JP5515731B2 - Cleaning method - Google Patents

Description

  The present invention relates to a cleaning method for cleaning electronic parts, machine parts, and the like in addition to medical instruments.

  Conventionally, as disclosed in Patent Document 1 below, a chamber (2) having a lid (1) for detachably storing a cast (8) is provided, and cleaning water (26) is provided below the chamber (2). A heating section (heater 10) for heating the chamber (2), a water supply section (shower nozzle 14) for supplying cleaning water (26) to the chamber (2), and a drain section (12) for draining the cleaning water (26). A heat pump for connecting a vacuum pump (19) for reducing the internal pressure and cooling and liquefying the vapor sucked from the chamber (2) between the vacuum pump (19) and the chamber (2). And a control mechanism (flow control valve 24) for adjusting the cooling capacity of the heat exchanger (18) to keep the temperature of the washing water (26) constant. Characterized cleaning and sterilization equipment is known Claim 4, Figure 2).

JP 61-109567 A

  In the cleaning apparatus, the liquid in the cleaning tank is often replaced to perform cleaning a plurality of times, or to rinse after cleaning. In addition, the object to be cleaned may be dried after cleaning or rinsing. Here, rinsing means cleaning the cleaning liquid on the object to be cleaned, and can also be regarded as a kind of cleaning.

  However, all the conventional cleaning apparatuses simply drain the stored liquid in the cleaning tank, store new liquid, and replace the liquid in the cleaning tank. Moreover, the drying process is implemented only after draining the stored liquid in a washing tank.

  In such a method, for example, when the object to be cleaned is a tube, or when the object to be cleaned has a bag hole, even if the liquid is discharged from the cleaning tank, the liquid remains in the tube or the bag hole, There is a risk that the liquid may not be replaced smoothly. In addition, it may take a long time to dry the object to be cleaned, or the object to be cleaned may not be sufficiently dried.

  By the way, as a method for drying an object to be cleaned, ventilation or ventilation is conventionally used, but in that case, an adapter is required or a ventilation amount must be ensured.

  The problem to be solved by the present invention is to easily and reliably replace the liquid in the cleaning tank and the object to be cleaned. In addition, it is preferable that the object to be cleaned is reliably dried in a short period of time without requiring new parts.

The present invention has been made to solve the above-mentioned problems, and the invention according to claim 1 is characterized in that the object to be cleaned is immersed in the liquid in the cleaning tank for cleaning or rinsing, and then the cleaning tank is cleaned. the liquid was discharged from, then the rear vacuum the cleaning tank to the saturation vapor pressure of a liquid remaining in the object to be cleaned condensate pressure, Ri figure draining from the object to be cleaned by the vacuum again, the The cleaning or rinsing of the object to be cleaned is a process of lowering the pressure in the cleaning tank by heating the liquid in the cleaning tank to a set temperature by the heating means and then continuing to exhaust the cleaning tank by the decompression means. Thus, during the boiling of the liquid in the cleaning tank due to this pressure reduction, outside air is introduced into the gas phase portion in the cleaning tank by the gas-phase air supply means, and instantaneously temporarily until the liquid stops boiling in the cleaning tank. cleaning side, characterized in that it comprises the operation of repeating that pressure recovery in It is.

According to the first aspect of the present invention, after the liquid is discharged from the cleaning tank, the inside of the cleaning tank can be decompressed to easily drain the liquid from the object to be cleaned. Moreover, the liquid can be drained from the object to be cleaned more reliably by reducing the pressure in the cleaning tank a plurality of times.
According to the first aspect of the present invention, the inside of the washing tank is decompressed to boil the stored liquid, and the inside of the washing tank is instantaneously restored during the boiling to stop the boiling of the stored liquid at a stretch. At the time of this pressure recovery, the water vapor bubbles generated in the stored liquid due to boiling until then are condensed instantly. The stored liquid is agitated and transferred by the pressure wave and pressure difference at the time of condensation, and the object to be cleaned is washed or rinsed.

According to a second aspect of the present invention, in the cleaning method according to the first aspect of the present invention, after the liquid is drained, the liquid is again stored in the cleaning tank and the object to be cleaned is cleaned or rinsed. is there.

According to invention of Claim 2 , after draining the liquid in a washing tank, after aiming at the drainage from a to-be-washed object, putting a liquid in a washing tank again, for example, to-be-washed object Even in the case of a tube or when the object to be cleaned has a bag hole, the liquid can be reliably replaced.

The invention according to claim 3 is a method of storing liquid in the cleaning tank, cleaning or rinsing the object to be cleaned, discharging liquid from the cleaning tank, and draining liquid from the object to be cleaned. The cleaning method according to claim 1 , wherein the cycle including the step is performed a set number of times.

According to the invention described in claim 3 , the liquid in the cleaning tank is drained from the object to be cleaned at the time of replacement of the liquid in the cleaning tank, and the liquid in the cleaning tank and the object to be cleaned is reliably replaced while being cleaned. Things can be washed or rinsed.

According to a fourth aspect of the invention, by the liquid cutting, or promote drying of the object to be cleaned, after the liquid cutting, to claim 1 or claim 3, characterized in that to achieve drying of the object to be cleaned The cleaning method described.

According to the fourth aspect of the present invention, the object to be cleaned can be dried in the liquid draining process itself, or can be dried after the liquid draining process.

  According to the present invention, it is possible to easily and reliably replace the liquid in the cleaning tank and the object to be cleaned. In addition, if drainage from the object to be cleaned is performed after draining from the cleaning tank and before drying the object to be cleaned, the object to be cleaned can be reliably dried in a short period of time. Moreover, no new parts are required.

It is a schematic block diagram which shows one Example of the washing | cleaning apparatus of this invention. It is a flowchart which shows one Example of the washing | cleaning method of this invention.

  Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.

  Although the cleaning apparatus and the cleaning method of the present invention cleans an object to be cleaned, the object to be cleaned may be rinsed (including disinfection) instead of or in addition to cleaning. That is, the cleaning apparatus and the cleaning method can execute at least one of cleaning and rinsing of the object to be cleaned.

  FIG. 1 is a schematic configuration diagram showing an embodiment of the cleaning apparatus of the present invention, which is partially shown in cross section.

