JP2008528853A - 旋回並進サイクル式マルチシャフト真空ポンプ - Google Patents

旋回並進サイクル式マルチシャフト真空ポンプ Download PDF

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Publication number
JP2008528853A
JP2008528853A JP2007551707A JP2007551707A JP2008528853A JP 2008528853 A JP2008528853 A JP 2008528853A JP 2007551707 A JP2007551707 A JP 2007551707A JP 2007551707 A JP2007551707 A JP 2007551707A JP 2008528853 A JP2008528853 A JP 2008528853A
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JP
Japan
Prior art keywords
disk
vacuum pump
movable disk
fixed
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007551707A
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English (en)
Japanese (ja)
Inventor
モーリス エリー
Original Assignee
ヴェ.ジェ.ベ.(ヴュリーズ ジェスティオン ブルヴェ)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヴェ.ジェ.ベ.(ヴュリーズ ジェスティオン ブルヴェ) filed Critical ヴェ.ジェ.ベ.(ヴュリーズ ジェスティオン ブルヴェ)
Publication of JP2008528853A publication Critical patent/JP2008528853A/ja
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008Hermetic pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0057Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions for eccentric movement
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Surgical Instruments (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2007551707A 2005-01-21 2006-01-20 旋回並進サイクル式マルチシャフト真空ポンプ Pending JP2008528853A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0500663A FR2881189A1 (fr) 2005-01-21 2005-01-21 Pompe a vide a cycle de translation circulaire a plusieurs arbres
PCT/FR2006/000132 WO2006077328A1 (fr) 2005-01-21 2006-01-20 Pompe a vide a cycle de translation circulaire a plusieurs arbres

Publications (1)

Publication Number Publication Date
JP2008528853A true JP2008528853A (ja) 2008-07-31

Family

ID=34953994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007551707A Pending JP2008528853A (ja) 2005-01-21 2006-01-20 旋回並進サイクル式マルチシャフト真空ポンプ

Country Status (12)

Country Link
US (1) US20080193311A1 (zh)
EP (1) EP1838965B1 (zh)
JP (1) JP2008528853A (zh)
KR (1) KR20070103446A (zh)
CN (1) CN101124408B (zh)
AT (1) ATE417203T1 (zh)
CA (1) CA2595360A1 (zh)
DE (1) DE602006004165D1 (zh)
DK (1) DK1838965T3 (zh)
FR (1) FR2881189A1 (zh)
RU (1) RU2388938C2 (zh)
WO (1) WO2006077328A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011085132A (ja) * 2009-09-25 2011-04-28 Varian Inc 分離障壁を有するスクロール・ポンプ

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10683865B2 (en) 2006-02-14 2020-06-16 Air Squared, Inc. Scroll type device incorporating spinning or co-rotating scrolls
US10221852B2 (en) * 2006-02-14 2019-03-05 Air Squared, Inc. Multi stage scroll vacuum pumps and related scroll devices
US11047389B2 (en) 2010-04-16 2021-06-29 Air Squared, Inc. Multi-stage scroll vacuum pumps and related scroll devices
US20130232975A1 (en) 2011-08-09 2013-09-12 Robert W. Saffer Compact energy cycle construction utilizing some combination of a scroll type expander, pump, and compressor for operating according to a rankine, an organic rankine, heat pump, or combined organic rankine and heat pump cycle
US9605674B2 (en) * 2013-12-26 2017-03-28 Agilent Technologies, Inc. Vacuum scroll pump having pressure-balanced orbiting plate scroll
US10508543B2 (en) 2015-05-07 2019-12-17 Air Squared, Inc. Scroll device having a pressure plate
CN105604985B (zh) * 2016-02-18 2018-07-03 上海交通大学 屏蔽式核主泵冷却系统的温度分布测定方法
US10865793B2 (en) 2016-12-06 2020-12-15 Air Squared, Inc. Scroll type device having liquid cooling through idler shafts
JP7042364B2 (ja) 2018-05-04 2022-03-25 エア・スクエアード・インコーポレイテッド 固定スクロール及び旋回スクロールのコンプレッサー、エキスパンダー、又は真空ポンプの液体冷却
US11067080B2 (en) 2018-07-17 2021-07-20 Air Squared, Inc. Low cost scroll compressor or vacuum pump
US20200025199A1 (en) 2018-07-17 2020-01-23 Air Squared, Inc. Dual drive co-rotating spinning scroll compressor or expander
US11530703B2 (en) 2018-07-18 2022-12-20 Air Squared, Inc. Orbiting scroll device lubrication
US11473572B2 (en) 2019-06-25 2022-10-18 Air Squared, Inc. Aftercooler for cooling compressed working fluid
US11898557B2 (en) 2020-11-30 2024-02-13 Air Squared, Inc. Liquid cooling of a scroll type compressor with liquid supply through the crankshaft
US11885328B2 (en) 2021-07-19 2024-01-30 Air Squared, Inc. Scroll device with an integrated cooling loop

