JP5370921B2 - Cleaning device - Google Patents

Cleaning device Download PDF

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JP5370921B2
JP5370921B2 JP2009196356A JP2009196356A JP5370921B2 JP 5370921 B2 JP5370921 B2 JP 5370921B2 JP 2009196356 A JP2009196356 A JP 2009196356A JP 2009196356 A JP2009196356 A JP 2009196356A JP 5370921 B2 JP5370921 B2 JP 5370921B2
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cleaning
liquid
gas
pressure
heat exchanger
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JP2011045834A (en
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慎二 藤井
崇文 山崎
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Miura Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To solve at the same time such problems as: how to reduce the space required, how to reduce the amount of a cleaning liquid consumed, how to prevent generation of cavitation, and how to reduce clogging with fine particle foreign matter. <P>SOLUTION: In a cleaning apparatus including a cleaning vessel 3, a pressure reducing means 6 containing a heat exchanger 4 condensing gas in the cleaning vessel 3 and a vacuum pump 5, a pressure returning means 7 in the cleaning vessel 3, and a control means 14 for boiling the cleaning liquid in the cleaning vessel 3 by alternating pressure reduction and pressure return, the heat exchanger 4 is constituted by a plate-type heat exchanger for cooling gas with cooling water, and a gas-liquid separator 9 is installed upstream of the heat exchanger 4 to separate the cleaning liquid, fine liquid drops of the cleaning liquid and fine foreign matter contained in gas from the gas by a demister, and to return the separated liquid to the cleaning vessel 3. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、医療器具の他、電子部品や機械部品などを洗浄する洗浄装置に関するものである。   The present invention relates to a cleaning apparatus for cleaning electronic parts, machine parts and the like in addition to medical instruments.

従来、下記特許文献1に開示されるように、洗浄液が貯留され、その洗浄液に被洗浄物が浸漬される洗浄槽と、洗浄槽内の気体に含まれる蒸気を凝縮する熱交換器およびこの熱交換器の下流に設けた真空ポンプを含み、洗浄槽内の気体を外部へ吸引排出して洗浄槽内を減圧する減圧手段と、減圧された洗浄槽内へ外気を導入して、洗浄槽内を復圧する復圧手段とを備え、前記減圧と前記復圧とを繰り返して洗浄槽内の洗浄液を沸騰させる洗浄装置(以下、減圧沸騰洗浄装置と称する。)が知られている。   Conventionally, as disclosed in the following Patent Document 1, a cleaning liquid is stored, a cleaning tank in which an object to be cleaned is immersed in the cleaning liquid, a heat exchanger that condenses the vapor contained in the gas in the cleaning tank, and this heat Including a vacuum pump provided downstream of the exchanger, vacuuming means for sucking and discharging the gas in the cleaning tank to the outside and depressurizing the cleaning tank, and introducing outside air into the vacuumed cleaning tank, There is known a cleaning device (hereinafter referred to as a reduced-pressure boiling cleaning device) that includes a pressure-recovery means for recovering the pressure of the liquid and boiles the cleaning liquid in the cleaning tank by repeating the pressure reduction and the pressure recovery.

特公昭63−32459号公報Japanese Examined Patent Publication No. 63-32459 特開平7−136604号公報JP-A-7-136604

この出願の発明者等は、特許文献1と同様な洗浄装置を開発する過程において、特許文献1の洗浄装置におけるつぎの第一〜第三の課題を見出した。すなわち、第一の課題は、蒸気凝縮用の熱交換器としてシェル・アンド・チューブ式熱交換器を用いているので、熱交換器の占有体積が大きく、結果として装置が大型化し、広い設置スペースが必要となるという省スペース化の課題である。第一の課題は、病院などに設置するこの種洗浄装置としては解決すべき重要な課題である。第二の課題は、洗浄液の沸騰により、洗浄液が洗浄槽外へ排出され、洗浄液の減少が著しいという洗浄液多量消費の課題である。洗浄液は、微小液滴として流出する場合と、洗浄槽内の水位が上昇して、洗浄液が流出する場合がある。第三の課題は、飽和温度以上の洗浄液が真空ポンプに吸い込まれることにより、キャビテーションが発生し、場合によっては、真空ポンプを損傷するキャビテーション発生の課題である。この第三の課題は、真空ポンプを用いた減圧沸騰洗浄装置においてこの出願の発明者らが見出した新規な課題である。   The inventors of this application have found the following first to third problems in the cleaning device of Patent Document 1 in the process of developing a cleaning device similar to Patent Document 1. That is, the first problem is that a shell-and-tube heat exchanger is used as a heat exchanger for vapor condensation, so that the heat exchanger occupies a large volume, resulting in a large equipment and a large installation space. This is a problem of space saving. The first problem is an important problem to be solved for this type of cleaning apparatus installed in a hospital or the like. The second problem is a problem of large consumption of the cleaning liquid in which the cleaning liquid is discharged out of the cleaning tank due to boiling of the cleaning liquid and the cleaning liquid is significantly reduced. The cleaning liquid may flow out as fine droplets, or the water level in the cleaning tank may rise and the cleaning liquid may flow out. A third problem is a problem of cavitation that causes cavitation when a cleaning liquid having a temperature equal to or higher than the saturation temperature is sucked into the vacuum pump, and possibly damages the vacuum pump. The third problem is a new problem found by the inventors of this application in a vacuum boiling cleaning apparatus using a vacuum pump.

第一の課題を解決するために、熱交換器を公知のプレート式熱交換器とした実験を行ったところ、第四の課題があることを見出した。第四の課題は、液体のまま流出する洗浄液に含まれる血液異物などの微粒子(以下、微粒異物という。),洗浄液の沸騰の際に生ずる微小液滴に含まれる微粒異物(洗浄液および微小液滴と独立して存在する微粒異物を含む。)が、プレート式熱交換器の微小隙間(隙間は、流体流通隙間と称することができる。)を塞ぐという微粒異物の詰りの課題である。微粒異物が詰まると、熱交換器の伝熱効率が低下し、結果として、減圧手段の減圧能力が低下して減圧に時間がかかる,すなわち減圧洗浄時間が長くなり、消費電力が増加するという課題と、熱交換器の詰りを解消する再生の作業が困難であるという課題を伴う。この第四の課題は、凝縮用熱交換器をプレート式熱交換器とした減圧沸騰洗浄装置における特有の課題であり、この出願の発明者らが見出した新規な課題である。   In order to solve the first problem, an experiment was conducted in which the heat exchanger was a known plate heat exchanger, and it was found that there was a fourth problem. The fourth problem is that fine particles such as blood foreign matters (hereinafter referred to as fine foreign matters) contained in the cleaning liquid that flows out as liquid, and fine foreign matters contained in the fine droplets generated when the cleaning liquid is boiled (cleaning liquid and fine droplets). Is a problem of clogging of fine foreign matter that includes a fine gap (a gap can be referred to as a fluid flow gap) of the plate heat exchanger. When the fine foreign matter is clogged, the heat transfer efficiency of the heat exchanger is lowered, and as a result, the pressure reduction capability of the pressure reduction means is reduced and it takes time to reduce the pressure, that is, the time for vacuum cleaning is increased and the power consumption is increased. In addition, there is a problem that it is difficult to perform the regeneration work to eliminate the clogging of the heat exchanger. The fourth problem is a problem specific to the vacuum boiling washing apparatus in which the heat exchanger for condensation is a plate heat exchanger, and is a new problem found by the inventors of this application.

