JP2008306468A5 - - Google Patents

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Publication number
JP2008306468A5
JP2008306468A5 JP2007151772A JP2007151772A JP2008306468A5 JP 2008306468 A5 JP2008306468 A5 JP 2008306468A5 JP 2007151772 A JP2007151772 A JP 2007151772A JP 2007151772 A JP2007151772 A JP 2007151772A JP 2008306468 A5 JP2008306468 A5 JP 2008306468A5
Authority
JP
Japan
Prior art keywords
vibrating
vibrating arm
bent portion
groove
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007151772A
Other languages
English (en)
Japanese (ja)
Other versions
JP4985960B2 (ja
JP2008306468A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007151772A priority Critical patent/JP4985960B2/ja
Priority claimed from JP2007151772A external-priority patent/JP4985960B2/ja
Publication of JP2008306468A publication Critical patent/JP2008306468A/ja
Publication of JP2008306468A5 publication Critical patent/JP2008306468A5/ja
Application granted granted Critical
Publication of JP4985960B2 publication Critical patent/JP4985960B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007151772A 2007-06-07 2007-06-07 振動片及び振動子 Expired - Fee Related JP4985960B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007151772A JP4985960B2 (ja) 2007-06-07 2007-06-07 振動片及び振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007151772A JP4985960B2 (ja) 2007-06-07 2007-06-07 振動片及び振動子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010144864A Division JP5057122B2 (ja) 2010-06-25 2010-06-25 圧電振動片および圧電振動子

Publications (3)

Publication Number Publication Date
JP2008306468A JP2008306468A (ja) 2008-12-18
JP2008306468A5 true JP2008306468A5 (enExample) 2010-07-08
JP4985960B2 JP4985960B2 (ja) 2012-07-25

Family

ID=40234794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007151772A Expired - Fee Related JP4985960B2 (ja) 2007-06-07 2007-06-07 振動片及び振動子

Country Status (1)

Country Link
JP (1) JP4985960B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010193133A (ja) * 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP2011082945A (ja) 2009-09-08 2011-04-21 Seiko Epson Corp 屈曲振動片、屈曲振動子、および電子デバイス
US8283988B2 (en) 2010-02-25 2012-10-09 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP5782707B2 (ja) * 2010-12-01 2015-09-24 セイコーエプソン株式会社 電子機器
JP5671821B2 (ja) * 2010-03-16 2015-02-18 セイコーエプソン株式会社 振動片及びデバイス
JP5499852B2 (ja) 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP6200636B2 (ja) * 2012-07-26 2017-09-20 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
JP2014112960A (ja) * 2014-03-13 2014-06-19 Seiko Epson Corp 振動片、振動子
US10965271B2 (en) * 2017-05-30 2021-03-30 Samsung Electro-Mechanics Co., Ltd. Acoustic resonator and method for fabricating the same
JP6750765B1 (ja) * 2018-09-21 2020-09-02 株式会社村田製作所 圧電デバイス

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149489A (en) * 1976-06-08 1977-12-12 Seiko Instr & Electronics Ltd Piezoelectric vibrator
JPS57206119A (en) * 1981-06-15 1982-12-17 Seiko Instr & Electronics Ltd Tuning fork type bent quartz oscillator
JPS5844805A (ja) * 1982-07-14 1983-03-15 Seiko Instr & Electronics Ltd 水晶振動子
JP4442521B2 (ja) * 2005-06-29 2010-03-31 セイコーエプソン株式会社 圧電振動片および圧電デバイス

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