JP2008294368A - Cleaning dryer appparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prolong life of cleaning fluid by preventing cleaning time from becoming longer for a cleaning apparatus that cleans things, which are allowed to skip pure water cleaning. <P>SOLUTION: This cleaning dryer apparatus comprises an exterior container 14; an interior container 38 arranged inside the exterior container 14, wherein cleaning fluid is stored and an opening from which things to be cleaned W can be entered and taken out; a pressure reduction means 20 for reducing pressure inside the exterior container 14 so that cleaning fluid attached to the things to be cleaned W may be evaporated; a filter 58 for purifying cleaning fluid; and a lid 52 for sealing the opening of the interior container 38 hermetically. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a cleaning / drying apparatus.

  Conventionally, as disclosed in Patent Document 1, a two-tank vacuum degreasing and cleaning apparatus is known. As shown in FIG. 2, this cleaning apparatus is configured by two drying chambers 102 arranged on a cleaning chamber 101 and upper and lower tanks. The cleaning object W is washed by a cleaning liquid stored in the cleaning chamber 101. After cleaning, the to-be-cleaned object W is pulled up to the drying chamber 102 by the lifting device 103 and the inside of the drying chamber 102 is evacuated to dry the to-be-cleaned object W. Further, considering that dirt components in the cleaning liquid adhere to the object to be cleaned W, the drying chamber 102 is provided with a shower 104 for showering the object to be cleaned W with the cleaning liquid before the object to be cleaned W is dried.

On the other hand, as disclosed in Patent Document 2, a single tank type cleaning apparatus is also known. As shown in FIG. 3, in this cleaning apparatus, the cleaning tank 111 can perform not only cleaning of the object to be cleaned W with the cleaning liquid, but also cleaning of pure water with pure water and drying of the object to be cleaned W. ing. Further, the cleaning tank 111 is provided with a circulation filtering device 113 that circulates the cleaning liquid and removes dirt components by the filter 112. And at the time of washing | cleaning by a washing | cleaning liquid, the circulation filtration apparatus 113 is operated and the purity of a washing | cleaning liquid is maintained. Further, after cleaning, the dirty cleaning liquid is discharged through the drain pipe 114, pure water is supplied from the pure water supply line 115 to the cleaning tank 111, and the object to be cleaned W is washed with water while the circulation filtration device 113 is operated. . Finally, pure water is discharged, and dry air is supplied to the cleaning tank 111 through the air supply duct 116 to dry the article W to be cleaned, thereby completing a series of cleaning steps.
JP-A-7-109590 JP-A-6-84872

  Since the cleaning apparatus of this Patent Document 2 is of a single tank type, the apparatus can be miniaturized. In this apparatus, in order to perform pure water cleaning, the cleaning liquid is discharged (discarded) and the cleaning tank is used. 111 must be empty. This cleaning device is a device for an object to be cleaned W that requires pure water cleaning after cleaning with a cleaning liquid. However, since this cleaning apparatus needs to discard the cleaning liquid every time, a large amount of cleaning liquid is used. There is a problem that it becomes necessary.

  On the other hand, in the cleaning apparatus of Patent Document 1, since there is no pure water cleaning step, it is not necessary to discard the cleaning liquid every time, but the cleaning liquid is always stored in the cleaning chamber 101. It gets dirty gradually. For this reason, there is a problem that the object to be cleaned W has to be cleaned with a dirty cleaning liquid. Further, the dirt adhering to the workpiece W is washed away by the shower 104, but this configuration still has a problem that it takes an extra time in the washing process.

  Therefore, the present invention has been made in view of such a point, and the object of the present invention is to prevent an increase in cleaning time in an apparatus for cleaning an object to be cleaned that can be omitted from pure water cleaning. However, it is intended to extend the life of the cleaning liquid.

  In order to achieve the above object, the present invention is a cleaning / drying apparatus for cleaning an object to be cleaned with a cleaning liquid and drying the cleaning liquid adhering to the object to be cleaned, which is disposed in an outer container and the outer container. An inner container provided with an opening through which the cleaning liquid is stored and an object to be cleaned can be taken in and out, and a pressure reducing means for depressurizing the inside of the outer container to such an extent that the cleaning liquid attached to the object to be cleaned evaporates; A cleaning / drying apparatus comprising: a purifying means for purifying the cleaning liquid; and a lid for sealing the opening of the inner container in an airtight manner.