  The cleaning apparatus 1 of this embodiment supplies a cleaning tank 3 in which an object to be cleaned 2 is stored, a water supply means 4 for supplying water into the cleaning tank 3, and supplies a cleaning agent or a rinsing agent into the cleaning tank 3. Liquid supply means 5, heating means 6 for heating the inside of the cleaning tank 3, decompression means 7 for sucking and discharging the gas in the cleaning tank 3 to decompress the inside of the cleaning tank 3, and inside the decompressed cleaning tank 3 The gas-phase air supply means 8 for introducing outside air into the gas-phase portion, the liquid-phase air supply means 9 for introducing outside air into the liquid-phase portion in the depressurized cleaning tank 3, and the liquid in the cleaning tank 3 are discharged. A drainage means 10;

  Further, the cleaning apparatus 1 includes a pressure sensor 11 that detects the pressure of the gas phase portion in the cleaning tank 3 and a liquid temperature sensor that detects the temperature of the liquid phase portion in the cleaning tank 3 (that is, the temperature of the cleaning liquid or the rinsing liquid). 12 and control means 13 for controlling the means 4 to 10 based on detection signals of the sensors 11 and 12 and the like. A temperature sensor (not shown) for detecting the temperature of the gas phase portion in the cleaning tank 3 may be provided instead of or in addition to the pressure sensor 11 for detecting the pressure of the gas phase portion in the cleaning tank 3. Good. Since pressure and temperature can be converted under a saturated environment, any one of the pressure sensor 11 and the temperature sensor can be used.

  The article to be cleaned 2 is an article to be cleaned, and is, for example, a medical instrument, an electronic component, or a mechanical component. The article to be cleaned 2 may be a tubular article such as a tube or an article having a bag hole. Even in that case, the inside of the pipe and the hole can be effectively cleaned.

<< Washing tank 3 >>
The cleaning tank 3 is a hollow container that can withstand the decompression of the internal space. The cleaning tank 3 in the illustrated example includes a main body 14 that opens upward and has a hollow portion, and a lid 15 that opens and closes the opening of the main body 14. In the state where the main body 14 is covered with the lid 15, the gap between the main body 14 and the lid 15 is sealed with the packing 16.

<< Water supply means 4 >>
The water supply means 4 supplies water into the cleaning tank 3. The water supplied into the cleaning tank 3 is preferably soft water or pure water. In the illustrated example, the water supply means 4 supplies soft water into the cleaning tank 3 through the first water supply path 17 and supplies pure water (RO water) into the cleaning tank 3 through the second water supply path 18. . The supply of soft water into the cleaning tank 3 is switched by opening and closing the first water supply valve 19 provided in the first water supply path 17, and the supply of pure water into the cleaning tank 3 is provided in the second water supply path 18. Switching is performed by opening and closing the second water supply valve 20. The first water supply path 17 downstream from the first water supply valve 19 and the second water supply path 18 downstream from the second water supply valve 20 may be unified as a common water supply path 21.

  When the water supply means 4 can supply soft water and pure water as in this embodiment, the type of water can be properly used according to the application. For example, soft water can be used as washing water, and pure water can be used as rinsing water. However, the second water supply path 18 and the second water supply valve 20 may be omitted so that only the soft water can be supplied into the cleaning tank 3. Conversely, the first water supply path 17 and the first water supply valve 19 are omitted. Then, only pure water may be supplied into the cleaning tank 3.

<< Liquid supply means 5 >>
The liquid supply means 5 supplies a cleaning agent or a rinsing agent into the cleaning tank 3. In this embodiment, the liquid supply means 5 includes a first liquid supply means 22 for supplying a cleaning agent into the cleaning tank 3 and a second liquid supply means 23 for supplying a rinsing agent into the cleaning tank 3.

  The first liquid supply means 22 supplies the cleaning agent in the first tank 24 into the cleaning tank 3 through the first liquid supply path 25. The first liquid supply path 25 is provided with a first liquid supply valve 26 and an orifice 27 in order from the first tank 24 side. The cleaning agent can be supplied into the cleaning tank 3 by opening the first liquid supply valve 26 in a state where the pressure in the cleaning tank 3 is reduced. In the present embodiment, the cleaning liquid is obtained by mixing the cleaning agent by the first liquid supply unit 22 into the cleaning water (soft water) by the water supply unit 4.

  The second liquid supply means 23 supplies the rinsing agent (for example, a lubricating rust preventive agent) in the second tank 28 into the cleaning tank 3 through the second liquid supply path 29. The second liquid supply passage 29 is provided with a second liquid supply valve 30 and an orifice 31 in order from the second tank 28 side. The rinsing agent can be supplied into the cleaning tank 3 by opening the second liquid supply valve 30 in a state where the pressure in the cleaning tank 3 is reduced. In the present embodiment, a rinsing liquid is obtained by mixing the rinsing agent by the second liquid supplying unit 23 into the rinsing water (pure water) by the water supplying unit 4.

  However, one or both of the first liquid supply means 22 and the second liquid supply means 23 can be omitted as desired. For example, the second liquid supply means 23 may be omitted and rinsing may be performed only with water from the water supply means 4. Alternatively, the first liquid supply means 22 and the second liquid supply means 23 may be omitted, and cleaning or rinsing may be performed using only the water supplied by the water supply means 4.

  Further, when water containing a cleaning agent is used as the cleaning liquid, the first liquid supply means 22 can be omitted if the cleaning agent is mixed in the water supplied by the water supply means 4 in advance. That is, the water supply means 4 may be means for supplying water containing a cleaning agent or other cleaning liquid into the cleaning tank 3 in addition to supplying water.

  Similarly, when water containing a rinsing agent is used as the rinsing liquid, the second liquid supplying means 23 can be omitted if the rinsing agent is injected into the water supplied by the water supply means 4 in advance. That is, the water supply means 4 may be means for supplying water containing a rinsing agent or other rinsing liquid into the cleaning tank 3 in addition to supplying water.

<< Heating means 6 >>
The heating means 6 heats the inside of the cleaning tank 3. Although the method for heating the inside of the cleaning tank 3 is not particularly limited, the heating means 6 in the illustrated example is an electric heater 32 disposed at the bottom of the cleaning tank 3. In this case, the liquid in the cleaning tank 3 can be heated by energizing the electric heater 32 with the liquid (cleaning liquid or rinsing liquid) stored in the cleaning tank 3.

<< Pressure reducing means 7 >>
The decompression means 7 sucks and discharges the gas in the cleaning tank 3 to the outside through the exhaust passage 33 to decompress the inside of the cleaning tank 3. In the case of the illustrated example, the exhaust path 33 is provided with an air / water separator 34, a heat exchanger 35, a check valve 36, and a water ring vacuum pump 37 in order from the cleaning tank 3 side.

  The steam separator 34 removes droplets and solids contained in the gas from the cleaning tank 3. In other words, the steam separator 34 captures the droplets contained in the steam from the cleaning tank 3 to improve the dryness of the steam, and captures the solid matter contained in the steam, thereby downstream. Clogging in the heat exchanger 35 is prevented.

