JP2008505045A5 - - Google Patents
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- Publication number
- JP2008505045A5 JP2008505045A5 JP2007519475A JP2007519475A JP2008505045A5 JP 2008505045 A5 JP2008505045 A5 JP 2008505045A5 JP 2007519475 A JP2007519475 A JP 2007519475A JP 2007519475 A JP2007519475 A JP 2007519475A JP 2008505045 A5 JP2008505045 A5 JP 2008505045A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon carbide
- preform
- porous
- carbide preform
- sic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US58424404P | 2004-06-30 | 2004-06-30 | |
| US60/584,244 | 2004-06-30 | ||
| PCT/US2005/023490 WO2006004999A1 (en) | 2004-06-30 | 2005-06-30 | A process for the manufacturing of dense silicon carbide |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008505045A JP2008505045A (ja) | 2008-02-21 |
| JP2008505045A5 true JP2008505045A5 (https=) | 2012-05-31 |
| JP5053085B2 JP5053085B2 (ja) | 2012-10-17 |
Family
ID=35094472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007519475A Expired - Fee Related JP5053085B2 (ja) | 2004-06-30 | 2005-06-30 | 高密度シリコンカーバイドの製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7799375B2 (https=) |
| EP (1) | EP1761475B1 (https=) |
| JP (1) | JP5053085B2 (https=) |
| AT (1) | ATE499333T1 (https=) |
| DE (1) | DE602005026523D1 (https=) |
| ES (1) | ES2359412T3 (https=) |
| WO (1) | WO2006004999A1 (https=) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009210266A (ja) * | 2008-02-29 | 2009-09-17 | Ibiden Co Ltd | 管状体 |
| WO2009140791A1 (en) * | 2008-05-21 | 2009-11-26 | Dalian Institute Of Chemical Physics, Chinese Academy Of Sciences | Process for producing silicon carbide |
| WO2009151994A1 (en) | 2008-06-09 | 2009-12-17 | Entegris, Inc. | A method to increase yield and reduce down time in semiconductor fabrication units by preconditioning components using sub-aperture reactive atom etch |
| KR101916492B1 (ko) | 2011-03-07 | 2018-11-07 | 엔테그리스, 아이엔씨. | 화학 및 기계적 평탄화 패드 컨디셔너 |
| US8642214B2 (en) | 2011-08-25 | 2014-02-04 | Uchicago Argonne, Llc | Silicon-carbonaceous encapsulated materials |
| RU2513497C1 (ru) * | 2012-09-04 | 2014-04-20 | Открытое Акционерное Общество "Уральский научно-исследовательский институт композиционных материалов" | Способ изготовления изделий из углерод-карбидокремниевого материала в форме оболочек |
| CN104955775B (zh) * | 2013-01-31 | 2018-06-26 | 安瀚视特控股株式会社 | 玻璃基板的制造方法 |
| WO2014150394A2 (en) | 2013-03-15 | 2014-09-25 | Rolls-Royce Corporation | Ceramic matrix composites and methods for producing ceramic matrix composites |
| US9708226B2 (en) | 2013-03-15 | 2017-07-18 | Rolls-Royce Corporation | Method for producing high strength ceramic matrix composites |
| EP2860015B1 (en) | 2013-10-10 | 2017-12-20 | Discma AG | Method of delivering a liquid volume and associated apparatus |
| WO2015143278A1 (en) | 2014-03-21 | 2015-09-24 | Entegris, Inc. | Chemical mechanical planarization pad conditioner with elongated cutting edges |
| FR3026961B1 (fr) * | 2014-10-10 | 2016-12-09 | Commissariat Energie Atomique | Dispositif de conversion catalytique presentant un temps d'activation reduit |
| CN104446656B (zh) * | 2014-12-15 | 2016-10-05 | 航天特种材料及工艺技术研究所 | 一种多孔碳材料抗氧化涂层的制备方法 |
| JP2016150873A (ja) * | 2015-02-18 | 2016-08-22 | 株式会社Ihi | セラミックス基複合材の製造方法 |
| US10227264B2 (en) | 2015-07-13 | 2019-03-12 | Rolls-Royce High Temperature Composites, Inc. | Method for making ceramic matrix composite articles |
