JP4985960B2 - 振動片及び振動子 - Google Patents

振動片及び振動子 Download PDF

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Publication number
JP4985960B2
JP4985960B2 JP2007151772A JP2007151772A JP4985960B2 JP 4985960 B2 JP4985960 B2 JP 4985960B2 JP 2007151772 A JP2007151772 A JP 2007151772A JP 2007151772 A JP2007151772 A JP 2007151772A JP 4985960 B2 JP4985960 B2 JP 4985960B2
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JP
Japan
Prior art keywords
vibrating
arm
vibrating piece
groove
bent portion
Prior art date
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Expired - Fee Related
Application number
JP2007151772A
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English (en)
Japanese (ja)
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JP2008306468A (ja
JP2008306468A5 (enExample
Inventor
憲也 平沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2007151772A priority Critical patent/JP4985960B2/ja
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Publication of JP2008306468A5 publication Critical patent/JP2008306468A5/ja
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Publication of JP4985960B2 publication Critical patent/JP4985960B2/ja
Expired - Fee Related legal-status Critical Current
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2007151772A 2007-06-07 2007-06-07 振動片及び振動子 Expired - Fee Related JP4985960B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007151772A JP4985960B2 (ja) 2007-06-07 2007-06-07 振動片及び振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007151772A JP4985960B2 (ja) 2007-06-07 2007-06-07 振動片及び振動子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010144864A Division JP5057122B2 (ja) 2010-06-25 2010-06-25 圧電振動片および圧電振動子

Publications (3)

Publication Number Publication Date
JP2008306468A JP2008306468A (ja) 2008-12-18
JP2008306468A5 JP2008306468A5 (enExample) 2010-07-08
JP4985960B2 true JP4985960B2 (ja) 2012-07-25

Family

ID=40234794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007151772A Expired - Fee Related JP4985960B2 (ja) 2007-06-07 2007-06-07 振動片及び振動子

Country Status (1)

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JP (1) JP4985960B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010193133A (ja) * 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP2011082945A (ja) 2009-09-08 2011-04-21 Seiko Epson Corp 屈曲振動片、屈曲振動子、および電子デバイス
US8283988B2 (en) 2010-02-25 2012-10-09 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP5782707B2 (ja) * 2010-12-01 2015-09-24 セイコーエプソン株式会社 電子機器
JP5671821B2 (ja) * 2010-03-16 2015-02-18 セイコーエプソン株式会社 振動片及びデバイス
JP5499852B2 (ja) 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP6200636B2 (ja) * 2012-07-26 2017-09-20 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計
JP2014112960A (ja) * 2014-03-13 2014-06-19 Seiko Epson Corp 振動片、振動子
US10965271B2 (en) * 2017-05-30 2021-03-30 Samsung Electro-Mechanics Co., Ltd. Acoustic resonator and method for fabricating the same
JP6750765B1 (ja) * 2018-09-21 2020-09-02 株式会社村田製作所 圧電デバイス

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52149489A (en) * 1976-06-08 1977-12-12 Seiko Instr & Electronics Ltd Piezoelectric vibrator
JPS57206119A (en) * 1981-06-15 1982-12-17 Seiko Instr & Electronics Ltd Tuning fork type bent quartz oscillator
JPS5844805A (ja) * 1982-07-14 1983-03-15 Seiko Instr & Electronics Ltd 水晶振動子
JP4442521B2 (ja) * 2005-06-29 2010-03-31 セイコーエプソン株式会社 圧電振動片および圧電デバイス

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JP2008306468A (ja) 2008-12-18

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