CN101314158A - Washing drying apparatus - Google Patents
Washing drying apparatus Download PDFInfo
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- CN101314158A CN101314158A CNA2008101001256A CN200810100125A CN101314158A CN 101314158 A CN101314158 A CN 101314158A CN A2008101001256 A CNA2008101001256 A CN A2008101001256A CN 200810100125 A CN200810100125 A CN 200810100125A CN 101314158 A CN101314158 A CN 101314158A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention provides a cleaning and drying device which cleans and dries cleaned objects capable of saving a cleaning step with pure water, and which can shorten cleaning time and prolong service life of cleaning solution. The cleaning and drying device (10) includes: an external vessel (14); an internal vessel (38) mounted within the external vessel and provided with an opening section through which the cleaned objects goes in and out; the internal vessel stores the cleaning solution; a vacuum pump (20b) pressurizing interior of the external vessel to evaporate the cleaning solution affixed to the cleaned objects; a filter (58) purifying the cleaning solution; and a cover body which is used for the airtight seal of the opening section of the internal vessel (38).
Description
Technical field
The present invention relates to a kind of clearing and drying device.
Background technology
In the past, the known vacuum degrease cleaning device that has the open communique spy of Japan Patent for example to open flat 7-109590 number disclosed such dual-trench type.As shown in Figure 2, this cleaning device is provided with hothouse 102 above purge chamber 101, has double-layer structure up and down.In this cleaning device, clean and be cleaned thing W with being stored in cleaning fluids in the purge chamber 101, will be cleaned thing W with lowering or hoisting gear 103 then and deliver to hothouse 102, and make and become vacuum state in the hothouse 102 and come to carry out drying being cleaned thing W.In addition, consider dirty one-tenth branch in the cleaning fluid attached to being cleaned on the thing W, this cleaning device is provided with spray head 104 in hothouse 102, is used for being cleaned thing W to before being cleaned thing W to carry out drying cleaning fluid being sprayed.
On the other hand, the known cleaning device that has the open communique spy of Japan Patent for example to open flat 6-84872 number disclosed such single grooved.As shown in Figure 3, in the rinse bath 111 of this cleaning device, not only clean and be cleaned thing W, also clean (pure water cleaning), carry out drying to being cleaned thing W then with pure water with cleaning fluid.In addition, in rinse bath 111, be provided with the circulation filter 113 that makes the cleaning fluid circulation, removes dirty composition with filter 112.When cleaning, start circulation filter 113, to keep the cleannes of cleaning fluid with cleaning fluid.After this external cleaning, discharge dirty cleaning fluid, and supply with pure water to rinse bath 111, clean being cleaned thing W while start circulation filter 113 usefulness pure water by pure water supply line 115 by drainpipe 114.At last, discharge pure water, and supply with drying by air supply pipe 116 to rinse bath 111 and use air, carry out drying, finish a series of cleaning step being cleaned thing W.
The open communique spy of this Japan Patent drives flat 6-84872 number cleaning device, owing to be single grooved, but the miniaturization of implement device, but in this device, clean in order to carry out pure water, must discharge all cleaning fluids in (discarding) rinse bath 111.The cleaning object of this cleaning device be must carry out after cleaning that pure water cleans with cleaning fluid be cleaned thing W, exist each cleaning all will discard all cleaning fluids, need the problem of a large amount of cleaning fluids.
On the other hand, the open communique spy of described Japan Patent drives flat 7-109590 number cleaning device, owing to there is not the pure water cleaning step, need not discard cleaning fluid, but because of cleaning fluid is stored in the purge chamber 101 always, cleaning fluid can be dirty gradually at every turn.Therefore, existence has to use dirty cleaning fluid to clean the problem that is cleaned thing W.In addition, in this cleaning device, wash off attached to being cleaned dirty on the thing W with spray head 104, because of this cleaning step, also existing needs extra time-consuming problem.
Summary of the invention
The objective of the invention is to, provide a kind of and be cleaned to what can omit the pure water cleaning step that thing cleans, dry clearing and drying device, can prevent that scavenging period is elongated, and can prolong the life-span of cleaning fluid.
