JP2009076921A - 多接合ソーラーセル及びその製造方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0687—Multiple junction or tandem solar cells
- H01L31/06875—Multiple junction or tandem solar cells inverted grown metamorphic [IMM] multiple junction solar cells, e.g. III-V compounds inverted metamorphic multi-junction cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
【解決手段】多接合ソーラーセルは、第1のバンドギャップを有する第1のソーラーサブセルと、この第1のサブセル上に配置され、第1のバンドギャップより小さい第2のバンドギャップを有する第2のソーラーサブセルと、この第2のサブセル上に配置され、第2のバンドギャップより大きい第3のバンドギャップを有するグレーディングインターレイヤーと、このインターレイヤー上に配置され、中間サブセルに対して格子不整合され、且つ第2のバンドギャップより小さい第4のバンドギャップを有する第3のソーラーサブセルと、これら第1、第2及び第3のソーラーサブセルを支持する薄い(約2−6ミル)基板及び/又は堅個なカバーガラスと、を備えている。
【選択図】図4
Description
本発明の目的は、改良された多接合ソーラーセルを提供することである。
簡単に且つ一般的に述べると、本発明は、第1基板を準備し、ソーラーセルを形成する半導体材料の一連の層を第1基板上に堆積し、一連の層の上部に代用基板を取り付け、第1基板を除去し、そして代用基板を所定の厚みへと薄くすることにより、ソーラーセルを製造する方法を提供する。
102:核生成層
103:バッファ層
104:エッチング停止層
105:接触層
106:窓層
107:n+エミッタ層
108:pベース層
109:BSF層
110:p型及びn型層(トンネルダイオード層)
111:窓層
112:n+エミッタ層
113:pベース層
114:BSF層
115:p++/n++トンネルダイオード
116a:バリア層
116:グレーディングインターレイヤー(メタモルフィックバッファ層)
116b:バリア層
117:窓層
118:n+エミッタ層
119:pベース層
120:BSF層
121:p+接触層
122:金属接触層
123:接着剤層
124、124a:代用基板
501:格子線
502:相互接続バス線
503:接触パッド
510:チャンネル
Claims (24)
- ソーラーセルを製造する方法において、
第1基板を準備するステップと、
ソーラーセルを形成する半導体材料の一連の層を第1基板上に堆積するステップと、
前記一連の層の上部に代用基板を取り付けるステップと、
前記第1基板を除去するステップと、
前記代用基板を所定の厚みへと薄くするステップと、
を備えた方法。 - 半導体材料の前記一連の層は、第1、第2及び第3のソーラーサブセルを含む三重接合ソーラーセルを形成する、請求項1に記載の方法。
- 前記取り付けるステップは、前記ソーラーセルを前記代用基板に接着することを含む、請求項1に記載の方法。
- 前記代用基板は、サファイアウェハである、請求項3に記載の方法。
- 代用基板を薄くする前記ステップは、研磨、ラッピング又はエッチングにより行われる、請求項3に記載の方法。
- 前記一連の半導体層の上に金属接触層を堆積し、そして該金属接触層の上部に前記代用基板を取り付けるステップを更に備えた、請求項5に記載の方法。
- 前記半導体材料の層を通して前記金属接触層の上部へ開口をエッチングするステップを更に備えた、請求項6に記載の方法。
- 前記金属接触層に電気導体を溶接して、前記ソーラーセルへの電気的接触部を形成するステップを更に備えた、請求項7に記載の方法。
- 前記電気導体は、隣接ソーラーセルへの電気的接続を形成する、請求項8に記載の方法。
- 前記代用基板は、導電性であり、そして前記基板は、前記ソーラーセルへの電気的接触を形成する、請求項3に記載の方法。
- 前記ソーラーセルをガラス支持部材に取り付けるステップを更に備えた、請求項1に記載の方法。
- 半導体材料の一連の層を堆積する前記ステップは、第1のバンドギャップを有する第1のソーラーサブセルを前記基板上に形成する段階と、前記第1のバンドギャップより小さい第2のバンドギャップを有する第2のソーラーサブセルを前記第1のサブセルの上に形成する段階と、前記第2のバンドギャップより大きな第3のバンドギャップを有するグレーディングインターレイヤーを前記第2のサブセルの上に形成する段階と、前記第2のバンドギャップより小さい第4のバンドギャップを有する第3のソーラーサブセルを形成して、前記第3のサブセルが前記第2のサブセルに対して格子不整列となるようにする段階と、を含む請求項1に記載の方法。
- 前記第1の基板は、GaAsで構成される、請求項1に記載のソーラーセルを製造する方法。
- 前記第1のソーラーサブセルは、InGa(Al)Pエミッタ領域及びInGa(Al)Pベース領域で構成される、請求項2に記載のソーラーセルを製造する方法。
- 前記第2のソーラーサブセルは、InGaPエミッタ領域及びGaAsベース領域で構成される、請求項2に記載の方法。
- 前記第3のソーラーサブセルは、InGaAsで構成される、請求項2に記載の方法。
- 堅個なカバーガラス上に前記ソーラーセルを取り付けるステップを更に備えた、請求項1に記載の方法。
- 前記代用基板を薄くするステップは、前記代用基板全体を除去することを含む、請求項1に記載の方法。
- 第1のバンドギャップを有する第1のソーラーサブセルと、
前記第1のサブセル上に配置され、前記第1のバンドギャップより小さい第2のバンドギャップを有する第2のソーラーサブセルと、
前記第2のサブセル上に配置され、前記第2のバンドギャップより大きい第3のバンドギャップを有するグレーディングインターレイヤーと、
前記インターレイヤー上に配置され、前記中間サブセルに対して格子不整合され、且つ第2のバンドギャップより小さい第4のバンドギャップを有する第3のソーラーサブセルと、
前記第1、第2及び第3のソーラーサブセルを支持する堅個なカバーガラスと、
を備えた多接合ソーラーセル。 - 前記第1のソーラーサブセルは、最上部のセルであり、InGa(Al)Pで構成される、請求項19に記載の多接合ソーラーセル。
- 前記第2のソーラーサブセルは、InGaP及びIn0.015GaAsで構成される、請求項19に記載の多接合ソーラーセル。
- 前記グレーディングインターレイヤーは、InGaAlAsで構成される、請求項19に記載の多接合ソーラーセル。
- 前記第3のソーラーサブセルは、In0.30GaAsで構成される、請求項19に記載の多接合ソーラーセル。
- 前記グレーディングインターレイヤーは、InxGa1-xAlAsで構成され、xは、バンドギャップが1.50eVで一定のままとなるようなものである、請求項19に記載の多接合ソーラーセル。
