KR20080104971A - Cleaning and drying apparatus - Google Patents

Abstract

A cleaning and drying apparatus is provided to prevent the cleaning time from being long and extending the service life of the washing solution. A cleaning and drying apparatus(10) comprises the outer container(14), the inner side container(38), the decompression means(20), the purification means(58), and the cover(52). The inner side container is arranged inside the outer container. The inner side container makes the washing solution to flow and includes the opening making the material to come in or out. The decompression unit decompresses the inside of the outer container at the extent in which the washing solution adhered to the material to be cleaned disappears. The purification unit purifies the washing solution. The cover prevents the opening of the inner side container with the hermetic state.

Description

Cleansing and Drying Equipment {CLEANING AND DRYING APPARATUS}

The present invention relates to a washing and drying apparatus.

2. Description of the Related Art As a type disclosed in Japanese Patent Laid-Open No. 7-109590, two sets of vacuum degreasing cleaners are known. As shown in FIG. 2, the washing apparatus includes two upper and lower sets in which a drying chamber 102 is disposed on the washing chamber 101. The cleaning apparatus washes the object to be cleaned W by the cleaning liquid stored in the cleaning chamber 101, and then lifts the object to be cleaned W by the lifting device 103 to the drying chamber 102. The object to be cleaned W is dried by vacuuming the interior of the drying chamber 102. Further, in consideration of the fact that the contaminant in the cleaning liquid adheres to the object to be cleaned, in the cleaning apparatus, the shower member 104 pouring the cleaning liquid into the object to be cleaned W before drying the object to be cleaned. ) Is provided in the drying chamber 102.

On the other hand, as a form disclosed in Japanese Patent Laid-Open No. Hei 6-84872, a cleaning apparatus of one set type is also known. As shown in FIG. 3, in the cleaning apparatus, the cleaning tank 111 not only cleans the object W to be cleaned by the cleaning liquid, but also pure water and pure water W by pure water. It is in the form of drying. In the cleaning tank 111, a circulating filtration device 113 for circulating the cleaning liquid to remove contaminants from the filter 112 is provided. Therefore, in the case of washing with the cleaning liquid, the circulation filtration device 113 is operated to maintain the cleanliness of the cleaning liquid. In addition, after washing, the contaminated washing liquid is discharged through the drain pipe 114, while pure water is supplied to the washing tank 111 through the pure water supply line 115, and the circulating filtration device 113 is operated. The washing | cleaning material W is washed with water. Therefore, the pure water is discharged at the end, and dry air is supplied to the cleaning tank 111 through the air supply duct 116 to dry the object to be cleaned W, thereby completing a series of cleaning processes. have.

In the washing apparatus of Japanese Patent Laid-Open No. 6-84872, the size of the apparatus can be reduced by being a single tank type, but in the apparatus, the washing liquid is discharged (disposed) for the pure water cleaning, and the washing tank 111 is used. The interior must be empty. The cleaning device is a device for the object to be cleaned (W) that requires pure water cleaning after cleaning with the cleaning liquid. However, since the cleaning liquid needs to be disposed of once, the cleaning device requires a large amount of cleaning liquid. There was this.

On the other hand, in the apparatus of Japanese Patent Laid-Open No. 7-109590, the cleaning liquid does not need to be disposed of once since there is no pure water washing step, but the cleaning liquid remains in the cleaning chamber 101 for a long time, so that the cleaning liquid is in turn. Is contaminated. For this reason, there is a problem in that it is not possible to obtain the cleaning of the object to be cleaned W with a contaminated cleaning solution. In addition, although the contaminants adhered to the object to be cleaned (W) are washed and removed by the shower member 104, this configuration has a problem in that it takes additional time in the cleaning process.

An object of the present invention is to prevent the washing time from prolonging and to increase the life of the washing liquid in the apparatus for washing the object to be cleaned, by allowing the elimination of pure water washing.

