JP2008529792A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2008529792A5 JP2008529792A5 JP2007556304A JP2007556304A JP2008529792A5 JP 2008529792 A5 JP2008529792 A5 JP 2008529792A5 JP 2007556304 A JP2007556304 A JP 2007556304A JP 2007556304 A JP2007556304 A JP 2007556304A JP 2008529792 A5 JP2008529792 A5 JP 2008529792A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- gas
- permeable layer
- gas permeable
- getter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 33
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 10
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 238000004587 chromatography analysis Methods 0.000 claims 7
- 239000000956 alloy Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052723 transition metal Inorganic materials 0.000 claims 2
- 150000003624 transition metals Chemical class 0.000 claims 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 239000006227 byproduct Substances 0.000 claims 1
- 230000003197 catalytic effect Effects 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052735 hafnium Inorganic materials 0.000 claims 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 239000011135 tin Substances 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 1
- 229910052727 yttrium Inorganic materials 0.000 claims 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
- 230000007547 defect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US65417005P | 2005-02-17 | 2005-02-17 | |
| US60/654,170 | 2005-02-17 | ||
| PCT/US2006/005544 WO2006089068A2 (en) | 2005-02-17 | 2006-02-16 | Flexible multi-layered getter |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012219516A Division JP5272104B2 (ja) | 2005-02-17 | 2012-10-01 | 弾力性多層ゲッター |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008529792A JP2008529792A (ja) | 2008-08-07 |
| JP2008529792A5 true JP2008529792A5 (enExample) | 2014-08-07 |
| JP5624263B2 JP5624263B2 (ja) | 2014-11-12 |
Family
ID=36917060
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007556304A Active JP5624263B2 (ja) | 2005-02-17 | 2006-02-16 | 弾力性多層ゲッター |
| JP2012219516A Active JP5272104B2 (ja) | 2005-02-17 | 2012-10-01 | 弾力性多層ゲッター |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012219516A Active JP5272104B2 (ja) | 2005-02-17 | 2012-10-01 | 弾力性多層ゲッター |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US8986569B2 (enExample) |
| EP (1) | EP1851050B1 (enExample) |
| JP (2) | JP5624263B2 (enExample) |
| KR (3) | KR20100005255U (enExample) |
| CN (2) | CN101163586A (enExample) |
| AT (1) | ATE518804T1 (enExample) |
| RU (1) | RU2007134254A (enExample) |
| TW (1) | TWI386317B (enExample) |
| WO (1) | WO2006089068A2 (enExample) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4453546B2 (ja) * | 2004-12-22 | 2010-04-21 | 日産自動車株式会社 | パッケージ素子 |
| JP2008062213A (ja) * | 2006-09-11 | 2008-03-21 | Okuno Chem Ind Co Ltd | 水素透過膜構造体の製造方法 |
| JP5628519B2 (ja) * | 2006-09-15 | 2014-11-19 | サエス ゲッターズ ソシエタ ペルアチオニＳａｅｓ Ｇｅｔｔｅｒｓ Ｓ．Ｐ．Ａ． | 金属ゲッターシステム |
| JP2009522104A (ja) * | 2006-12-15 | 2009-06-11 | ビ−エイイ− システムズ パブリック リミテッド カンパニ− | 薄膜ゲッタ装置に関する改善 |
| ITMI20090410A1 (it) * | 2009-03-18 | 2010-09-19 | Getters Spa | Leghe getter non evaporabili adatte particolarmente per l'assorbimento di idrogeno |
| ITMI20090917A1 (it) * | 2009-05-25 | 2010-11-26 | Getters Spa | Getter composito multistrato |