  In the present invention, since the purifying means for purifying the cleaning liquid is provided, the cleaning liquid can be purified even if the cleaning liquid is contaminated by cleaning the object to be cleaned in the inner container. For this reason, it is not necessary to take measures such as taking a shower again after cleaning, and the cleaning process can be prevented from being lengthened. In addition, the cleaning liquid can be prolonged. Further, since the object to be cleaned after drying is dried by reducing the pressure inside the outer container, the object to be cleaned can be dried in detail. At this time, since the inner container is closed in an airtight manner by the lid, the inside of the outer container can be decompressed while the cleaning liquid in the inner container is stored therein. For this reason, the time for discharging the cleaning liquid when drying the object to be cleaned can be omitted, the time of the drying process can be shortened, and wasteful cleaning liquid can be prevented from being discarded. In addition, since the inner container for cleaning is accommodated in the outer container used for drying the object to be cleaned, it is possible to suppress an increase in the number of processing steps for the outer container itself that needs to be configured as a sealed container. be able to. Furthermore, since the inner container is arranged inside the outer container, only the inner container can be moved independently when adjusting the level of the inner container when installing the device. It is possible to prevent the work from becoming complicated. In other words, in the configuration of the two upper and lower tanks shown in FIG. 2, the drying chamber is rigidly fixed to the cleaning chamber in order to ensure the sealing property between the cleaning chamber and the drying chamber. In order to adjust, it is necessary to adjust the inclination of the apparatus in which the drying chamber is integrated, and the adjustment work becomes complicated. On the other hand, in the configuration in which the inner container is accommodated in the outer container as in the present invention, it is not necessary to ensure the sealing performance at the joint portion between the outer container and the inner container. This makes it possible to reduce the labor required for adjustment work.

  The cleaning / drying apparatus preferably includes a heater for heating the cleaning liquid. In the outer container, since the cleaning liquid evaporates as the pressure is reduced, the temperature decreases due to latent heat of vaporization. In this aspect, since the heater for heating the cleaning liquid is provided, the cleaning liquid in the inner container is decreased as the temperature decreases. Can be prevented from solidifying. In addition, the cleaning ability can be improved by increasing the temperature of the cleaning liquid. In addition, the processing temperature can be kept constant.

  In the cleaning / drying apparatus, the inner container includes a partition wall that divides the interior of the container into a first chamber in which an object to be cleaned is immersed and a second chamber, and the inner container has one end portion on the inner container. When a circulation path connected to the first chamber and having the other end connected to the second chamber is provided and a pump is provided in the circulation path, the cleaning liquid in the first chamber is supplied by driving the pump. It is preferable to overflow from the partition wall into the second chamber.

  In this aspect, when the pump is driven, the cleaning liquid in the second chamber flows into the first chamber through the circulation path. Then, the cleaning liquid in the first chamber overflows from the partition wall and flows into the second chamber. In this way, the cleaning liquid can be forcibly circulated. That is, since the cleaning liquid in the first chamber in which the object to be cleaned is immersed can be forced to flow, the cleaning ability of the object to be cleaned can be improved.

  In this aspect, it is preferable that the purification means is constituted by a filter provided in the circulation path. In this embodiment, the cleaning liquid flows from the inner container into the circulation path by driving the pump, and the cleaning liquid flows through the circulation path. This cleaning liquid is purified by a filter.

  In the cleaning / drying apparatus, it is preferable that an ultrasonic cleaning means is provided in the inner container. In this aspect, the cleaning power of the object to be cleaned can be further improved.

  In the washing and drying apparatus, the decompression unit includes a suction path connected to the outer container and a pump provided in the suction path, and the suction path is connected to a gas-liquid separator, and the gas-liquid separator The separator is preferably provided with condensation means.

  In this aspect, air sucked through the suction path flows into the gas-liquid separator, but the vaporized cleaning liquid contained in this air is stored in the gas-liquid separator. Since the gas-liquid separator is provided with condensing means, the vaporized cleaning liquid can be liquefied and separated.

  In the cleaning / drying apparatus, in the case where the cleaning object includes a transporting unit for transporting the object to be cleaned between the inside and the outside of the inner container, the transporting unit cleans the object to be cleaned in the inner container. Sometimes, the object to be cleaned may be configured to be swingable. In this aspect, the object to be cleaned can be cleaned while swinging the object to be cleaned, so that the cleaning ability can be further improved.

  As described above, according to the present invention, in an apparatus for cleaning an object to be cleaned that can be omitted from pure water cleaning, it is possible to extend the life of the cleaning liquid while preventing an increase in cleaning time. .