第二の課題を解決するために、特許文献2のように、洗浄槽の下流側に気液分離器を設けることが考えられるが、単なる気液分離器では、解決することはできない。なお、特許文献2の気液分離器は、その下流側に減圧タンクを備える構成であるので、第三の課題の
解決を意図するものではない。
In order to solve the second problem, it is conceivable to provide a gas-liquid separator on the downstream side of the washing tank as in Patent Document 2, but a simple gas-liquid separator cannot solve the problem. In addition, since the gas-liquid separator of patent document 2 is a structure provided with a pressure reduction tank in the downstream, it does not intend the solution of a 3rd subject.

この発明は、減圧沸騰洗浄装置において、第一の課題〜第四の課題,すなわち省スペース化の課題,洗浄液多量消費の課題,キャビテーション発生の課題,および微粒異物の詰りの課題を同時に解決することである。   The present invention simultaneously solves the first to fourth problems, that is, the problem of space saving, the problem of large consumption of cleaning liquid, the problem of cavitation generation, and the problem of clogging of fine particles in the vacuum boiling cleaning apparatus. It is.

本発明は、前記課題を解決するためになされたもので、請求項1に記載の発明は、洗浄液が貯留され、その洗浄液に被洗浄物が浸漬される洗浄槽と、前記洗浄槽内の気体を凝縮する熱交換器および前記熱交換器の下流に設けた真空ポンプを含み、前記気体を外
部へ吸引排出して前記洗浄槽内を減圧する減圧手段と、減圧された前記洗浄槽内へ外気
を導入して、前記洗浄槽内を復圧する復圧手段と、前記減圧手段および前記復圧手段を
制御して前記減圧と前記復圧とを繰り返して前記洗浄槽内の洗浄液を沸騰させる制御手
段とを備える洗浄装置において、前記熱交換器は、冷却水により前記気体を冷却するプ
レート式熱交換器にて構成され、前記熱交換器の上流側に、デミスタにより洗浄液,前
記気体に含まれる洗浄液の微小液滴および微粒異物を前記気体から分離し、分離した液
体を前記洗浄槽へ戻す気液分離器を備え、前記気液分離器は、前記熱交換器と別体に構成された容器と、この容器内を入口側空間と出口側空間とに仕切るように配置されたデミスタとを備え、前記容器は、前記洗浄槽からの気体を前記入口側空間へ導入する気体入口と、前記デミスタにより洗浄液,洗浄液の微小液滴および微粒異物を分離した後の気体を前記熱交換器へ向けて流出させる気体出口と、前記デミスタにより分離された液体を前記洗浄槽へ還流させる液体出口とを備え、前記デミスタを再生または交換可能に構成し、前記洗浄槽内の液温を検出する液温センサを備え、前記制御手段は、前記減圧時の前記液温センサの検出温度の変化勾配が設定値以下となると、前記デミスタの再生または交換時期を報知することを特徴としている。
The present invention has been made to solve the above problems, and the invention according to claim 1 is directed to a cleaning tank in which a cleaning liquid is stored and an object to be cleaned is immersed in the cleaning liquid, and a gas in the cleaning tank. And a vacuum pump provided downstream of the heat exchanger, decompressing means for sucking and discharging the gas to the outside and decompressing the inside of the washing tank, and outside air into the decompressed washing tank And a control means for boiling the cleaning liquid in the cleaning tank by controlling the pressure reducing means and the pressure recovery means to repeat the pressure reduction and the pressure recovery. The heat exchanger is configured by a plate heat exchanger that cools the gas with cooling water, and a cleaning liquid is contained in the gas by a demister on the upstream side of the heat exchanger. Microdroplets and microparticles Is separated from the gas, e Bei the gas-liquid separator to return the separated liquid to the cleaning tank, the gas-liquid separator, a container made to the heat exchanger separately from the inlet to the vessel A demister disposed so as to be divided into a side space and an outlet side space, and the container has a gas inlet for introducing gas from the cleaning tank into the inlet side space, and a cleaning liquid and a cleaning liquid by the demister. A gas outlet for discharging the gas after separating the droplets and fine foreign matters toward the heat exchanger, and a liquid outlet for returning the liquid separated by the demister to the cleaning tank, and regenerating or exchanging the demister. A liquid temperature sensor configured to detect the liquid temperature in the cleaning tank, and the control means is configured such that when the change gradient of the temperature detected by the liquid temperature sensor at the time of the pressure reduction is equal to or lower than a set value, Replay or exchange It is characterized by notifying the time.

請求項2に記載の発明によれば、請求項1において、前記復圧手段の給気路を前記出口側空間に接続し、前記給気路,前記出口側空間,前記デミスタ、前記気体入口を順次通して前記洗浄槽内を復圧することを特徴としている。According to the second aspect of the present invention, in the first aspect, the air supply path of the return pressure unit is connected to the outlet side space, and the air supply path, the outlet side space, the demister, and the gas inlet are connected. It is characterized in that the pressure inside the washing tank is restored by passing sequentially.

この発明によれば、減圧沸騰洗浄装置における第一の課題〜第四の課題,すなわち省スペース化の課題,洗浄液多量消費の課題,キャビテーション発生の課題および微粒異物の詰りの課題を同時に解決することができる。   According to the present invention, the first to fourth problems in the vacuum boiling cleaning apparatus, that is, the problem of space saving, the problem of large consumption of cleaning liquid, the problem of cavitation generation, and the problem of clogging of fine foreign matters are simultaneously solved. Can do.

本発明の洗浄装置の実施例1を示す概略図である。It is the schematic which shows Example 1 of the washing | cleaning apparatus of this invention. 本発明の洗浄装置の実施例1の制御手順の要部を示す図である。It is a figure which shows the principal part of the control procedure of Example 1 of the washing | cleaning apparatus of this invention. 本発明の洗浄装置の実施例2を示す概略図である。It is the schematic which shows Example 2 of the washing | cleaning apparatus of this invention. 本発明の洗浄装置の実施例2の制御手順の要部を示す図である。It is a figure which shows the principal part of the control procedure of Example 2 of the washing | cleaning apparatus of this invention. 本発明の洗浄装置の実施例3を示す概略図である。It is the schematic which shows Example 3 of the washing | cleaning apparatus of this invention. 本発明の洗浄装置の実施例4を示す概略図である。It is the schematic which shows Example 4 of the washing | cleaning apparatus of this invention.

