JP2009037966A - 走査電子顕微鏡 - Google Patents
走査電子顕微鏡 Download PDFInfo
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- JP2009037966A JP2009037966A JP2007203142A JP2007203142A JP2009037966A JP 2009037966 A JP2009037966 A JP 2009037966A JP 2007203142 A JP2007203142 A JP 2007203142A JP 2007203142 A JP2007203142 A JP 2007203142A JP 2009037966 A JP2009037966 A JP 2009037966A
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Abstract
【解決手段】本発明は、電子ビームが通過するインナーパイプ内部を真空とし、試料室との間に設けた対物絞りにより低真空観察が可能な走査電子顕微鏡において、対物絞りと試料との間にさらに第二の対物絞りを設けた2段対物絞りユニットをインナーパイプの端に設ける。また、2段対物絞りユニットを設けたインナーパイプと、対物絞りのみを設けた対物絞りユニットを設けたインナーパイプとを交換可能とする。
【選択図】図2
Description
Claims (2)
- 電子ビームが通過するインナーパイプ内部を真空とし、試料室との間に設けた対物絞りにより低真空観察が可能な走査電子顕微鏡において、
前記対物絞りと前記試料との間にさらに第二の対物絞りを設けた2段対物絞りユニットを前記インナーパイプの端に設けたことを特徴とする走査電子顕微鏡。 - 請求項1記載の走査電子顕微鏡において、
前記2段対物絞りユニットを設けたインナーパイプと、前記対物絞りのみを設けた対物絞りユニットを設けたインナーパイプとを交換可能としたことを特徴とする走査電子顕微鏡。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2007203142A JP5065796B2 (ja) | 2007-08-03 | 2007-08-03 | 走査電子顕微鏡 |
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JP2007203142A JP5065796B2 (ja) | 2007-08-03 | 2007-08-03 | 走査電子顕微鏡 |
Publications (2)
Publication Number | Publication Date |
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JP2009037966A true JP2009037966A (ja) | 2009-02-19 |
JP5065796B2 JP5065796B2 (ja) | 2012-11-07 |
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JP2007203142A Expired - Fee Related JP5065796B2 (ja) | 2007-08-03 | 2007-08-03 | 走査電子顕微鏡 |
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JP (1) | JP5065796B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013027448A1 (ja) * | 2011-08-22 | 2013-02-28 | 株式会社日立ハイテクノロジーズ | 電子銃および荷電粒子線装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51110964A (ja) * | 1975-03-26 | 1976-09-30 | Hitachi Ltd | Sosagatadenshikenbikyo |
JPH09320504A (ja) * | 1996-05-30 | 1997-12-12 | Jeol Ltd | 低真空走査電子顕微鏡 |
JP2000048749A (ja) * | 1998-07-30 | 2000-02-18 | Jeol Ltd | 走査電子顕微鏡および電子ビームの軸合わせ方法 |
JP2006260878A (ja) * | 2005-03-16 | 2006-09-28 | Hitachi High-Technologies Corp | 低真空走査電子顕微鏡 |
JP2007305499A (ja) * | 2006-05-15 | 2007-11-22 | Hitachi High-Technologies Corp | 差動排気走査形電子顕微鏡 |
-
2007
- 2007-08-03 JP JP2007203142A patent/JP5065796B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51110964A (ja) * | 1975-03-26 | 1976-09-30 | Hitachi Ltd | Sosagatadenshikenbikyo |
JPH09320504A (ja) * | 1996-05-30 | 1997-12-12 | Jeol Ltd | 低真空走査電子顕微鏡 |
JP2000048749A (ja) * | 1998-07-30 | 2000-02-18 | Jeol Ltd | 走査電子顕微鏡および電子ビームの軸合わせ方法 |
JP2006260878A (ja) * | 2005-03-16 | 2006-09-28 | Hitachi High-Technologies Corp | 低真空走査電子顕微鏡 |
JP2007305499A (ja) * | 2006-05-15 | 2007-11-22 | Hitachi High-Technologies Corp | 差動排気走査形電子顕微鏡 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013027448A1 (ja) * | 2011-08-22 | 2013-02-28 | 株式会社日立ハイテクノロジーズ | 電子銃および荷電粒子線装置 |
JP2013045525A (ja) * | 2011-08-22 | 2013-03-04 | Hitachi High-Technologies Corp | 電子銃および荷電粒子線装置 |
US9293293B2 (en) | 2011-08-22 | 2016-03-22 | Hitachi High-Technologies Corporation | Electron gun and charged particle beam device having an aperture with flare-suppressing coating |
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JP5065796B2 (ja) | 2012-11-07 |
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