JP2009038274A5 - - Google Patents
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- Publication number
- JP2009038274A5 JP2009038274A5 JP2007202680A JP2007202680A JP2009038274A5 JP 2009038274 A5 JP2009038274 A5 JP 2009038274A5 JP 2007202680 A JP2007202680 A JP 2007202680A JP 2007202680 A JP2007202680 A JP 2007202680A JP 2009038274 A5 JP2009038274 A5 JP 2009038274A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- titanium layer
- substrate
- piezoelectric
- piezoelectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 11
- 229910052719 titanium Inorganic materials 0.000 claims 11
- 239000010936 titanium Substances 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 7
- 238000000059 patterning Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007202680A JP2009038274A (ja) | 2007-08-03 | 2007-08-03 | 圧電素子およびその製造方法、アクチュエータ、並びに、液体噴射ヘッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007202680A JP2009038274A (ja) | 2007-08-03 | 2007-08-03 | 圧電素子およびその製造方法、アクチュエータ、並びに、液体噴射ヘッド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009038274A JP2009038274A (ja) | 2009-02-19 |
| JP2009038274A5 true JP2009038274A5 (enExample) | 2010-08-12 |
Family
ID=40439908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007202680A Withdrawn JP2009038274A (ja) | 2007-08-03 | 2007-08-03 | 圧電素子およびその製造方法、アクチュエータ、並びに、液体噴射ヘッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2009038274A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5812243B2 (ja) * | 2010-12-09 | 2015-11-11 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子、超音波デバイス及びｉｒセンサー |
| WO2025071476A1 (en) * | 2023-09-26 | 2025-04-03 | Agency For Science, Technology And Research | Stacked arrangement, micro-electromechanical device and methods of forming the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4088817B2 (ja) * | 2001-02-09 | 2008-05-21 | セイコーエプソン株式会社 | 圧電体薄膜素子の製造方法、これを用いたインクジェットヘッド |
| JP2003298736A (ja) * | 2002-03-29 | 2003-10-17 | Tamura Electric Works Ltd | 電話装置管理システム、サーバ装置、電話装置及びプログラム |
| JP4737375B2 (ja) * | 2004-03-11 | 2011-07-27 | セイコーエプソン株式会社 | アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射装置の製造方法 |
| JP2006245248A (ja) * | 2005-03-02 | 2006-09-14 | Seiko Epson Corp | 圧電素子及びその製造方法、液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
| JP2007173605A (ja) * | 2005-12-22 | 2007-07-05 | Seiko Epson Corp | 圧電素子の製造方法及び液体噴射ヘッドの製造方法 |
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2007
- 2007-08-03 JP JP2007202680A patent/JP2009038274A/ja not_active Withdrawn