| WO2011026214A1 (en) * | 2009-09-01 | 2011-03-10 | The Governors Of The University Of Alberta | Kinetic stabilization of magnesium hydride |
| FR2950876B1 (fr) | 2009-10-07 | 2012-02-10 | Commissariat Energie Atomique | Procede de traitement d'un materiau getter et procede d'encapsulation d'un tel materiau getter |
| US9045335B2 (en) | 2010-08-18 | 2015-06-02 | The Governors Of The University Of Alberta | Kinetic stabilization of magnesium hydride |
| IT1402887B1 (it) * | 2010-11-23 | 2013-09-27 | Getters Spa | Getter composito multistrato migliorato |
| WO2012081004A1 (en) | 2010-12-15 | 2012-06-21 | Konstantin Chuntonov | Sorption apparatuses for the production of pure gases |
| FR2971614A1 (fr) * | 2011-02-11 | 2012-08-17 | Tn Int | Dispositif de piegeage de gaz inflammables produits par radiolyse ou thermolyse dans une enceinte de confinement |
| DE102011079776A1 (de) * | 2011-07-26 | 2013-01-31 | Osram Ag | Gasentladungslampe und Verfahren zum Herstellen einer Gasentladungslampe |
| CN103182297B (zh) * | 2011-12-28 | 2015-09-30 | 北京有色金属研究总院 | 一种高吸气性能薄膜吸气剂及制备方法 |
| ITMI20120144A1 (it) * | 2012-02-03 | 2013-08-04 | Getters Spa | Miglioramenti per tubi ricevitori di collettori solari |
| WO2013191656A1 (en) | 2012-06-20 | 2013-12-27 | Agency For Science, Technology And Research | A layer arrangement and a wafer level package comprising the layer arrangement |
| TW201436855A (zh) * | 2012-12-21 | 2014-10-01 | Tesa Se | 從平面結構物移除滲透物的方法 |
| ITMI20131921A1 (it) * | 2013-11-20 | 2015-05-21 | Getters Spa | Leghe getter non evaporabili particolarmente adatte per l'assorbimento di idrogeno e monossido di carbonio |
| KR101752669B1 (ko) * | 2013-12-10 | 2017-06-30 | 삼성전자주식회사 | 진공단열재 및 이를 포함하는 냉장고 |
| US20150373868A1 (en) * | 2014-06-18 | 2015-12-24 | Emerson Network Power, Energy Systems, North America, Inc. | Cabinets and methods for removing undesirable gas in cabinets |
| US20160108301A1 (en) * | 2014-10-16 | 2016-04-21 | Hudson Gencheng Shou | High-efficiency coolant for electronic systems |
| CA2978752C (en) * | 2015-03-05 | 2019-11-12 | Chicago Bridge & Iron Company | Connection for refrigerated gas storage tank |
| KR102042894B1 (ko) * | 2017-08-28 | 2019-11-08 | 한양대학교 에리카산학협력단 | 박막 게터, 및 그 제조 방법 |
| US11524271B2 (en) | 2017-08-28 | 2022-12-13 | Industry-University Cooperation Foundation Hanyang University Erica Campus | Thin film getter and manufacturing method therefor |
| JP7657458B2 (ja) * | 2018-08-31 | 2025-04-07 | テックスタイル マテリアルズ インコーポレイテッド | パッシブな熱及び水の管理のための多機能システム |
| AU2019397742B2 (en) * | 2018-12-11 | 2023-03-09 | Clean Planet Inc. | Heat utilization system, and heat generating device |
| CN110699649A (zh) * | 2019-11-10 | 2020-01-17 | 中电国基南方集团有限公司 | 一种用于电子封装的吸氢材料及其制备方法 |
| CN110863174A (zh) * | 2019-11-20 | 2020-03-06 | 有研工程技术研究院有限公司 | 一种无需激活的钛基吸氢材料及其制备方法 |
| US12005391B2 (en) | 2019-12-11 | 2024-06-11 | Brookhaven Science Associates, Llc | Method for trapping noble gas atoms and molecules in oxide nanocages |
| CN114011374B (zh) * | 2021-11-03 | 2023-07-14 | 安徽有研吸气材料有限公司 | 一种快速吸气的非蒸散型钛钼吸气剂 |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2773561A (en) * | 1955-05-02 | 1956-12-11 | Atlantic Refining Co | Silver-palladium film for separation and purification of hydrogen |
| US3285687A (en) * | 1963-12-30 | 1966-11-15 | Gen Electric | Gettering apparatus |
| NL7315641A (nl) * | 1973-11-15 | 1975-05-20 | Philips Nv | Hogedrukgasontladingslamp. |
