JP2008511177A - 半導体検査用のファイバ増幅器ベースの光源 - Google Patents
半導体検査用のファイバ増幅器ベースの光源 Download PDFInfo
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- JP2008511177A JP2008511177A JP2007529941A JP2007529941A JP2008511177A JP 2008511177 A JP2008511177 A JP 2008511177A JP 2007529941 A JP2007529941 A JP 2007529941A JP 2007529941 A JP2007529941 A JP 2007529941A JP 2008511177 A JP2008511177 A JP 2008511177A
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Abstract
Description
Claims (29)
- 試料検査システムに用いられる照射器であって、
光エネルギーを受け取って該光エネルギーを試料に伝送するように構成された少なくとも1つの光ファイバを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記試料が半導体ウエハを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記試料がフォトマスクを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記光エネルギーがレーザ光エネルギーを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記少なくとも1つの光ファイバから光エネルギーを受け取って増幅し該光エネルギーを前記試料に伝送するように構成された増幅器をさらに備えることを特徴とする照射器。 - 試料検査システムに用いられる照射器であって、
少なくとも1つのレーザ発振器と、
少なくとも1つのファイバレーザ増幅器と、
を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器が固体レーザを備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器が半導体ダイオードレーザであることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器がQスイッチのパルス列を発生させるように構成されていることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器がモード同期のパルス列を発生させるように構成されていることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器が、
半導体物質と、
カーボンナノチューブと、
音響光学変調器と、
電気光学変調器と、
電気スイッチと、
を備える群から選ばれた1つで製造される飽和性吸収体を有する装置を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記ファイバレーザ増幅器が端部を備え、前記ファイバレーザ増幅器の前記端部がテーパ状であることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記ファイバレーザ増幅器がフォトニック結晶ファイバを備えることを特徴とする照射器。 - 請求項13に記載の照射器であって、
前記フォトニック結晶ファイバがマルチコアファイバであることを特徴とする照射器。 - 請求項6に記載の照射器であって、
各ファイバレーザ増幅器が、修正屈折率プロファイルを有する光ファイバを備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記ファイバレーザ増幅器が、イッテルビウムと、エルビウムと、ツリウムと、ネオジムと、プラセオジムと、ホルミウムとを備える群から選ばれた少なくとも1つを備えるランタニド元素でドープされていることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記少なくとも1つのファイバレーザ増幅器が、同等の出力周波数を有する複数のファイバレーザ増幅器を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記少なくとも1つのファイバレーザ増幅器が、異なる出力周波数を有する複数のファイバレーザ増幅器を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器がファイバレーザ発振器を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記少なくとも1つのファイバレーザ発振器が、同等の発振波長を有する複数のレーザ発振器を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
少なくとも1つの周波数変換媒体をさらに備えることを特徴とする照射器。 - 試料を検査する方法であって、
少なくとも1つのレーザ発振器をポンプすることによってコヒーレント光を発生させ、
少なくとも1つのファイバレーザ増幅器で前記コヒーレント光を増幅する方法。 - 請求項22に記載の方法であって、
さらに、前記ファイバレーザ増幅器の光の偏波を、実質的に増幅と同時に制御する方法。 - 請求項22に記載の方法であって、
さらに、ポンプ後に各レーザにモード同期を行って少なくとも1つのパルス出力ビームを生成する方法。 - 請求項22に記載の方法であって、
さらに、ポンプ後に各レーザにQスイッチを行って少なくとも1つのパルス出力ビームを生成する方法。 - 請求項22に記載の方法であって、前記コヒーレント光がある帯域幅を有し、前記方法が、
さらに、前記コヒーレント光の前記帯域幅を広げてスーパーコンティニウムを生成する方法。 - 請求項26に記載の方法であって、
さらに、ポンプ後に各レーザにモード同期を行って少なくとも1つのパルス出力ビームを生成する方法。 - 請求項26に記載の方法であって、
さらに、ポンプ後に各レーザにQスイッチを行って少なくとも1つのパルス出力ビームを生成する方法。 - 請求項26に記載の方法であって、
さらに、前記コヒーレント光の一部に対してコヒーレント光の周波数を変換する方法。
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US11/056,855 US7924892B2 (en) | 2004-08-25 | 2005-02-11 | Fiber amplifier based light source for semiconductor inspection |
US11/056,855 | 2005-02-11 | ||
PCT/US2005/028993 WO2006023448A2 (en) | 2004-08-25 | 2005-08-16 | Fiber amplified based light source for semiconductor inspection |
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JP2021057613A (ja) * | 2015-03-12 | 2021-04-08 | ノースロップ グラマン システムズ コーポレーション | コヒーレントな結合レーザ・パワーの全ファイバ・デリバリのためのアーキテクチャ |
JP2023027275A (ja) * | 2014-12-18 | 2023-03-01 | エヌケイティー フォトニクス アクティーゼルスカブ | フォトニック結晶ファイバ、その作製方法、及びスーパーコンティニューム光源 |
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EP2369695A3 (en) | 2012-02-08 |
EP2369695B1 (en) | 2013-11-13 |
EP1782510A2 (en) | 2007-05-09 |
WO2006023448A3 (en) | 2006-10-19 |
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JP5255838B2 (ja) | 2013-08-07 |
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