  The structure of the steam separator 34 is not particularly limited, but a demister 38 is used, for example. Specifically, the air / water separator 34 in the illustrated example includes a hollow container 39 and a demister 38 provided to partition the inside of the container 39 into an upper space and a lower space. The container 39 of the steam separator 34 is connected to the side wall of the lower space from the demister 38 and the pipe from the gas phase part of the cleaning tank 3 to the heat exchanger 35 to the side wall or upper wall of the upper space from the demister 38. Are connected. Further, the container 39 of the steam separator 34 is connected to the bottom wall of the lower space from the demister 38 with a pipe 40 to the liquid phase part of the cleaning tank 3.

  The heat exchanger 35 cools and condenses the steam in the exhaust passage 33. Although the kind in particular is not ask | required for the heat exchanger 35, it is a plate type heat exchanger, for example. Water is supplied to the heat exchanger 35 through the heat exchange water supply valve 41 and discharged. Therefore, the steam from the cleaning tank 3 is subjected to indirect heat exchange with water from the heat exchange water supply valve 41 in the heat exchanger 35 to be condensed.

  As is well known, the water-sealed vacuum pump 37 is supplied with water called sealed water. Therefore, water is supplied to the vacuum pump 37 via the sealed water supply valve 42 and discharged. The sealed water supply valve 42 is opened and closed in conjunction with the presence or absence of the operation of the vacuum pump 37.

<< Gas phase air supply means 8 >>
The gas phase supply means 8 introduces outside air to the gas phase portion in the depressurized cleaning tank 3 through the gas phase supply path 43. A filter 44 and a gas phase air supply valve 45 are provided in the gas phase air supply path 43 in order toward the cleaning tank 3. Accordingly, when the gas-phase air supply valve 45 is opened in a state where the pressure in the cleaning tank 3 is reduced, air through the filter 44 is introduced into the cleaning tank 3 due to a differential pressure inside and outside the cleaning tank 3, and the cleaning tank 3 The pressure inside 3 can be restored.

<< Liquid phase air supply means 9 >>
The liquid phase air supply means 9 introduces outside air to the liquid phase part in the cleaning tank 3 whose pressure has been reduced through the liquid phase air supply path 46. In the liquid phase air supply path 46, a filter 47 and a liquid phase air supply valve 48 are provided in order toward the cleaning tank 3. Therefore, when the liquid-phase air supply valve 48 is opened in a state where the inside of the cleaning tank 3 is depressurized, air through the filter 47 is introduced into the stored liquid in the cleaning tank 3 due to the differential pressure inside and outside the cleaning tank 3. can do. However, the liquid phase air supply means 9 may forcibly send air from a compressor or a pump in addition to naturally introducing outside air by a differential pressure. Moreover, the liquid phase air supply means 9 may send in gas other than air if desired other than sending in air. As will be described later, the gas introduced into the stored liquid in the cleaning tank 3 is preferably a gas that hardly dissolves in the stored liquid in order to use it as a nucleus for boiling the stored liquid.

  By the way, the air from the liquid phase supply passage 46 is introduced into the liquid stored in the cleaning tank 3 through the liquid phase supply nozzle 49 provided at the bottom of the cleaning tank 3. The liquid-phase air supply nozzle 49 is a pipe disposed laterally at the bottom of the cleaning tank 3. The liquid phase air supply nozzle 49 is a bottom portion in the cleaning tank 3 but is separated from the bottom surface and is held horizontally. The liquid-phase air supply nozzle 49 is formed with nozzle holes (not shown) that open downward in the peripheral side wall of the pipe at set intervals along the extending direction of the pipe. Thereby, when the liquid phase air supply valve 48 is opened in a state where the inside of the cleaning tank 3 is decompressed, the gas can be uniformly introduced into the liquid stored in the cleaning tank 3.

<< Drainage means 10 >>
The drainage means 10 discharges the liquid in the cleaning tank 3 from the bottom of the cleaning tank 3 through the drainage channel 50. A drain valve 51 is provided in the drain channel 50. When the drain valve 51 is opened while the liquid is stored in the cleaning tank 3, the liquid can be naturally discharged out of the cleaning tank 3. In the illustrated example, the above-described pipe 40 from the steam / water separator 34 to the liquid phase part of the cleaning tank 3 is connected midway from the cleaning tank 3 to the drain valve 51 in the drainage channel 50.

<< Sensors 11, 12 >>
Further, the cleaning tank 3 is provided with a pressure sensor 11 for detecting the pressure of the gas phase part in the cleaning tank 3 and a liquid temperature sensor 12 for detecting the temperature of the liquid phase part in the cleaning tank 3. Further, as described above, a temperature sensor for detecting the temperature of the gas phase portion in the cleaning tank 3 is provided instead of or in addition to the pressure sensor 11 as desired.

  The cleaning tank 3 is provided with a liquid level detector (not shown). This liquid level detector detects whether or not the liquid has been stored in the cleaning tank 3 up to the set liquid level, whether or not the stored liquid in the cleaning tank 3 has been drained, and whether or not the liquid above the upper limit liquid level has been stored in the cleaning tank 3. It is detected whether it is not stored. In addition, an overflow path 52 is provided in the upper portion of the side wall of the cleaning tank 3 to allow excess stored liquid to overflow to the outside. A check valve 53 is provided in the overflow path 52.

<< Control means 13 >>
The control means 13 is a controller 54 that controls the means 4 to 10 based on the detection signals of the sensors 11 and 12. Specifically, the 1st water supply valve 19, the 2nd water supply valve 20, the 1st liquid supply valve 26, the 2nd liquid supply valve 30, the electric heater 32, the vacuum pump 37, the heat exchange water supply valve 41, the sealing water supply valve 42 The pressure sensor 11, the liquid temperature sensor 12, and the liquid level detector are connected to the controller 54 in addition to the gas phase air supply valve 45, the liquid phase air supply valve 48, and the drain valve 51. The controller 54 then cleans or rinses the article 2 to be cleaned in the cleaning tank 3 according to a predetermined procedure (program) as described below.

  Although the cleaning apparatus 1 is configured as described above, an example of a cleaning method using such a cleaning apparatus 1 will be described below.

FIG. 2 is a flowchart showing an embodiment of the cleaning method of the present invention.
Here, a process selected from among the pre-cleaning process S1, one or more cleaning processes S2 to S3, one or more rinsing processes S4 to S6, and a liquid draining process S7 is sequentially performed. More specifically, in the illustrated example, the pre-washing step S1, the first washing step S2, the second washing step S3, the first rinsing step S4, the second rinsing step S5, the third rinsing step S6, and the liquid draining step S7. Of these, the selected processes are executed sequentially.