According to one aspect of the present invention, there is provided a cleaning and drying apparatus for drying a cleaning liquid adhered to a object to be cleaned while washing the object to be cleaned with a cleaning liquid, the outer container being disposed inside the outer container and the cleaning liquid is stored. An inner container provided with an opening for allowing the object to be taken out and simultaneously to be cleaned, a decompression means for depressurizing the inside of the outer container to the extent that the cleaning liquid attached to the object is evaporated, and a purification for purifying the cleaning liquid. Means and a lid for preventing the opening of the inner container from being hermetically sealed.

The use of a washing and drying apparatus for washing a to-be-cleaned object which is permitted to omit pure water cleaning according to an embodiment of the present invention can prevent the cleaning time from being prolonged and make it possible to prolong the service life of the cleaning liquid.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

1 is a view schematically showing an embodiment of the washing and drying apparatus according to the present invention. The cleaning and drying apparatus 10 according to the present embodiment is an apparatus for cleaning and drying semiconductors, precision machine parts, and the like. In the form as shown in the figure, the cleaning and drying apparatus 10 is provided with a case 12, the outer container 14 is housed in the case 12 is configured.

The outer container 14 is a container in which the upper side is opened, and the outer container 14 is provided with an outer cover 15. The outer cover 15 can be configured to open and close the outer opening 16 formed on the upper side of the outer container 14, thereby making it possible to close the outer opening 16 in the airtight state by the outer cover 15. The outer opening 16 is used to bring the object to be cleaned W into the outer container 14.

The outer container 14 is provided with a decompression means 20 for depressurizing the inside of the outer container 14. The decompression means 20 includes a suction path 20a and a vacuum pump 20b. One end of the suction passage 20a is connected to a vacuum port 22 provided in the outer container 14. The suction path 20a is provided with a first check valve 23, a vacuum pump 20b and a second check valve 24. The inside of the outer container 14 is reduced in pressure as the vacuum pump 20b is driven.

The other end of the suction path 20a is connected to the gas-liquid separator 26. The gas-liquid separator 26 serves to separate the vaporized cleaning liquid including air sucked through the suction path 20a from the air. The gas-liquid separator 26 is provided with a pressure pump 28 as a condensing means. The pressurized pump 28 is connected to the gas-liquid separator 26, and the pressurized pump 28 may pressurize the inside of the gas-liquid separator 26 according to the reduced pressure state by driving the pressurized pump 28. As the gas-liquid separator 26 is pressurized, it becomes possible to liquefy the vaporized cleaning liquid. The liquefied cleaning liquid is recovered to the cleaning liquid recovery tank 30.

An exhaust path 32 is connected to the gas-liquid separator 26. The exhaust path 32 is used to exhaust the air inside the gas-liquid separator 26 to the outside of the case 12. The check valve 33 is provided in the exhaust path 32. In addition, the liquid-liquid separator 26 is provided with a liquid level sensor 35.

The inner container 38 is accommodated in the outer container 14. The space inside the outer container 14 other than the inner container 38 functions as a drying space S1 for drying the object to be cleaned. The inner container 38 is a container having a side wall (outer wall) 38a whose upper side is opened, and a cleaning liquid (chemical liquid) is stored in the inner container 38. The interior of the inner container 38 is divided into a first chamber 39 and a second chamber 40 by a partition wall 38b. The first chamber 39 is sized to insert the object to be cleaned W, and the second chamber 40 is disposed on the side of the first chamber 39 with the partition wall 38b therebetween. have. The dividing wall 38b is formed at a height lower than the side wall 38a of the inner container 38, so that when the cleaning liquid is supplied into the first chamber 39 to the extent that the dividing wall 38b is exceeded, the dividing wall 38b is formed in the first chamber 39. The cleaning liquid exceeds the dividing wall 38b and is stored in the second chamber 40.

The liquid level sensor 42 and the discharge port 44 are installed in the second chamber 40. The liquid level sensor 42 is configured to detect the liquid level in the second chamber 40, and is used to control the amount of liquid in the second chamber 40 within a predetermined range. The liquid level sensor 42 is connected to the controller 46. If the liquid level in the second chamber 40 falls below the height of the lower limit, the supply port 48 is driven to supply the cleaning liquid from the cleaning liquid supply tank 49. If the liquid level exceeds the upper limit, the cleaning liquid supply tank 49 ), The cleaning liquid supply is stopped. The discharge port 44 is used to discharge all the cleaning liquid in the second chamber 40.

