JP2009076938A - サスペンデッドナノワイヤチャネルを有するトランジスタ構造とその製造方法 - Google Patents
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- 239000002070 nanowire Substances 0.000 title claims abstract description 94
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001953 recrystallisation Methods 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 238000001459 lithography Methods 0.000 claims description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 abstract description 3
- 238000003795 desorption Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 49
- 238000000034 method Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
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- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005441 electronic device fabrication Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical group [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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Abstract
【解決手段】サスペンデッドナノワイヤチャネルを有するトランジスタ構造とその製造方法は、基板と、基板上に位置するサイドゲートと、基板とサイドゲート上を被覆する誘電層と、サイドゲートの側辺に位置し、誘電層との間に気隙を有するサスペンデッドナノワイヤチャネルと、誘電層上に設置され、サスペンデッドナノワイヤチャネルの両端に分設されるソース電極とドレイン電極と、からなる。サイドゲートの静電力のサスペンデッドナノワイヤチャネルに対する吸着と分離により、等価サイドゲートの誘電層厚さを快速に変化させ、素子がスイッチ状態上で快速に切り換わる、或いは、チャネルの初期電圧を変化させる。
【選択図】図1
Description
12 基板
14 熱酸化層
15 多結晶シリコン層
16 サイドゲート
20 誘電層
22 サスペンデッドナノワイヤチャネル
24 ソース電極
26 ドレイン電極
28 犠牲層
Claims (18)
- サスペンデッドナノワイヤチャネルを有するトランジスタ構造であって、
基板と、
前記基板上に位置するサイドゲートと、
前記基板と前記サイドゲート上を被覆する誘電層と、
前記サイドゲートの側辺に位置し、前記誘電層との間に気隙を有するサスペンデッドナノワイヤチャネルと、
前記誘電層上に設置され、前記サスペンデッドナノワイヤチャネルの両端に分設されるソース電極とドレイン電極と、
からなることを特徴とするサスペンデッドナノワイヤチャネルを有するトランジスタ構造。 - 前記ソース電極と前記ドレイン電極の底面は、それぞれ、犠牲層を有して、前記誘電層との接点となることを特徴とする請求項1に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造。
- 前記犠牲層と前記誘電層間には、異なるエッチング選択比を有することを特徴とする請求項2に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造。
- 前記基板表面に、絶縁層を有することを特徴とする請求項1に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造。
- 前記誘電層の材質は、窒化ケイ素、或いは、酸化ケイ素であることを特徴とする請求項1に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造。
- 前記サスペンデッドナノワイヤチャネルの結晶態は単結晶シリコン、或いは、多結晶シリコンであることを特徴とする請求項1に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造。
- 前記基板はシリコン基板であることを特徴とする請求項1に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造。
- メモリ素子の操作、或いは、スイッチ素子に応用できることを特徴とする請求項1に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造。
- 前記サスペンデッドナノワイヤチャネルの尺寸は、100ナノメートル以下であることを特徴とする請求項1に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造。
- サスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法であって、
基板を提供する工程と、
前記基板上にサイドゲートを形成する工程と、
前記サイドゲートと前記基板表面上に、順に、誘電層と犠牲層を形成する工程と、
前記犠牲層上に、多結晶シリコン層を形成すると共に、前記多結晶シリコン層に対し、ソース/ドレインイオンを注入する工程と、
前記多結晶シリコン層にパターン化を実行し、前記サイドゲート側壁上に、ナノワイヤチャネルを形成し、前記誘電層上に、前記ナノワイヤ両端に分設されるソース電極とドレイン電極を形成する工程と、
前記ナノワイヤチャネルと前記ゲート間に挟まれた前記犠牲層を除去し、前記ナノワイヤチャネルをサスペンデッド状態にする工程と、
からなることを特徴とするサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。 - 前記多結晶シリコン層にパターン化を施す工程は、リソグラフィと異方性エッチングであることを特徴とする請求項10に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。
- 前記犠牲層を除去する工程は、選択的エッチングを利用することを特徴とする請求項10に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。
- 前記基板表面は絶縁層を被覆することを特徴とする請求項10に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。
- 前記基板上にサイドゲートを形成する工程は、
前記絶縁層上にサイドゲート多結晶シリコン層を形成する工程と、
前記サイドゲート多結晶シリコン層にパターン化を施して、前記サイドゲート構造を定義する工程と、
からなることを特徴とする請求項13に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。 - 前記誘電層の材質は、窒化ケイ素、或いは、酸化ケイ素であることを特徴とする請求項10に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。
- 前記基板はシリコン基板であることを特徴とする請求項10に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。
- 更に、前記ナノワイヤチャネルに低温再結晶工程を実行して、前記ナノワイヤチャネルを単結晶構造にすることを特徴とする請求項10に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。
- 前記ナノワイヤチャネルの尺寸は100ナノメートル以下であることを特徴とする請求項10に記載のサスペンデッドナノワイヤチャネルを有するトランジスタ構造の製造方法。
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WO2014169242A1 (en) * | 2013-04-12 | 2014-10-16 | The Regents Of The University Of California | Nanowire nanoelectromechanical field-effect transistors |
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KR101090740B1 (ko) | 2009-07-06 | 2011-12-08 | 고려대학교 산학협력단 | 상향식 게이트 올 어라운드 소자 및 그 제조방법 |
US9312333B2 (en) | 2010-11-22 | 2016-04-12 | Samsung Electronics Co., Ltd. | Resonator having terminals and a method for manufacturing the resonator |
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KR102219295B1 (ko) * | 2014-07-25 | 2021-02-23 | 삼성전자 주식회사 | 반도체 소자 및 이의 제조 방법 |
Also Published As
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JP4934662B2 (ja) | 2012-05-16 |
US7977755B2 (en) | 2011-07-12 |
TWI380376B (ja) | 2012-12-21 |
TW201017769A (en) | 2010-05-01 |
US20100096704A1 (en) | 2010-04-22 |
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