JP2008544852A5 - - Google Patents

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Publication number
JP2008544852A5
JP2008544852A5 JP2008519700A JP2008519700A JP2008544852A5 JP 2008544852 A5 JP2008544852 A5 JP 2008544852A5 JP 2008519700 A JP2008519700 A JP 2008519700A JP 2008519700 A JP2008519700 A JP 2008519700A JP 2008544852 A5 JP2008544852 A5 JP 2008544852A5
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JP
Japan
Prior art keywords
region
fluid ejector
wetting layer
forming
orifice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008519700A
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English (en)
Japanese (ja)
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JP2008544852A (ja
JP5241491B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2006/026023 external-priority patent/WO2007005857A1/en
Publication of JP2008544852A publication Critical patent/JP2008544852A/ja
Publication of JP2008544852A5 publication Critical patent/JP2008544852A5/ja
Application granted granted Critical
Publication of JP5241491B2 publication Critical patent/JP5241491B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008519700A 2005-07-01 2006-06-30 流体エゼクター上の非湿性コーティング Active JP5241491B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US69603505P 2005-07-01 2005-07-01
US60/696,035 2005-07-01
PCT/US2006/026023 WO2007005857A1 (en) 2005-07-01 2006-06-30 Non-wetting coating on a fluid ejector

Publications (3)

Publication Number Publication Date
JP2008544852A JP2008544852A (ja) 2008-12-11
JP2008544852A5 true JP2008544852A5 (https=) 2009-07-16
JP5241491B2 JP5241491B2 (ja) 2013-07-17

Family

ID=37055980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008519700A Active JP5241491B2 (ja) 2005-07-01 2006-06-30 流体エゼクター上の非湿性コーティング

Country Status (7)

Country Link
US (2) US8523322B2 (https=)
EP (1) EP1910085B1 (https=)
JP (1) JP5241491B2 (https=)
KR (1) KR20080027296A (https=)
CN (1) CN101272915B (https=)
TW (2) TWI379771B (https=)
WO (1) WO2007005857A1 (https=)

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JP6972697B2 (ja) * 2017-06-22 2021-11-24 セイコーエプソン株式会社 ノズルプレート、液体噴射ヘッド、及び、液体噴射装置
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WO2021108421A1 (en) 2019-11-25 2021-06-03 Aita Bio Inc. Micropump and method of fabricating the same
CN114368222A (zh) * 2022-01-21 2022-04-19 武汉敏捷微电子有限公司 一种微流体器件及其制作方法
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