  Prior to the start of these steps, the object to be cleaned 2 is accommodated in the cleaning tank 3, and the lid 15 of the cleaning tank 3 is closed in an airtight manner. At this time, the object to be cleaned 2 is disposed above the liquid-phase air supply nozzle 49 and, if desired, is placed in a net-like basket or the like and accommodated in the cleaning tank 3.

  By the way, since precleaning process S1 and washing | cleaning process S2-S3 have the operation which can be implemented in common, prewashing process S1 can also be regarded as a kind of washing | cleaning process S2-S3. Further, since the cleaning steps S2 to S3 and the rinsing steps S4 to S6 are different in whether the liquid stored in the cleaning tank 3 is a cleaning solution or a rinsing solution, the rinsing steps S4 to S6 are a kind of the cleaning steps S2 to S3. It can also be taken as. Further, in the cleaning steps S2 to S3 and the rinsing steps S4 to S6, the temperature of the liquid in the cleaning tank 3 can be increased to disinfect the object 2 to be cleaned. It can also be understood that the steps S4 to S6 include a disinfection step.

<< Prewashing step S1 and each washing step S2, S3 >>
In the pre-washing step S1 and each of the washing steps S2 and S3, the selected operation among the liquid draining operation, the water supply operation, the cleaning agent charging operation, the warming operation, the heat retaining operation, the cooling operation, the recuperation operation and the draining operation is sequentially performed To run.

<Liquid draining operation>
In the liquid draining operation, the pressure in the cleaning tank 3 is reduced by the pressure reducing means 7. Specifically, the first water supply valve 19, the second water supply valve 20, the first liquid supply valve 26, the second liquid supply valve 30, the gas phase air supply valve 45, the liquid phase air supply valve 48, and the drain valve 51 are closed. At the same time, the pressure reducing means 7 may be operated while the electric heater 32 is stopped. Thereby, the gas in the washing tank 3 can be sucked and discharged to the outside, and the inside of the washing tank 3 can be decompressed.

  In a situation where the object to be cleaned 2 is wet, as a liquid draining operation, the liquid in the object to be cleaned 2 is depressurized to a level equal to or lower than the saturated vapor pressure of the liquid, thereby draining the liquid from the object to be cleaned 2. Can do. That is, the object to be cleaned 2 may be wet in relation to a process performed before. In that case, the object to be cleaned is depressurized in the cleaning tank 3 by performing a liquid draining operation. Liquid draining from 2 can be achieved.

  Specifically, the liquid draining operation is performed after the liquid is discharged from the cleaning tank 3, and the residual liquid is removed from the object to be cleaned 2 by reducing the pressure in the cleaning tank 3. In particular, when the object to be cleaned 2 is a tube, or when the object to be cleaned 2 has a bag hole, even if the liquid is discharged from the cleaning tank 3, the liquid may remain in the tube or the bag hole. By this liquid draining operation, such residual liquid can be removed.

  For example, when the object to be cleaned 2 is a tube, the cleaning tank 3 is depressurized to boil residual liquid in the tube and fill the tube with steam to remove the cleaning liquid from the tube. Can do. Moreover, air can be introduce | transduced into a tube by decompressing the inside of the washing tank 3 after that. Furthermore, if the pressure inside the washing tank 3 is reduced again after the pressure is restored, the introduced air can be expanded, and the remaining liquid in the tube can be further pushed out of the tube. That is, the operation of returning the pressure in the cleaning tank 3 after depressurization is not limited to once and may be performed a plurality of times.

  The liquid draining operation is preferably performed when the liquid in the cleaning tank 3 is replaced, or when the object to be cleaned 2 is dried after cleaning or rinsing. In the latter case, a liquid draining operation is performed in a liquid draining process described later. In the liquid draining operation, not only the liquid from the object to be cleaned 2 but also the liquid from the cleaning tank 3 is drained.

  After draining the liquid in the washing tank 3, by performing a liquid draining operation, the liquid remaining in the tube or the bag hole is drawn out and filled with air, whereby the next liquid can be put. Thereby, replacement | exchange of the liquid in a tube or a bag hole is made reliably. Further, even if air remains in the tube or the bag hole, as will be described later, the liquid is stored in the cleaning tank 3 and is decompressed after being decompressed. Therefore, by decompressing, the air is expanded and decompressed. Thus, the liquid can be put into the tube or the bag hole. And the inside of a tube and a bag hole can also be aimed at by the flow of such a liquid. Moreover, the liquids before and after the replacement are prevented from being mixed with each other by interposing a liquid draining operation. Furthermore, by performing a liquid draining operation when drying the object to be cleaned 2, the object to be cleaned 2 can be quickly and reliably dried.

  The inside of the cleaning tank 3 is depressurized to the set pressure, the inside of the cleaning tank 3 is depressurized for a set time, the inside of the wash tank 3 is depressurized to the set pressure and held for the set time, or the pressure in the wash tank 3 is reduced and restored. After repeating the pressure, the operation of the decompression means 7 is stopped. Then, the gas-phase air supply valve 45 is opened to restore the pressure in the cleaning tank 3 to atmospheric pressure, and the liquid draining operation is completed.

<Water supply operation>
In the water supply operation, water is supplied into the cleaning tank 3 by the water supply means 4. Specifically, the second water supply valve 20, the first liquid supply valve 26, the second liquid supply valve 30, the liquid phase air supply valve 48 and the drain valve 51 are closed, while the gas phase air supply valve 45 is opened, The first water supply valve 19 may be opened with the heater 32 and the decompression means 7 stopped. As a result, the cleaning water is supplied into the cleaning tank 3. At this time, the air in the cleaning tank 3 flows backward through the gas-phase air supply passage 43 and is discharged out of the cleaning tank 3.

  However, in the water supply operation, the pressure reducing means 7 may be operated instead of closing the gas phase air supply valve 45. By supplying water while depressurizing the inside of the cleaning tank 3, when the object to be cleaned 2 is a tube, for example, air can be expelled from the tube.

  In any case, when the cleaning water is supplied up to the set water level in the cleaning tank 3, the liquid level detector detects it, closes the first water supply valve 19, and ends the water supply operation. When the pressure reducing means 7 is operating, the operation of the pressure reducing means 7 is stopped and the gas-phase supply valve 45 is opened at a stroke, so that the cleaning water flows into the tube all at once when the object to be cleaned 2 is a tube, for example. Thus, the cleaning effect can be enhanced. However, when the cleaning agent charging operation is subsequently performed, the operation of the decompression means 7 may be continued until the cleaning agent charging operation is ended, and the gas phase supply valve 45 may be opened at the end of the cleaning agent charging operation. .