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3802809A (en) * 1971-06-01 1974-04-09 P Vulliez Completely dry and fluid-tight vacuum pumps
JPS61126390A (ja) * 1984-11-22 1986-06-13 Shin Meiwa Ind Co Ltd オイルフリ−スクロ−ル形流体機械
JPH0953589A (ja) * 1995-08-18 1997-02-25 Tokico Ltd スクロール式流体機械
JPH11247770A (ja) * 1998-03-03 1999-09-14 Tokico Ltd スクロール式流体機械

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2753317B2 (ja) * 1989-03-20 1998-05-20 株式会社日立製作所 スクロール流体機械
JPH05126139A (ja) * 1991-10-31 1993-05-21 Ntn Corp 旋回部材のスラスト支持装置
FR2731051B1 (fr) * 1995-02-24 1997-04-30 Mecanique De Normandie Soc Pompe a vide a cycle de translation circulaire
JP3781460B2 (ja) * 1995-03-17 2006-05-31 株式会社デンソー スクロール型圧縮機
JP3158938B2 (ja) * 1995-03-20 2001-04-23 株式会社日立製作所 スクロール流体機械及びこれを用いた圧縮気体製造装置
JPH0953577A (ja) * 1995-08-17 1997-02-25 Mitsubishi Heavy Ind Ltd スクロール型流体機械
JP4026099B2 (ja) * 1998-10-15 2007-12-26 アネスト岩田株式会社 スクロール流体機械
US6266995B1 (en) * 1999-05-20 2001-07-31 Respiratory Management Services, Inc. Portable medical gas system tester
FR2798093B1 (fr) * 1999-09-03 2001-11-30 Sidel Sa Machine rotative d'etirage-soufflage comportant une commande magnetique de la tige d'etirage
US6268995B1 (en) * 2000-06-08 2001-07-31 Jennings Technology Double-bellows vacuum variable capacitor
JP3935006B2 (ja) * 2001-12-03 2007-06-20 松下エコシステムズ株式会社 発電装置
JP2003227476A (ja) * 2002-02-05 2003-08-15 Matsushita Electric Ind Co Ltd 空気供給装置
JP4053416B2 (ja) * 2002-12-16 2008-02-27 松下エコシステムズ株式会社 スクロール圧縮装置とその製造方法
US6764288B1 (en) * 2003-11-06 2004-07-20 Varian, Inc. Two stage scroll vacuum pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3802809A (en) * 1971-06-01 1974-04-09 P Vulliez Completely dry and fluid-tight vacuum pumps
JPS61126390A (ja) * 1984-11-22 1986-06-13 Shin Meiwa Ind Co Ltd オイルフリ−スクロ−ル形流体機械
JPH0953589A (ja) * 1995-08-18 1997-02-25 Tokico Ltd スクロール式流体機械
JPH11247770A (ja) * 1998-03-03 1999-09-14 Tokico Ltd スクロール式流体機械

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011085132A (ja) * 2009-09-25 2011-04-28 Varian Inc 分離障壁を有するスクロール・ポンプ

Also Published As

Publication number Publication date
RU2007131433A (ru) 2009-02-27
EP1838965B1 (fr) 2008-12-10
EP1838965A1 (fr) 2007-10-03
DK1838965T3 (da) 2009-04-06
CN101124408A (zh) 2008-02-13
ATE417203T1 (de) 2008-12-15
WO2006077328A8 (fr) 2007-08-30
US20080193311A1 (en) 2008-08-14
RU2388938C2 (ru) 2010-05-10
DE602006004165D1 (de) 2009-01-22
FR2881189A1 (fr) 2006-07-28
CA2595360A1 (fr) 2006-07-27
KR20070103446A (ko) 2007-10-23
CN101124408B (zh) 2011-03-09
WO2006077328A1 (fr) 2006-07-27

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