TW200846095A - Cleaning and drying device - Google Patents

Abstract

The present invention provides a cleaning and drying device that can subject an article to be cleaned for cleaning and drying with omissible pure water rinsing step and that eliminates the need for wash over extended period of time and also extends the life of the cleaning liquid. The cleaning and drying device (10) comprises: an external tub (14); and internal tub (38), which is arranged inside the external tub and has an opening for loading and unloading the article to be cleaned, the internal tube containing therein the cleaning liquid; a vacuum pump (20b), which depressurizes the interior of the external tub for vaporizing the cleaning liquid attached to the article to be cleaned; a sieving and inspecting process (58), which purifies the cleaning liquid; and a lid (52), which forms an airtight seal at the opening of the internal tub (38).

Description

200846095 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a cleaning and drying device. [Prior Art] A double-slot type vacuum degreasing cleaning device disclosed in, for example, Japanese Laid-Open Patent Publication No. Hei No. Hei. As shown in Fig. 2, the cleaning device is provided with a drying chamber 1〇2 above the cleaning chamber 1〇1, which has a structure of two layers. In the cleaning device, the object to be cleaned W is washed with the cleaning liquid stored in the cleaning chamber 1〇1, and then sent to the drying chamber 102 by the lifting device w, and the inside of the drying chamber 1〇2 is cleaned. The material W is dried. Further, in consideration of the fact that the dirty component in the cleaning liquid adheres to the object to be cleaned, the cleaning device is provided with a shower head 104 in the drying chamber 102 for spraying the cleaning liquid before drying the object to be cleaned w Drain onto the object to be cleaned. On the other hand, a single-slot type cleaning device as disclosed in Japanese Laid-Open Patent Publication No. Hei 6-84872 is known. As shown in Fig. 3, in the cleaning tank U1 of the cleaning apparatus, not only the cleaning material W but also the pure material is washed with pure water (clean water), and then the object to be cleaned is dried. Further, the cleaning tank ill is provided with a loop filter device 113 for circulating the cleaning liquid and removing the dirty components by the inspection program 112. The loop filter unit 113 is activated during washing with the cleaning liquid to maintain the cleanliness of the cleaning liquid. Further, after the cleaning, the dirty cleaning liquid is discharged through the drain pipe 114, and the pure water is supplied to the washing tank 111 through the pure water supply line 115.

2014-9694-PF 6 200846095 = Start, n county set 113 - while cleaning with clean water (four), remove the pure water, and pass the air supply pipe (1) to the cleaning tank (1) ^ (four) W gas, the cleaning is Money 1 carries money,

Cleaning step. j W

In the cleaning device of Japanese Laid-Open Patent Publication No. Hei 6-84872, since the device is of a single-slot type, the size of the device can be reduced. However, in this device, the two-in-one lamp and the four-water/month-washing must be discharged (discarded). The cleaning items of all the '忒' monthly washing devices in the cleaning tank (1) are cleaned after cleaning with the cleaning liquid, and must be cleaned with pure water. ff, all the monthly washing liquids must be discarded for each cleaning, and a large amount of cleaning is required. Liquid problem. In the other aspect, the above-mentioned Japanese Patent Laid-Open No. 7-109090 is a delicate washing device. Since there is no pure water washing step, it is not necessary to discard the cleaning liquid every time. However, since the cleaning liquid-money is cleaned in the t 1G1, the cleaning liquid gradually The change H has a problem that the dirty cleaning liquid has to be used to clean the object W to be cleaned. Further, in the cleaning device, the dirt adhering to the object to be cleaned W is washed away by the shower bowl 104, which is an additional time consuming problem. SUMMARY OF THE INVENTION An object of the present invention is to provide a cleaning and drying apparatus for cleaning and drying an object to be cleaned which can omit a pure water washing step, which can prevent a long cleaning time and prolong the life of the cleaning liquid. The present invention provides a cleaning and drying device for cleaning a cleaning object by a cleaning liquid and drying the cleaning liquid attached to the object to be cleaned, including