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US11/860,142 US20090078308A1 (en) | 2007-09-24 | 2007-09-24 | Thin Inverted Metamorphic Multijunction Solar Cells with Rigid Support |
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JP2014523128A (ja) * | 2011-07-05 | 2014-09-08 | ザ・ボーイング・カンパニー | 反転型メタモルフィック多接合(imm)太陽電池セル及び関連する製作方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060162768A1 (en) | 2002-05-21 | 2006-07-27 | Wanlass Mark W | Low bandgap, monolithic, multi-bandgap, optoelectronic devices |
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US9117966B2 (en) | 2007-09-24 | 2015-08-25 | Solaero Technologies Corp. | Inverted metamorphic multijunction solar cell with two metamorphic layers and homojunction top cell |
US20100229913A1 (en) * | 2009-01-29 | 2010-09-16 | Emcore Solar Power, Inc. | Contact Layout and String Interconnection of Inverted Metamorphic Multijunction Solar Cells |
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US20080029151A1 (en) * | 2006-08-07 | 2008-02-07 | Mcglynn Daniel | Terrestrial solar power system using III-V semiconductor solar cells |
US20100203730A1 (en) * | 2009-02-09 | 2010-08-12 | Emcore Solar Power, Inc. | Epitaxial Lift Off in Inverted Metamorphic Multijunction Solar Cells |
US20100047959A1 (en) * | 2006-08-07 | 2010-02-25 | Emcore Solar Power, Inc. | Epitaxial Lift Off on Film Mounted Inverted Metamorphic Multijunction Solar Cells |
US20110041898A1 (en) * | 2009-08-19 | 2011-02-24 | Emcore Solar Power, Inc. | Back Metal Layers in Inverted Metamorphic Multijunction Solar Cells |
US20100093127A1 (en) * | 2006-12-27 | 2010-04-15 | Emcore Solar Power, Inc. | Inverted Metamorphic Multijunction Solar Cell Mounted on Metallized Flexible Film |
US7825328B2 (en) * | 2007-04-09 | 2010-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Nitride-based multi-junction solar cell modules and methods for making the same |
US8895342B2 (en) | 2007-09-24 | 2014-11-25 | Emcore Solar Power, Inc. | Heterojunction subcells in inverted metamorphic multijunction solar cells |
US20100233838A1 (en) * | 2009-03-10 | 2010-09-16 | Emcore Solar Power, Inc. | Mounting of Solar Cells on a Flexible Substrate |
US10381505B2 (en) | 2007-09-24 | 2019-08-13 | Solaero Technologies Corp. | Inverted metamorphic multijunction solar cells including metamorphic layers |
US20090155952A1 (en) * | 2007-12-13 | 2009-06-18 | Emcore Corporation | Exponentially Doped Layers In Inverted Metamorphic Multijunction Solar Cells |
US20090272430A1 (en) * | 2008-04-30 | 2009-11-05 | Emcore Solar Power, Inc. | Refractive Index Matching in Inverted Metamorphic Multijunction Solar Cells |
US20100012175A1 (en) | 2008-07-16 | 2010-01-21 | Emcore Solar Power, Inc. | Ohmic n-contact formed at low temperature in inverted metamorphic multijunction solar cells |
US20090272438A1 (en) * | 2008-05-05 | 2009-11-05 | Emcore Corporation | Strain Balanced Multiple Quantum Well Subcell In Inverted Metamorphic Multijunction Solar Cell |
US20100012174A1 (en) * | 2008-07-16 | 2010-01-21 | Emcore Corporation | High band gap contact layer in inverted metamorphic multijunction solar cells |
