JP2008511177A - 半導体検査用のファイバ増幅器ベースの光源 - Google Patents
半導体検査用のファイバ増幅器ベースの光源 Download PDFInfo
- Publication number
- JP2008511177A JP2008511177A JP2007529941A JP2007529941A JP2008511177A JP 2008511177 A JP2008511177 A JP 2008511177A JP 2007529941 A JP2007529941 A JP 2007529941A JP 2007529941 A JP2007529941 A JP 2007529941A JP 2008511177 A JP2008511177 A JP 2008511177A
- Authority
- JP
- Japan
- Prior art keywords
- irradiator
- fiber
- laser
- fiber laser
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06754—Fibre amplifiers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02295—Microstructured optical fibre
- G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
- G02B6/02342—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
- G02B6/02347—Longitudinal structures arranged to form a regular periodic lattice, e.g. triangular, square, honeycomb unit cell repeated throughout cladding
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02295—Microstructured optical fibre
- G02B6/02314—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes
- G02B6/02342—Plurality of longitudinal structures extending along optical fibre axis, e.g. holes characterised by cladding features, i.e. light confining region
- G02B6/02366—Single ring of structures, e.g. "air clad"
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0057—Temporal shaping, e.g. pulse compression, frequency chirping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06729—Peculiar transverse fibre profile
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06729—Peculiar transverse fibre profile
- H01S3/06741—Photonic crystal fibre, i.e. the fibre having a photonic bandgap
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
- H01S3/06745—Tapering of the fibre, core or active region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/067—Fibre lasers
- H01S3/06791—Fibre ring lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/094003—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
- H01S3/094007—Cladding pumping, i.e. pump light propagating in a clad surrounding the active core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/094003—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light the pumped medium being a fibre
- H01S3/094019—Side pumped fibre, whereby pump light is coupled laterally into the fibre via an optical component like a prism, or a grating, or via V-groove coupling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
- H01S3/09415—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode the pumping beam being parallel to the lasing mode of the pumped medium, e.g. end-pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1106—Mode locking
- H01S3/1112—Passive mode locking
- H01S3/1115—Passive mode locking using intracavity saturable absorbers
- H01S3/1118—Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Lasers (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
Claims (29)
- 試料検査システムに用いられる照射器であって、
光エネルギーを受け取って該光エネルギーを試料に伝送するように構成された少なくとも1つの光ファイバを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記試料が半導体ウエハを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記試料がフォトマスクを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記光エネルギーがレーザ光エネルギーを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記少なくとも1つの光ファイバから光エネルギーを受け取って増幅し該光エネルギーを前記試料に伝送するように構成された増幅器をさらに備えることを特徴とする照射器。 - 試料検査システムに用いられる照射器であって、
少なくとも1つのレーザ発振器と、
少なくとも1つのファイバレーザ増幅器と、
を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器が固体レーザを備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器が半導体ダイオードレーザであることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器がQスイッチのパルス列を発生させるように構成されていることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器がモード同期のパルス列を発生させるように構成されていることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器が、
