JP2009080088A5 - - Google Patents

Info

Publication number
JP2009080088A5
JP2009080088A5 JP2007251481A JP2007251481A JP2009080088A5 JP 2009080088 A5 JP2009080088 A5 JP 2009080088A5 JP 2007251481 A JP2007251481 A JP 2007251481A JP 2007251481 A JP2007251481 A JP 2007251481A JP 2009080088 A5 JP2009080088 A5 JP 2009080088A5
Authority
JP
Japan
Prior art keywords
substrate
moving
light receiving
speed
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007251481A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009080088A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007251481A priority Critical patent/JP2009080088A/ja
Priority claimed from JP2007251481A external-priority patent/JP2009080088A/ja
Priority to TW097133240A priority patent/TW200918989A/zh
Priority to CNA2008101615084A priority patent/CN101398396A/zh
Priority to KR1020080093754A priority patent/KR20090033031A/ko
Publication of JP2009080088A publication Critical patent/JP2009080088A/ja
Publication of JP2009080088A5 publication Critical patent/JP2009080088A5/ja
Withdrawn legal-status Critical Current

Links

JP2007251481A 2007-09-27 2007-09-27 基板外観検査装置 Withdrawn JP2009080088A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007251481A JP2009080088A (ja) 2007-09-27 2007-09-27 基板外観検査装置
TW097133240A TW200918989A (en) 2007-09-27 2008-08-29 Substrate appearance inspection apparatus
CNA2008101615084A CN101398396A (zh) 2007-09-27 2008-09-24 基板外观检查装置
KR1020080093754A KR20090033031A (ko) 2007-09-27 2008-09-24 기판 외관 검사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007251481A JP2009080088A (ja) 2007-09-27 2007-09-27 基板外観検査装置

Publications (2)

Publication Number Publication Date
JP2009080088A JP2009080088A (ja) 2009-04-16
JP2009080088A5 true JP2009080088A5 (enExample) 2010-10-14

Family

ID=40517101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007251481A Withdrawn JP2009080088A (ja) 2007-09-27 2007-09-27 基板外観検査装置

Country Status (4)

Country Link
JP (1) JP2009080088A (enExample)
KR (1) KR20090033031A (enExample)
CN (1) CN101398396A (enExample)
TW (1) TW200918989A (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011055432A1 (ja) * 2009-11-04 2011-05-12 ダックエンジニアリング株式会社 ワーク検査装置
KR20140022064A (ko) * 2011-05-10 2014-02-21 아사히 가라스 가부시키가이샤 투광성 판상체의 미소 결점의 검사 방법 및 투광성 판상체의 미소 결점의 검사 장치
JP5854501B2 (ja) * 2011-11-17 2016-02-09 東レエンジニアリング株式会社 自動外観検査装置
CN102706887B (zh) * 2012-05-18 2014-09-24 华中科技大学 一种rfid天线检测设备及其应用
CN103543162B (zh) * 2013-11-05 2015-11-04 中国矿业大学 一种半导体片材的表面缺陷及厚度检测方法及装置
CN104568973A (zh) * 2015-02-09 2015-04-29 京东方科技集团股份有限公司 一种基板检测装置及方法
JP6666101B2 (ja) * 2015-09-30 2020-03-13 日東電工株式会社 長尺状偏光子の検査方法
CN106370674A (zh) * 2016-08-29 2017-02-01 武汉华星光电技术有限公司 一种玻璃基板的检测装置及检测方法
CN108469437B (zh) * 2018-03-16 2021-06-11 河北视窗玻璃有限公司 浮法玻璃的缺陷检测方法及装置
CN110783223B (zh) * 2018-07-24 2024-04-16 泰克元有限公司 电子部件处理设备用拍摄装置
CN108872256A (zh) * 2018-09-13 2018-11-23 广东中航特种玻璃技术有限公司 一种在线检测玻璃原片杂质的方法
CN112888531B (zh) * 2018-12-11 2023-04-14 本田技研工业株式会社 工件检查装置和工件检查方法
JP2021096699A (ja) * 2019-12-18 2021-06-24 三菱電機株式会社 飛行ルート学習装置、条件修正装置及び飛行ルート決定装置
EP4100727A1 (en) * 2020-02-05 2022-12-14 Smartex Europe, Unipessoal Lda. Systems and methods for defect detection
JP7562597B2 (ja) * 2022-05-12 2024-10-07 キヤノン株式会社 識別装置

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