The invention provides a kind of clearing and drying device, utilize cleaning fluid to clean and be cleaned thing, and the cleaning fluid that is cleaned attached to this on thing is carried out drying, comprising: outside container; Inboard container is arranged in the container of the described outside, has to be used to make the described peristome that thing is come in and gone out that is cleaned, and stores described cleaning fluid in this inboard container; Decompressing unit makes the inner pressure relief of described outside container, so that attached to the described cleaning fluid evaporation that is cleaned on the thing; Clean unit purifies described cleaning fluid; And lid, the described peristome of the described inboard container of gas-tight seal.Thus, can prevent that scavenging period is elongated, and can prolong the life-span of cleaning fluid.
Description of drawings
Fig. 1 is the integrally-built skeleton diagram of the clearing and drying device of expression embodiment of the present invention.
Fig. 2 represents the figure of the structure of clearing and drying device in the past.
Fig. 3 represents the figure of the structure of clearing and drying device in the past.
The specific embodiment
Below, with reference to accompanying drawing better embodiment of the present invention is elaborated.
Fig. 1 is the skeleton diagram of an embodiment of expression clearing and drying device of the present invention.The clearing and drying device 10 of present embodiment be used for to semiconductor or precision optical machinery parts etc. clean, dry device.As shown in Figure 1, clearing and drying device 10 comprises shell 12, accommodates outside container 14 in this shell 12.
Outside container 14 is the open containers of upside, and this outside container 14 has enclosing cover 15.By this enclosing cover 15, can open and close the outer openings 16 that is formed at outside container 14 upsides, and, utilize this enclosing cover 15, can gas-tight seal outer openings 16.This outer openings 16 is used for moving in the container 14 of the outside being cleaned thing W.
The decompressing unit 20 of the inner pressure relief of container 14 outside outside container 14 is provided with and is used to make.This decompressing unit 20 comprises attraction road 20a and vavuum pump 20b.Attract the end of road 20a to link to each other with the vacuum port 22 that is arranged at outside container 14.Attract road 20a to be provided with first check-valves 23, described vavuum pump 20b and second check-valves 24.By driving vavuum pump 20b, can make outside container 14 inner pressure relieves.
Attract the other end of road 20a to link to each other with gas-liquid separator 26.This gas-liquid separator 26 is used for from isolating the contained gasification cleaning fluid of this air by the air that attracts road 20a to attract.Gas-liquid separator 26 is provided with the force (forcing) pump 28 as condensing unit.Force (forcing) pump 28 links to each other with gas-liquid separator 26, by driving this force (forcing) pump 28, and can be to pressurizeing in the gas-liquid separator 26 that is in decompression state.By being pressurizeed in the inside of gas-liquid separator 26, can make the cleaning fluid liquefaction of gasification.Cleaning fluid after the liquefaction is recycled in the cleaning fluid accumulator tank 30.
Gas-liquid separator 26 links to each other with exhaust line 32.This exhaust line 32 is used for the air in the gas-liquid separator 26 is discharged to outside the shell 12.Exhaust line 32 is provided with check-valves 33.In addition, gas-liquid separator 26 is provided with liquid level sensor 35.
Accommodate inboard container 38 in the container 14 of the outside.The space except that inboard container 38 in this outside container 14 is dry with space S 1, is used for carrying out drying to being cleaned thing W.Inboard container 38 is containers that sidewall (outer wall) 38a was opened and had to upside, stores cleaning fluid (medicament) in this container 38.The inside of inboard container 38 is divided into first Room 39 and second Room 40 by dividing plate 38b.First Room 39 has can put into the size that is cleaned thing W, and second Room 40 is positioned at the outside of first Room 39 across dividing plate 38b.Because the height of dividing plate 38b is lower than the sidewall 38a of inboard container 38, when therefore the cleaning fluid during supplying to first Room 39 reached certain amount, first Room, 39 interior cleaning fluids were just crossed dividing plate 38b and are stored in second Room 40.