つぎに、この発明の洗浄装置の実施の形態について説明する。この発明の実施の形態は、被洗浄物の洗浄に限らず、すすぎや消毒を行う装置に好適に実施される。   Next, an embodiment of the cleaning apparatus of the present invention will be described. The embodiment of the present invention is not limited to cleaning of an object to be cleaned, but is preferably implemented in an apparatus that performs rinsing and disinfection.

この実施の形態を具体的に説明する。この実施の形態は、洗浄液が貯留され、その洗浄液に被洗浄物が浸漬される洗浄槽と、前記洗浄槽内の気体を外部へ吸引排出して前記洗浄槽内を減圧する減圧手段と、減圧された前記洗浄槽内へ外気を導入して、前記洗浄槽内を復圧する復圧手段と、前記減圧手段および前記復圧手段を制御して前記減圧と前記復圧とを繰り返して前記洗浄槽内の洗浄液を沸騰させる制御手段とを備える洗浄装置である。前記減圧手段は、前記気体を凝縮する熱交換器および前記熱交換器の下流に設けた真空ポンプを含んで構成される。   This embodiment will be specifically described. This embodiment includes a cleaning tank in which a cleaning liquid is stored and an object to be cleaned is immersed in the cleaning liquid, a decompression unit that sucks and discharges the gas in the cleaning tank to the outside, and depressurizes the cleaning tank. A return pressure means for introducing outside air into the cleaning tank and returning the pressure in the cleaning tank; and controlling the pressure reducing means and the return pressure means to repeat the pressure reduction and the return pressure. And a control means for boiling the cleaning liquid therein. The said pressure reduction means is comprised including the heat pump which condenses the said gas, and the vacuum pump provided downstream of the said heat exchanger.

前記熱交換器は、冷却水により前記気体を冷却するプレート式熱交換器にて構成されている。そして、前記熱交換器の上流側に、デミスタ(デミスタブランケットとも称する。)により液体の状態で流出する洗浄液,前記気体に含まれる洗浄液の微小液滴および微粒異物を前記気体から分離し、分離した液体を前記洗浄槽へ戻す気液分離器を備えている。プレート式熱交換器とは、微小隙間を存して多数のプレートを積層し、前記微小隙間に前記気体と冷却水を交互に流通させる構造の周知の熱交換器である。   The heat exchanger is composed of a plate heat exchanger that cools the gas with cooling water. Then, on the upstream side of the heat exchanger, the cleaning liquid flowing out in a liquid state by a demister (also referred to as a demister blanket), the fine droplets and fine foreign substances of the cleaning liquid contained in the gas are separated from the gas and separated. The gas-liquid separator which returns a liquid to the said washing tank is provided. The plate heat exchanger is a known heat exchanger having a structure in which a large number of plates are stacked with minute gaps and the gas and cooling water are alternately circulated in the minute gaps.

この発明の実施の形態1においては、前記熱交換器をプレート式熱交換器としているので、同じ熱交換能力のシェル・アンド・チューブ式熱交換器と比較して、洗浄装置における占有体積を減少でき、洗浄装置の小型化により省スペース化を実現できる。また、同じ外形寸法のシェル・アンド・チューブ式熱交換器と比較して、伝熱面が広く、冷却能力が高いので、少ない冷却水量で、所定の冷却能力を発揮できる。その結果、大幅に冷却水量を低減できる。   In Embodiment 1 of the present invention, since the heat exchanger is a plate heat exchanger, the occupied volume in the cleaning device is reduced as compared with a shell-and-tube heat exchanger having the same heat exchange capacity. The space can be saved by downsizing the cleaning device. In addition, compared to a shell-and-tube heat exchanger having the same outer dimensions, the heat transfer surface is wide and the cooling capacity is high, so that a predetermined cooling capacity can be exhibited with a small amount of cooling water. As a result, the amount of cooling water can be greatly reduced.

また、前記減圧手段の作動による減圧と前記復圧手段の作動による復圧とを繰り返して前記洗浄槽内の洗浄液を沸騰させる。その洗浄液の沸騰の際に、洗浄液の微小液滴と血液異物などの微粒異物とが、気体(殆どが蒸気)に含まれて前記洗浄槽から前記プレート式
熱交換器へ向けて流出する。微粒異物は、前記洗浄槽の水位が上昇して流出する洗浄液に含まれて出てゆく場合と、微小液滴に含まれて出てゆく場合と、単独ででてゆく場合がある。
In addition, the cleaning liquid in the cleaning tank is boiled by repeating the decompression by the operation of the decompression means and the return pressure by the operation of the decompression means. When the cleaning liquid is boiled, fine droplets of the cleaning liquid and fine foreign matters such as blood foreign matters are contained in a gas (mostly steam) and flow out from the cleaning tank toward the plate heat exchanger. There are cases where the fine foreign matters are included in the cleaning liquid flowing out as the water level of the cleaning tank rises, are included in the fine droplets, or are released alone.

流出した洗浄液と洗浄液の微小液滴と微粒異物は、前記デミスタにより捕捉され、気体から洗浄液が分離される。分離された洗浄液は、前記洗浄槽へ還流されて、洗浄に使用されるので、使用する洗浄液量が減少する。   The cleaning liquid that has flowed out, the fine droplets of the cleaning liquid, and the fine foreign matters are captured by the demister, and the cleaning liquid is separated from the gas. Since the separated cleaning liquid is returned to the cleaning tank and used for cleaning, the amount of cleaning liquid used is reduced.

また、飽和温度以上の洗浄液の前記気液分離器下流側への流出が防止されるので、その洗浄液が前記真空ポンプへ吸い込まれることにより生ずるキャビテーションが防止され、前記真空ポンプの損傷が防止される。   Further, since the washing liquid having a temperature equal to or higher than the saturation temperature is prevented from flowing out to the downstream side of the gas-liquid separator, cavitation caused when the washing liquid is sucked into the vacuum pump is prevented, and damage to the vacuum pump is prevented. .