US9287438B1 (en) * | 2008-07-16 | 2016-03-15 | Solaero Technologies Corp. | Method for forming ohmic N-contacts at low temperature in inverted metamorphic multijunction solar cells with contaminant isolation |
US8263853B2 (en) * | 2008-08-07 | 2012-09-11 | Emcore Solar Power, Inc. | Wafer level interconnection of inverted metamorphic multijunction solar cells |
US7741146B2 (en) | 2008-08-12 | 2010-06-22 | Emcore Solar Power, Inc. | Demounting of inverted metamorphic multijunction solar cells |
US20100065105A1 (en) * | 2008-09-12 | 2010-03-18 | Francois Andre Koran | Thin Film Photovoltaic Module Having a Contoured Substrate |
US8236600B2 (en) * | 2008-11-10 | 2012-08-07 | Emcore Solar Power, Inc. | Joining method for preparing an inverted metamorphic multijunction solar cell |
US20100122764A1 (en) * | 2008-11-14 | 2010-05-20 | Emcore Solar Power, Inc. | Surrogate Substrates for Inverted Metamorphic Multijunction Solar Cells |
US20100139755A1 (en) * | 2008-12-09 | 2010-06-10 | Twin Creeks Technologies, Inc. | Front connected photovoltaic assembly and associated methods |
US9018521B1 (en) | 2008-12-17 | 2015-04-28 | Solaero Technologies Corp. | Inverted metamorphic multijunction solar cell with DBR layer adjacent to the top subcell |
US10541349B1 (en) | 2008-12-17 | 2020-01-21 | Solaero Technologies Corp. | Methods of forming inverted multijunction solar cells with distributed Bragg reflector |
US7960201B2 (en) * | 2009-01-29 | 2011-06-14 | Emcore Solar Power, Inc. | String interconnection and fabrication of inverted metamorphic multijunction solar cells |
US8778199B2 (en) | 2009-02-09 | 2014-07-15 | Emoore Solar Power, Inc. | Epitaxial lift off in inverted metamorphic multijunction solar cells |
US20100206365A1 (en) * | 2009-02-19 | 2010-08-19 | Emcore Solar Power, Inc. | Inverted Metamorphic Multijunction Solar Cells on Low Density Carriers |
US20100229933A1 (en) * | 2009-03-10 | 2010-09-16 | Emcore Solar Power, Inc. | Inverted Metamorphic Multijunction Solar Cells with a Supporting Coating |
US9018519B1 (en) | 2009-03-10 | 2015-04-28 | Solaero Technologies Corp. | Inverted metamorphic multijunction solar cells having a permanent supporting substrate |
US8283558B2 (en) * | 2009-03-27 | 2012-10-09 | The Boeing Company | Solar cell assembly with combined handle substrate and bypass diode and method |
US20100282288A1 (en) * | 2009-05-06 | 2010-11-11 | Emcore Solar Power, Inc. | Solar Cell Interconnection on a Flexible Substrate |
US8263856B2 (en) * | 2009-08-07 | 2012-09-11 | Emcore Solar Power, Inc. | Inverted metamorphic multijunction solar cells with back contacts |
US20110073887A1 (en) * | 2009-09-25 | 2011-03-31 | Alliance For Sustainable Energy, Llc | Optoelectronic devices having a direct-band-gap base and an indirect-band-gap emitter |
TWI411116B (zh) * | 2009-11-17 | 2013-10-01 | Epistar Corp | 一種高效率太陽能電池 |
JP5215284B2 (ja) | 2009-12-25 | 2013-06-19 | シャープ株式会社 | 多接合型化合物半導体太陽電池 |
US8187907B1 (en) | 2010-05-07 | 2012-05-29 | Emcore Solar Power, Inc. | Solder structures for fabrication of inverted metamorphic multijunction solar cells |