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the drawings.

  FIG. 1 schematically shows an embodiment of a washing and drying apparatus according to the present invention. The cleaning / drying apparatus 10 according to the present embodiment is an apparatus for cleaning and drying semiconductors, precision machine parts, and the like. As shown in the figure, the cleaning / drying apparatus 10 includes a case 12 and an outer container 14 is accommodated in the case 12.

  The outer container 14 is a container whose upper side is opened, and an outer lid 15 is provided on the outer container 14. The outer lid 15 is configured to be able to open and close an outer opening 16 formed on the upper side of the outer container 14, and can seal the outer opening 16 in an airtight manner. The outer opening 16 is used when the object to be cleaned W is carried into the outer container 14.

  The outer container 14 is provided with a decompression means 20 for decompressing the inside of the outer container 14. The decompression means 20 includes a suction path 20a and a vacuum pump 20b. One end of the suction channel 20 a is connected to a vacuum port 22 provided in the outer container 14. A first check valve 23, the vacuum pump 20b, and a second check valve 24 are provided in the suction passage 20a. By driving the vacuum pump 20b, the inside of the outer container 14 is depressurized.

  The other end of the suction path 20 a is connected to the gas-liquid separator 26. The gas-liquid separator 26 is for separating the vaporized cleaning liquid contained in the air sucked through the suction passage 20a from the air, and the gas-liquid separator 26 is provided with a pressurizing pump 28 as a condensing means. ing. The pressurization pump 28 is connected to the gas-liquid separator 26, and is configured so as to pressurize the gas-liquid separator 26 in a decompressed state by driving the pressurization pump 28. When the gas-liquid separator 26 is pressurized, the vaporized cleaning liquid can be liquefied. The liquefied cleaning liquid is recovered in the cleaning liquid recovery tank 30.

  An exhaust path 32 is connected to the gas-liquid separator 26. The exhaust path 32 is for exhausting the air in the gas-liquid separator 26 to the outside of the case 12, and a check valve 33 is provided in the exhaust path 32. The gas-liquid separator 26 is provided with a liquid level sensor 35.

  An inner container 38 is accommodated in the outer container 14. The space in the outer container 14 other than the inner container 38 functions as a drying space S1 for drying the article W to be cleaned. The inner container 38 is a container having a side wall (outer wall) 38a whose upper side is open, and a cleaning liquid (chemical solution) is stored in the container 38. The inside of the inner container 38 is partitioned into a first chamber 39 and a second chamber 40 by a partition wall 38b. The first chamber 39 is configured to have a size into which the article to be cleaned W can be inserted, and the second chamber 40 is located on the side of the first chamber 39 with the partition wall 38b interposed therebetween. Since the partition wall 38b has a lower height than the side wall 38a of the inner container 38, when the cleaning liquid is supplied into the first chamber 39 so as to exceed the partition wall 38b, the cleaning liquid in the first chamber 39 is used. Is stored in the second chamber 40 beyond the partition wall 38b.

  The second chamber 40 is provided with a liquid level sensor 42 and a discharge port 44. The liquid level sensor 42 is for controlling the amount of liquid in the second chamber 40 within a predetermined range, and is configured to detect the liquid level in the second chamber 40. The liquid level sensor 42 is connected to the controller 46. When the liquid level in the second chamber 40 falls below the lower limit height, the supply pump 48 is driven to supply the cleaning liquid from the cleaning liquid supply tank 49, and when the upper limit height is exceeded, the liquid supply from the cleaning liquid supply tank 49 is stopped. It can be done. The discharge port 44 is used to discharge all the cleaning liquid in the second chamber 40.

  The inner container 38 is provided with a top portion 38c. The top part 38 c is provided on the side wall 38 a so as to partially close the opening of the inner container 38. An outlet end of a supply pipe 50 connected to the cleaning liquid supply tank 49 is fixed to the top portion 38c.

  The inner container 38 is provided with a lid 52 for opening and closing the upper opening. The lid 52 is rotatably provided on the side wall 38a of the inner container 38, and the lid 52 takes two positions, a closed position that is horizontally oriented and an open position that is vertical from the closed position. obtain. In the closed position, the upper opening can be closed in an airtight manner. In the closed position, the lid 52 is surface-bonded to the top portion 38c to ensure airtightness. In FIG. 1, the lid 52 in the closed position is indicated by a solid line, and the lid 52 in the open position is indicated by a broken line.