| KR101941232B1 (ko) * | 2016-12-20 | 2019-01-22 | 주식회사 티씨케이 | 반도체 제조용 부품, 복합체 코팅층을 포함하는 반도체 제조용 부품 및 그 제조방법 |
| JP7078706B2 (ja) | 2017-07-06 | 2022-05-31 | インテグリス・インコーポレーテッド | 炭化ケイ素フィルター膜および使用方法 |
| WO2020214623A1 (en) | 2019-04-16 | 2020-10-22 | Corning Incorporated | Filled-pore decorative layer for ion exchange and automotive glass |
| CN110092381B (zh) * | 2019-05-22 | 2021-04-16 | 浙江工业大学 | 一种高纯碳化硅材料的制备方法 |
| RU2740984C1 (ru) * | 2019-10-23 | 2021-01-22 | Федеральное государственное бюджетное учреждение науки Институт физики твердого тела Российской академии наук (ИФТТ РАН) | Способ получения изделий из карбидокремниевой керамики |
| CN115894069B (zh) * | 2022-11-29 | 2023-07-14 | 厦门大学 | 一种多孔碳化硅高温隔热瓦及其制备方法 |
| CN115594514B (zh) * | 2022-11-30 | 2023-03-21 | 常熟通乐电子材料有限公司 | 一种三维SiC骨架增强SiC的高致密陶瓷及制备方法 |
| US20240275246A1 (en) * | 2023-02-13 | 2024-08-15 | Honeywell International Inc. | Thermal management in electric machines using near net shape formation of silicon carbide potting material |
| CN119390452B (zh) * | 2025-01-02 | 2025-03-28 | 中南大学 | 一种不含B的常压烧结高纯SiC及应用 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3205043A (en) * | 1962-04-04 | 1965-09-07 | Carborundum Co | Cold molded dense silicon carbide articles and method of making the same |
| FR2741063B1 (fr) * | 1995-11-14 | 1998-02-13 | Europ Propulsion | Procede pour l'introduction dans des substrats poreux d'une composition en fusion a base de silicium |
| EP0835853A1 (fr) * | 1996-10-14 | 1998-04-15 | Societe Europeenne De Propulsion | Elément de friction en matériau composite carbone/carbone-carbure de silicium et procédé pour sa fabrication |
| US5981002A (en) * | 1998-02-09 | 1999-11-09 | Textron Systems Corporation | Method for densifying the edges and surfaces of a preform using a liquid precursor |
| US6743393B1 (en) * | 1998-06-17 | 2004-06-01 | Coi Ceramics, Inc. | Method for producing ceramic matrix composites |
| US6162543A (en) * | 1998-12-11 | 2000-12-19 | Saint-Gobain Industrial Ceramics, Inc. | High purity siliconized silicon carbide having high thermal shock resistance |
| EP1219578B1 (en) * | 2000-12-27 | 2006-03-22 | Toshiba Ceramics Co., Ltd. | Silicon/silicon carbide composite and process for manufacturing the same |
| DE10143015C2 (de) * | 2001-09-03 | 2003-11-13 | Deutsch Zentr Luft & Raumfahrt | Verfahren zur Herstellung eines Verbundwerkstoffes |
| US6953605B2 (en) * | 2001-12-26 | 2005-10-11 | Messier-Bugatti | Method for densifying porous substrates by chemical vapour infiltration with preheated gas |
| US20040067316A1 (en) | 2002-10-04 | 2004-04-08 | Paul Gray | Method for processing silicon-carbide materials using organic film formers |
-
2005
- 2005-06-29 US US11/170,199 patent/US7799375B2/en not_active Expired - Fee Related
- 2005-06-30 DE DE602005026523T patent/DE602005026523D1/de not_active Expired - Lifetime
- 2005-06-30 ES ES05770502T patent/ES2359412T3/es not_active Expired - Lifetime
- 2005-06-30 WO PCT/US2005/023490 patent/WO2006004999A1/en not_active Ceased
- 2005-06-30 JP JP2007519475A patent/JP5053085B2/ja not_active Expired - Fee Related
- 2005-06-30 AT AT05770502T patent/ATE499333T1/de not_active IP Right Cessation
- 2005-06-30 EP EP05770502A patent/EP1761475B1/en not_active Expired - Lifetime
-
2010
- 2010-09-13 US US12/880,751 patent/US8142845B2/en not_active Expired - Fee Related
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