<Cleaning agent operation>
In the cleaning agent charging operation, the cleaning agent is supplied into the cleaning tank 3 by the liquid supply means 5. In this embodiment, after the pressure in the cleaning tank 3 is reduced by the pressure reducing means 7, the cleaning agent is mixed into the cleaning water in the cleaning tank 3 by drawing the cleaning agent into the cleaning tank 3 by the first liquid supply means 22. Use cleaning solution. Specifically, the first water supply valve 19, the second water supply valve 20, the first liquid supply valve 26, the second liquid supply valve 30, the gas phase air supply valve 45, the liquid phase air supply valve 48, and the drain valve 51 are closed. At the same time, the pressure reducing means 7 is operated while the electric heater 32 is stopped, the pressure inside the cleaning tank 3 is reduced to a desired level, and then the first liquid supply valve 26 is opened while the pressure reducing means 7 is stopped. .

  After supplying the desired amount of cleaning agent into the cleaning tank 3 by opening the first liquid supply valve 26 for a set time, the first liquid supply valve 26 is closed, while the gas phase air supply valve 45 or the liquid phase supply is closed. The air valve 48 is opened to end the cleaning agent charging operation. When the object to be cleaned 2 is a tube, or when the object to be cleaned 2 has a bag hole, the gas-phase air supply valve 45 is opened and the pressure in the cleaning tank 3 is restored, so that the inside of the tube or the bag hole is obtained. Can contain liquid. On the other hand, when the liquid phase supply valve 48 is opened and air is introduced into the liquid phase portion, the liquid in the cleaning tank 3 can be shaken, thereby mixing the cleaning agent and the cleaning water, and the cleaning agent in a short time. Can be uniformly diffused in the wash water. Further, the air supplied to the liquid phase part rises in the liquid in the cleaning tank 3 and eventually reaches the gas phase part. By increasing the pressure in the gas phase portion, the same effect as when the gas phase air supply valve 45 is opened can be obtained. Specifically, when the article to be cleaned 2 is a tube, for example, a liquid can be put into the tube.

  By the way, during the supply of the cleaning agent into the cleaning tank 3, the pressure in the cleaning tank 3 is monitored, and if there is a sudden pressure increase, the cleaning agent in the first tank 24 becomes empty, etc. For the reason, it may be notified that outside air has been introduced into the cleaning tank 3.

<Heating operation>
In the heating operation, the liquid in the cleaning tank 3 is heated until the liquid in the cleaning tank 3 reaches the heating target temperature. Specifically, the electric heater 32 with the first water supply valve 19, the second water supply valve 20, the first liquid supply valve 26, the second liquid supply valve 30, the liquid phase air supply valve 48, and the drain valve 51 closed. Can be activated.

  During the heating operation, the decompression means 7 is stopped and the gas phase supply valve 45 is kept open. Alternatively, during the heating operation, the decompression by the decompression unit 7 and the subsequent return pressure by the gas-phase air supply unit 8 may be repeated. Such control is referred to as vapor phase air supply pulse control. Alternatively, during the heating operation, the decompression by the decompression unit 7 and the subsequent return pressure by the liquid phase supply unit 9 may be repeated. Such control is referred to as liquid phase air supply pulse control.

  By the way, each air supply pulse control is not limited to during the heating operation, but can be performed as desired during the heat retaining operation and the cooling operation as will be described later. However, depending on which operation in which process is performed, which air supply pulse control is used, and the target pressure and target temperature used for each air supply pulse control are appropriately changed. Further, each air supply pulse control may be continuously performed during an operation in which the air supply pulse is used together (for example, a heating operation), but may be performed only at one time during the operation.

  When the object to be cleaned 2 is a tube, for example, by performing gas phase air supply pulse control, the residual air in the tube is expanded and compressed by the decompression and return pressure in the cleaning tank 3, and the liquid flows in the tube. Thus, the inside of the tube can be cleaned. On the other hand, when the object to be cleaned 2 is a forceps, for example, there is no place where steam or air accumulates. Therefore, by performing liquid phase air supply pulse control, gas is blown into the liquid in the cleaning tank 3 to The object to be cleaned 2 can be cleaned by swinging the liquid.

  When performing the cleaning process a plurality of times, such as performing the second cleaning process S3 after the first cleaning process S2, the contents of the heating operation in each cleaning process may be changed. For example, the heating target temperature in the second cleaning step S3 may be set higher than the heating target temperature in the first cleaning step S2. Further, the gas phase air supply pulse control may be performed in the heating operation of the first cleaning step S2, and the liquid phase air supply pulse control may be performed in the heating operation of the second cleaning step S3.

  During the heating operation, the temperature of the liquid in the cleaning tank 3 is monitored by the liquid temperature sensor 12, and when the liquid in the cleaning tank 3 reaches the heating target temperature, the electric heater 32 is stopped and the heating operation is finished. To do. However, when the heat insulation operation is subsequently performed, the operation proceeds to the heat insulation operation as it is.

<Insulation operation>
In the warming operation, after the liquid in the cleaning tank 3 is heated to the warming target temperature by the warming operation, the liquid is held at the warming target temperature for the set warming time. Specifically, the temperature detected by the liquid temperature sensor 12 is heated while the first water supply valve 19, the second water supply valve 20, the first liquid supply valve 26, the second liquid supply valve 30, and the drain valve 51 are closed. What is necessary is just to control the presence or absence of electricity supply to the electric heater 32, or supply electric power so that it may maintain at target temperature.

  During the heat retaining operation, the decompression means 7 is stopped. In some cases, the liquid phase air supply pulse control described above may be performed. That is, with the gas phase supply valve 45 closed, the pressure reduction by the pressure reduction means 7 and the subsequent return pressure by the liquid phase air supply means 9 may be repeated. Details of the effect of this liquid phase air supply pulse control will be described later.

  When the set heat retention time elapses after the liquid in the cleaning tank 3 reaches the warming target temperature, the electric heater 32 is stopped and the heat retaining operation is terminated. For example, when the object to be cleaned 2 is a tube, the rise in the liquid temperature in the tube is delayed from the outside of the tube, but by performing the heat retaining operation, the liquid temperature inside and outside the tube can be kept constant.

<Cooling operation>
The cooling operation depressurizes the cleaning tank 3 and cools the liquid in the cleaning tank 3 until a predetermined end condition is satisfied. Specifically, the first water supply valve 19, the second water supply valve 20, the first liquid supply valve 26, the second liquid supply valve 30, the liquid phase air supply valve 48, the drain valve 51 are closed, and the electric heater 32 is stopped. In this state, the decompression means 7 may be operated.

  The termination condition is that the liquid in the cleaning tank 3 reaches the cooling target temperature. However, it may be performed until the inside of the cleaning tank 3 reaches a set pressure or until a set time elapses.

