko) | 2015-07-29 | 2017-02-08 | 가부시키가이샤 스크린 홀딩스 | 유하 판정 방법, 유하 판정 장치 및 토출 장치 |
| JP2017090232A (ja) * | 2015-11-10 | 2017-05-25 | 株式会社Ｓｃｒｅｅｎホールディングス | 吐出判定方法および吐出装置 |
| KR101906288B1 (ko) * | 2016-12-22 | 2018-12-06 | 삼성디스플레이 주식회사 | 하향식 기판 에칭장치 |
| KR20190049282A (ko) * | 2017-11-01 | 2019-05-09 | 주식회사 포스코 | 감지유닛, 이를 포함하는 노즐검사장치 및 노즐검사방법 |
| US10531550B2 (en) | 2015-09-24 | 2020-01-07 | Gigaphoton Inc. | Extreme ultraviolet light generation device |
| US10665481B2 (en) | 2014-03-11 | 2020-05-26 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle |
-
2008
- 2008-09-25 JP JP2008245726A patent/JP2009095826A/ja not_active Withdrawn
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009160546A (ja) * | 2008-01-09 | 2009-07-23 | Toray Ind Inc | 塗布ノズル検査装置および検査方法ならびに塗液の塗布方法 |
| US10665481B2 (en) | 2014-03-11 | 2020-05-26 | SCREEN Holdings Co., Ltd. | Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle |
| JP2016115863A (ja) * | 2014-12-17 | 2016-06-23 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理方法 |
| KR101858816B1 (ko) * | 2015-07-29 | 2018-05-16 | 가부시키가이샤 스크린 홀딩스 | 유하 판정 방법, 유하 판정 장치 및 토출 장치 |
| US9838575B2 (en) | 2015-07-29 | 2017-12-05 | SCREEN Holdings Co., Ltd. | Flow-down determination method, flow-down determination apparatus and discharge apparatus |
| JP2017029883A (ja) * | 2015-07-29 | 2017-02-09 | 株式会社Ｓｃｒｅｅｎホールディングス | 流下判定方法、流下判定装置および吐出装置 |
| KR20170015180A (ko) | 2015-07-29 | 2017-02-08 | 가부시키가이샤 스크린 홀딩스 | 유하 판정 방법, 유하 판정 장치 및 토출 장치 |
| US10531550B2 (en) | 2015-09-24 | 2020-01-07 | Gigaphoton Inc. | Extreme ultraviolet light generation device |
| JP2017090232A (ja) * | 2015-11-10 | 2017-05-25 | 株式会社Ｓｃｒｅｅｎホールディングス | 吐出判定方法および吐出装置 |
| US10065208B2 (en) | 2015-11-10 | 2018-09-04 | SCREEN Holdings Co., Ltd. | Discharge determination method and discharge apparatus |
| KR101906288B1 (ko) * | 2016-12-22 | 2018-12-06 | 삼성디스플레이 주식회사 | 하향식 기판 에칭장치 |
| KR20190049282A (ko) * | 2017-11-01 | 2019-05-09 | 주식회사 포스코 | 감지유닛, 이를 포함하는 노즐검사장치 및 노즐검사방법 |
| KR101998965B1 (ko) * | 2017-11-01 | 2019-07-10 | 주식회사 포스코 | 감지유닛, 이를 포함하는 노즐검사장치 및 노즐검사방법 |
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