半導体物質と、
カーボンナノチューブと、
音響光学変調器と、
電気光学変調器と、
電気スイッチと、
を備える群から選ばれた1つで製造される飽和性吸収体を有する装置を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記ファイバレーザ増幅器が端部を備え、前記ファイバレーザ増幅器の前記端部がテーパ状であることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記ファイバレーザ増幅器がフォトニック結晶ファイバを備えることを特徴とする照射器。 - 請求項13に記載の照射器であって、
前記フォトニック結晶ファイバがマルチコアファイバであることを特徴とする照射器。 - 請求項6に記載の照射器であって、
各ファイバレーザ増幅器が、修正屈折率プロファイルを有する光ファイバを備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記ファイバレーザ増幅器が、イッテルビウムと、エルビウムと、ツリウムと、ネオジムと、プラセオジムと、ホルミウムとを備える群から選ばれた少なくとも1つを備えるランタニド元素でドープされていることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記少なくとも1つのファイバレーザ増幅器が、同等の出力周波数を有する複数のファイバレーザ増幅器を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記少なくとも1つのファイバレーザ増幅器が、異なる出力周波数を有する複数のファイバレーザ増幅器を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記レーザ発振器がファイバレーザ発振器を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
前記少なくとも1つのファイバレーザ発振器が、同等の発振波長を有する複数のレーザ発振器を備えることを特徴とする照射器。 - 請求項6に記載の照射器であって、
少なくとも1つの周波数変換媒体をさらに備えることを特徴とする照射器。 - 試料を検査する方法であって、
少なくとも1つのレーザ発振器をポンプすることによってコヒーレント光を発生させ、
少なくとも1つのファイバレーザ増幅器で前記コヒーレント光を増幅する方法。 - 請求項22に記載の方法であって、
さらに、前記ファイバレーザ増幅器の光の偏波を、実質的に増幅と同時に制御する方法。 - 請求項22に記載の方法であって、
さらに、ポンプ後に各レーザにモード同期を行って少なくとも1つのパルス出力ビームを生成する方法。 - 請求項22に記載の方法であって、
さらに、ポンプ後に各レーザにQスイッチを行って少なくとも1つのパルス出力ビームを生成する方法。 - 請求項22に記載の方法であって、前記コヒーレント光がある帯域幅を有し、前記方法が、
さらに、前記コヒーレント光の前記帯域幅を広げてスーパーコンティニウムを生成する方法。 - 請求項26に記載の方法であって、
さらに、ポンプ後に各レーザにモード同期を行って少なくとも1つのパルス出力ビームを生成する方法。 - 請求項26に記載の方法であって、
さらに、ポンプ後に各レーザにQスイッチを行って少なくとも1つのパルス出力ビームを生成する方法。 - 請求項26に記載の方法であって、
さらに、前記コヒーレント光の一部に対してコヒーレント光の周波数を変換する方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US60454004P | 2004-08-25 | 2004-08-25 | |
US60/604,540 | 2004-08-25 | ||
US11/056,855 US7924892B2 (en) | 2004-08-25 | 2005-02-11 | Fiber amplifier based light source for semiconductor inspection |
US11/056,855 | 2005-02-11 | ||
PCT/US2005/028993 WO2006023448A2 (en) | 2004-08-25 | 2005-08-16 | Fiber amplified based light source for semiconductor inspection |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008511177A true JP2008511177A (ja) | 2008-04-10 |
JP5255838B2 JP5255838B2 (ja) | 2013-08-07 |
Family
ID=35968096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007529941A Expired - Fee Related JP5255838B2 (ja) | 2004-08-25 | 2005-08-16 | 半導体検査用のファイバ増幅器ベースの光源 |
Country Status (3)
Country | Link |
---|---|
EP (2) | EP2369695B1 (ja) |
JP (1) | JP5255838B2 (ja) |
WO (1) | WO2006023448A2 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009534850A (ja) * | 2006-04-19 | 2009-09-24 | モビアス フォトニクス, インク. | 1つの主発振器に結合した複数の同期増幅器を有するレーザー装置 |
WO2011152261A1 (ja) * | 2010-06-03 | 2011-12-08 | 株式会社日立ハイテクノロジーズ | 欠陥検査方法およびその装置 |
JP2015220376A (ja) * | 2014-05-19 | 2015-12-07 | 日本電信電話株式会社 | レーザー発振器 |
JP2015220375A (ja) * | 2014-05-19 | 2015-12-07 | 日本電信電話株式会社 | レーザー発振器 |
JP2017505456A (ja) * | 2014-01-07 | 2017-02-16 | ソーラボス インコーポレイテッド | 非線形イメージング用途のための可変中赤外ファイバ・レーザ |
JP2017201697A (ja) * | 2011-06-13 | 2017-11-09 | ケーエルエー−テンカー コーポレイション | レーザパルスマルチプライヤを用いた半導体検査および計測システム |
JP2021057613A (ja) * | 2015-03-12 | 2021-04-08 | ノースロップ グラマン システムズ コーポレーション | コヒーレントな結合レーザ・パワーの全ファイバ・デリバリのためのアーキテクチャ |
JP2023027275A (ja) * | 2014-12-18 | 2023-03-01 | エヌケイティー フォトニクス アクティーゼルスカブ | フォトニック結晶ファイバ、その作製方法、及びスーパーコンティニューム光源 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8199398B2 (en) * | 2008-02-07 | 2012-06-12 | Imra America, Inc. | High power parallel fiber arrays |
WO2009133734A1 (ja) * | 2008-05-02 | 2009-11-05 | オリンパス株式会社 | 光学的検査装置、電磁波検出方法、電磁波検出装置、生態観察方法、顕微鏡、および、内視鏡並びに光断層画像生成装置 |
WO2013160770A2 (en) * | 2012-04-27 | 2013-10-31 | Biolitec Pharma Marketing Ltd. | Fiber laser system for medical applications |