2014-9694-PF 7 200846095 = side container; the inner container s is placed in the outer container, and has an opening for allowing the object to be washed in and out, and the inner ', the earth, and the six ar D are stored in each of the containers. The cleaning liquid, the decompression soap element, depressurizes the inside of the outer container to evaporate the cleaning liquid adhering to the object to be cleaned; the purifying unit purifies the cyan washing liquid; and the lid body 4 seals the above The opening portion of the inner container: by this, it is possible to prevent the cleaning time from becoming long and to extend the life of the cleaning liquid. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing an embodiment of a washing and drying apparatus of the present invention. The cleaning and drying device 10 of the present embodiment is a device for cleaning and drying a semiconductor or a precision mechanical component or the like. As shown in Figure ,, the cleaning and drying device 10 includes a housing 12 that houses an outer container 14. The outer container 14 is an open container on the upper side, and the outer container 14 has an outer rim 15 . The outer cover 15 can open and close the outer opening 16 formed on the upper side of the outer container 14, and the outer cover 15 can hermetically seal the outer opening 16 by the outer cover 15. The outer opening 16 is for carrying the object to be cleaned w into the outer container 14. The outer container 14 is provided with a pressure reducing unit 20 for decompressing the inside of the outer container 14. The decompression unit 20 includes a suction path 20a and a vacuum pump 20b. One end of the suction path 20a is connected to the vacuum port 22 provided in the outer container 14. The suction path 20a is provided with a first check valve 23, the above-described vacuum pump 2〇b, and a second check valve 24. By driving the vacuum pump 2〇b, the inner portion of the outer container 14 can be decompressed.

20I4-9694-PF 200846095 • The other end of the suction path 20a is connected to the gas-liquid separator 26. The gas-liquid separator 26 is for separating the vaporized cleaning liquid contained in the air from the air t sucked by the suction path 2A. The gas-liquid separator 26 is provided with a pressurizing pump 28 as a condensing unit. The pressurizing pump 28 is connected to the gas-liquid separator 26, and by driving the pressurizing pump 28, the gas-liquid separator in a reduced pressure state can be pressurized. The gasified cleaning liquid can be liquefied by pressurizing the inside of the gas-liquid separator 26. The liquefied cleaning solution is recovered into the cleaning night ~ recovery tank 3 。. The '' gas-liquid separator 26 is connected to the exhaust passage 32. The exhaust passage 32 serves to discharge the air in the gas-liquid separator 26 to the outside of the casing 12. The exhaust passage 32 is provided with a check valve 33. Further, the gas-liquid separator 26 is provided with a liquid level sensor 35. The outer container 14 houses an inner container 38 therein. The space other than the inner container 38 in the outer container j 4 is a drying space S1 for drying the object W to be washed. The inner container 38 is a container whose upper side is open and has a side wall (outer wall) 38a in which a cleaning liquid (medicine) is stored. The inside of the inner container 38 is partitioned into a first chamber 39 and second to 40 by a partition 38b. The first chamber 39 has a size in which the object to be cleaned w can be placed, and the second chamber 40 is located outside the first chamber 39 via the partition plate 38b. Since the south side of the partition 3 is lower than the side wall 38a of the inner container 38, when the cleaning liquid supplied into the first chamber 39 reaches a certain amount, the cleaning liquid in the first chamber 39 is stored over the partition 38b. The second room is within 4 inches. The second chamber 40 is provided with a level sensor 42 and a discharge port 44. The level sensor 42 can detect the liquid level in the second chamber 40 for controlling the amount of liquid in the second chamber 4 within a prescribed range. The liquid level sensor 42 is connected to the controller 4M.

2014-9694-PF 9 200846095 Thereby, when the liquid level in the second chamber 40 is lower than the lower limit height, the supply pump 48 can be driven to supply the cleaning liquid in the cleaning liquid supply tank 49, and the liquid in the second chamber = When the surface exceeds the upper limit height, the supply of the cleaning liquid to the cleaning liquid supply tank is stopped. The discharge port 44 is for discharging all of the cleaning liquid in the second chamber. The inner container 38 has a top portion 38c. The top portion 38c is disposed on the side opening μ to cover a portion of the opening of the inner container 38. The top portion 38c defines an outlet end of the supply pipe 5A connected to the cleaning liquid supply tank 49. Further, the inner container 38 is provided with a lid body 52 for opening and closing the upper side opening. The lid body 52 is rotatably disposed on the side wall of the inner container 38, and the moss body 52 is rotatable between a horizontally horizontally closed state, that is, a closed position, and a longitudinally erected state, that is, an open position, from which the closing = standing. The lid body can be hermetically sealed to the upper side opening when in the closed position. In the closed position, the face of the cover 52 engages the face of the top 38c to ensure airtightness. In Fig. 1, the cover 52 in the closed position is indicated by a solid line, and the cover 52 in the open position is indicated by a broken line. The inner container 38 is connected to a loop 55 for circulating the cleaning liquid. One end portion 55a (upstream side end portion) of the loop path 55 is connected to the bottom portion of the second chamber 4A, and the other end portion 55b (downstream side end portion) is connected to the bottom portion of the first chamber 39. The other end portion 55b is, for example, a tubular shape extending in a horizontal direction, and a plurality of through holes (not shown) are disposed in the tube wall, and the cleaning liquid in the loop path flows out through the through hole to the inner container. 38 inside. The loop 55 is provided with a loop fruit 57 and a screening program 58 as a purifying unit. The looper 57 is used to forcibly flow the cleaning liquid, and the loop π causes the washing liquid to pass from the one end portion 55a connected to the second chamber 40 to the first chamber 39.

2014-9694-PF 10 200846095 The other end 55b connected is flowing. By driving the loop pump 57, the washing liquid in the second chamber 40 is sucked, and the washing liquid in the loop 55 is sent out into the first chamber 39. Thereby, the cleaning liquid is circulated between the inner container 38 and the return path 55. The screening program 58 is used to purify the cleaning liquid and capture the dirt contained in the cleaning liquid.

The inner granulator 38 is provided with an ultrasonic cleaning unit 6 〇. The ultrasonic cleaning unit 60 applies ultrasonic vibration to the cleaning liquid in the inner container 38 to improve the cleaning ability of the cleaning liquid. The return path 55 is provided with a heater 62 that can heat the cleaning liquid. Controller 46 can control the heater 62. Further, the inner container 38 is provided with a liquid temperature gauge 64 for detecting the temperature of the cleaning liquid. The liquid temperature meter 64 is also connected to the controller (4). The reason why the cleaning liquid is heated by the heater 62 is to prevent the inside of the inner container 38 from being caused by the heat absorbing action generated when the drying space S1 in the outer container 14 is decompressed and the cleaning liquid in the outer container 14 is evaporated. The cleaning solution is cooled and solidified. On the other hand, by monitoring the temperature of the cleaning liquid, it is possible to prevent cleaning: it is heated to boiling. Further, the loop 纟 57, the screening program 58 and the second heater 62 are disposed in the outer casing 12 outside the outer container 14. The circulation path 55 is connected to a heater side discharge pipe 65 for discharging the cleaning liquid remaining in the heater 62, and a screening program side discharge pipe 66 for discharging the cleaning liquid remaining in the screening program 58. . The discharge pipes 65 and 66 are connected to the drain groove 68. Further, the heater side discharge pipe π is provided with a check valve 69', and the screening program side discharge f 66 is provided with (four) 7 turns. In addition, a = = the cleaning liquid in the outer container is recovered through the drain pipe 72 to the drain tank.

2014-9694-PF 11 200846095 The cleaning and drying device 10 is provided with a transport unit 74 for transporting the object W to be washed between the inside and the outside of the inner container 38. The transport unit 74 has a lifting member 74a that is driven by a motor (not shown) and that is movable in the vertical direction along the guide member 74b extending upward and downward. The conveyance unit 74 conveys the object to be cleaned ff which is placed on the elevating member 7 to the inside from the inside of the inner container 38 before the washing step, and conveys the object W from the inside of the inner container 38 to the outside after the washing is completed ( Drying is carried out with _ space S1). Further, a groove (not shown) penetrating in a direction perpendicular to the vertical direction is formed on the wall surface of the outer container 14, and a supporting member (not shown) of the elevating member penetrates the groove, and when the elevating member 74a moves up and down Move up and down on the inside of the slot. The groove is sealed by a bellows (be U〇ws) thereby ensuring the tightness of the outer container 14. When the object W to be cleaned is cleaned, the lifting member 74a can shake the object W to be washed. For example, the elevating member 74a may be rocked upward and downward along the guide member 74b, or may be swung in the left-right direction with respect to the guide member 74b. Next, the operation of the cleaning and drying device 10 of the present embodiment will be described. The operation of the cleaning and drying device 10 includes a washing step of washing the object to be cleaned and a drying step of drying the wetted object w. In the cleaning step, the object to be cleaned is transported by the transport unit 74? It is transferred to the inner container 38 and immersed in the cleaning liquid. At the time of conveyance, the outer lid 丨 5 is opened, and the object to be cleaned w is fed into the outer container 14 through the outer opening 16 of the outer damper 14 and then the lid body 52 is opened to move the lifting member 74a downward, and the object to be cleaned is to be washed. W is carried into the inner container 38. By driving the loop pump 57, the cleaning liquid in the second chamber 4 of the inner container 38 is sucked into the loop 5 5, and the cleaning liquid flows through the loop 5 5 and passes through The other end portion 55b (downstream side end portion) is supplied into the first chamber 39. Since the other end portion 55b of the loop path 55 is provided at the bottom of the first chamber 39, in the first chamber 39 of the inner side container 38, an upward flow phenomenon of the cleaning liquid supplied from below through the plate 38b is generated. Thus, the cleaning liquid is looped between the inner side of the capacitor 3 8 and the loop path 55, and the dirt contained in the cleaning liquid is removed by the screening program 58 by the loop. Further, in the cleaning step, the ultrasonic cleaning unit 6 causes ultrasonic vibration to be generated in the cleaning liquid, and the object w is also shaken by the shaking of the elevating member 74a. Therefore, in addition to the flow of the cleaning liquid, the ultrasonic vibration and the shaking of the object W itself are used for cleaning. After the cleaning is completed, the elevating member 74a is raised, and the object to be cleaned f is transported to the outside of the inner container (4), that is, in the drying space si. In addition, the cover 52 can be opened or closed during cleaning. In the drying step, the lid 52 of the inner container 38 is closed to drive the jade pump \〇b. As a result, the outer space (drying space) S1 of the inner container 38 is decompressed, and the liquid is evaporated by decompression, and the object to be cleaned is dried. 0 The cleaning liquid which is vaporized by another is attracted by the vacuum pump 20 The gas-liquid separation knife is introduced into the is 26 through the suction path 20a. In the gas-liquid separator 26, the washing liquid of the prince is condensed by the driving of the pressurizing pump 28, and is separated from the air. The air is discharged through the exhaust passage 32 by $1 ** OA ^ 〗 外, and the cleaning liquid is recovered into the cleaning liquid recovery tank 30. ~ Drying step" As the cleaning liquid is vaporized in the drying space S1,