In addition, inboard container 38 is provided with the lid 52 that is used to open and close side opening.Lid 52 is arranged on the sidewall 38a of inboard container 38 rotationally, this lid 52 can be at the state of horizontal traverse the closed position and certainly vertical upright state of erecting of this closed position be to rotate between the open position.Lid 52 when being positioned at the closed position, can gas-tight seal on side opening.On the closed position, the face of lid 52 engages with the face of top 38c, to guarantee air-tightness.In Fig. 1, represent to be positioned at the lid 52 of closed position with solid line, dot the lid 52 that is positioned at open position.
But circulation road 55 is provided with the heater 62 of heated wash liquid.Controller 46 can be controlled this heater 62.In addition, inboard container 38 is provided with the liquid thermometer 64 that is used to detect rinse liquid temperature.This liquid thermometer 64 also links to each other with controller 46.Why using heater 62 heated wash liquid, is when preventing that drying in outside container 14 from making cleaning fluid evaporation in the container 14 of the outside with space S 1 decompression, because of the heat-absorbing action of generation thereupon makes the interior cleaning fluid cooled and solidified of inboard container 38.On the other hand, the temperature by the monitoring cleaning fluid can prevent that cleaning fluid is heated to boiling.In addition, circulating pump 57, filter 58 and heater 62 all are arranged in the shell 12 in container 14 outsides, the outside.
Be connected with on the circulation road 55: heater side discharge pipe 65 is used to discharge the cleaning fluid of staying in the heater 62; And filter side discharge pipe 66, be used to discharge the cleaning fluid of staying in the filter 58.Described discharge pipe 65,66 all links to each other with rhone 68.In addition, heater side discharge pipe 65 is provided with check-valves 69, and filter side discharge pipe 66 is provided with needle-valve 70.In addition, the cleaning fluid of savings in the container of the outside is recovered in the rhone 68 by drainpipe 72.
Clearing and drying device 10 is provided with and is used for the conveyance unit 74 that between inboard container 38 inside and outside conveyance is cleaned thing W.Conveyance unit 74 has lift component 74a, and this lift component 74a is driven by the motor (not shown), and can along the ways 74b that extends up and down up and down direction move.Conveyance unit 74, will be placed on before the cleaning step on the lift component 74a be cleaned thing W from the outside of inboard container 38 to inner conveyance, and clean will be cleaned after finishing thing W from the inside of inboard container 38 to outside (dry) conveyance with space S 1.In addition, be formed with the groove (not shown) that runs through to the direction vertical with above-below direction on the wall of outside container 14, the support component of lift component (diagram is omitted) runs through this groove, and the inboard at this groove when lift component 74a moves up and down moves up and down.This groove is guaranteed the sealing of outside container 14 thus by bellows (bellows) sealing.
When cleaning was cleaned thing W, lift component 74a can shake and be cleaned thing W.For example, lift component 74a can along ways 74b up and down direction shake, also can with respect to ways 74b to the left and right direction shake.
Below, the work of the clearing and drying device 10 of present embodiment is described.In the work of this clearing and drying device 10, comprise and clean cleaning step and the drying steps that thing W carries out drying that is cleaned that is cleaned thing W soaking.In cleaning step, will be cleaned thing W conveyance to inboard container 38 by conveyance unit 74, and be immersed in the cleaning fluid.When conveyance, open enclosing cover 15, the outer openings 16 by outside container 14 will be cleaned thing W and send in the container 14 of the outside, open lid 52 then, and lift component 74a is moved down, and will be cleaned thing W and move in the inboard container 38.
By driving circulating pump 57, the cleaning fluid in second Room 40 of inboard container 38 is inhaled in the circulation road 55, after this cleaning fluid flows through circulation road 55, supplies in first Room 39 by the other end 55b (end of downstream side).Because the other end 55b on circulation road 55 is arranged on the bottom of first Room 39, in first Room 39 of inboard container 38, produce the upwards flow phenomenon of crossing dividing plate 38b from the below cleaning liquid supplied.Thus, cleaning fluid circulates between inboard container 38 and circulation road 55, and by this circulation, the contained dirty composition of cleaning fluid is filtered device 58 and removes.