The ceiling 38c is installed in the inner container 38. The ceiling 38c is provided on the side wall 38a in such a manner as to close a part of the opening of the inner container 38. The ceiling portion 38c is fixed to the outlet end of the supply pipe 50 connecting the cleaning liquid supply tank 49.

In addition, the inner container 38 is provided with a cover 52 for opening and closing the upper opening. The lid 52 is rotatably installed on the side wall 38a of the inner container 38, and the lid 52 is provided in two positions, a closed position facing horizontally and an open position standing vertically in the closed position. Get the location. Therefore, in the closed position, the lid 52 is shaped to block the upper inlet in the airtight state. In the closed position, the cover 52 is secured by sealing the cover 52 with the ceiling 38c. In addition, in FIG. 1, the cover 52 in the closed position is shown by the solid line, and the cover 52 in the open position is shown by the dotted line.

A circulation passage 55 for circulating the washing liquid is connected to the inner container 38. One end 55a (upstream end) of the circulation passage 55 is connected to the bottom of the second chamber 40, and the other end 55b (downstream end) is connected to the bottom of the first chamber 39. . The other end 55b has a tubular shape extending in the horizontal direction, for example, and the cleaning liquid in the circulation passage 55 is formed in the inner container 38 through a plurality of through holes (not shown) provided on the wall surface thereof. Spill inside.

The circulation path 55 is provided with a circulation pump 57 and a filter 58 as purification means. The circulation pump 57 is for forcibly flowing the cleaning liquid, and the circulation pump 57 is connected to the first chamber 39 from one end 55a connected to the second chamber 40. The cleaning liquid flows toward (). When the circulation pump 57 is driven, the cleaning liquid in the second chamber 40 is sucked, while the cleaning liquid in the circulation path 55 flows out into the first chamber 39. As a result, the cleaning liquid is circulated between the inner container 38 and the circulation path 55. The filter 58 is for purifying the cleaning liquid, and is configured to capture contaminants contained in the cleaning liquid.

Ultrasonic cleaning means 60 is installed in the inner container 38. The ultrasonic cleaning means 60 can improve the cleaning power of the cleaning liquid by applying ultrasonic vibration to the cleaning liquid in the inner container 38.

The circulation path 55 is provided with a heater 62 capable of heating the cleaning liquid. The heater 62 is configured to be controllable by the controller 46. In addition, the inner container 38 is provided with a liquid thermometer 64 for detecting the temperature of the cleaning liquid. The liquid thermometer 64 is also connected to the controller 46. The cleaning liquid is heated in the heater 62 in such a way that the cleaning liquid in the outer container 14 evaporates as the pressure of the drying space S1 in the outer container 14 is reduced, whereas the inner side due to the endothermic action This is to prevent the cleaning liquid in the container 38 from cooling and solidifying. On the other hand, the heating of the cleaning liquid to the boiling point is prevented by monitoring the temperature of the cleaning liquid. In addition, the circulation pump 57, the filter 58, and the heater 62 are disposed in the outer case 12 of the outer container 14.

The circulation path 55 is connected to a heater side discharge pipe 65 for discharging the cleaning liquid remaining in the heater 62 and a filter side discharge pipe 66 for discharging the cleaning liquid remaining in the filter 58. Any of these discharge pipes 65 and 66 can be connected to the drainage tank 68. In addition, the check valve 69 is provided in the heater side discharge pipe 65, and the needle valve 70 is provided in the filter side discharge pipe 66, respectively. In addition, the cleaning liquid remaining in the outer container is recovered to the drain tank 68 through the drain pipe 72.

