JP2009037269A5 - - Google Patents
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- Publication number
- JP2009037269A5 JP2009037269A5 JP2008296858A JP2008296858A JP2009037269A5 JP 2009037269 A5 JP2009037269 A5 JP 2009037269A5 JP 2008296858 A JP2008296858 A JP 2008296858A JP 2008296858 A JP2008296858 A JP 2008296858A JP 2009037269 A5 JP2009037269 A5 JP 2009037269A5
- Authority
- JP
- Japan
- Prior art keywords
- tray
- pellicle
- storage container
- lid
- reinforcing plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003860 storage Methods 0.000 claims description 44
- 230000003014 reinforcing Effects 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 22
- 229920005989 resin Polymers 0.000 claims description 22
- 239000011347 resin Substances 0.000 claims description 22
- 238000007666 vacuum forming Methods 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 claims description 9
- PPBRXRYQALVLMV-UHFFFAOYSA-N styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 8
- NLHHRLWOUZZQLW-UHFFFAOYSA-N acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 claims description 4
- 229920000178 Acrylic resin Polymers 0.000 claims description 3
- 239000004925 Acrylic resin Substances 0.000 claims description 3
- 229920001225 Polyester resin Polymers 0.000 claims description 3
- 150000001336 alkenes Chemical class 0.000 claims description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 claims description 3
- 239000004645 polyester resin Substances 0.000 claims description 3
- 229920005990 polystyrene resin Polymers 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 description 19
- 230000001070 adhesive Effects 0.000 description 19
- 210000003660 Reticulum Anatomy 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 7
- 230000001681 protective Effects 0.000 description 6
- 230000002787 reinforcement Effects 0.000 description 6
- 238000009434 installation Methods 0.000 description 5
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 4
- -1 polyethylene terephthalate Polymers 0.000 description 4
- 210000000614 Ribs Anatomy 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000001746 injection moulding Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004642 transportation engineering Methods 0.000 description 2
- 240000004282 Grewia occidentalis Species 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 239000004698 Polyethylene (PE) Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000001771 impaired Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000001131 transforming Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008296858A JP4493711B2 (ja) | 2008-11-20 | 2008-11-20 | 大型ペリクル収納容器及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008296858A JP4493711B2 (ja) | 2008-11-20 | 2008-11-20 | 大型ペリクル収納容器及びその製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003283891A Division JP4236535B2 (ja) | 2003-07-31 | 2003-07-31 | 大型ペリクル収納容器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009216369A Division JP4776721B2 (ja) | 2009-09-18 | 2009-09-18 | 大型ペリクル収納容器及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009037269A JP2009037269A (ja) | 2009-02-19 |
| JP2009037269A5 true JP2009037269A5 (de) | 2009-04-02 |
| JP4493711B2 JP4493711B2 (ja) | 2010-06-30 |
Family
ID=40439144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008296858A Expired - Lifetime JP4493711B2 (ja) | 2008-11-20 | 2008-11-20 | 大型ペリクル収納容器及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4493711B2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5271763B2 (ja) * | 2009-03-18 | 2013-08-21 | 旭化成イーマテリアルズ株式会社 | ペリクル収納容器 |
| JP5528190B2 (ja) * | 2010-04-23 | 2014-06-25 | 信越化学工業株式会社 | ペリクル収納容器 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62200639U (de) * | 1986-06-10 | 1987-12-21 | ||
| JP2000173887A (ja) * | 1998-12-02 | 2000-06-23 | Asahi Kasei Denshi Kk | ペリクル収納ケース |
-
2008
- 2008-11-20 JP JP2008296858A patent/JP4493711B2/ja not_active Expired - Lifetime
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