US8878048B2 (en) * | 2010-05-17 | 2014-11-04 | The Boeing Company | Solar cell structure including a silicon carrier containing a by-pass diode |
CN101976690A (zh) * | 2010-08-23 | 2011-02-16 | 北京工业大学 | 一种四结半导体太阳能光伏电池芯片 |
CN101980367B (zh) * | 2010-08-23 | 2013-01-23 | 广东瑞德兴阳光伏科技有限公司 | 一种四结化合物半导体太阳能光伏电池芯片 |
CN101964398A (zh) * | 2010-10-11 | 2011-02-02 | 福建钧石能源有限公司 | 柔性薄膜太阳能电池及其制造方法 |
US9543468B2 (en) | 2010-10-12 | 2017-01-10 | Alliance For Sustainable Energy, Llc | High bandgap III-V alloys for high efficiency optoelectronics |
TWI497569B (zh) * | 2012-04-18 | 2015-08-21 | Univ Nat Central | Used in the integration of compound semiconductor components in silicon or germanium substrate crystal structure |
US10153388B1 (en) | 2013-03-15 | 2018-12-11 | Solaero Technologies Corp. | Emissivity coating for space solar cell arrays |
US9590131B2 (en) | 2013-03-27 | 2017-03-07 | Alliance For Sustainable Energy, Llc | Systems and methods for advanced ultra-high-performance InP solar cells |
US9758261B1 (en) | 2015-01-15 | 2017-09-12 | Solaero Technologies Corp. | Inverted metamorphic multijunction solar cell with lightweight laminate substrate |
US10270000B2 (en) | 2015-10-19 | 2019-04-23 | Solaero Technologies Corp. | Multijunction metamorphic solar cell assembly for space applications |
US10361330B2 (en) | 2015-10-19 | 2019-07-23 | Solaero Technologies Corp. | Multijunction solar cell assemblies for space applications |
US10403778B2 (en) * | 2015-10-19 | 2019-09-03 | Solaero Technologies Corp. | Multijunction solar cell assembly for space applications |
US9935209B2 (en) | 2016-01-28 | 2018-04-03 | Solaero Technologies Corp. | Multijunction metamorphic solar cell for space applications |
US9985161B2 (en) | 2016-08-26 | 2018-05-29 | Solaero Technologies Corp. | Multijunction metamorphic solar cell for space applications |
US10256359B2 (en) | 2015-10-19 | 2019-04-09 | Solaero Technologies Corp. | Lattice matched multijunction solar cell assemblies for space applications |
US10263134B1 (en) | 2016-05-25 | 2019-04-16 | Solaero Technologies Corp. | Multijunction solar cells having an indirect high band gap semiconductor emitter layer in the upper solar subcell |
US10636926B1 (en) | 2016-12-12 | 2020-04-28 | Solaero Technologies Corp. | Distributed BRAGG reflector structures in multijunction solar cells |
US20190181289A1 (en) | 2017-12-11 | 2019-06-13 | Solaero Technologies Corp. | Multijunction solar cells |
US11011660B1 (en) * | 2018-07-17 | 2021-05-18 | Solaero Technologies Corp. | Inverted metamorphic multijunction solar cell |
CN110246923A (zh) * | 2019-06-29 | 2019-09-17 | 深圳黑晶光电科技有限公司 | 一种串联型钙钛矿/同质结硅叠层太阳能电池及其制备方法 |
CN112885921B (zh) * | 2021-01-14 | 2022-10-25 | 常州信息职业技术学院 | 一种GaInP/GaAs/AlGaSb三结级联太阳电池及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6293981A (ja) * | 1985-10-18 | 1987-04-30 | Sharp Corp | 薄型半導体装置の製造法 |
JPS62291183A (ja) * | 1986-06-11 | 1987-12-17 | Nippon Telegr & Teleph Corp <Ntt> | 多接合半導体光電変換素子の製造方法 |
JPH10256661A (ja) * | 1997-03-11 | 1998-09-25 | Nichia Chem Ind Ltd | 窒化物半導体素子及びその製造方法 |
JP2004327889A (ja) * | 2003-04-28 | 2004-11-18 | Sharp Corp | 化合物太陽電池およびその製造方法 |