2014-9694-PF 13 200846095 w Occasionally, the surrounding heat is absorbed and the temperature is lowered. Here, it should be avoided that the temperature of the cleaning liquid in the inner container 38 drops as the temperature drops, and the cleaning liquid solidifies. To this end, the cleaning liquid is heated by the heater 62 to prevent solidification of the / month wash. In addition, the temperature of the cleaning liquid in the inner container is detected by a liquid thermometer to prevent the cleaning liquid from being heated to a boiling temperature. Here, although the loop pump 57 is driven to recirculate the washing liquid in the drying step, the loop pump 57 〇 _ & may be driven only in the washing step in the case where the washing liquid does not solidify or the like. As described above, in the present embodiment, since the screening program 58 for purifying the cleaning liquid is provided, the cleaning liquid can be purified even if it is dirty after cleaning the object W in the inside container 38. Therefore, it is not necessary to take measures such as spray cleaning after cleaning, and it is possible to prevent the cleaning step from becoming long and to make the cleaning liquid durable. Further, since the inside of the outer container 14 is decompressed to dry the object to be cleaned after washing, the respective portions of the object to be washed ¥ can be completely dried. At this time, since the inner crucible container 38 is hermetically sealed by the lid body 52, the inside of the outer container 14 can be decompressed while the cleaning liquid is stored in the inner container 38. Therefore, when the object to be cleaned is dried, the time required for discharging the cleaning liquid can be omitted, and the drying step time can be shortened, and the cleaning liquid can be prevented from being discarded and wasted unnecessarily. Moreover, since the inner container 38 for cleaning is accommodated in the outer container II 14 for drying the object to be cleaned (9), it is possible to suppress an increase in the processing time of the outer container 14 as the sealed container. Further, since the inner container 38 is provided inside the outer container 14, the inner container 38 can be individually moved, for example, when the level of the inner container 38 is adjusted in the case of the setting device.

2014-9694-PF 14 200846095 Free: The complexity of the whole operation. # 'If using the structure of the upper and lower slots shown in Figure 2, in order to ensure the tightness between the cleaning chamber and the drying chamber, the drying chamber is fixedly fixed to the cleaning chamber. When the level of the cleaning chamber is to be adjusted, It is necessary to shoulder the inclination of the device which is formed into a body with the drying chamber, and the adjustment work is complicated. On the other hand, in the case of the configuration in which the inner container 38 is accommodated in the outer container 14 as in the present embodiment, since it is not necessary to ensure the sealing property of the joint portion of the outer container 14 and the inner container 38, the inner container can be separately performed. The tilt adjustment of 38 does not have to be laborious for the adjustment work. In particular, in the example of the present invention, since the cleaning liquid is overflowed, it is necessary to finely adjust the inner damper 38. However, since only the inner container 38 is adjusted, the inner container 38 can be easily fine-tuned. Further, in the present embodiment, since the heater 62 for heating the cleaning liquid is provided, it is possible to prevent the cleaning liquid in the inner container 38 from being solidified by the temperature drop caused by the evaporation of the cleaning liquid in the drying space S1. Further, by raising the temperature of the cleaning liquid, the cleaning ability can be improved, and the processing temperature can be kept constant. Further, in the present embodiment, the cleaning liquid in the second chamber 40 flows into the first chamber 39 through the return path 55 by the driving of the loop pump 57. Then, the cleaning liquid in the first chamber 39 flows into the second chamber 4 through the partition 38b. This makes it possible to force the cleaning liquid to loop. That is, since the cleaning liquid in the first chamber 39 soaked by the object W can be forcibly flowed by the pump 57, the ability to clean the object W can be improved. Further, in the present embodiment, since the ultrasonic cleaning unit is provided, the ability to clean the object W can be further improved. 2014-9694-PF 15 200846095 Further, in the present embodiment, the air sucked through the suction path 20a flows into the gas-liquid separator 26 by the driving of the vacuum pump 2〇b, and the vaporized cleaning liquid contained in the air is It is stored in the gas-liquid separator 26. Since the gas-liquid separator 26 is provided with a condensing unit, the vaporized washing liquid can be liquefied and separated. Further, in the present embodiment +, since the object to be cleaned w is washed while shaking the object W during washing, the cleaning ability can be further improved. The present invention is not limited to the above embodiments, and various changes, improvements, and the like can be made without departing from the scope of the invention. In the present embodiment, the heater 62 is disposed in the loop path 55, but may be disposed in the inner container 38. Further, in the present embodiment, the elevating member 7 is swung while being cleaned, but the elevating member may not be shaken depending on the type of the washing W. In addition, the ultrasonic cleaning unit may not be provided. [Outline of Embodiments] The above embodiments can be summarized as follows. (1) In the present embodiment, since the cleaning liquid for purifying the cleaning liquid is provided earlier, the cleaning liquid can be purified even if it is dirty after washing the object to be cleaned in the inner container. Therefore, it is not necessary to take measures such as spray cleaning after cleaning, which can prevent the cleaning step from becoming long and the cleaning liquid to be durable. Further, since the inside of the outer container is depressurized to dry the object to be cleaned after washing, the respective portions of the object to be cleaned can be completely dried. At this time, the inner container is hermetically sealed by the lid body, and the inside of the outer container can be depressurized while the cleaning liquid is stored in the inner container. Therefore, when drying the object to be cleaned, the time required to discharge the cleaning solution can be eliminated.

