JP2009081366A - バッチ処理装置 - Google Patents
バッチ処理装置 Download PDFInfo
- Publication number
- JP2009081366A JP2009081366A JP2007250935A JP2007250935A JP2009081366A JP 2009081366 A JP2009081366 A JP 2009081366A JP 2007250935 A JP2007250935 A JP 2007250935A JP 2007250935 A JP2007250935 A JP 2007250935A JP 2009081366 A JP2009081366 A JP 2009081366A
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- liquid temperature
- liquid
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- temperature
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Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1917—Control of temperature characterised by the use of electric means using digital means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
【解決手段】ワンバス式の洗浄槽20は、被洗浄物を洗浄するメガソニック発振器を備える。制御コンピュータ30は、メガソニック照射の際に発生する液温変化を補償するために、純水加温装置40から供給され薬液を希釈する純水の供給温度を制御する。被洗浄物は、各バッチが平均液温一定の元で洗浄され、高い洗浄効率が維持される。
【選択図】図1
Description
バッチ処理の対象物を照射する超音波照射で予測されるバッチ槽内の処理液の液温変化に少なくとも基づいて、バッチ槽内の処理液の液温変化を予測する液温予測手段を有することを特徴とする。
11:ウエハカウンタ
20:ワンバス式洗浄槽
21:温度計
30:制御コンピュータ
40:純水加温装置
50:配管装置
51,52:ミキシングバルブ
Claims (6)
- バッチ処理の対象物を処理液内に浸漬し、処理液内で超音波を用いてバッチ処理するバッチ槽を有するバッチ処理装置であって、
バッチ処理の対象物を照射する超音波照射で予測されるバッチ槽内の処理液の液温変化に少なくとも基づいて、バッチ槽内の処理液の液温変化を予測する液温予測手段を有することを特徴とするバッチ処理装置。 - 前記液温予測手段によって予測された液温の変化を補償するように、前記バッチ槽に供給する処理液の液温を制御する液温制御手段を更に有する、請求項1に記載のバッチ処理装置。
- 前記液温制御手段は、バッチ槽内の処理液の処理時間内での平均液温が各バッチで均一となるように、バッチ槽に供給する処理液の液温を制御する、請求項2に記載のバッチ処理装置。
- 前記液温予測手段は、バッチ処理の対象物の個数と、超音波の出力と、バッチ槽内の処理液の予測される平均液温変化とを対応付けたデータを保持しており、前記予測された平均液温変化を補償するように、前記供給する処理液の液温を制御する、請求項2又は3に記載のバッチ処理装置。
- 前記バッチ処理の対象物が半導体ウエハである、請求項1〜4の何れか一に記載のバッチ処理装置。
- 前記バッチ槽がワンバス式の洗浄槽であり、前記バッチ処理装置が、半導体ウエハの洗浄装置である、請求項5に記載のバッチ処理装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007250935A JP2009081366A (ja) | 2007-09-27 | 2007-09-27 | バッチ処理装置 |
US12/232,886 US20090088909A1 (en) | 2007-09-27 | 2008-09-25 | Batch processing apparatus for processing work pieces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007250935A JP2009081366A (ja) | 2007-09-27 | 2007-09-27 | バッチ処理装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009081366A true JP2009081366A (ja) | 2009-04-16 |
Family
ID=40509293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007250935A Pending JP2009081366A (ja) | 2007-09-27 | 2007-09-27 | バッチ処理装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US20090088909A1 (ja) |
JP (1) | JP2009081366A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20130028692A (ko) * | 2011-09-09 | 2013-03-19 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치, 기판 처리 방법 및 기억 매체 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8404056B1 (en) * | 2009-05-27 | 2013-03-26 | WD Media, LLC | Process control for a sonication cleaning tank |
US8863763B1 (en) | 2009-05-27 | 2014-10-21 | WD Media, LLC | Sonication cleaning with a particle counter |
DE102015211941A1 (de) * | 2015-06-26 | 2016-12-29 | Zf Friedrichshafen Ag | Verfahren und Vorrichtung zur Reduzierung eines Energiebedarfs einer Werkzeugmaschine und Werkzeugmaschinensystem |
CN111570389A (zh) * | 2020-04-20 | 2020-08-25 | 深圳市洁盟清洗设备有限公司 | 一种超声波清洗机的高精度温控方法及超声波清洗机 |
Citations (4)
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JPH05304130A (ja) * | 1992-04-28 | 1993-11-16 | Tokyo Electron Ltd | 洗浄液の温度制御方法 |
JPH11154657A (ja) * | 1997-11-20 | 1999-06-08 | Tokyo Electron Ltd | 洗浄装置及び洗浄方法 |
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JP2001284306A (ja) * | 2000-03-28 | 2001-10-12 | Toshiba Corp | 基板洗浄装置および基板洗浄方法 |
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2007
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2008
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Patent Citations (4)
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JPH05304130A (ja) * | 1992-04-28 | 1993-11-16 | Tokyo Electron Ltd | 洗浄液の温度制御方法 |
JPH11154657A (ja) * | 1997-11-20 | 1999-06-08 | Tokyo Electron Ltd | 洗浄装置及び洗浄方法 |
JP2001102350A (ja) * | 1999-09-29 | 2001-04-13 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20130028692A (ko) * | 2011-09-09 | 2013-03-19 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치, 기판 처리 방법 및 기억 매체 |
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KR101687201B1 (ko) | 2011-09-09 | 2016-12-16 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치, 기판 처리 방법 및 기억 매체 |
TWI584390B (zh) * | 2011-09-09 | 2017-05-21 | Tokyo Electron Ltd | A substrate processing apparatus, a substrate processing method, and a memory medium |
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