JP2006032784A (ja) * | 2004-07-20 | 2006-02-02 | Sharp Corp | 半導体装置の製造方法、半導体装置 |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1863099A (en) * | 1929-10-30 | 1932-06-14 | Trans Lux Daylight Picture | Projection system and projection lens system therefor |
US2878076A (en) * | 1950-04-28 | 1959-03-17 | Houdry Process Corp | Transportation of fluent solid particles |
US4338480A (en) * | 1980-12-29 | 1982-07-06 | Varian Associates, Inc. | Stacked multijunction photovoltaic converters |
US4612408A (en) * | 1984-10-22 | 1986-09-16 | Sera Solar Corporation | Electrically isolated semiconductor integrated photodiode circuits and method |
US5053083A (en) * | 1989-05-08 | 1991-10-01 | The Board Of Trustees Of The Leland Stanford Junior University | Bilevel contact solar cells |
US5019177A (en) * | 1989-11-03 | 1991-05-28 | The United States Of America As Represented By The United States Department Of Energy | Monolithic tandem solar cell |
US5322572A (en) * | 1989-11-03 | 1994-06-21 | The United States Of America As Represented By The United States Department Of Energy | Monolithic tandem solar cell |
US5280748A (en) * | 1992-02-24 | 1994-01-25 | W. R. Grace & Co.-Conn. | Cook/chill tank |
US5376185A (en) * | 1993-05-12 | 1994-12-27 | Midwest Research Institute | Single-junction solar cells with the optimum band gap for terrestrial concentrator applications |
US6281426B1 (en) * | 1997-10-01 | 2001-08-28 | Midwest Research Institute | Multi-junction, monolithic solar cell using low-band-gap materials lattice matched to GaAs or Ge |
US5944913A (en) * | 1997-11-26 | 1999-08-31 | Sandia Corporation | High-efficiency solar cell and method for fabrication |
US6239354B1 (en) * | 1998-10-09 | 2001-05-29 | Midwest Research Institute | Electrical isolation of component cells in monolithically interconnected modules |
US6300557B1 (en) * | 1998-10-09 | 2001-10-09 | Midwest Research Institute | Low-bandgap double-heterostructure InAsP/GaInAs photovoltaic converters |
JP3657143B2 (ja) * | 1999-04-27 | 2005-06-08 | シャープ株式会社 | 太陽電池及びその製造方法 |
US6252287B1 (en) * | 1999-05-19 | 2001-06-26 | Sandia Corporation | InGaAsN/GaAs heterojunction for multi-junction solar cells |
US6340788B1 (en) * | 1999-12-02 | 2002-01-22 | Hughes Electronics Corporation | Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications |
US6614371B2 (en) * | 2001-07-19 | 2003-09-02 | Broadcom Corporation | Synchronous data serialization circuit |
US6660928B1 (en) * | 2002-04-02 | 2003-12-09 | Essential Research, Inc. | Multi-junction photovoltaic cell |
US8067687B2 (en) * | 2002-05-21 | 2011-11-29 | Alliance For Sustainable Energy, Llc | High-efficiency, monolithic, multi-bandgap, tandem photovoltaic energy converters |
US6951819B2 (en) * | 2002-12-05 | 2005-10-04 | Blue Photonics, Inc. | High efficiency, monolithic multijunction solar cells containing lattice-mismatched materials and methods of forming same |
WO2005015638A1 (en) * | 2003-07-22 | 2005-02-17 | Akzo Nobel N.V. | Process for manufacturing a solar cell foil using a temporary substrate |
US20050211291A1 (en) * | 2004-03-23 | 2005-09-29 | The Boeing Company | Solar cell assembly |