| US4468235A (en) * | 1979-02-15 | 1984-08-28 | Hill Eugene F | Hydrogen separation using coated titanium alloys |
| JPS55130801A (en) * | 1979-02-15 | 1980-10-11 | Hill Eugene Farrell | Separation of hydrogen which use coating titaniummzirconium alloy |
| EP0061655B2 (de) * | 1981-03-31 | 1990-03-28 | Hans Sauer | Von der Umgebung abgedichtete Schaltkammer für elektrische Kontakte |
| DE3225751C1 (de) * | 1982-07-09 | 1984-01-26 | Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe | Vorrichtung zum Abtrennen der gasfoermigen Wasserstoffisotope |
| US4548258A (en) * | 1984-07-02 | 1985-10-22 | Whirlpool Corporation | Method and means for inhibiting corrosion in a heat pipe |
| DE3604416A1 (de) * | 1986-02-12 | 1987-08-13 | Grs Ges Fuer Reaktorsicherheit | Vorrichtung zur beseitigung von wasserstoff |
| GB8623296D0 (en) * | 1986-09-27 | 1986-10-29 | Emi Plc Thorn | Hydrogen getter |
| JP3359050B2 (ja) * | 1992-05-07 | 2002-12-24 | 日本重化学工業株式会社 | ストリップゲッターの製造方法 |
| DE4344061C1 (de) * | 1993-12-23 | 1995-03-30 | Mtu Muenchen Gmbh | Bauteil mit Schutzanordnung gegen Alitieren oder Chromieren beim Gasdiffusionsbeschichten und Verfahren zu seiner Herstellung |
| US5654084A (en) * | 1994-07-22 | 1997-08-05 | Martin Marietta Energy Systems, Inc. | Protective coatings for sensitive materials |
| US5895519A (en) * | 1996-03-28 | 1999-04-20 | Saes Pure Gas, Inc. | Method and apparatus for purifying hydrogen gas |
| IT1283484B1 (it) | 1996-07-23 | 1998-04-21 | Getters Spa | Metodo per la produzione di strati sottili supportati di materiale getter non-evaporabile e dispositivi getter cosi' prodotti |
| US6673400B1 (en) | 1996-10-15 | 2004-01-06 | Texas Instruments Incorporated | Hydrogen gettering system |
| FR2760089B1 (fr) | 1997-02-26 | 1999-04-30 | Org Europeene De Rech | Agencement et procede pour ameliorer le vide dans un systeme a vide tres pousse |
| US5861665A (en) | 1997-05-13 | 1999-01-19 | Lucent Technologies Inc. | Structure for absorption of hydrogen in a package |
| JP3439629B2 (ja) * | 1997-05-19 | 2003-08-25 | 象印マホービン株式会社 | 低温活性ゲッター及びその製造方法 |
| DE19756620A1 (de) * | 1997-12-19 | 1999-06-24 | Bosch Gmbh Robert | Verfahren zur Herstellung eines Absorbermaterials |
| US6512256B1 (en) * | 1998-11-20 | 2003-01-28 | Symetrix Corporation | Integrated circuit having self-aligned hydrogen barrier layer and method for fabricating same |
| US6110808A (en) | 1998-12-04 | 2000-08-29 | Trw Inc. | Hydrogen getter for integrated microelectronic assembly |
| JP3518855B2 (ja) * | 1999-02-26 | 2004-04-12 | キヤノン株式会社 | ゲッター、ゲッターを有する気密容器および画像形成装置、ゲッターの製造方法 |
| DE20023858U1 (de) * | 1999-06-02 | 2007-03-01 | Saes Getters S.P.A., Lainate | Unabhängig von Aktivierungsbehandlungen zur Wasserstoffsorption befähigte Verbundmaterialien |
| US6521192B1 (en) * | 1999-08-06 | 2003-02-18 | Saes Pure Gas, Inc. | Rejuvenable ambient temperature purifier |
| US6428612B1 (en) * | 2001-04-19 | 2002-08-06 | Hughes Electronics Corporation | Hydrogen getter package assembly |
| US6608319B2 (en) * | 2001-06-08 | 2003-08-19 | Adrian Joseph | Flexible amorphous composition for high level radiation and environmental protection |
| US6423575B1 (en) * | 2001-07-27 | 2002-07-23 | Dean Tran | Hydrogen gettering structure including silver-doped palladium layer to increase hydrogen gettering of module component and semiconductor device module having such structure, and methods of fabrication |