また、洗浄液の前記気液分離器下流側への流出が防止されるので、洗浄液による前記プレート式熱交換器の微小隙間の閉塞が防止され、洗浄液による前記プレート式熱交換器の伝熱面の減少が防止される。前記デミスタによる微小液滴の捕捉効率は、好ましくは、90%〜99%とする。この伝熱面の減少が防止される結果、前記真空ポンプによる前記洗浄槽の所定圧力までの減圧を短時間に行うことができ、洗浄時間を短縮することができる。また、所定圧力までの減圧を短時間に行うことができる結果、前記熱交換器での冷却水量を減少させることができる。   In addition, since the outflow of the cleaning liquid to the downstream side of the gas-liquid separator is prevented, the clogging of the minute gap of the plate heat exchanger by the cleaning liquid is prevented, and the heat transfer surface of the plate heat exchanger by the cleaning liquid is prevented. Reduction is prevented. The capture efficiency of the fine droplets by the demister is preferably 90% to 99%. As a result of preventing the reduction of the heat transfer surface, the vacuum pump can be depressurized to a predetermined pressure in the cleaning tank in a short time, and the cleaning time can be shortened. Moreover, as a result of being able to perform pressure reduction to a predetermined pressure in a short time, the amount of cooling water in the heat exchanger can be reduced.

さらに、流出した微粒異物は、前記デミスタにより除去され、微粒異物による前記プレート式熱交換器の詰りが防止される。前記デミスタにより除去すべき微粒異物の径は、前記プレート式熱交換器の微小隙間より小さく設定される。好ましくは、圧損の関係から前記微小隙間を2〜3mmとすると、前記デミスタにより除去すべき微粒異物の径は、1mm以上とする。この微粒異物の好ましい捕捉効率は、90〜99%である。   Further, the discharged foreign particles are removed by the demister, and the plate heat exchanger is prevented from being clogged by the fine particles. The diameter of the fine foreign matter to be removed by the demister is set smaller than the minute gap of the plate heat exchanger. Preferably, when the fine gap is set to 2 to 3 mm due to pressure loss, the diameter of the fine foreign matter to be removed by the demister is set to 1 mm or more. The preferable trapping efficiency of the fine foreign particles is 90 to 99%.

こうして、前記プレート式熱交換器の詰りの原因となる微粒異物が前記デミスタにより捕捉されるので、前記プレート式熱交換器の伝熱効率の低下を防止できる。その結果、前記減圧手段による減圧時間が長くなり、消費電力が増加するという課題を解決することができる。   In this way, fine foreign matters that cause clogging of the plate heat exchanger are captured by the demister, so that a decrease in heat transfer efficiency of the plate heat exchanger can be prevented. As a result, it is possible to solve the problem that the decompression time by the decompression means becomes long and the power consumption increases.

この実施の形態においては、好ましくは、前記デミスタの上流側に前記デミスタが捕捉する微粒異物よりも大径の微粒異物を捕捉するプレフィルタを備える。このプレフィルタは、着脱自在で、詰まった微粒異物を洗浄等により除去することで再生可能な構成とする。前記デミスタの捕捉する微粒異物の径を1mm以上とすると、前記プレフィルタの捕捉する異物の径を5mm以上とする。   In this embodiment, preferably, a pre-filter that captures fine foreign particles having a diameter larger than the fine foreign particles captured by the demister is provided on the upstream side of the demister. The prefilter is detachable and can be regenerated by removing clogged fine particles by washing or the like. If the diameter of the fine foreign material captured by the demister is 1 mm or more, the diameter of the foreign material captured by the prefilter is 5 mm or more.

ここで、この発明の実施の形態の洗浄装置を構成する構成要素を説明する。前記洗浄槽は、被洗浄物が出し入れ可能、所定量の洗浄液を貯留可能、貯留した洗浄液を加熱手段により所定温度に加熱可能であって、内部を所定圧力に減圧した後、復圧の減復圧の繰り返しに耐えうる構成であればよく、特定の構造に限定されない。   Here, the component which comprises the washing | cleaning apparatus of embodiment of this invention is demonstrated. The cleaning tank is capable of taking in and out the object to be cleaned, storing a predetermined amount of cleaning liquid, heating the stored cleaning liquid to a predetermined temperature by heating means, and reducing the internal pressure to a predetermined pressure and then reducing the return pressure Any structure that can withstand repeated pressure is acceptable, and the structure is not limited to a specific one.

前記減圧手段は、前記熱交換器と前記真空ポンプとを含むもので、前記熱交換器の上流側に蒸気エゼクタを備えることができる   The decompression means includes the heat exchanger and the vacuum pump, and can include a steam ejector on the upstream side of the heat exchanger.

前記熱交換器は、微小隙間を存して多数のプレートを積層し、前記微小隙間に前記気体と冷却水を交互に流通させる形式のプレート式熱交換であればよく、前記微小隙間は、好ましくは、圧損の上限を1kPaとした場合、2〜3mmとする。   The heat exchanger may be a plate type heat exchange in which a large number of plates are stacked with minute gaps, and the gas and cooling water are alternately circulated in the minute gaps. When the upper limit of the pressure loss is 1 kPa, it is set to 2 to 3 mm.

前記真空ポンプは、好ましくは、水封式の真空ポンプとするが、これに限定されるもの
ではなく、この発明の課題の一つが、飽和温度以上の液滴が吸い込まれることにより生ずるキャビテーションを防止することであるので、このキャビテーションを生ずる可能性のある真空ポンプであればよい。
The vacuum pump is preferably a water-sealed vacuum pump. However, the present invention is not limited to this, and one of the problems of the present invention is to prevent cavitation caused by inhalation of a droplet having a saturation temperature or higher. Therefore, any vacuum pump that may cause this cavitation may be used.

前記気液分離器は、流入した気体から洗浄液および洗浄液の微小液滴を分離する気液分離を行う機能と、分離した洗浄液を前記洗浄槽へ還流する機能と、前記プレート式熱交換器の微小隙間に詰まる可能性のある微粒異物を先に捕捉する機能と、微粒異物の詰りの解消を前記プレート式熱交換器よりも容易に行える機能とを備える。   The gas-liquid separator has a function of performing gas-liquid separation for separating the cleaning liquid and the cleaning liquid microdroplets from the inflowing gas, a function of returning the separated cleaning liquid to the cleaning tank, and a microscopic function of the plate heat exchanger. It has a function of first capturing fine foreign matters that may be clogged in the gap and a function that can more easily eliminate clogging of fine foreign matters than the plate heat exchanger.

これらの機能を満たすべく、前記気液分離器は、好ましくは、前記熱交換器と別体に構成された容器と、この容器内を入口側空間と出口側空間とに仕切るように配置されたデミスタとを備え、前記容器は、前記洗浄槽からの気体を前記入口側空間へ導入する気体入口と、前記デミスタにより洗浄液,洗浄液の微小液滴および微粒異物を分離した後の気体を前記熱交換器へ向けて流出させる気体出口と、前記デミスタにより分離された液体を前記洗浄槽へ還流させる液体出口とを備える。   In order to satisfy these functions, the gas-liquid separator is preferably disposed so as to partition the container into an inlet side space and an outlet side space, and a container configured separately from the heat exchanger. A demister, and the container exchanges the gas after introducing the gas from the cleaning tank into the inlet side space, and the gas after the cleaning liquid, the fine droplets of the cleaning liquid and the fine foreign particles are separated by the demister. A gas outlet for flowing out toward the vessel, and a liquid outlet for returning the liquid separated by the demister to the washing tank.

