JP2009093187A - 大型ペリクル収納容器 - Google Patents
大型ペリクル収納容器 Download PDFInfo
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- JP2009093187A JP2009093187A JP2008288361A JP2008288361A JP2009093187A JP 2009093187 A JP2009093187 A JP 2009093187A JP 2008288361 A JP2008288361 A JP 2008288361A JP 2008288361 A JP2008288361 A JP 2008288361A JP 2009093187 A JP2009093187 A JP 2009093187A
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- pellicle
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- Containers Having Bodies Formed In One Piece (AREA)
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Abstract
【解決手段】 ペリクル1を収納して保管、搬送するために用いられる大型ペリクル収納容器であって、ペリクル1を収納するトレイ2と、該トレイ2を被覆する蓋3とからなり、該トレイ2または蓋3の少なくとも平面部は二重構造であって、2枚のトレイ2a,2bの間にハニカム構造42を設けて構成したことを特徴とする。
【選択図】 図5
Description
2…トレイ
2a…第一トレイ
2b…第二トレイ
3…蓋
4…補強板
5…樹脂材料
11…ペリクル膜
12…枠体
13…粘着材
21…隆起部
22…平面部
23…溝部
24…突起
41…ハニカム板
42…ハニカム
51…枠体
52…ペリクル膜
53…粘着材
54…保護フィルム
55…トレイ
55a…設置面
55b…ポスト
56…フタ
56a…斜面
57…クリップ
Claims (2)
- ペリクルを収納して保管、搬送するために用いられる大型ペリクル収納容器であって、
ペリクルを収納するトレイと、前記トレイを被覆する蓋とからなり、
前記トレイまたは蓋の少なくとも平面部は二重構造であって、2枚のトレイまたは蓋の間にハニカム構造を設けたことを特徴とする大型ペリクル収納容器。 - 前記トレイまたは蓋は、真空成形にて製造したものであることを特徴とする請求項1に記載の大型ペリクル収納容器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2008288361A JP4337988B2 (ja) | 2008-11-11 | 2008-11-11 | 大型ペリクル収納容器 |
Applications Claiming Priority (1)
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JP2008288361A JP4337988B2 (ja) | 2008-11-11 | 2008-11-11 | 大型ペリクル収納容器 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003283891A Division JP4236535B2 (ja) | 2003-07-31 | 2003-07-31 | 大型ペリクル収納容器 |
Publications (2)
Publication Number | Publication Date |
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JP2009093187A true JP2009093187A (ja) | 2009-04-30 |
JP4337988B2 JP4337988B2 (ja) | 2009-09-30 |
Family
ID=40665172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008288361A Expired - Lifetime JP4337988B2 (ja) | 2008-11-11 | 2008-11-11 | 大型ペリクル収納容器 |
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JP (1) | JP4337988B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012004382A (ja) * | 2010-06-17 | 2012-01-05 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
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2008
- 2008-11-11 JP JP2008288361A patent/JP4337988B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012004382A (ja) * | 2010-06-17 | 2012-01-05 | Shin Etsu Polymer Co Ltd | 基板収納容器 |
Also Published As
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JP4337988B2 (ja) | 2009-09-30 |
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