| US20030062610A1 (en) | 2001-09-28 | 2003-04-03 | Kovacs Alan L. | Multilayer thin film hydrogen getter |
| JP3855946B2 (ja) * | 2003-03-07 | 2006-12-13 | セイコーエプソン株式会社 | 水素透過フィルターの製造方法 |
| ITMI20031178A1 (it) * | 2003-06-11 | 2004-12-12 | Getters Spa | Depositi multistrato getter non evaporabili ottenuti per |
| US20050238803A1 (en) * | 2003-11-12 | 2005-10-27 | Tremel James D | Method for adhering getter material to a surface for use in electronic devices |
| US7147908B2 (en) * | 2004-10-13 | 2006-12-12 | Hewlett-Packard Development Company, L.P. | Semiconductor package with getter formed over an irregular structure |
| US8609994B2 (en) * | 2008-09-24 | 2013-12-17 | Alliance For Sustainable Energy, Llc | Thin film electronic devices with conductive and transparent gas and moisture permeation barriers |
-
2006
- 2006-02-16 KR KR2020107000002U patent/KR20100005255U/ko active Pending
- 2006-02-16 EP EP06735283A patent/EP1851050B1/en active Active
- 2006-02-16 KR KR1020107006646A patent/KR101017608B1/ko active Active
- 2006-02-16 WO PCT/US2006/005544 patent/WO2006089068A2/en not_active Ceased
- 2006-02-16 KR KR1020077021366A patent/KR20070120499A/ko not_active Ceased
- 2006-02-16 CN CNA2006800126342A patent/CN101163586A/zh active Pending
- 2006-02-16 AT AT06735283T patent/ATE518804T1/de not_active IP Right Cessation
- 2006-02-16 JP JP2007556304A patent/JP5624263B2/ja active Active
- 2006-02-16 RU RU2007134254/02A patent/RU2007134254A/ru not_active Application Discontinuation
- 2006-02-16 CN CN201410270156.1A patent/CN104118164B/zh active Active
- 2006-02-16 US US11/884,640 patent/US8986569B2/en active Active
- 2006-02-17 TW TW095105389A patent/TWI386317B/zh active
-
2012
- 2012-10-01 JP JP2012219516A patent/JP5272104B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2008529792A5 (enExample) | ||
| KR880008444A (ko) | 반도체 장치 | |
| JP2010513942A5 (enExample) | ||
| WO2009092506A3 (en) | A method of fabricating a composite structure with a stable bonding layer of oxide | |
| DK1994202T4 (da) | Beskyttelsescoating til sølv | |
| JP2007503530A5 (enExample) | ||
| JP2013501378A5 (enExample) | ||
| CA2717167A1 (en) | Reflective article | |
| MY152025A (en) | Ag-au-pd ternary alloy bonding wire | |
| JP2013080887A5 (enExample) | ||
| JP2006297588A5 (enExample) | ||
| EP1674663A3 (en) | Thermal barrier coating material, thermal barrier member, and member coated with thermal barrier and method for manufacturing the same | |
| KR960031401A (ko) | 접합체, 내식성 접합 재료 및 접합체의 제조 방법 | |
| RU2008122337A (ru) | Двухслойная система тепловой защиты с фазой пирохлора | |
| WO2006086244A3 (en) | Carbonaceous composite heat spreader and associated methods | |
| JP2004535928A (ja) | 分離拡散金属膜とその製造方法 | |
| JP2000516666A (ja) | 高融点金属用酸化保護層 | |
| JP2010503992A5 (enExample) | ||
| JPWO2022244243A5 (enExample) | ||
| JPWO2022244242A5 (enExample) | ||
| CN101680863A (zh) | 氢传感器 | |
| ATE383904T1 (de) | Selektive, wasserstoffdurchlässige membranverbundstrukturen und brenngasprozessor unter verwendung derselben | |
| US11524271B2 (en) | Thin film getter and manufacturing method therefor | |
| DK1060140T3 (da) | Termisk højbelastbar, varmereflekterende belægning | |
| FR2522543A1 (fr) | Procede d'application d'un revetement en materiau composite sur des pieces |