  During the cooling operation, vapor phase air supply pulse control is preferably performed. In the cooling operation with the gas-phase air supply pulse control, the pressure in the cleaning tank 3 is continuously reduced so that the liquid in the cleaning tank 3 continues to boil, and during this time, until the liquid stops boiling at a predetermined timing. The inside of the inside is instantaneously and temporarily restored. This return pressure is performed up to a pressure at which the boiling of the liquid stops. Instantaneous return pressure is achieved by opening the gas-phase air supply valve 45 made of an electromagnetic valve at once. Even during the return pressure, the pressure reducing means 7 may remain operated. After the gas-phase air supply valve 45 is opened and the pressure in the cleaning tank 3 is restored to interrupt the boiling of the liquid, the gas-phase air supply valve 45 is closed again to reduce the pressure in the cleaning tank 3 and the resulting liquid. Boiling is achieved.

  As the predetermined timing, the temperature of the liquid in the cleaning tank 3 is monitored based on the liquid temperature sensor 12, and the temperature is lowered every predetermined temperature. However, the pressure in the cleaning tank 3 may be monitored based on the pressure sensor 11 and the pressure may be decreased every predetermined pressure. Alternatively, a temperature sensor may be provided in the gas phase part in the cleaning tank 3, and the temperature of the gas phase part in the cleaning tank 3 may be monitored based on this temperature sensor, and the temperature may be lowered by a predetermined temperature.

  As described above, in the cooling operation with the gas-phase air supply pulse control, the inside of the cleaning tank 3 is decompressed to boil the liquid, and during this boiling, the inside of the cleaning tank 3 is instantaneously and temporarily re-pressured. Repeatedly stopping boiling at once. Therefore, when the pressure is restored, the bubbles of water vapor generated in the liquid due to boiling until then are condensed instantly. The liquid in the cleaning tank 3 is agitated and transferred by the pressure wave and pressure difference during the condensation, and the object to be cleaned 2 is cleaned. In addition, when the object to be cleaned 2 has a pipe or a hole, a vapor accumulation occurs in the pipe or the hole of the object to be cleaned 2 due to the decompression in the cleaning tank 3, The vapor pool disappears instantly. Accordingly, the liquid can be vigorously moved in and out of the tube or hole of the object to be cleaned 2, thereby cleaning the object to be cleaned 2.

  Such processing is performed until the end condition is satisfied. Typically, as above-mentioned, it is performed until the liquid in the washing tank 3 reaches cooling target temperature. When the termination condition is satisfied, the operation of the decompression means 7 is stopped and the cooling operation is terminated.

  Incidentally, during the cooling operation, liquid phase air supply pulse control may be performed instead of the gas phase air supply pulse control. In other words, during the cooling operation, instead of maintaining the gas phase supply valve 45 in the closed state, the liquid phase supply valve 48 may be opened and closed to perform the liquid phase supply pulse control. In the cooling operation accompanied by the liquid phase air supply pulse control, the liquid phase air supply valve 48 is opened in a state where the liquid in the cleaning tank 3 is boiled or the pressure inside the cleaning tank 3 is reduced to just before that. In addition, the object to be cleaned 2 can be cleaned while boiling the liquid by introducing gas into the liquid in the cleaning tank 3 from below.

  That is, in a state where the pressure of the gas phase portion in the cleaning tank 3 is lowered to a pressure equal to or lower than the vapor pressure of the liquid in the cleaning tank 3 by the decompression means 7, the liquid phase air supply means 9 A gas is introduced into the liquid in the cleaning tank 3 from below. As a result, the liquid in the cleaning tank 3 can be boiled and boiled vigorously, and the object to be cleaned 2 can be cleaned. In addition, you may perform pressure reduction to predetermined and induction | guidance | derivation of bumping by the gas introduction | transduction in the liquid of a boiling possible state by the pressure reduction in multiple times.

  In order to make the liquid in the cleaning tank 3 boilable, it is basically necessary to set the pressure of the gas phase portion in the cleaning tank 3 to be equal to or lower than the vapor pressure of the liquid in the cleaning tank 3. However, in reality, even if the pressure is slightly higher than the vapor pressure of the liquid in the cleaning tank 3, there is a case where boiling occurs due to the introduction of gas into the liquid due to the presence of a superheated part in the liquid. is there. Therefore, the gas may be introduced into the liquid by setting the pressure in the gas phase portion in the cleaning tank 3 to be equal to or lower than the vapor pressure of the liquid in the cleaning tank 3 or in some cases just before that.

  When performing the cleaning process a plurality of times, such as performing the second cleaning process S3 after the first cleaning process S2, the content of the decompression operation in each cleaning process may be changed. For example, the target cooling temperature in the second cleaning step S3 may be set higher than the target cooling temperature in the first cleaning step S2.

<Return pressure operation>
In the return pressure operation, the inside of the cleaning tank 3 is returned to the return pressure target pressure. Specifically, the first water supply valve 19, the second water supply valve 20, the first liquid supply valve 26, the second liquid supply valve 30, the liquid phase air supply valve 48, the drain valve 51 are closed, and the electric heater 32 and the pressure reducing valve are reduced. The vapor supply valve 45 may be opened while the means 7 is stopped. When the pressure in the cleaning tank 3 is restored to the return pressure target pressure, the return pressure process is terminated.

<Draining action>
In the draining operation, the liquid in the cleaning tank 3 is discharged. Specifically, the first water supply valve 19, the second water supply valve 20, the first liquid supply valve 26, the second liquid supply valve 30, and the liquid phase air supply valve 48 are closed while the gas phase air supply valve 45 is opened. The drain valve 51 may be opened while the electric heater 32 and the decompression means 7 are stopped. Thereby, the liquid in the cleaning tank 3 is discharged out of the cleaning tank 3. When the liquid level detector detects that the liquid in the cleaning tank 3 has been completely discharged, the drain valve 51 is closed and the drain operation is terminated.

<< Each rinsing step S4 to S6 >>
In each of the rinsing steps S4 to S6, a selected operation among the liquid draining operation, the water supply operation, the rinsing agent charging operation, the warming operation, the heat retaining operation, the pressure reducing operation, the decompression operation, and the draining operation is sequentially executed. Among these, the liquid draining operation, the water supply operation, the warming operation, the heat retaining operation, the pressure reducing operation, the pressure-reducing operation, and the draining operation are the same as those in the above-described cleaning steps S2 to S3. However, in the water supply operation in the rinsing steps S <b> 4 to S <b> 6, rinsing water is supplied into the cleaning tank 3 by opening the second water supply valve 20 instead of the first water supply valve 19. In addition, in the warming operation, the heat retaining operation, and the decompression operation, whether or not the air supply pulse control is performed, and in the case of performing the air supply pulse control, any of the gas phase air supply pulse control and the liquid phase air supply pulse control is performed. The pressure or temperature at which the air supply pulse control to be performed is performed is appropriately set according to each operation in each process.