この気液分離器の構成において、好ましくは、洗浄液および洗浄液の微小液滴を分離する機能の大部分を前記デミスタにより行うように構成する。しかしながら、前記気体入口から導入される気体の導入方向を前記容器の内周壁に対して水平周方向として、遠心分離によって洗浄液および洗浄液の微小液滴を分離するように構成し、洗浄液および洗浄液の微小液滴を分離する機能の大部分をこの遠心分離機能により行い、残りを前記デミスタにより行うように構成できる。   In the configuration of the gas-liquid separator, the demister is preferably configured to perform most of the function of separating the cleaning liquid and the cleaning liquid microdroplets. However, the introduction direction of the gas introduced from the gas inlet is a horizontal circumferential direction with respect to the inner peripheral wall of the container, and the cleaning liquid and the fine droplets of the cleaning liquid are separated by centrifugal separation. It can be configured such that most of the function of separating droplets is performed by the centrifugal separation function and the rest is performed by the demister.

そして、前記容器を本体とこの本体を開閉可能とする蓋とから構成し、前記デミスタを前記本体に着脱自在に装着する構成とすることで、前記デミスタの再生または、交換を容易にする。前記デミスタの再生は、液体による洗浄だけではなく、気体により微粒異物を吹き飛ばす方法などを含む。前記プレート式熱交換器に微粒異物が詰まると、数十枚にも及ぶプレートを1枚、1枚、洗浄して元に戻す必要がある。これに対して前記デミスタを前記熱交換器と別体の容器内に着脱自在に設けておくことで、前記デミスタに捕捉された微粒異物の除去が容易となるので、前記プレート式熱交換器にて捕捉された場合と比較して、微粒異物の詰りを容易に解消することができる。   The container is composed of a main body and a lid capable of opening and closing the main body, and the demister is detachably attached to the main body, thereby facilitating the regeneration or replacement of the demister. The regeneration of the demister includes not only cleaning with a liquid but also a method of blowing off fine foreign particles with gas. If the plate-type heat exchanger is clogged with fine foreign matter, it is necessary to wash and return dozens of plates one by one. On the other hand, by providing the demister detachably in a container separate from the heat exchanger, it is easy to remove the fine foreign matter captured by the demister. As compared with the case where the particles are trapped, the clogging of fine foreign matters can be easily eliminated.

前記の分離した洗浄液を前記洗浄槽へ還流する機能は、好ましくは、前記洗浄槽と前記液体出口とが、強制還流手段を備えない連通管にて接続することにより実現する。前記強制還流手段とは、ポンプであるが、前記強制還流手段を備えないことにより、装置構成を簡略化できる。   The function of returning the separated cleaning liquid to the cleaning tank is preferably realized by connecting the cleaning tank and the liquid outlet through a communication pipe not provided with a forced reflux means. The forced reflux means is a pump, but the apparatus configuration can be simplified by not providing the forced reflux means.

この発明は、前記の発明の実施の形態に限定されるものではなく、前記復圧手段の給気路を前記洗浄槽に直接接続するのではなく、前記容器の出口側空間に接続し、前記給気路−前記出口側空間−前記デミスタ−前記気体入口を順次通して前記洗浄槽内を復圧するように構成することができる。   The present invention is not limited to the embodiment of the invention described above, and instead of directly connecting the air supply path of the decompression means to the cleaning tank, it is connected to the outlet side space of the container, The inside of the washing tank can be re-pressured through the air supply path, the outlet side space, the demister, and the gas inlet sequentially.

また、前記デミスタの再生または交換時期を報知する報知手段を備えることができる。この報知手段は、好ましくは、前記洗浄槽内の液温を検出する液温センサを備え、前記制御手段は、前記減圧時の前記液温センサの検出温度の変化勾配が設定値以下となると、前記デミスタの再生または交換時期を報知するように構成する。こうした構成を採用した場合は、前記洗浄槽内の減圧を行う際に、洗浄液の温度を制御するために用いる液温センサをそのまま使用して、前記報知に用いることができ、装置の構成を簡素化できる。報知の手段としては、表示器による表示,音声による報知などを含む。   In addition, an informing means for informing the regeneration or replacement time of the demister can be provided. The informing means preferably includes a liquid temperature sensor for detecting the liquid temperature in the cleaning tank, and the control means has a change gradient of the detected temperature of the liquid temperature sensor at the time of the depressurization being a set value or less. It is configured to notify the regeneration or replacement time of the demister. When such a configuration is adopted, when the pressure in the cleaning tank is reduced, a liquid temperature sensor used for controlling the temperature of the cleaning liquid can be used as it is for the notification, and the configuration of the apparatus is simplified. Can be The notification means includes display by a display, notification by sound, and the like.

しかしながら、前記報知手段として、前記デミスタの気体の流れに対して前後の差圧を検出して、検出差圧が設定値以上となると、前記デミスタの再生または交換時期を報知するように構成することができる。   However, the notifying means is configured to detect a differential pressure before and after the gas flow of the demister and to notify the regeneration or replacement timing of the demister when the detected differential pressure exceeds a set value. Can do.

以下、この発明の実施例1を図面に基づいて詳細に説明する。図1は、本発明の洗浄装置の一実施形態を示す概略図であり、図2は、同実施例1の制御手順の要部を示すフローチャート図である。   Embodiment 1 of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a schematic view showing an embodiment of the cleaning apparatus of the present invention, and FIG. 2 is a flowchart showing the main part of the control procedure of the first embodiment.

本実施1の洗浄装置1は、洗浄液が貯留され、その洗浄液に被洗浄物2が浸漬される洗浄槽3と、前記気体を凝縮する熱交換器4およびこの熱交換器4の下流に設けた真空ポンプ5を含み、洗浄槽3内の気体を外部へ吸引排出して洗浄槽3内を減圧する減圧手段6と、減圧された洗浄槽3内へ外気を導入して、洗浄槽3内を復圧する復圧手段7と、熱交換器4の上流側に設けられ、デミスタ8により洗浄液,前記気体に含まれる洗浄液の微小液滴および微粒異物を前記気体から分離し、分離した液体を洗浄槽3へ戻す気液分離器9とを主要部として備えている。   The cleaning apparatus 1 according to the first embodiment is provided with a cleaning tank 3 in which cleaning liquid is stored and an object to be cleaned 2 is immersed in the cleaning liquid, a heat exchanger 4 that condenses the gas, and a downstream of the heat exchanger 4. A vacuum pump 5 is included to suck and discharge the gas in the cleaning tank 3 to the outside to reduce the pressure in the cleaning tank 3, and to introduce the outside air into the pressure-reduced cleaning tank 3. Pressure recovery means 7 for returning pressure and upstream of the heat exchanger 4, a demister 8 separates the cleaning liquid, the cleaning liquid micro-droplets and the foreign particles from the gas from the gas, and the separated liquid is cleaned. A gas-liquid separator 9 that returns to 3 is provided as a main part.