In addition, in cleaning step, ultrasonic wave cleaning unit 60 makes cleaning fluid produce ultrasonic vibration, and follows shaking of lift component 74a, is cleaned thing W and also shakes.Therefore, except that utilizing the flowing of cleaning fluid, also utilize ultrasonic vibration and be cleaned shaking of thing W itself and clean.After cleaning end, lift component 74a rises, and will be cleaned the outside of thing W conveyance to inboard container 38, and is promptly dry with in the space S 1.In addition, lid 52 can be opened also and can close when cleaning.
In drying steps, close the lid 52 of inboard container 38, drive vavuum pump 20b.Thus, make outer space (the dry space of using) the S1 decompression of inboard container 38.Cleaning fluid evaporates with decompression, carries out drying to being cleaned thing W thus.
On the other hand, the cleaning fluid of gasification is attracted by vavuum pump 20b, imports in the gas-liquid separator 26 through attracting road 20a.In gas-liquid separator 26, by the driving of force (forcing) pump 28, gasiform cleaning fluid condensation is with air separation.Air is discharged to the outside through exhaust line 32, and cleaning fluid is recycled in the cleaning fluid accumulator tank 30.
In this drying steps, along with gasify the phenomenon that the heat around causing once in a while is absorbed, temperature descends with cleaning fluid in the space S 1 in drying.The temperature of the cleaning fluid in this should be avoided inboard container 38 with this temperature descend, cleaning fluid solidifies.For this reason, with heater 62 heated wash liquid, to prevent solidifying of cleaning fluid.In addition, the temperature with the cleaning fluid in the inboard container 38 of liquid thermometer 64 detections prevents that cleaning fluid is heated to the temperature of boiling.At this, make cleaning fluid circulation though in drying steps, also drive circulating pump 57, can not solidify at cleaning fluid under the situation about waiting, driving circulating pump 57 in cleaning step only yet.
As mentioned above, dirty even cleaning fluid cleans in inboard container 38 after being cleaned thing W owing to be provided with the filter 58 that is used to purify cleaning fluid in the present embodiment, also can be purified.Therefore, carry out the measure of spray Cleaning for High Capacity etc. after need not to take to clean again, can prevent that cleaning step is elongated, also can make cleaning fluid durable in use.In addition, owing to make the inner pressure relief of outside container 14 come the thing W that is cleaned after cleaning is carried out drying, therefore can make the various piece that is cleaned thing W dry comprehensively.At this moment,, can in keeping inboard container 38, store under the state of cleaning fluid, make outside container 14 inner pressure relieves owing to utilize the inboard container 38 of lid 52 gas-tight seals.Therefore,, can shorten the drying steps time discharging the required time of cleaning fluid to being cleaned can save when thing W carries out drying, and, unnecessarily discarded, waste cleaning fluid can also be prevented.And, because being contained in, the inboard container 38 of cleaning usefulness is used for carrying out in the dry outside container 14 to being cleaned thing W, therefore can suppress machining period increase as the outside container 14 of airtight container.And, because inboard container 38 is arranged on the inboard of outside container 14, therefore, in the time of for example under the situation of setting device, will adjusting the levelness of inboard container 38, can move inboard container 38 separately, avoid adjusting the complicated of operation.Promptly, if adopt the structure of two grooves up and down shown in Figure 2, in order to ensure the sealing between purge chamber and the hothouse, hothouse firmly is fixed in the purge chamber, in the time will adjusting the levelness of this purge chamber, just have to adjust the gradient with hothouse all-in-one-piece device, it is very complicated to adjust operation.Relative therewith, as present embodiment, adopting inboard container 38 to be contained under the situation of the structure in the container 14 of the outside, because the sealing at the junction surface of container 14 and inboard container 38 outside need not to guarantee, can carry out the tilt adjustments of inboard container 38 separately, needn't be for adjusting the operation effort.Particularly, in the present embodiment,, therefore must finely tune, but get final product, can be easy to inboard container 38 is finely tuned operation because of only adjusting inboard container 38 to inboard container 38 owing to adopt the structure that cleaning fluid is overflowed.
In addition, in the present embodiment, owing to be provided with the heater 62 that is used for heated wash liquid, can prevent from inboard container 38 interior cleaning fluids to be solidified because of temperature that drying causes with the evaporation of the cleaning fluid in the space S 1 descends.And, rise by the temperature that makes cleaning fluid, can improve cleansing power, also can make treatment temperature keep certain.
In addition, in the present embodiment, by the driving of circulating pump 57, the cleaning fluid in second Room 40 flows into first Room 39 through circulation road 55.Then, the cleaning fluids in first Room 39 are crossed dividing plate 38b and are flowed in second Room 40.So can forcibly make the cleaning fluid circulation.That is, because by pump 57, the cleaning fluids that are cleaned in first Room 39 that thing W soaked are flowed, can improve the ability that is cleaned thing W of cleaning.
And, in the present embodiment,, can further improve the ability that is cleaned thing W of cleaning owing to be provided with ultrasonic wave cleaning unit 60.
In addition, in the present embodiment, by the driving of vavuum pump 20b, the air through attracting road 20a to be attracted flows in the gas-liquid separator 26, and gasification cleaning fluid contained in this air is stored in the gas-liquid separator 26.Because gas-liquid separator 26 is provided with condensing unit, the liquefaction of gasification cleaning fluid is separated.
In addition, in the present embodiment, while, can further improve cleansing power owing to when cleaning, shake and be cleaned thing W and clean and be cleaned thing W.
The present invention is not limited to described embodiment, can carry out various variations, improvement etc. in the scope that does not break away from purport of the present invention.For example, in the present embodiment, heater 62 is arranged on circulation road 55, but also can be arranged in the inboard container 38.
In addition, in the present embodiment, when cleaning, shake lift component 74a, but, lift component 74a is shaken according to the kind of cleaning thing W.In addition, also ultrasonic wave cleaning unit 60 can be set.
[summary of embodiment]
Described embodiment can be summarized as follows.
(1) in the present embodiment, dirty even cleaning fluid cleans in inboard container after being cleaned thing owing to be provided with the clean unit that is used to purify cleaning fluid, also can be purified.Therefore, carry out the measure of spray Cleaning for High Capacity etc. after need not to take to clean again, can prevent that cleaning step is elongated, and can make cleaning fluid durable in use.In addition, owing to make the inner pressure relief of outside container come the thing that is cleaned after cleaning is carried out drying, can make the various piece that is cleaned thing dry comprehensively.At this moment,, can in keeping inboard container, store under the state condition of cleaning fluid, make outside internal tank decompression owing to utilize the inboard container of lid gas-tight seal.Therefore,, promptly can shorten the drying steps time discharging the required time of cleaning fluid to being cleaned can save when thing carries out drying, and, unnecessarily discarded, waste cleaning fluid can also be prevented.And, because being contained in, the inboard container of cleaning usefulness is used for carrying out in the dry outside container to being cleaned thing, can suppress machining period increase as the outside container of airtight container.And, because inboard container is arranged on the inboard of outside container, therefore, in the time of for example under the situation of setting device, will adjusting the levelness of inboard container, can move inboard container separately, avoid adjusting the complicated of operation.Promptly, if adopt the structure of two grooves up and down shown in Figure 2, in order to ensure the sealing between purge chamber and the hothouse, hothouse firmly is fixed in the purge chamber, in the time will adjusting the levelness of this purge chamber, just have to adjust the gradient with hothouse all-in-one-piece device, it is very complicated to adjust operation.Relative therewith, as present embodiment, adopting inboard container to be contained under the situation of the structure in the container of the outside, owing to need not to guarantee the sealing at the junction surface of outside container and inboard container, can carry out the tilt adjustments of inboard container separately, needn't be to adjust the operation effort.
(2) described clearing and drying device comprises that the heater that is used for heated wash liquid is comparatively desirable.In the container of the outside, cleaning fluid evaporates with decompression, produces the temperature decline that heat of gasification causes, but in the present embodiment, owing to be provided with heater, can prevent that the cleaning fluid in the inboard container from solidifying with temperature decline.In addition, rise, can also improve cleansing power by the temperature that makes cleaning fluid.Also can make treatment temperature keep certain in addition.
(3) comparatively it is desirable in described clearing and drying device: described inboard container has dividing plate, and this dividing plate is divided into first Room and second Room with inboard internal tank, is cleaned thing and is immersed in described first indoor; Described inboard container links to each other with the circulation road, and an end on this circulation road links to each other with described second Room with described first Room respectively with the other end; Be provided with under the situation of pump on described circulation road,, make the described first indoor cleaning fluid cross described dividing plate to described second indoor the overflowing by driving this pump.In the present embodiment, by driving pump, the second indoor cleaning fluid just flows into first indoor through the circulation road.Then, the first indoor cleaning fluid is crossed dividing plate and is flowed into second indoor.So can forcibly make the cleaning fluid circulation.That is, be cleaned the first indoor cleaning fluid that thing soaks and flow, can improve the ability that is cleaned thing of cleaning owing to can forcibly make.
(4) comparatively it is desirable in the present embodiment, described clean unit has the filter that is arranged on described circulation road.In this embodiment, by driving pump, cleaning fluid flows into the circulation road from inboard container, and this cleaning fluid flows in the circulation road.Then, this cleaning fluid is filtered the device purification.
(5) comparatively it is desirable in described clearing and drying device, described inboard container is provided with the ultrasonic wave cleaning unit.In this embodiment, can further improve the ability that is cleaned thing of cleaning.
(6) comparatively it is desirable in described clearing and drying device: described decompressing unit has the attraction road that links to each other with described outside container and is arranged on the pump on this attraction road, and described attraction road links to each other with gas-liquid separator, and described gas-liquid separator is provided with condensing unit.In this embodiment, flow in the gas-liquid separator by the air that attracts the road to attract, this gas-liquid separator stores gasification cleaning fluid contained in the described air.Because gas-liquid separator is provided with condensing unit, the liquefaction of gasification cleaning fluid is separated.
(7) comprise the conveyance unit at described clearing and drying device, be used under the described situation that is cleaned thing of between described inboard container inside and outside conveyance, described conveyance unit can clean when being cleaned thing in described inboard container, can shake this and be cleaned thing.In this embodiment, while, can further improve cleansing power owing to shake and be cleaned thing and clean and be cleaned thing.
As mentioned above, present embodiment provides a kind of and is cleaned to what can omit the pure water cleaning step that thing cleans, dry clearing and drying device, can prevent that scavenging period is elongated, and can prolong the life-span of cleaning fluid.
Claims (7)
1. a clearing and drying device utilizes cleaning fluid to clean and is cleaned thing, and the cleaning fluid that is cleaned attached to this on thing is carried out drying, it is characterized in that comprising:
Outside container;
Inboard container is arranged in the container of the described outside, has to be used to make the described peristome that thing is come in and gone out that is cleaned, and stores described cleaning fluid in this inboard container;
Decompressing unit makes the inner pressure relief of described outside container, so that attached to the described cleaning fluid evaporation that is cleaned on the thing;
Clean unit purifies described cleaning fluid; And
Lid, the described peristome of the described inboard container of gas-tight seal.
2. clearing and drying device according to claim 1 is characterized in that comprising heater, heats described cleaning fluid.
3. clearing and drying device according to claim 1 is characterized in that,
Described inboard container has dividing plate, and this dividing plate is divided into first Room and second Room with described inboard internal tank, described be cleaned thing be dipped into described first indoor,
Described inboard container is provided with the circulation road, and an end on this circulation road links to each other with described first Room, and the other end on this circulation road links to each other with described second Room,
Described circulation road is provided with pump, by driving this pump, makes the described first indoor cleaning fluid cross described dividing plate to described second indoor the overflowing.
4. clearing and drying device according to claim 3 is characterized in that described clean unit has the filter that is arranged on described circulation road.
5. clearing and drying device according to claim 1 is characterized in that, described inboard container is provided with the ultrasonic wave cleaning unit.