The cleaning and drying apparatus 10 is provided with a conveying means 74 for conveying the liquid to be cleaned W between the inside and the outside of the inner container 38. The conveying means 74 is provided with the lifter 74a driven by the motor which is not shown in figure, The said lifter 74a is comprised so that it can move to an up-down direction according to the guide 74b which extends up and down. Therefore, the conveying means 74 conveys the to-be-cleaned object W mounted on the lifter 74a from the outside of the inner container 38 which precedes a washing | cleaning process, and wash | cleaning is complete | finished, The object to be cleaned W is conveyed from the inside of the inner container 38 to the outside (the space S1 for drying). In addition, although not shown, the wall of the outer container 14 is formed in the vertical direction through the hole, the support member (not shown) of the lifter penetrates the hole. Therefore, the simultaneous support member of the lifter 74a moves up and down inside its hole. The hole is sealed by bellows, thereby ensuring the tightness of the outer container 14.

The lifter 71a can swing when the object to be cleaned W is washed. For example, the lifter 74a may be configured to swing in the vertical direction in accordance with the guide 74b, or the lifter 74a may be configured to swing left and right with respect to the guide 74b. .

Next, the operation of the washing and drying apparatus 10 according to the present embodiment will be described. In the operation of the cleaning and drying apparatus 10, the cleaning drying apparatus 10 includes a washing step of washing the object to be cleaned and a drying step of drying the wet object to be cleaned. In the washing step, the object to be cleaned W is conveyed into the inner container 38 by the conveying means 74 and deposited in the washing liquid. At the time of conveyance, the outer lid 15 is opened to put the object to be cleaned W in the outer vessel 14 through the outer opening 16 of the outer vessel 14, and then the lid 52 is closed to lift the lifter 74a. ), The object to be cleaned W is loaded into the inner container 38.

As the circulation pump 57 is driven, the cleaning liquid in the second chamber 40 of the inner container 38 is sucked into the circulation path 55, and the cleaning liquid flows through the circulation path 55, and then the other end 55b ( It is supplied into the 1st chamber 39 through the downstream end part. Since the other end part 55b of the circulation path 55 is provided in the bottom part of the 1st chamber 39, in the 1st chamber 39 of the inner side container 38, the washing | cleaning liquid supplied from below is divided into the partition wall 38b. Upward flow occurs. The cleaning liquid circulates between the inner container 38 and the circulation path 55, but the contaminant contained in the cleaning liquid due to the circulation is removed by the filter 58.

In addition, in the washing step, ultrasonic vibration is generated in the cleaning liquid by the ultrasonic cleaning means 60, and the object to be cleaned W is shaken by the shaking of the lifter 74a. For this reason, cleaning is performed by the ultrasonic vibration applied to the flow of the cleaning liquid and the shaking of the object to be cleaned W itself. Then, when the cleaning is completed, the lifter 74a is raised, and the to-be-cleaned object W is conveyed and discharged to the outside of the inner container 38, that is, into the drying space S1. In addition, it is preferable to open the cover 52 at the time of washing | cleaning, or to set it to the closed state.

In the drying process, the lid 52 of the inner container 38 is closed and the vacuum pump 20b is driven. As a result, the outer space (drying space) S1 of the inner container 38 is reduced in pressure. And the washing | cleaning liquid evaporates with pressure reduction, and the to-be-cleaned object W is dried by this.

On the other hand, the vaporized washing liquid is sucked by the vacuum pump 20b and introduced into the gas-liquid separator 26 through the suction path 20. In the gas-liquid separator 26, the gaseous washing liquid is condensed by the driving of the pressure pump 28 to be separated from the air. Air is exhausted to the outside through the exhaust path 32, the cleaning liquid is recovered to the cleaning liquid recovery tank (30).

In the drying step, the temperature is lowered because the surrounding heat is taken away with vaporization of the cleaning liquid in the drying space S1. In connection with the said temperature fall, the temperature of the washing | cleaning liquid in the inner side container 38 falls, and the undesirable thing to which a washing | cleaning liquid solidifies arises. Therefore, solidification of the cleaning liquid can be prevented by heating the cleaning liquid through the heater 62. In addition, the cleaning liquid temperature in the inner container 38 is detected by the liquid thermometer 64, and the cleaning liquid is prevented from being heated to a temperature above the boiling point. In addition, although the washing | cleaning liquid is a form circulated by the circulation pump 57 at the completion of a drying process, it is preferable to drive the circulating pump 57 with a washing | cleaning process in the case where there is no concern of solidification of a washing | cleaning liquid.