そして、洗浄槽3内の洗浄液を加熱する加熱手段10と、洗浄槽3内の洗浄液を排出する排水手段11と、洗浄槽3内の圧力を検出する圧力センサ12と、洗浄槽3内の洗浄液の温度を検出する液温センサ13と、これらセンサ12,13の検出信号などに基づき前記各手段6,7,10,11を制御する制御手段14とを備える。   The heating means 10 for heating the cleaning liquid in the cleaning tank 3, the drain means 11 for discharging the cleaning liquid in the cleaning tank 3, the pressure sensor 12 for detecting the pressure in the cleaning tank 3, and the cleaning liquid in the cleaning tank 3 And a control means 14 for controlling the means 6, 7, 10, 11 based on detection signals of the sensors 12, 13 and the like.

洗浄装置1は、被洗浄物2の洗浄、すすぎおよび消毒の内、いずれか一以上の処理を実行可能とされる。本実施例1では、被洗浄物2の洗浄およびすすぎの後、被洗浄物2の乾燥が、一つの洗浄槽3で実行可能とされる。   The cleaning device 1 can perform any one or more of cleaning, rinsing, and disinfection of the object to be cleaned 2. In the first embodiment, after the object to be cleaned 2 is cleaned and rinsed, the object to be cleaned 2 can be dried in one cleaning tank 3.

洗浄液は、減圧手段6による洗浄槽3内の減圧により沸騰可能であれば特に問わないが、たとえば水である。本実施例1では、洗浄液は、洗浄剤を0.5%前後含んだ水である。但し、洗浄液は、洗剤を含む水の他、洗剤を含まない水でもよい。また、洗浄液は、軟水、純水、溶剤など、洗浄に使用できるその他の液体でもよい。   The cleaning liquid is not particularly limited as long as it can be boiled by the pressure reduction in the cleaning tank 3 by the pressure reducing means 6, but is water, for example. In Example 1, the cleaning liquid is water containing about 0.5% of a cleaning agent. However, the cleaning liquid may be water that does not contain detergent as well as water that contains detergent. The cleaning liquid may be other liquid that can be used for cleaning, such as soft water, pure water, and a solvent.

被洗浄物2は、洗浄を図りたい物品であり、たとえば、医療器具、電子部品または機械部品である。   The article to be cleaned 2 is an article to be cleaned, and is, for example, a medical instrument, an electronic component, or a mechanical component.

洗浄槽3は、内部空間の減圧に耐える中空容器である。本実施例1の洗浄槽3は、上方へ開口して中空部を有する第一容器本体(以下、単に第一本体という。)15と、この第一本体15の開口部を開閉する着脱自在の第一蓋16とを備える。第一本体15に第一蓋16をした状態では、第一本体15と第一蓋16との隙間は第一パッキン17で封止される。これにより、第一本体12の中空部は密閉され、洗浄槽3内に密閉空間が形成される。   The cleaning tank 3 is a hollow container that can withstand the decompression of the internal space. The cleaning tank 3 of the first embodiment includes a first container body (hereinafter simply referred to as a first body) 15 that opens upward and has a hollow portion, and a detachable that opens and closes the opening of the first body 15. A first lid 16. In the state where the first lid 16 is attached to the first body 15, the gap between the first body 15 and the first lid 16 is sealed with the first packing 17. Thereby, the hollow part of the 1st main body 12 is sealed, and the sealed space is formed in the washing tank 3.

洗浄槽3には、洗浄槽3内に洗浄液を供給する給水手段18が接続される。本実施例1の給水手段18は、原水タンク19の水を、給水路20を介して洗浄槽3に供給する。給水路20には、原水タンク19の側から順に、給水ポンプ21と第一給水弁22とが設けられる。給水ポンプ21を作動させた状態で第一給水弁22を開くと、原水タンク19の水が給水路20を介して洗浄槽3に供給される。洗浄槽3へ供給される水には、給水路20の中途において、薬液タンク23からの洗浄剤を薬注ポンプ24により混入することができる。なお、第一給水弁22の開閉は、給水ポンプ21および薬注ポンプ24の作動の有無と連動する。但し、洗浄剤の添加は適宜に省略でき、その場合には薬注ポンプ24および薬液タンク23の設置は省略できる。   A water supply means 18 for supplying a cleaning liquid into the cleaning tank 3 is connected to the cleaning tank 3. The water supply means 18 of the first embodiment supplies the water in the raw water tank 19 to the cleaning tank 3 through the water supply channel 20. A water supply pump 21 and a first water supply valve 22 are provided in the water supply path 20 in order from the raw water tank 19 side. When the first water supply valve 22 is opened while the water supply pump 21 is operated, the water in the raw water tank 19 is supplied to the cleaning tank 3 through the water supply path 20. The water supplied to the cleaning tank 3 can be mixed with the cleaning agent from the chemical liquid tank 23 by the chemical injection pump 24 in the middle of the water supply channel 20. The opening / closing of the first water supply valve 22 is linked to the presence / absence of the operation of the water supply pump 21 and the chemical injection pump 24. However, the addition of the cleaning agent can be omitted as appropriate, and in this case, the installation of the chemical injection pump 24 and the chemical liquid tank 23 can be omitted.

洗浄槽3には、洗浄槽3内の気体を外部へ吸引排出して洗浄槽3内を減圧する減圧手段6が接続される。本実施例1の減圧手段6は、洗浄槽3内の気体を、排気路25を介して吸引排出する。排気路25には、気液分離器9,洗浄槽3の側から順に、減圧手段6の構成要素である熱交換器4、逆止弁26よび水封式の真空ポンプ6が設けられる。   The cleaning tank 3 is connected to a decompression means 6 that sucks and discharges the gas in the cleaning tank 3 to the outside and decompresses the cleaning tank 3. The decompression means 6 according to the first embodiment sucks and discharges the gas in the cleaning tank 3 through the exhaust passage 25. In the exhaust passage 25, a heat exchanger 4, a check valve 26, and a water seal vacuum pump 6, which are constituent elements of the decompression means 6, are provided in this order from the gas-liquid separator 9 and the washing tank 3 side.