<Rinsing agent charging operation>
The rinsing agent charging operation corresponds to the cleaning agent charging operation in each of the cleaning steps S2 and S3 described above. The difference is that the liquid supplied into the cleaning tank 3 is not the cleaning agent but the rinsing agent. It is in. That is, in the cleaning agent charging operation in the cleaning steps S2 to S3, after the pressure in the cleaning tank 3 is reduced by the pressure reducing means 7, the first liquid supply valve 26 is opened and the cleaning agent is supplied to the cleaning tank 3. In the rinsing agent charging operation in S <b> 6, after the pressure in the cleaning tank 3 is reduced by the pressure reducing means 7, the second liquid supply valve 30 is opened to supply the rinse agent to the cleaning tank 3. In this manner, the rinsing agent is drawn into the washing tank 3, so that the rinsing agent is mixed into the rinsing water in the washing tank 3 to obtain a rinsing liquid. Then, after supplying the desired amount of the rinsing agent into the cleaning tank 3 by opening the second liquid supply valve 30 for a set time, the second liquid supply valve 30 is closed, while the gas phase air supply valve 45 or the liquid is supplied. The phase supply valve 48 is opened, and the rinsing agent charging operation is completed.

<< Liquid draining step S7 >>
The liquid draining step S7 corresponds to the liquid draining operation in the pre-washing step S1, the cleaning steps S2 to S3, and the rinsing steps S4 to S6, and the subsequent pressure recovery operation. That is, the liquid draining operation in the liquid draining step S7 corresponds to the liquid draining operation in the cleaning steps S2 to S3, and the pressure recovery operation in the liquid draining step S7 corresponds to a pressure recovery operation in the cleaning steps S2 to S3. Therefore, in the liquid draining step S7, after the pressure in the cleaning tank 3 is reduced while the cleaning tank 3 is filled with air, the pressure in the cleaning tank 3 is restored to atmospheric pressure.

  As described above, the pre-washing step S1, the first washing step S2, the second washing step S3, the first rinsing step S4, the second rinsing step S5, the third rinsing step S6 and the liquid draining step S7 are selected. Run sequentially. For example, by selecting the first cleaning step S2, the first rinsing step S4, and the liquid draining step S7, three of the cleaning step, the rinsing step, and the liquid draining step are sequentially executed. In the cleaning step S2, for example, a water supply operation, a cleaning agent charging operation, a warming operation, a heat retaining operation, a cooling operation, a pressure recovery operation, and a draining operation are selected. Further, in the rinsing step S4, for example, a liquid draining operation, a water supply operation, a rinsing agent charging operation, a warming operation, a heat retaining operation, a cooling operation, a return pressure operation, and a draining operation are selected. Further, in the liquid draining operation S7, the liquid draining operation and the return pressure operation are selected.

  In this case, after the cleaning liquid is stored in the cleaning tank 3 by the water supply operation and the cleaning agent charging operation in the cleaning step S2, the cleaning liquid is heated to the set temperature and held by the warming operation and the heat retaining operation. After the cooling operation is performed, the pressure in the cleaning tank 3 is restored to the atmospheric pressure by the return pressure operation, and the cleaning liquid is discharged by the drain operation.

  Thereafter, the remaining liquid from the object to be cleaned 2 is drained by the liquid draining operation in the rinsing step S4. Then, after the rinsing liquid is stored in the washing tank 3 by the water supply operation and the rinsing agent charging operation, the rinsing liquid is heated to the set temperature by the warming operation and the heat retaining operation, and then cooled. After the operation is performed, the pressure inside the washing tank 3 is restored to the atmospheric pressure by the decompression operation, and the rinsing liquid is discharged by the draining operation.

  Thereafter, the remaining liquid from the object to be cleaned 2 is drained by the liquid draining operation in the liquid draining step S7. Finally, the pressure inside the cleaning tank 3 is returned to atmospheric pressure by the return pressure operation. By the liquid draining operation in the liquid draining step S7, not only the liquid to be cleaned 2 may be drained, but also the object to be cleaned 2 may be completely dried. Or you may dry the to-be-cleaned object 2 by moving the to-be-cleaned object 2 to another apparatus after the liquid draining operation | movement of liquid draining process S7.

  By the way, when operating the decompression means 7 in each of the steps S1 to S7, since the inside of the washing tank 3 is filled with air at the beginning of decompression, the heat exchanger 35 is allowed to function from such a stage. Waste water is generated in the cooling water in the exchanger 35. Therefore, it is preferable to open the heat supply water valve 41 at a set timing delayed after the vacuum pump 37 is operated with the heat supply water valve 41 closed to start depressurization in the cleaning tank 3.

  That is, at the beginning of decompression, air is mainly extracted from the cleaning tank 3, so that it is not necessary to condense the vapor in the heat exchanger 35. Therefore, at the beginning of the pressure reduction, the heat exchange water supply valve 41 may be closed and the pressure reduced only by the vacuum pump 37. Thereafter, when the steam is sucked and discharged, the heat exchange water supply valve 41 is opened and the heat exchanger 35 is allowed to function.

  The timing for opening the heat exchange water supply valve 41 is appropriately set. For example, it is set when the set time has elapsed from the start of pressure reduction, or when the pressure in the cleaning tank 3 becomes equal to or lower than the set pressure. Alternatively, it may be set based on the pressure or temperature of the gas phase portion in the cleaning tank 3 and the temperature of the liquid in the cleaning tank 3.

  The reason why the timing for opening the heat exchange water supply valve 41 can be determined based on the pressure or temperature of the gas phase part in the cleaning tank 3 and the temperature of the liquid phase part in the cleaning tank 3 will be described. First, at the beginning of decompression, the pressure in the cleaning tank 3 is close to atmospheric pressure, and there is a lot of air in the cleaning tank 3. As the pressure in the cleaning tank 3 is reduced, air escapes from the cleaning tank 3. When the pressure is further reduced and the pressure in the gas phase portion in the cleaning tank 3 becomes equal to or lower than the vapor pressure of the liquid in the cleaning tank 3, the liquid in the cleaning tank 3 boils, and the steam in the cleaning tank 3 eventually becomes steam. It is filled. Here, as described above, the pressure and temperature of the gas phase portion in the cleaning tank 3 have a predetermined relationship. Further, the vapor pressure of the liquid in the cleaning tank 3 depends on the temperature of the liquid. Therefore, the boiling start point can be predicted based on the pressure or temperature of the gas phase portion in the cleaning tank 3 and the temperature of the liquid phase portion in the cleaning tank 3. Therefore, the heat supply water valve 41 may be opened in anticipation of the boiling start point and at a predetermined timing after the start of pressure reduction and before the start of boiling, preferably at or immediately before the boiling start point.