CN106644391B (zh) * | 2016-09-19 | 2019-03-29 | 核工业理化工程研究院 | 一种激光振放链故障专家诊断系统及诊断方法 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02222187A (ja) * | 1989-02-22 | 1990-09-04 | Hitachi Cable Ltd | 多波長ガラス導波路レーザーアレイ |
JPH04127591A (ja) * | 1989-12-26 | 1992-04-28 | United Technol Corp <Utc> | 光ファイバレーザ装置 |
JPH04267578A (ja) * | 1991-02-22 | 1992-09-24 | Toshiba Corp | パルスレーザ装置 |
JPH08327554A (ja) * | 1995-03-31 | 1996-12-13 | Lintec Corp | 照明装置 |
US5867305A (en) * | 1996-01-19 | 1999-02-02 | Sdl, Inc. | Optical amplifier with high energy levels systems providing high peak powers |
JP2000200747A (ja) * | 1998-03-11 | 2000-07-18 | Nikon Corp | レ―ザ装置並びにこのレ―ザ装置を用いた露光装置及び方法 |
WO2001002904A1 (fr) * | 1999-06-30 | 2001-01-11 | The Furukawa Electric Co., Ltd. | Fibre optique |
JP2002006165A (ja) * | 2000-06-07 | 2002-01-09 | Lucent Technol Inc | マルチモード光ファイバを含む装置 |
JP2002517794A (ja) * | 1998-06-09 | 2002-06-18 | クリスタル フィブレ アクティーゼルスカブ | 光バンドギャップファイバ |
JP2002359420A (ja) * | 2001-03-16 | 2002-12-13 | Alcatel | 二重クラッドフォトニック光ファイバ |
US20030008448A1 (en) * | 1999-05-27 | 2003-01-09 | Kafka James D. | Remote UV laser system and methods of use |
WO2004059806A2 (en) * | 2002-12-20 | 2004-07-15 | Alnaire Laboratories Corporation | Optical pulse lasers |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3646462A (en) * | 1969-11-14 | 1972-02-29 | American Optical Corp | Fiber for distortion-free propagation |
US5694408A (en) * | 1995-06-07 | 1997-12-02 | Mcdonnell Douglas Corporation | Fiber optic laser system and associated lasing method |
US5880877A (en) * | 1997-01-28 | 1999-03-09 | Imra America, Inc. | Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier |
US5832006A (en) * | 1997-02-13 | 1998-11-03 | Mcdonnell Douglas Corporation | Phased array Raman laser amplifier and operating method therefor |
US6061170A (en) * | 1998-03-16 | 2000-05-09 | Mcdonnell Douglas Corporation | Dual frequency laser amplifier array and operating method therefor |
US6567605B1 (en) * | 2000-08-25 | 2003-05-20 | The Boeing Company | Fiber optic projection device |
JP2003008115A (ja) * | 2001-06-26 | 2003-01-10 | Mitsubishi Cable Ind Ltd | 光増幅装置 |
-
2005
- 2005-08-16 JP JP2007529941A patent/JP5255838B2/ja not_active Expired - Fee Related
- 2005-08-16 EP EP11001760.5A patent/EP2369695B1/en active Active
- 2005-08-16 EP EP05813080A patent/EP1782510A4/en not_active Withdrawn
- 2005-08-16 WO PCT/US2005/028993 patent/WO2006023448A2/en active Application Filing
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02222187A (ja) * | 1989-02-22 | 1990-09-04 | Hitachi Cable Ltd | 多波長ガラス導波路レーザーアレイ |
JPH04127591A (ja) * | 1989-12-26 | 1992-04-28 | United Technol Corp <Utc> | 光ファイバレーザ装置 |
JPH04267578A (ja) * | 1991-02-22 | 1992-09-24 | Toshiba Corp | パルスレーザ装置 |
JPH08327554A (ja) * | 1995-03-31 | 1996-12-13 | Lintec Corp | 照明装置 |
US5867305A (en) * | 1996-01-19 | 1999-02-02 | Sdl, Inc. | Optical amplifier with high energy levels systems providing high peak powers |
JP2000503476A (ja) * | 1996-01-19 | 2000-03-21 | エスディーエル インク. | 高エネルギーレベルを有する高ピークパワーを供給する光増幅器 |
JP2000200747A (ja) * | 1998-03-11 | 2000-07-18 | Nikon Corp | レ―ザ装置並びにこのレ―ザ装置を用いた露光装置及び方法 |
JP2002517794A (ja) * | 1998-06-09 | 2002-06-18 | クリスタル フィブレ アクティーゼルスカブ | 光バンドギャップファイバ |
US20030008448A1 (en) * | 1999-05-27 | 2003-01-09 | Kafka James D. | Remote UV laser system and methods of use |
WO2001002904A1 (fr) * | 1999-06-30 | 2001-01-11 | The Furukawa Electric Co., Ltd. | Fibre optique |
JP2002006165A (ja) * | 2000-06-07 | 2002-01-09 | Lucent Technol Inc | マルチモード光ファイバを含む装置 |
JP2002359420A (ja) * | 2001-03-16 | 2002-12-13 | Alcatel | 二重クラッドフォトニック光ファイバ |
WO2004059806A2 (en) * | 2002-12-20 | 2004-07-15 | Alnaire Laboratories Corporation | Optical pulse lasers |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009534850A (ja) * | 2006-04-19 | 2009-09-24 | モビアス フォトニクス, インク. | 1つの主発振器に結合した複数の同期増幅器を有するレーザー装置 |