According to this embodiment which is the form described above, since the filter 58 which purifies a washing | cleaning liquid is provided, even if the washing | cleaning liquid is contaminated by washing | cleaning the to-be-cleaned object W in the inner container 38, Purification is possible. Therefore, it is not necessary to take countermeasures such as fresh washing after washing, and it is possible to prevent the washing process from lengthening. In addition, the cleaning liquid can be used for a long time. In addition, by drying the to-be-cleaned object W after washing in accordance with the pressure reduction of the inside of the outer container 14, it becomes possible to dry the to-be-cleaned object W in detail. At this time, since the inner container 38 is blocked by the cover 52 in an airtight state, it is possible to collect the cleaning liquid in the inner container 38 therein and to reduce the pressure inside the outer container 14 intermittently. For this reason, the time which discharges a washing | cleaning liquid at the time of drying of the to-be-cleaned object W can be skipped, the time of a drying process can be shortened, and waste disposal of a washing | cleaning liquid can be prevented unnecessarily. Moreover, the inner container 38 for cleaning is accommodated in the outer container 14 used for drying the to-be-cleaned object W, so that the outer container 14 itself which needs to be comprised by a closed container is needed. It is possible to suppress the increase in the processing time. In addition, the inner container 38 is arranged inside the outer container 14 so that the inner container 38 itself moves independently when adjusting the horizontality of the inner container 38 in the arrangement time of the apparatus. So that adjustment work can be suppressed. As a result, in order to ensure the sealing property between the cleaning chamber and the drying chamber in the configuration of the two upper and lower sets shown in Fig. 2, the drying chamber is firmly fixed to the cleaning chamber. Since the inclination adjustment of the integrated device must be performed, the adjustment work becomes complicated. On the other hand, in the structure in which the inner side container 38 in the outer side container 14 which concerns on this embodiment was accommodated, since the necessity to ensure sealing property in the junction part of the outer side container 14 and the inner side container 38 does not arise, it is an inner side. It is possible to perform tilt adjustment in the container 38 single body, and the effort required for adjustment work is reduced. In particular, in the present embodiment, fine adjustment of the inner container 38 is required by setting it to an overflowed configuration. However, since fine adjustment of the inner container 38 is completed, fine adjustment of the inner container 38 is performed. The work is easily done.

In addition, in this embodiment, since the heater 62 which heats a washing | cleaning liquid is provided, solidification | cleaning of the washing | cleaning liquid in the inner container 38 by temperature fall with evaporation of a washing | cleaning liquid in the drying space S1 can be prevented. To be. In addition, it is possible to improve the washing ability by increasing the temperature of the washing liquid. It is also possible to keep the treatment temperature constant.

In the present embodiment, when the circulation pump 57 is driven, the cleaning liquid in the second chamber 40 flows into the first chamber 39 through the circulation path 55. The cleaning liquid in the first chamber 39 overflows the dividing wall 38 and flows into the second chamber 40. In this manner, the cleaning liquid can be forcedly circulated. That is, it becomes possible to forcibly flow the cleaning liquid in the first chamber 39 in which the object to be cleaned W is deposited by the pump 57, so that the cleaning ability of the object to be cleaned W can be improved. do.

Furthermore, in the present embodiment, the ultrasonic cleaning means 60 is provided so that the cleaning power of the object to be cleaned W can be further improved.

In addition, in this embodiment, although the air sucked through the suction path 20a flows into the gas-liquid separator 26 according to the drive of the vacuum pump 20b, the gas-cleaning liquid contained in the air is the gas-liquid separator 26. It becomes a thing to be stored in. Since the gas-liquid separator 26 is provided with a condensation means, it is possible to liquefy and separate the vaporized cleaning liquid.

