JP4985960B2 - 振動片及び振動子 - Google Patents
振動片及び振動子 Download PDFInfo
- Publication number
- JP4985960B2 JP4985960B2 JP2007151772A JP2007151772A JP4985960B2 JP 4985960 B2 JP4985960 B2 JP 4985960B2 JP 2007151772 A JP2007151772 A JP 2007151772A JP 2007151772 A JP2007151772 A JP 2007151772A JP 4985960 B2 JP4985960 B2 JP 4985960B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- arm
- vibrating piece
- groove
- bent portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005284 excitation Effects 0.000 claims description 29
- 238000007789 sealing Methods 0.000 claims description 8
- 238000005452 bending Methods 0.000 description 15
- 239000000758 substrate Substances 0.000 description 14
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 238000000605 extraction Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910017401 Au—Ge Inorganic materials 0.000 description 1
- 229910015363 Au—Sn Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007151772A JP4985960B2 (ja) | 2007-06-07 | 2007-06-07 | 振動片及び振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007151772A JP4985960B2 (ja) | 2007-06-07 | 2007-06-07 | 振動片及び振動子 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010144864A Division JP5057122B2 (ja) | 2010-06-25 | 2010-06-25 | 圧電振動片および圧電振動子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008306468A JP2008306468A (ja) | 2008-12-18 |
| JP2008306468A5 JP2008306468A5 (enExample) | 2010-07-08 |
| JP4985960B2 true JP4985960B2 (ja) | 2012-07-25 |
Family
ID=40234794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007151772A Expired - Fee Related JP4985960B2 (ja) | 2007-06-07 | 2007-06-07 | 振動片及び振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4985960B2 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010193133A (ja) * | 2009-02-18 | 2010-09-02 | Epson Toyocom Corp | 屈曲振動片および屈曲振動子 |
| JP2011082945A (ja) | 2009-09-08 | 2011-04-21 | Seiko Epson Corp | 屈曲振動片、屈曲振動子、および電子デバイス |
| US8283988B2 (en) | 2010-02-25 | 2012-10-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, and electronic device |
| JP5782707B2 (ja) * | 2010-12-01 | 2015-09-24 | セイコーエプソン株式会社 | 電子機器 |
| JP5671821B2 (ja) * | 2010-03-16 | 2015-02-18 | セイコーエプソン株式会社 | 振動片及びデバイス |
| JP5499852B2 (ja) | 2010-04-08 | 2014-05-21 | セイコーエプソン株式会社 | 振動片、振動子 |
| JP6200636B2 (ja) * | 2012-07-26 | 2017-09-20 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計 |
| JP2014112960A (ja) * | 2014-03-13 | 2014-06-19 | Seiko Epson Corp | 振動片、振動子 |
| US10965271B2 (en) * | 2017-05-30 | 2021-03-30 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method for fabricating the same |
| JP6750765B1 (ja) * | 2018-09-21 | 2020-09-02 | 株式会社村田製作所 | 圧電デバイス |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52149489A (en) * | 1976-06-08 | 1977-12-12 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
| JPS57206119A (en) * | 1981-06-15 | 1982-12-17 | Seiko Instr & Electronics Ltd | Tuning fork type bent quartz oscillator |
| JPS5844805A (ja) * | 1982-07-14 | 1983-03-15 | Seiko Instr & Electronics Ltd | 水晶振動子 |
| JP4442521B2 (ja) * | 2005-06-29 | 2010-03-31 | セイコーエプソン株式会社 | 圧電振動片および圧電デバイス |
-
2007
- 2007-06-07 JP JP2007151772A patent/JP4985960B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008306468A (ja) | 2008-12-18 |
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