WO2011152261A1 (ja) * | 2010-06-03 | 2011-12-08 | 株式会社日立ハイテクノロジーズ | 欠陥検査方法およびその装置 |
JP2011252841A (ja) * | 2010-06-03 | 2011-12-15 | Hitachi High-Technologies Corp | 欠陥検査方法およびその装置 |
US8711347B2 (en) | 2010-06-03 | 2014-04-29 | Hitachi High-Technologies Corporation | Defect inspection method and device therefor |
JP2017201697A (ja) * | 2011-06-13 | 2017-11-09 | ケーエルエー−テンカー コーポレイション | レーザパルスマルチプライヤを用いた半導体検査および計測システム |
JP2017505456A (ja) * | 2014-01-07 | 2017-02-16 | ソーラボス インコーポレイテッド | 非線形イメージング用途のための可変中赤外ファイバ・レーザ |
JP2015220376A (ja) * | 2014-05-19 | 2015-12-07 | 日本電信電話株式会社 | レーザー発振器 |
JP2015220375A (ja) * | 2014-05-19 | 2015-12-07 | 日本電信電話株式会社 | レーザー発振器 |
JP2023027275A (ja) * | 2014-12-18 | 2023-03-01 | エヌケイティー フォトニクス アクティーゼルスカブ | フォトニック結晶ファイバ、その作製方法、及びスーパーコンティニューム光源 |
JP2021057613A (ja) * | 2015-03-12 | 2021-04-08 | ノースロップ グラマン システムズ コーポレーション | コヒーレントな結合レーザ・パワーの全ファイバ・デリバリのためのアーキテクチャ |
Also Published As
Publication number | Publication date |
---|---|
WO2006023448A3 (en) | 2006-10-19 |
EP1782510A2 (en) | 2007-05-09 |
EP2369695B1 (en) | 2013-11-13 |
WO2006023448A2 (en) | 2006-03-02 |
EP2369695A2 (en) | 2011-09-28 |
EP2369695A3 (en) | 2012-02-08 |
JP5255838B2 (ja) | 2013-08-07 |
EP1782510A4 (en) | 2010-04-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5255838B2 (ja) | 半導体検査用のファイバ増幅器ベースの光源 | |
US7924892B2 (en) | Fiber amplifier based light source for semiconductor inspection | |
JP5649548B2 (ja) | サブ213nm波長を生成するためのCLBOにおける非臨界位相整合 | |
US8248688B2 (en) | Tandem photonic amplifier | |
JP4921977B2 (ja) | 広域スペクトル光源と広域スペクトル光の生成方法 | |
US9209589B2 (en) | Reducing the spectral bandwidth of lasers | |
US7733922B1 (en) | Method and apparatus for fast pulse harmonic fiber laser | |
JP5851517B2 (ja) | ショートパルスファイバーレーザー | |
JP5203063B2 (ja) | 多光子励起測定装置 | |
US20170179675A1 (en) | Homogeneous Laser Light Source for Area Processing Applications | |
JP2020127000A (ja) | 圧縮パルス幅を有する受動qスイッチ型固体レーザ | |
JP2004063924A (ja) | レーザアニール方法及び装置 | |
WO2009119585A1 (ja) | パルス光源装置 | |
JP2010139604A (ja) | 電磁波発生・伝送装置 | |
US9306366B2 (en) | Optical amplifier arrangement | |
JP2006171624A (ja) | テラヘルツ波発生システム | |
JP2012204372A (ja) | 短パルス光源およびレーザ走査顕微鏡システム | |
JP2021132070A (ja) | パルスレーザ光生成伝送装置およびレーザ加工装置 | |
JP2009015040A (ja) | レーザ光第2高調波発生装置 | |
KR100525566B1 (ko) | 유도 브릴루앙 산란과 2차 라만-스토크스파 발생을 이용한라만 레이저 발진 장치 및 방법 | |
Bartulevičius | Compact high pulse energy fiber laser systems for industrial and scientific applications | |
TW202420667A (zh) | 一種飛秒雷射應用處理系統及其方法 | |
Hale | Novel Solid State Lasers Based on Volume Bragg Gratings | |
CN116171515A (zh) | 短脉冲激光系统 | |
JPH1051058A (ja) | パルスレーザ光の増幅装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080707 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110613 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110621 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110920 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111108 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120203 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120210 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120308 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120315 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120327 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20121023 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130222 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20130301 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130402 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130422 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5255838 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160426 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |