JP5255838B2 - 半導体検査用のファイバ増幅器ベースの光源 - Google Patents
半導体検査用のファイバ増幅器ベースの光源 Download PDFInfo
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- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
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- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
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- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
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- H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
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- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
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- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
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- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
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- H01S3/094019—Side pumped fibre, whereby pump light is coupled laterally into the fibre via an optical component like a prism, or a grating, or via V-groove coupling
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- H01S3/1112—Passive mode locking
- H01S3/1115—Passive mode locking using intracavity saturable absorbers
- H01S3/1118—Semiconductor saturable absorbers, e.g. semiconductor saturable absorber mirrors [SESAMs]; Solid-state saturable absorbers, e.g. carbon nanotube [CNT] based
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Description
Claims (15)
- 試料検査システムに用いられる照射器であって、
コヒーレント光を生成するように構成された1つのレーザ発振器を含むレーザ装置と、
前記レーザ発信器からのコヒーレント光を受け取って増幅し、増幅したコヒーレント光を検査する試料に向けてそれぞれ伝送するように構成され、それぞれが偏波保持フォトニック結晶ファイバを有する複数の並列なファイバレーザ増幅器と、を備え、
前記レーザ装置は、モード同期を用いて、約5ないし100MHzを超える範囲の繰り返しレートで所望の特性を有するエネルギーバーストを選択的に発生させる、
照射器。 - 請求項1に記載の照射器であって、
前記レーザ発振器が、
半導体物質と、
カーボンナノチューブと、
音響光学変調器と、
電気光学変調器と、
電気スイッチと、
を備える群から選ばれた1つで製造される飽和性吸収体を有する装置を備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記各ファイバレーザ増幅器が端部を備え、前記各ファイバレーザ増幅器の前記端部がテーパ状であることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記フォトニック結晶ファイバがマルチコアファイバであることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記各ファイバレーザ増幅器が、修正屈折率プロファイルを有する光ファイバを備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記各ファイバレーザ増幅器が、イッテルビウムと、エルビウムと、ツリウムと、ネオジムと、プラセオジムと、ホルミウムとを備える群から選ばれた少なくとも1つを含むランタニド元素でドープされていることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記複数のファイバレーザ増幅器が、同等の出力周波数を有することを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記複数のファイバレーザ増幅器が、異なる出力周波数を有することを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記レーザ発振器がファイバレーザ発振器をからなることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記レーザ装置が、同等の発振波長を有する複数のレーザ発振器を備えることを特徴とする照射器。 - 請求項1に記載の照射器であって、
前記コヒーレント光は帯域幅を有し、前記照射器は、前記コヒーレント光の帯域幅を広げてスーパーコンティニュウムを生成する手段をさらに備えることを特徴とする照射器。 - 試料を検査する方法であって、
レーザ装置内のレーザ発振器をポンプすることによってコヒーレント光を発生させ、
前記コヒーレント光を偏波保持フォトニック結晶ファイバを有するファイバレーザ増幅器で増幅し、
前記増幅したコヒーレント光を前記ファイバレーザ増幅器から前記試料を検査するために前記試料に伝送する、
方法であり、
前記レーザ装置は、モード同期を用いて、約5ないし100MHzを超える範囲の繰り返しレートで所望の特性を有するエネルギーバーストを選択的に発生させる、
方法。 - 請求項12に記載の方法であって、
前記ファイバレーザ増幅器の光の偏波を、実質的に増幅と同時に制御することをさらに含むことを特徴とする方法。 - 請求項12に記載の方法であって、
前記コヒーレント光がある帯域幅を有し、前記方法が、
前記コヒーレント光の前記帯域幅を広げてスーパーコンティニウムを生成することをさらに含むことを特徴とする方法。 - 請求項14に記載の方法であって、
前記コヒーレント光の一部に対してコヒーレント光の周波数を変換することをさらに含むことを特徴とする方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US60454004P | 2004-08-25 | 2004-08-25 | |
US60/604,540 | 2004-08-25 | ||
US11/056,855 US7924892B2 (en) | 2004-08-25 | 2005-02-11 | Fiber amplifier based light source for semiconductor inspection |
US11/056,855 | 2005-02-11 | ||
PCT/US2005/028993 WO2006023448A2 (en) | 2004-08-25 | 2005-08-16 | Fiber amplified based light source for semiconductor inspection |
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JP2008511177A JP2008511177A (ja) | 2008-04-10 |
JP5255838B2 true JP5255838B2 (ja) | 2013-08-07 |
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JP5538072B2 (ja) | 2010-06-03 | 2014-07-02 | 株式会社日立ハイテクノロジーズ | 欠陥検査方法およびその装置 |
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JP2017504074A (ja) * | 2014-01-07 | 2017-02-02 | ソーラボス インコーポレイテッド | 可変フェムト秒発振器を使用する調節可能中赤外スーパー・コンティニューム発生装置 |
JP6190317B2 (ja) * | 2014-05-19 | 2017-08-30 | 日本電信電話株式会社 | レーザー発振器 |
JP6190318B2 (ja) * | 2014-05-19 | 2017-08-30 | 日本電信電話株式会社 | レーザー発振器 |
KR20240064049A (ko) * | 2014-12-18 | 2024-05-10 | 엔케이티 포토닉스 에이/에스 | 광결정 섬유, 이의 제조방법 및 초연속 광원 |
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JP4232130B2 (ja) * | 1998-03-11 | 2009-03-04 | 株式会社ニコン | レーザ装置並びにこのレーザ装置を用いた光照射装置および露光方法 |
US6061170A (en) * | 1998-03-16 | 2000-05-09 | Mcdonnell Douglas Corporation | Dual frequency laser amplifier array and operating method therefor |
DE69917776D1 (de) * | 1998-06-09 | 2004-07-08 | Crystal Fibre As Birkerod | Faser mit photonischer bandlücke |
US6822978B2 (en) * | 1999-05-27 | 2004-11-23 | Spectra Physics, Inc. | Remote UV laser system and methods of use |
EP1113314A1 (en) * | 1999-06-30 | 2001-07-04 | The Furukawa Electric Co., Ltd. | Optical fiber |
JP4132581B2 (ja) * | 2000-06-07 | 2008-08-13 | ルーセント テクノロジーズ インコーポレーテッド | マルチモード光ファイバを含む装置 |
US6567605B1 (en) * | 2000-08-25 | 2003-05-20 | The Boeing Company | Fiber optic projection device |
FR2822243B1 (fr) * | 2001-03-16 | 2003-06-20 | Cit Alcatel | Fibre optique photonique a double gaine |
JP2003008115A (ja) * | 2001-06-26 | 2003-01-10 | Mitsubishi Cable Ind Ltd | 光増幅装置 |
JP4514130B2 (ja) * | 2002-12-20 | 2010-07-28 | 株式会社アルネアラボラトリ | 光パルスレーザ |
-
2005
- 2005-08-16 WO PCT/US2005/028993 patent/WO2006023448A2/en active Application Filing
- 2005-08-16 EP EP05813080A patent/EP1782510A4/en not_active Withdrawn
- 2005-08-16 JP JP2007529941A patent/JP5255838B2/ja not_active Expired - Fee Related
- 2005-08-16 EP EP11001760.5A patent/EP2369695B1/en active Active
Also Published As
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WO2006023448A2 (en) | 2006-03-02 |
EP1782510A2 (en) | 2007-05-09 |
JP2008511177A (ja) | 2008-04-10 |
EP2369695A3 (en) | 2012-02-08 |
WO2006023448A3 (en) | 2006-10-19 |
EP2369695B1 (en) | 2013-11-13 |
EP2369695A2 (en) | 2011-09-28 |
EP1782510A4 (en) | 2010-04-07 |
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