In addition, in this embodiment, since the to-be-cleaned object W can be wash | cleaned by rocking the to-be-cleaned object W at the time of washing | cleaning, it is possible to improve a washing | cleaning ability further.

Here, this invention is not limited to the said embodiment, It is possible to change and improve variously in the range which does not deviate from the summary. For example, although the heater 62 is provided in the circulation path 55, it can also be set as the form arrange | positioned in the inner container 38 with respect to this.

In addition, in this embodiment, although the lifter 74a is made to rock | fluctuate at the time of washing | cleaning, it is also possible that the lifter 74a does not rock | sway according to the kind of to-be-cleaned object W. It is also possible to omit the ultrasonic cleaning means 60.

Outline of Embodiment

The above embodiment is summarized as follows.

(1) In this embodiment, since purification means for purifying the cleaning liquid is provided, the cleaning liquid can be purified even if the cleaning liquid is contaminated due to cleaning the object to be cleaned in the inner container. Therefore, it is not necessary to take countermeasures such as fresh washing after washing, and it is possible to prevent the washing process from lengthening. In addition, the cleaning liquid can be used for a long time. In addition, it is possible to dry the object to be cleaned in detail by drying the object to be cleaned after washing in accordance with the pressure reduction of the inside of the outer container. At this time, since the inner container is clogged in the airtight state by the cover, it is possible to collect the cleaning liquid in the inner container there and to depressurize the inside of the outer container occasionally. For this reason, the time which discharges a washing | cleaning liquid at the time of drying of a to-be-cleaned object can be skipped, the time of a drying process can be shortened, and the waste of the washing liquid which is wastelessly performed can be prevented. Furthermore, the structure in which the inner container for cleaning is accommodated in the outer container used for drying the to-be-cleaned object becomes possible, and it becomes possible to suppress the increase of the processing time of the outer container itself which needs to be comprised by the closed container. In addition, since the inner container is arranged inside the outer container, the inner container itself can be moved independently when adjusting the horizontal level of the inner container in the arrangement time of the apparatus, thereby reducing the complicated operation. To be able. As a result, in order to ensure the sealing property between the cleaning chamber and the drying chamber in the configuration of the two upper and lower sets shown in Fig. 2, the drying chamber is firmly fixed to the cleaning chamber. Since the inclination adjustment of the integrated device must be performed, the adjustment work becomes complicated. On the other hand, in the structure in which the inner container in the outer container which concerns on this embodiment was accommodated, since the necessity of ensuring sealing property in the junction part of an outer container and an inner container does not arise, the inclination adjustment can be performed in an inner container single body. This reduces the effort required for coordination.

(2) In the washing drying apparatus, a heater for heating the washing liquid is preferably provided. In the outer container, since the cleaning liquid evaporates with reduced pressure, a temperature decrease occurs due to latent heat of vaporization. In this embodiment, a heater for heating the cleaning liquid is installed, thereby preventing the cleaning liquid in the inner container from coagulating due to the temperature decrease. Will be. Moreover, it is also possible to improve the washing | cleaning ability according to the temperature rise of a washing | cleaning liquid. In addition, it is possible to ensure a constant processing temperature.

(3) The washing and drying apparatus, wherein the inner container is provided with a dividing wall for dividing the first chamber and the second chamber in which the object to be cleaned is deposited inside the container, and one end of the inner container is connected to the first chamber. When the other end is connected to the second chamber and a circulation path is provided, when the pump is installed in the circulation path, the cleaning liquid in the first chamber is preferably flooded from the dividing wall into the second chamber by the driving of the pump. In this embodiment, when the pump is driven, the washing liquid in the second chamber flows into the first chamber through the circulation passage. The cleaning liquid in the first chamber is flooded from the dividing wall and flows into the second chamber. This form makes it possible to circulate the cleaning liquid forcibly. That is, it is possible to forcibly drive the cleaning liquid in the first chamber in which the object to be cleaned is deposited, thereby improving the cleaning ability of the object to be cleaned.