  Therefore, typically, after the vacuum pump 37 is operated with the heat exchange water supply valve 41 closed and pressure reduction in the washing tank 3 is started, (a) a temperature at which the detected pressure of the pressure sensor 11 is a saturation pressure, The difference between the detected temperature of the liquid temperature sensor 12 falls within the set range, or (b) the difference between the detected pressure of the pressure sensor 11 and the pressure at which the detected temperature of the liquid temperature sensor 12 is the saturation temperature is within the set range. Or (c) when the difference between the temperature detected by the temperature sensor in the gas phase portion and the temperature detected by the liquid temperature sensor 12 falls within the set range, the heat exchange water supply valve 41 may be opened.

  Moreover, in each said process S1-S7, after operating the pressure reduction means 7, since a stored liquid is vacuum-cooled with the pressure_reduction | reduced_pressure in the washing tank 3, a liquid temperature falls gradually. If the water supply amount to the heat exchanger 35 is kept constant regardless of the change in the liquid temperature, the water supply amount is wasted. Therefore, it is preferable to reduce the amount of water supplied to the heat exchanger 35 as the temperature of the cleaning liquid in the cleaning tank 3 decreases while the pressure in the cleaning tank 3 is reduced by the pressure reducing means 7.

  Specifically, the heat exchange water supply valve 41 is composed of a valve whose opening degree can be adjusted, the temperature of the liquid in the cleaning tank 3 is monitored by the liquid temperature sensor 12, and the heat exchange is performed based on the temperature detected by the liquid temperature sensor 12. The opening degree of the water supply valve 41 may be adjusted. Alternatively, a heat exchange water pump is provided in the heat exchange water channel, the temperature of the liquid in the cleaning tank 3 is monitored by the liquid temperature sensor 12, and the heat exchange water pump is inverter-controlled based on the detected temperature of the liquid temperature sensor 12. Also good.

  In any case, after starting the pressure reduction in the washing tank 3 by operating the vacuum pump 37 in a state where the water supply to the heat exchanger 35 is stopped, the water supply to the heat exchanger 35 is started at the set timing. It is preferable to adjust the amount of water supplied to the heat exchanger 35 as the temperature of the liquid in the cleaning tank 3 decreases.

  By the way, it is preferable that it is possible to detect a situation in which sealed water is not supplied to the vacuum pump 37 due to an abnormality in the water supply system. For this purpose, a pressure sensor (not shown) may be installed in the sealed water supply channel to the vacuum pump 37 to monitor the pressure in the sealed water supply channel. Alternatively, a flow sensor (not shown) may be installed in the sealed water supply channel to the vacuum pump 37 to monitor the flow in the sealed water supply channel. Or what is necessary is just to install the sealing water temperature sensor (illustration omitted) downstream from the vacuum pump 37, and to monitor the temperature of sealing water. Thereby, it is possible to monitor whether or not the sealing water is supplied to the vacuum pump 37.

  Further, if the high-temperature liquid in the cleaning tank 3 continues to be led out to the exhaust path 33 for some reason while the pressure in the cleaning tank 3 is reduced, there is a possibility that the vacuum pump 37 may become abnormal. Therefore, the temperature of the sealed water is monitored by the sealed water temperature sensor, and when the temperature of the sealed water exceeds the setting, the decompression means 7 is preferably stopped. Thereby, protection of the vacuum pump 37 can be aimed at.

  The cleaning apparatus and the cleaning method of the present invention are not limited to the configuration of the above-described embodiment, and can be appropriately changed. In particular, after the object to be cleaned 2 is immersed in the liquid in the cleaning tank 3 for cleaning or rinsing, the liquid is discharged from the cleaning tank 3 and then the pressure in the cleaning tank 3 is reduced to reduce the object 2 to be cleaned. If it is the structure which drains liquid from, the concrete method of washing | cleaning and rinsing can be changed suitably. Therefore, for example, when the liquid phase air supply pulse control is not performed, the installation of the liquid phase air supply means 9 can be omitted. Conversely, for example, when ultrasonic cleaning is to be performed, an ultrasonic transducer can be further installed.

  Furthermore, the clogging of the demister 38 and the heat exchanger 35 may be monitored. Specifically, based on the pressure in the cleaning tank 3 and the elapsed time, the depressurization speed in the cleaning tank 3 is monitored, and if this depressurization speed is below the reference value, a notification to that effect is given. It may be. The steam separator 34 is provided with a demister 38 so as to partition the interior of the container 39 into an upper space and a lower space. By monitoring the pressure difference between the upper region and the lower region with a pressure switch, the demister 38 is provided. Whether or not 38 is clogged can be grasped.

DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Object to be cleaned 3 Washing tank 4 Water supply means 5 Liquid supply means 6 Heating means 7 Depressurization means 8 Gas phase air supply means 9 Liquid phase air supply means 10 Drainage means 11 Pressure sensor 12 Liquid temperature sensor 13 Control means

Claims (4)

After the object to be cleaned is immersed in the liquid in the cleaning tank for washing or rinsing, the liquid is discharged from the cleaning tank, and then the saturated vapor pressure of the liquid remaining in the object to be cleaned is lower than the saturated vapor pressure . after the vacuum pressure was regained, Ri figure draining from the object to be cleaned by the vacuum again,
The washing or rinsing of the object to be cleaned, after heating the liquid in the cleaning tank to a set temperature by heating means, thereby reducing the pressure in the cleaning tank to continue to exhaust from the cleaning tank by the pressure reducing means In the process, during the boiling of the liquid in the cleaning tank due to this decompression, the outside air is introduced into the gas phase portion in the cleaning tank by the gas-phase air supply means, and instantaneously temporarily until the liquid stops boiling in the cleaning tank. A cleaning method characterized by including an operation of repeatedly restoring pressure. The cleaning method according to claim 1 , wherein after the liquid is drained, the liquid is stored again in the cleaning tank to clean or rinse the object to be cleaned. Performing a set number of cycles including storing liquid in the cleaning tank, cleaning or rinsing the object to be cleaned, discharging liquid from the cleaning tank, and draining the liquid from the object to be cleaned. The cleaning method according to claim 1, wherein: The cleaning method according to claim 1 , wherein the object to be cleaned is dried by the liquid draining, or the object to be cleaned is dried after the liquid draining.

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