US8227689B2 (en) * | 2004-06-15 | 2012-07-24 | The Boeing Company | Solar cells having a transparent composition-graded buffer layer |
WO2006015185A2 (en) * | 2004-07-30 | 2006-02-09 | Aonex Technologies, Inc. | GaInP/GaAs/Si TRIPLE JUNCTION SOLAR CELL ENABLED BY WAFER BONDING AND LAYER TRANSFER |
US7846759B2 (en) * | 2004-10-21 | 2010-12-07 | Aonex Technologies, Inc. | Multi-junction solar cells and methods of making same using layer transfer and bonding techniques |
FR2878076B1 (fr) * | 2004-11-17 | 2007-02-23 | St Microelectronics Sa | Amincissement d'une plaquette semiconductrice |
JP2006163842A (ja) * | 2004-12-07 | 2006-06-22 | Canon Inc | 検索システム、情報処理装置及びその制御方法、プログラム |
US10374120B2 (en) * | 2005-02-18 | 2019-08-06 | Koninklijke Philips N.V. | High efficiency solar cells utilizing wafer bonding and layer transfer to integrate non-lattice matched materials |
US7166520B1 (en) * | 2005-08-08 | 2007-01-23 | Silicon Genesis Corporation | Thin handle substrate method and structure for fabricating devices using one or more films provided by a layer transfer process |
US8637759B2 (en) * | 2005-12-16 | 2014-01-28 | The Boeing Company | Notch filter for triple junction solar cells |
US8536445B2 (en) * | 2006-06-02 | 2013-09-17 | Emcore Solar Power, Inc. | Inverted metamorphic multijunction solar cells |
-
2007
- 2007-09-24 US US11/860,142 patent/US20090078308A1/en not_active Abandoned
-
2008
- 2008-07-25 TW TW097128491A patent/TW200917512A/zh unknown
- 2008-07-25 EP EP08013466A patent/EP2040309A3/en not_active Withdrawn
- 2008-08-11 CN CN200810133368XA patent/CN101399296B/zh active Active
- 2008-09-24 JP JP2008244568A patent/JP2009076921A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6293981A (ja) * | 1985-10-18 | 1987-04-30 | Sharp Corp | 薄型半導体装置の製造法 |
JPS62291183A (ja) * | 1986-06-11 | 1987-12-17 | Nippon Telegr & Teleph Corp <Ntt> | 多接合半導体光電変換素子の製造方法 |
JPH10256661A (ja) * | 1997-03-11 | 1998-09-25 | Nichia Chem Ind Ltd | 窒化物半導体素子及びその製造方法 |
JP2004327889A (ja) * | 2003-04-28 | 2004-11-18 | Sharp Corp | 化合物太陽電池およびその製造方法 |
JP2006032784A (ja) * | 2004-07-20 | 2006-02-02 | Sharp Corp | 半導体装置の製造方法、半導体装置 |
Non-Patent Citations (1)
Title |
---|
JPN6009048726; M.W.Wanlass et al.: 'LATTICE-MISMATCHED APPROACHES FOR HIGH-PERFORMANCE, III-V PHOTOVOLTAIC ENERGY CONVERTERS' Conf. Rec. IEEE Photovoltaic Spec. Conf. Vol.31, 2005, p.530-535, IEEE * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010283208A (ja) * | 2009-06-05 | 2010-12-16 | Univ Of Fukui | タンデム太陽電池及びその生産方法 |
JP2014512699A (ja) * | 2011-04-29 | 2014-05-22 | アンバーウェーブ, インコーポレイテッド | 薄膜はんだ接合 |
JP2014523128A (ja) * | 2011-07-05 | 2014-09-08 | ザ・ボーイング・カンパニー | 反転型メタモルフィック多接合(imm)太陽電池セル及び関連する製作方法 |
JP2015050367A (ja) * | 2013-09-03 | 2015-03-16 | 日本電信電話株式会社 | 太陽電池 |
Also Published As
Publication number | Publication date |
---|---|
CN101399296A (zh) | 2009-04-01 |
TW200917512A (en) | 2009-04-16 |
US20090078308A1 (en) | 2009-03-26 |
EP2040309A3 (en) | 2010-02-24 |
EP2040309A2 (en) | 2009-03-25 |
CN101399296B (zh) | 2012-02-08 |
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