熱交換器4は、排気路25内の蒸気を冷却し凝縮させるプレート式熱交換器である。プレート式熱交換器4は、微小隙間を存して多数のプレートを積層して、微小隙間に気体流路27と冷却水流路28とを交互に形成(気体流路27と冷却水流路28とは並列に多数形成されているが、図1では、それぞれ1本のみ図示している。)し、流通させる構造の周知の熱交換器である。   The heat exchanger 4 is a plate heat exchanger that cools and condenses the steam in the exhaust passage 25. The plate heat exchanger 4 is formed by stacking a large number of plates with minute gaps, and alternately forming gas flow paths 27 and cooling water flow paths 28 in the minute gaps (the gas flow paths 27 and the cooling water flow paths 28 and 28 1 is a well-known heat exchanger having a structure in which only one is shown in FIG.

そして、冷却水流路28には、第二給水弁29を介して水が供給され排出される。熱交換器4において、排気路25内の蒸気を予め凝縮させることで、その後の真空ポンプ6の負荷を軽減して、洗浄槽3内の減圧を有効に図ることができる。   Then, water is supplied to the cooling water passage 28 via the second water supply valve 29 and discharged. In the heat exchanger 4, by condensing the vapor in the exhaust passage 25 in advance, it is possible to reduce the subsequent load on the vacuum pump 6 and effectively reduce the pressure in the cleaning tank 3.

水封式の真空ポンプ6は、周知のとおり、封水と呼ばれる水が供給されて作動される。そのために、真空ポンプ6には、第三給水弁30を介して水が供給され排出される。真空ポンプ6を作動させる際、第三給水弁30は、真空ポンプ6に連動して開かれる。   As is well known, the water-sealed vacuum pump 6 is supplied with water called sealed water. Therefore, water is supplied to the vacuum pump 6 through the third water supply valve 30 and discharged. When operating the vacuum pump 6, the third water supply valve 30 is opened in conjunction with the vacuum pump 6.

気液分離器9は、排気路25の熱交換器4の上流側で、洗浄槽3の下流側に設けている。気液分離器9は、熱交換器4と別体に構成された容器31と、この容器31内を入口側空間32と出口側空間33とに仕切るように配置されたデミスタ8とを含んで構成されている。   The gas-liquid separator 9 is provided on the upstream side of the heat exchanger 4 in the exhaust passage 25 and on the downstream side of the cleaning tank 3. The gas-liquid separator 9 includes a container 31 configured separately from the heat exchanger 4, and a demister 8 disposed so as to partition the inside of the container 31 into an inlet side space 32 and an outlet side space 33. It is configured.

容器31は、洗浄槽3からの気体を入口側空間32へ導入する気体入口34と、デミスタ8により洗浄液および洗浄液の微小液滴を分離した後の気体を熱交換器4へ向けて流出させる気体出口35と、デミスタ8により分離された液体を洗浄槽3へ還流させる液体出口36とを備える。デミスタ8は、熱交換器4の微小隙間に微粒異物が詰まらないように、1mm以上の微粒異物を捕捉する機能を有する。そして、洗浄槽3内の排気路25の入口に5mm以上の径の異物を除去するプレフィルタ37を設けている。   The container 31 includes a gas inlet 34 that introduces the gas from the cleaning tank 3 into the inlet side space 32, and a gas that causes the gas after the cleaning liquid and the fine droplets of the cleaning liquid are separated by the demister 8 to flow toward the heat exchanger 4. An outlet 35 and a liquid outlet 36 for refluxing the liquid separated by the demister 8 to the cleaning tank 3 are provided. The demister 8 has a function of capturing fine foreign matters of 1 mm or more so that the fine foreign matters are not clogged in the minute gaps of the heat exchanger 4. A pre-filter 37 for removing foreign matters having a diameter of 5 mm or more is provided at the inlet of the exhaust passage 25 in the cleaning tank 3.

また、容器31は、上方へ開口して中空部を有する第二容器本体(以下、単に第二本体という。)38と、この第二本体38の開口部を開閉する着脱自在の第二蓋38とを備える。第二本体38に第二蓋39をした状態では、第二本体38と第二蓋39との隙間は第二パッキン40で封止される。これにより、第二本体38の中空部は密閉され、気液分離器9内に密閉空間が形成される。こうした構成により、デミスタ8の洗浄または、交換を容易としている。   The container 31 has a second container body (hereinafter simply referred to as a second body) 38 that opens upward and has a hollow portion, and a detachable second lid 38 that opens and closes the opening of the second body 38. With. In the state where the second lid 39 is attached to the second body 38, the gap between the second body 38 and the second lid 39 is sealed with the second packing 40. Thereby, the hollow part of the 2nd main body 38 is sealed, and the sealed space is formed in the gas-liquid separator 9. Such a configuration facilitates cleaning or replacement of the demister 8.

洗浄槽3の底部と容器31の液体出口36とは、ポンプを備えない連通管41している。これにより、気液分離器9にて分離された洗浄液は洗浄槽3に還流される。気液分離器9の液面と、洗浄槽3の液面は、連通管41の作用により、図1に示すように等しくなる。   The bottom of the cleaning tank 3 and the liquid outlet 36 of the container 31 form a communication pipe 41 that does not include a pump. Thereby, the cleaning liquid separated in the gas-liquid separator 9 is returned to the cleaning tank 3. The liquid level of the gas-liquid separator 9 and the liquid level of the cleaning tank 3 are equalized as shown in FIG.

また、洗浄槽3には、減圧下の洗浄槽3内へ外気を導入して洗浄槽3内を復圧する復圧手段7が接続される。本実施例1の復圧手段7は、減圧下の洗浄槽3内に、給気路42を介して外気を導入する。給気路42には給気フィルタ43および給気弁44が設けられており、洗浄槽3内が減圧された状態で給気弁44を開くと、差圧により外気を洗浄槽3内へ導入して、洗浄槽3内を復圧することができる。   The cleaning tank 3 is connected to a decompression means 7 that introduces outside air into the cleaning tank 3 under reduced pressure to restore the pressure in the cleaning tank 3. The return pressure means 7 of the first embodiment introduces outside air into the cleaning tank 3 under reduced pressure via the air supply path 42. An air supply filter 43 and an air supply valve 44 are provided in the air supply path 42. When the air supply valve 44 is opened in a state where the inside of the cleaning tank 3 is decompressed, outside air is introduced into the cleaning tank 3 by a differential pressure. Thus, the pressure in the cleaning tank 3 can be restored.

また、洗浄槽3には、洗浄槽3内の洗浄液を加熱する加熱手段10が設けられる。本実施例1の加熱手段10は、洗浄槽3内の洗浄液中に蒸気を吹き込んで、洗浄液を加熱する。具体的には、洗浄槽3には、ボイラなどの蒸気供給源から給蒸路45を介して蒸気が供給可能とされる。給蒸路45に設けた給蒸弁46を開閉することで、洗浄槽3内への蒸気供給の有無を切り替えることができる。   The cleaning tank 3 is provided with heating means 10 for heating the cleaning liquid in the cleaning tank 3. The heating means 10 according to the first embodiment heats the cleaning liquid by blowing steam into the cleaning liquid in the cleaning tank 3. Specifically, steam can be supplied to the cleaning tank 3 through a steam supply path 45 from a steam supply source such as a boiler. By opening and closing the steam supply valve 46 provided in the steam supply path 45, it is possible to switch the presence or absence of steam supply into the cleaning tank 3.