(4) In the above aspect, the purification means preferably comprises a filter provided in the circulation passage. In this aspect, the cleaning liquid flows from the inner container into the circulation path as the pump is driven, and the cleaning liquid moves along the circulation path. The cleaning liquid is then purified by a filter.

(5) In the above washing and drying apparatus, preferably, ultrasonic cleaning means is provided in the inner container. This aspect makes it possible to further improve the cleaning power of the object to be cleaned.

(6) The washing and drying apparatus, wherein the decompression means includes a suction path connected to an outer container and a pump provided in the suction path, the suction path is connected to a gas-liquid separator, and the gas-liquid separator is provided with condensation means. do. In this aspect, the air sucked through the suction path flows into the gas-liquid separator, and the vaporized washing liquid contained in the air is stored in the gas-liquid separator. Since the condensation means is provided in the gas-liquid separator, it is possible to liquefy and separate the vaporized washing liquid.

(7) In the cleaning and drying apparatus, in the case where a conveying means for conveying the object to be cleaned is provided between the inside and the outside of the inner container, the conveying means is used for cleaning the object to be cleaned in the inner container. Allow the cleaning material to be configured in a swingable form. In the above aspect, it becomes possible to wash the to-be-cleaned object by rocking the to-be-washed object, thereby further improving the washing ability.

Although preferred embodiments of the present invention have been described above, the present invention is not limited to the above, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention. Belongs to the scope of.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view schematically showing the overall configuration of a washing and drying apparatus according to an embodiment of the present invention.

2 is a view showing the configuration of a conventional washing and drying apparatus.

3 is a view showing the configuration of a conventional washing and drying apparatus.

* Brief description of symbols for the main parts of the drawings *

10: washing and drying device 12: case

14: outer container 15: outer cover

16: outer opening 20: decompression means

22: vacuum port 23: first check valve

24: second check valve 26: gas-liquid separator

28: pressurized pump 30: cleaning liquid recovery tank

32: exhaust passage 33: check valve

35: liquid level sensor 38: inner container

39: room 1 40: room 2

42: liquid level sensor 44: discharge port

46: controller 48: supply port

49: cleaning liquid supply tank 50: supply pipe

52: cover 55: circuit

57: circulation pump 58: filter

60: ultrasonic cleaning means 62: heater

64: liquid thermometer 65: heater side discharge pipe

66: filter side discharge pipe 68: drain tank

69: check valve 70: needle valve

72: drain pipe 74: conveying means

Claims (7)

A washing-drying apparatus for washing a substance to be cleaned with a cleaning liquid and drying the cleaning liquid attached to the object to be cleaned, Outside container, An inner container disposed inside the outer container, the inner container having an opening configured to store the cleaning liquid and to allow the object to be washed out; Decompression means for depressurizing the inside of the outer container to the extent that the cleaning liquid attached to the object to be cleaned evaporates; Purifying means for purifying the cleaning liquid; And a lid for blocking the opening of the inner container in an airtight state. The cleaning and drying apparatus according to claim 1, further comprising a heater for heating the cleaning liquid. The said inner container is provided with the partition wall which divides the inside of a container into the 1st chamber and the 2nd chamber in which the to-be-cleaned object was deposited, The inner container is provided with a circulation passage in which one end is connected to the first chamber and the other end is connected to the second chamber, A pump is provided in the circulation path, and the cleaning and drying apparatus is characterized in that the cleaning liquid in the first chamber is overflowed from the dividing wall into the second chamber by the driving of the pump. 4. The cleaning and drying apparatus according to claim 3, wherein the purifying means is constituted by a filter provided in the circulation passage. The washing and drying apparatus according to claim 1, wherein the inner container is provided with ultrasonic cleaning means. The said decompression means is equipped with the suction path connected to the said outer container, and the pump provided in the said suction path, The suction path is connected to the gas-liquid separator, The gas-liquid separator is a washing and drying device, characterized in that the condensation means is installed. A conveying means for conveying the object to be cleaned between the inside and the outside of the inner container, and And the conveying means is configured to oscillate the object to be cleaned when cleaning the object to be cleaned in the inner container.

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