2014-9694-PF 16 200846095 The drying step time is reduced by t, and it is also possible to prevent unnecessary waste and waste of the monthly washing liquid. Further, since the inner container for cleaning is housed in the outer container for drying the object to be cleaned, it is possible to suppress an increase in the number of processing steps as the sealed container or the side bar. Further, since the inner container is disposed inside the outer damper, for example, when the level of the inner container is adjusted in the case of the setting device, the inner container can be separately moved to avoid the complication of the adjustment work. That is, if the structure of the upper and lower grooves shown in Fig. 2 is adopted, _ = ensuring the sealing property between the cleaning chamber and the drying chamber, the drying chamber is firmly fixed on the cleaning chamber, and the level of the cleaning chamber is adjusted. At this time, it is necessary to erode the inclination of the device integrated with the drying chamber, and the adjustment work is complicated. In the case of the structure in which the inner container is accommodated in the outer side as in the case of the bebething example, since it is not necessary to ensure the sealing property of the joint portion of the outer container and the inner container, the tilt adjustment of the inner container can be performed separately, without It is laborious to adjust the work. (2) The above cleaning and drying device includes a heater _ for heating the cleaning liquid. In the outer container, the cleaning liquid evaporates with the pressure reduction to cause a temperature drop due to the heat of vaporization. However, in the present embodiment, since the heater is provided, it is possible to prevent the cleaning liquid in the inner container from solidifying with a drop in temperature. Further, by increasing the temperature of the cleaning liquid, the cleaning ability can be improved. It also keeps the processing temperature constant. (3) In the above-described cleaning and drying device, it is preferable that the inner grain device has a partition plate that partitions the inner container inner portion into a first chamber and a second chamber, and the object to be cleaned is immersed in the first chamber; The inner container is connected to the loop road, and one end portion and the other end portion of the loop road are respectively connected to the first 2014-9694-PF 17 200846095 to the second chamber; in the case where the pump is provided in the loop road By driving the pump, the cleaning liquid in the first chamber overflows into the second chamber over the partition. In the present embodiment, by driving the pump, the cleaning liquid in the second chamber flows into the first chamber through the loop. Then, the cleaning liquid in the first chamber flows into the second chamber across the partition. This makes it possible to force the cleaning fluid to loop. That is, since the cleaning liquid in the first chamber immersed in the object to be cleaned can be forcibly flowed, the ability to clean the object to be cleaned can be improved. (4) In the present embodiment, it is preferable that the purification unit has a screening program provided on the loop. In this embodiment, by driving the pump, the cleaning liquid flows from the inner container into the return path, and the cleaning liquid flows in the circulation path. Then the cleaning solution is cleaned by a screening program. (5) In the above cleaning and drying apparatus, it is preferable that the inner container is provided with an ultrasonic cleaning unit. In this embodiment, the ability to clean the object to be cleaned can be further improved. (6) In the above cleaning and drying apparatus, it is preferable that the decompression unit has a suction path connected to the outer container and a pump provided in the suction path, and the suction path is connected to the gas-liquid separator, the gas-liquid The separator is provided with a condensing unit. In this embodiment, the air sucked by the suction path flows into the gas-liquid separator, and the gas-liquid separator stores the vaporized cleaning liquid contained in the air. Since the gas-liquid separator is provided with a condensing unit, the gasification washing liquid can be liquefied and separated. (7) When the washing and drying device includes a conveying unit for conveying the object to be cleaned between the inside and the outside of the inner container, the conveying unit may clean the object to be cleaned in the inner container. 2014-9694-PF 18 200846095 to shake the object to be washed. In this embodiment, the cleaning ability can be improved by cleaning the object to be cleaned while shaking the object to be cleaned. As described above, the present embodiment provides a cleaning and drying apparatus which can clean and dry the object to be cleaned which can omit the pure water washing step, can prevent the cleaning time from becoming long, and can prolong the life of the cleaning liquid. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a cleaning and drying 10 according to an embodiment of the present invention. 2 is a view showing a configuration of a conventional cleaning and drying device. FIG. 3 is a view showing a configuration of a conventional cleaning and drying device. [Main component symbol description] 10 to a cleaning and drying device; 12 to a casing; 14 to an outer container; 15~outer cover; 16~outer opening; 20~decompression unit; 20a~ suction path; 20b~vacuum pump; 22~vacuum port; 23~first check valve; 2 4~second check valve; 2014-9694 -PF 19 200846095 26~ gas-liquid separator; 26~ gas-liquid separator; 2 8~ pressurizing pump; 30~ washing liquid recovery tank; 32~ exhaust road; 3 3~ check valve; 3 5~ liquid level Sensor; 38 ~ inner container; 3 8 a ~ side wall; 38b ~ partition; 38c ~ top; 39 ~ first chamber; 40 ~ second chamber; 42 ~ liquid level sensor; 44 ~ discharge; ~ controller; 48 ~ supply pump; 49 ~ cleaning solution supply tank; 50 ~ supply tube; 52 ~ cover body; 55 ~ loop circuit; 55a, 55b ~ end; 57 ~ loop pump; 58 ~ screening program ;