  A circulation path 55 for circulating the cleaning liquid is connected to the inner container 38. One end 55 a (upstream end) of the circulation path 55 is connected to the bottom of the second chamber 40, and the other end 55 b (downstream end) is connected to the bottom of the first chamber 39. The other end portion 55b is configured, for example, in a tubular shape extending in the horizontal direction, and allows the cleaning liquid in the circulation path 55 to flow out into the inner container 38 through a large number of through holes (not shown) provided in the tube wall.

  The circulation path 55 is provided with a circulation pump 57 and a filter 58 as purification means. The circulation pump 57 is for forcibly flowing the cleaning liquid. The circulation pump 57 is directed from the one end 55 a connected to the second chamber 40 to the other end 55 b connected to the first chamber 39. The cleaning liquid is made to flow. When the circulation pump 57 is driven, the cleaning liquid in the second chamber 40 is sucked, while the cleaning liquid in the circulation path 55 is sent into the first chamber 39 to circulate the cleaning liquid between the inner container 38 and the circulation path 55. be able to. The filter 58 is for purifying the cleaning liquid, and is configured to be able to capture dirt components contained in the cleaning liquid.

  An ultrasonic cleaning means 60 is provided in the inner container 38. The ultrasonic cleaning means 60 improves the cleaning power of the cleaning liquid by applying ultrasonic vibration to the cleaning liquid in the inner container 38.

  The circulation path 55 is provided with a heater 62 that can heat the cleaning liquid. The heater 62 is configured to be controllable by the controller 46. The inner container 38 is provided with a liquid thermometer 64 for detecting the temperature of the cleaning liquid. This liquid thermometer 64 is also connected to the controller 46. The cleaning liquid is heated by the heater 62 because the cleaning liquid in the outer container 14 evaporates by depressurizing the drying space S1 in the outer container 14, and the cleaning liquid in the inner container 38 is absorbed by the endothermic action associated therewith. This is to prevent cooling and solidification. On the other hand, by monitoring the temperature of the cleaning liquid, it is prevented that the cleaning liquid is heated to a boiling point. The circulation pump 57, the filter 58, and the heater 62 are disposed in the case 12 outside the outer container 14.

  Connected to the circulation path 55 are a heater side discharge pipe 65 for discharging the cleaning liquid staying in the heater 62 and a filter side discharge pipe 66 for discharging the cleaning liquid staying in the filter 58. These discharge pipes 65 and 66 are both connected to the drain tank 68. The heater side discharge pipe 65 is provided with a check valve 69, and the filter side discharge pipe 66 is provided with a needle valve 70. Further, the cleaning liquid accumulated in the outer container is collected in the drain tank 68 through the drain pipe 72.

  The cleaning / drying apparatus 10 is provided with a transport means 74 for transporting the article to be cleaned W between the inside and the outside of the inner container 38. The conveying means 74 includes a lifter 74a that is driven by a motor (not shown). The lifter 74a is configured to be movable in the vertical direction along a guide 74b that extends vertically. The transport means 74 transports the article W to be cleaned placed on the lifter 74a from the inside of the inner container 38 to the inside prior to the cleaning process. The object to be cleaned W is transported to the drying space S1). Although not shown, a hole is formed through the wall of the outer container 14 perpendicularly to the vertical direction, and a support member (not shown) of the lifter passes through the hole. When the lifter 74a moves up and down, the support member moves up and down inside the hole. This hole is sealed by a bellows, thereby ensuring the tightness of the outer container 14.

  The lifter 74a can be swung when the workpiece W is cleaned. For example, the lifter 74a may be configured to swing up and down along the guide 74b, or the lifter 74a may be configured to swing left and right with respect to the guide 74b.

  Next, the operation of the cleaning / drying apparatus 10 according to the present embodiment will be described. The operation of the cleaning / drying apparatus 10 includes a cleaning process for cleaning the object to be cleaned W and a drying process for drying the object to be cleaned W. In the cleaning process, the article W to be cleaned is transferred into the inner container 38 by the transfer means 74 and immersed in the cleaning liquid. At the time of this conveyance, the outer lid 15 is opened, the article W to be cleaned is put into the outer container 14 through the outer opening 16 of the outer container 14, the lid 52 is opened, the lifter 74a is lowered, and the article to be cleaned is put into the inner container 38. W is carried in.