6. according to each described clearing and drying device in the claim 1 to 5, it is characterized in that,
Described decompressing unit has attraction road that links to each other with described outside container and the pump that is arranged on this attraction road,
Described attraction road links to each other with gas-liquid separator,
Described gas-liquid separator is provided with condensing unit.
7. according to each described clearing and drying device in the claim 1 to 5, it is characterized in that comprising the conveyance unit, this conveyance unit is the described thing that is cleaned of conveyance between described inboard container inside and outside, described conveyance unit, in described inboard container, clean when being cleaned thing, can shake this and be cleaned thing.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007140798 | 2007-05-28 | ||
| JP2007140798A JP2008294368A (en) | 2007-05-28 | 2007-05-28 | Cleaning dryer appparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101314158A true CN101314158A (en) | 2008-12-03 |
Family
ID=40105392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2008101001256A Pending CN101314158A (en) | 2007-05-28 | 2008-05-26 | Washing drying apparatus |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008294368A (en) |
| KR (1) | KR20080104971A (en) |
| CN (1) | CN101314158A (en) |
| TW (1) | TW200846095A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103052857A (en) * | 2010-08-02 | 2013-04-17 | 杜尔艾科克林有限公司 | Device for drying workpieces after a cleaning operation |
| CN103167916A (en) * | 2010-10-11 | 2013-06-19 | Tms运输及装配系统有限公司 | Method and a cleaning system for cleaning industrially produced components |
| CN103350079A (en) * | 2013-07-26 | 2013-10-16 | 浙江皓鸿超声波科技有限公司 | Ultrasonic cleaning machine |
| US9636716B2 (en) | 2012-04-25 | 2017-05-02 | Ihi Corporation | Vacuum cleaning device |
| CN107921485A (en) * | 2015-08-18 | 2018-04-17 | 埃克科林有限公司 | Utilize the device and method of process fluid processing workpiece |
| CN108838179A (en) * | 2018-06-20 | 2018-11-20 | 袁静 | A kind of cleaning device for chemistry teaching instrument |
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2007
- 2007-05-28 JP JP2007140798A patent/JP2008294368A/en active Pending
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2008
- 2008-05-26 KR KR1020080048561A patent/KR20080104971A/en not_active Application Discontinuation
- 2008-05-26 CN CNA2008101001256A patent/CN101314158A/en active Pending
- 2008-05-26 TW TW097119340A patent/TW200846095A/en unknown
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| CN103052857A (en) * | 2010-08-02 | 2013-04-17 | 杜尔艾科克林有限公司 | Device for drying workpieces after a cleaning operation |
| CN103052857B (en) * | 2010-08-02 | 2015-04-15 | 杜尔艾科克林有限公司 | Device for drying workpieces after a cleaning operation |
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| CN103167916B (en) * | 2010-10-11 | 2015-09-30 | 特莫式启钥制造方案工程有限公司 | For cleaning equipment and the method for the component of cleaned industry manufacture |
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| CN103350079B (en) * | 2013-07-26 | 2015-10-14 | 浙江皓鸿超声波科技有限公司 | Supersonic wave cleaning machine |
| CN107921485A (en) * | 2015-08-18 | 2018-04-17 | 埃克科林有限公司 | Utilize the device and method of process fluid processing workpiece |
| CN108838179A (en) * | 2018-06-20 | 2018-11-20 | 袁静 | A kind of cleaning device for chemistry teaching instrument |
| TWI834064B (en) * | 2020-09-25 | 2024-03-01 | 日商愛斯佩克股份有限公司 | Conditioner |
| WO2023065435A1 (en) * | 2021-10-22 | 2023-04-27 | 长鑫存储技术有限公司 | Cleaning apparatus and cleaning method thereof |
| CN117672926A (en) * | 2024-01-29 | 2024-03-08 | 东领科技装备有限公司 | Single-blade type semiconductor substrate cleaning device and cleaning method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200846095A (en) | 2008-12-01 |
| KR20080104971A (en) | 2008-12-03 |
| JP2008294368A (en) | 2008-12-04 |
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