2014-9694-PF 200846095 6 0~ ultrasonic cleaning unit; 62~heater; 65~ heater side discharge pipe; 66~ screening program side discharge pipe; 6 8~ drainage groove; 6 9~ check valve; Needle valve; 72~ drain pipe; • 74~ conveying unit; 74a~ lifting member; 74b~ guiding member; S-drying space; W~ to be cleaned. twenty one

2014-9694-PF

Claims (1)

200846095 % X. Patent application scope: 1. A cleaning and drying device for cleaning the object to be cleaned by the cleaning liquid and drying the cleaning liquid attached to the object to be cleaned, characterized in that: the outer container; the inner container, the setting The outer container β has an opening for allowing the object to be washed out, and the cleaning liquid is stored in the inner container; the decompression unit decompresses the inside of the outer container to be attached to the cleaning device. The cleaning liquid on the object evaporates; the purifying unit purifies the cleaning liquid; and the lid body hermetically seals the opening portion of the inner container. 2. The cleaning and drying device according to claim 1, wherein the heater is heated to heat the cleaning liquid. 3. The washing and drying device according to claim 2, wherein the inner container has a partition that partitions the inner container inner portion into a first chamber and a second chamber, and the object to be cleaned is immersed in the above In the first chamber, the inner container is provided with a loop, and one end of the loop is connected to the first chamber, and the other end of the loop is connected to the second chamber, and the loop is provided The pump, by driving the system, causes the cleaning liquid in the first chamber to overflow the second chamber over the partition. 4. The cleaning and drying device according to claim 3, wherein the purification unit has a screening program provided on the loop. 5. The cleaning and drying device according to the above-mentioned patent application scope, wherein the inner container is provided with an ultrasonic cleaning unit in 2014-9694-PF 22 200846095 %. The cleaning and drying device according to any one of claims 1 to 5, wherein the decompression unit has a suction path connected to the outer container and a pump provided in the suction path, the suction path Connected to a gas-liquid separator, the gas-liquid separator is provided with a condensing unit. The cleaning and drying device according to any one of the preceding claims, wherein the cleaning unit comprises: a transport unit that transports the inside and the outside between the inside and the outside of the inner container The object to be cleaned, the conveyance unit, can shake the object to be cleaned when the object to be cleaned is washed in the inner container. 2014-9694-PF 23