  By driving the circulation pump 57, the cleaning liquid in the second chamber 40 of the inner container 38 is sucked into the circulation path 55, and after flowing through the circulation path 55, the cleaning liquid passes through the other end portion 55b (downstream end portion). It is supplied into the chamber 39. Since the other end 55b of the circulation path 55 is provided at the bottom of the first chamber 39, an upward flow in which the cleaning liquid supplied from below overflows the partition wall 38b in the first chamber 39 of the inner container 38. Will occur. The cleaning liquid circulates between the inner container 38 and the circulation path 55, and the dirt component contained in the cleaning liquid is removed by the filter 58 by this circulation.

  In the cleaning step, ultrasonic vibration is generated in the cleaning liquid by the ultrasonic cleaning means 60, and the article to be cleaned W swings due to the swing of the lifter 74a. For this reason, in addition to the flow of the cleaning liquid, cleaning is performed by ultrasonic vibration and swing of the cleaning target W itself. When the cleaning is finished, the lifter 74a is raised, and the article to be cleaned W is carried outside the inner container 38, that is, into the drying space S1. Note that the lid 52 may be opened or closed during cleaning.

  In the drying process, the lid 52 of the inner container 38 is closed and the vacuum pump 20b is driven. As a result, the space (drying space) S1 outside the inner container 38 is decompressed. Then, the cleaning liquid evaporates as the pressure is reduced, whereby the object to be cleaned W is dried.

  On the other hand, the vaporized cleaning liquid is sucked by the vacuum pump 20b and introduced into the gas-liquid separator 26 through the suction path 20a. In the gas-liquid separator 26, the gaseous cleaning liquid is condensed by driving the pressurizing pump 28 and separated from the air. Air is exhausted to the outside through the exhaust path 32, and the cleaning liquid is recovered in the cleaning liquid recovery tank 30.

  In this drying step, the ambient heat is taken away as the cleaning liquid vaporizes in the drying space S1, and the temperature may decrease. Since it is not preferable that the temperature of the cleaning liquid in the inner container 38 decreases and the cleaning liquid coagulates as the temperature decreases, the cleaning liquid is prevented from coagulating by heating the cleaning liquid with the heater 62. Further, the temperature of the cleaning liquid in the inner container 38 is detected by the liquid thermometer 64 to prevent the cleaning liquid from being heated to a temperature at which it boils. Although the cleaning liquid is circulated by the circulation pump 57 even during the drying process, the circulation pump 57 may be driven only during the cleaning process when there is no possibility of the coagulation of the cleaning liquid. Good.

  As described above, according to the present embodiment, since the filter 58 for purifying the cleaning liquid is provided, even if the cleaning liquid may be contaminated by cleaning the cleaning target W in the inner container 38, the cleaning liquid Purification is possible. Therefore, it is not necessary to take measures such as taking a shower after the cleaning, and the cleaning process can be prevented from being lengthened. In addition, the cleaning liquid can be prolonged. Moreover, since the to-be-cleaned object W after drying is dried by decompressing the inside of the outer container 14, the to-be-cleaned object W can be dried in detail. At this time, since the inner container 38 is airtightly closed by the lid 52, the inside of the outer container 14 can be decompressed while the cleaning liquid in the inner container 38 is stored therein. For this reason, it is possible to omit the time for discharging the cleaning liquid at the time of drying the article to be cleaned W, the time for the drying process can be shortened, and the waste of the cleaning liquid can be prevented. Moreover, since the cleaning inner container 38 is accommodated in the outer container 14 used for drying the article to be cleaned W, the number of processing steps for the outer container 14 itself that needs to be configured as a sealed container increases. Can be suppressed. Further, since the inner container 38 is arranged inside the outer container 14, only the inner container 38 is moved independently when adjusting the level of the inner container 38 when the apparatus is installed. Therefore, the adjustment work can be suppressed from becoming complicated. In other words, in the configuration of the two upper and lower tanks shown in FIG. 2, the drying chamber is rigidly fixed to the cleaning chamber in order to ensure the sealing property between the cleaning chamber and the drying chamber. In order to adjust, it is necessary to adjust the inclination of the apparatus in which the drying chamber is integrated, and the adjustment work becomes complicated. On the other hand, in the configuration in which the inner container 38 is accommodated in the outer container 14 as in the present embodiment, it is not necessary to ensure sealing performance at the joint between the outer container 14 and the inner container 38. The tilt adjustment can be performed by 38 alone, and the labor required for the adjustment work is reduced. In particular, in the present embodiment, since it is configured to overflow, fine adjustment of the inner container 38 is required, but adjustment of only the inner container 38 is sufficient, and therefore, fine adjustment work of the inner container 38 is easy to perform. It has become.

  Further, in the present embodiment, since the heater 62 for heating the cleaning liquid is provided, it is possible to prevent the cleaning liquid in the inner container 38 from solidifying due to a temperature drop accompanying the evaporation of the cleaning liquid in the drying space S1. In addition, the cleaning ability can be improved by increasing the temperature of the cleaning liquid. Further, the processing temperature can be kept constant.

  In this embodiment, when the circulation pump 57 is driven, the cleaning liquid in the second chamber 40 flows into the first chamber 39 through the circulation path 55. Then, the cleaning liquid in the first chamber 39 overflows from the partition wall 38 b and flows into the second chamber 40. In this way, the cleaning liquid can be forcibly circulated. That is, since the cleaning liquid in the first chamber 39 in which the article to be cleaned W is immersed can be forced to flow by the pump 57, the cleaning ability of the article to be cleaned W can be improved.

  Moreover, in the present embodiment, since the ultrasonic cleaning means 60 is provided, the cleaning power of the object to be cleaned W can be further improved.

  In the present embodiment, the air sucked through the suction passage 20a by the driving of the vacuum pump 20b flows into the gas-liquid separator 26. The vaporized cleaning liquid contained in the air is stored in the gas-liquid separator 26. Become. Since the gas-liquid separator 26 is provided with a condensing means, the vaporized cleaning liquid can be liquefied and separated.

  Moreover, in this embodiment, since the to-be-cleaned object W can be cleaned while swinging the to-be-cleaned object W at the time of cleaning, the cleaning ability can be further improved.

  Note that the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made without departing from the spirit of the present invention. For example, although the heater 62 is provided in the circulation path 55, it may be arranged in the inner container 38 instead.

  In the present embodiment, the lifter 74a is swung during cleaning, but the lifter 74a may not be swung depending on the type of the object to be cleaned W. Further, the ultrasonic cleaning means 60 may be omitted.

1 is a diagram schematically showing an overall configuration of a cleaning / drying apparatus according to an embodiment of the present invention. It is a figure which shows the structure of the conventional washing | cleaning drying apparatus. It is a figure which shows the structure of the conventional washing | cleaning drying apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 14 Outer container 20 Pressure reducing means 20a Suction path 20b Vacuum pump 26 Gas-liquid separator 28 Pressurizing pump 38 Inner container 38a Side wall 38b Partition wall 39 First chamber 40 Second chamber 52 Lid 55 Circulation path 55a One end 55b Other end 57 Circulation pump 58 Filter 60 Ultrasonic cleaning means 62 Heater 74 Conveying means

Claims (7)

A cleaning / drying apparatus for cleaning an object to be cleaned with a cleaning liquid and drying the cleaning liquid attached to the object to be cleaned,
An outer container;
An inner container disposed in the outer container and provided with an opening through which the cleaning liquid is stored and an object to be cleaned can be taken in and out;
Decompression means for decompressing the inside of the outer container to such an extent that the cleaning liquid adhering to the object to be cleaned evaporates;
A purification means for purifying the cleaning liquid;
And a lid for closing the opening of the inner container in an airtight manner.   The cleaning / drying apparatus according to claim 1, further comprising a heater for heating the cleaning liquid. The inner container includes a partition wall that partitions the interior of the container into a first chamber in which an object to be cleaned is immersed and a second chamber,
The inner container is provided with a circulation path having one end connected to the first chamber and the other end connected to the second chamber,
The cleaning / drying apparatus according to claim 1, wherein a pump is provided in the circulation path, and the cleaning liquid in the first chamber overflows from the partition wall into the second chamber by driving the pump.   The cleaning and drying apparatus according to claim 3, wherein the purification unit is configured by a filter provided in the circulation path.   The cleaning / drying apparatus according to claim 1, wherein an ultrasonic cleaning unit is provided in the inner container. The decompression means includes a suction path connected to the outer container, and a pump provided in the suction path,
The suction path is connected to a gas-liquid separator,
The washing / drying apparatus according to any one of claims 1 to 5, wherein the gas-liquid separator is provided with a condensing means. A transport means for transporting the object to be cleaned between the inside and the outside of the inner container;
The cleaning / drying apparatus according to claim 1, wherein the transport unit is configured to be able to swing the object to be cleaned when the object to be cleaned is cleaned in the inner container.

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