また、洗浄槽3には、洗浄槽3内の洗浄液を排出する排水手段11が設けられる。本実施例1の排水手段11は、洗浄槽3内の洗浄液を、洗浄槽3の底部から排水路47を介して排出する。排水路47には、排水弁48が設けられており、洗浄槽3内に洗浄液が貯留された状態で排水弁48を開くと、洗浄液を洗浄槽3外へ自然に導出することができる。   Further, the cleaning tank 3 is provided with a drainage means 11 for discharging the cleaning liquid in the cleaning tank 3. The drainage means 11 of the first embodiment discharges the cleaning liquid in the cleaning tank 3 from the bottom of the cleaning tank 3 through the drainage channel 47. The drainage passage 47 is provided with a drainage valve 48. When the drainage valve 48 is opened in a state where the cleaning liquid is stored in the cleaning tank 3, the cleaning liquid can be naturally led out of the cleaning tank 3.

減圧手段6、復圧手段7、加熱手段10,排水手段11および給水手段18は、制御手段14により制御される。この制御手段14は、前記各センサ12,13の検出信号などに基づき、前記各手段6,7,10,11,18を制御する制御器である。具体的には、給水ポンプ5、薬注ポンプ24、第一給水弁22、第二給水弁29、第三給水弁30、真空ポンプ24、給気弁28、給蒸弁30、排水弁32、給蒸弁46、排水弁47、圧力センサ9および液温センサ10は、制御器33に接続されている。そして、制御手段14は、以下に述べるように、所定の手順(プログラム)に従い、洗浄槽3内の被洗浄物2の洗浄を図る。   The decompression means 6, the decompression means 7, the heating means 10, the drainage means 11, and the water supply means 18 are controlled by the control means 14. The control means 14 is a controller that controls the means 6, 7, 10, 11, 18 based on the detection signals of the sensors 12, 13. Specifically, the water supply pump 5, the chemical injection pump 24, the first water supply valve 22, the second water supply valve 29, the third water supply valve 30, the vacuum pump 24, the air supply valve 28, the steam supply valve 30, the drain valve 32, The steam supply valve 46, the drain valve 47, the pressure sensor 9 and the liquid temperature sensor 10 are connected to the controller 33. And the control means 14 aims at washing | cleaning of the to-be-cleaned object 2 in the washing tank 3 according to a predetermined | prescribed procedure (program) as described below.

以下、本実施例1の洗浄装置1を用いた洗浄方法について図1および図2に基づき具体的に説明する。   Hereinafter, a cleaning method using the cleaning device 1 of the first embodiment will be specifically described with reference to FIGS. 1 and 2.

<注水工程開始前>
初期状態において、洗浄槽3内に洗浄液はなく、給気弁44以外の各弁22,29,30,46,48は、閉じられ、各ポンプ5,21,24は作動を停止している。この初期状態から、注水工程S1、加熱工程S2、減復圧パルス工程S3および排水工程S4が順次になされる。
<Before starting the water injection process>
In the initial state, there is no cleaning liquid in the cleaning tank 3, the valves 22, 29, 30, 46, 48 other than the air supply valve 44 are closed, and the pumps 5, 21, 24 are not operating. From this initial state, a water injection step S1, a heating step S2, a depressurizing pressure pulse step S3, and a drainage step S4 are sequentially performed.

注水工程S1に先立って、洗浄槽3内には被洗浄物2が入れられ、洗浄槽3の第一蓋16は閉じられる。但し、被洗浄物2は、注水工程S1の直後に洗浄槽3内に入れてもよく、その場合も、洗浄槽3内に被洗浄物2を入れた後、洗浄槽3の第一蓋16は閉じられる。いずれにしても、被洗浄物2は、洗浄槽3内の洗浄液内に浸漬される。   Prior to the water injection step S1, the object to be cleaned 2 is placed in the cleaning tank 3, and the first lid 16 of the cleaning tank 3 is closed. However, the object to be cleaned 2 may be placed in the cleaning tank 3 immediately after the water injection step S1. In this case, the first lid 16 of the cleaning tank 3 is placed after the object to be cleaned 2 is placed in the cleaning tank 3. Is closed. In any case, the article to be cleaned 2 is immersed in the cleaning liquid in the cleaning tank 3.

<注水工程>
注水工程S1は、給水手段18により洗浄槽3内に洗浄液を入れる工程である。本実施例1では、第一給水弁22を開けた状態で、給水ポンプ21および薬注ポンプ24を作動させて、洗浄槽3内に洗浄液が入れられる。洗浄槽3内へ供給される水には、薬注ポンプ24の作動により、所望量の洗浄剤が添加される。注水工程S1において、洗浄槽3の第一蓋16が閉じられている場合、洗浄槽3への注水に伴い、洗浄槽3内の空気は給気路42から排出される。
<Water injection process>
The water injection step S <b> 1 is a step of putting a cleaning liquid into the cleaning tank 3 by the water supply means 18. In the first embodiment, with the first water supply valve 22 opened, the water supply pump 21 and the chemical injection pump 24 are operated to put the cleaning liquid into the cleaning tank 3. A desired amount of cleaning agent is added to the water supplied into the cleaning tank 3 by the operation of the chemical injection pump 24. In the water injection step S <b> 1, when the first lid 16 of the cleaning tank 3 is closed, the air in the cleaning tank 3 is discharged from the air supply path 42 along with the water injection to the cleaning tank 3.

洗浄槽3に設けた液位センサ(図示省略)により、洗浄槽3内の所定水位まで洗浄液が貯留されたことを検知すると、給水手段18による給水を停止する。具体的には、給水弁22を閉じると共に、給水ポンプ21および薬注ポンプ24を停止して、次工程へ移行する。   When a liquid level sensor (not shown) provided in the cleaning tank 3 detects that the cleaning liquid has been stored up to a predetermined water level in the cleaning tank 3, water supply by the water supply means 18 is stopped. Specifically, the water supply valve 22 is closed and the water supply pump 21 and the chemical injection pump 24 are stopped, and the process proceeds to the next step.

<加熱工程>
加熱工程S2は、洗浄槽3内の洗浄液を減復圧パルス開始温度まで加熱する工程である。具体的には、洗浄液が減復圧パルス開始温度になるまで、加熱手段10により洗浄液を
加熱する。本実施例1では、給蒸弁46を開いて、洗浄槽3内の洗浄液中に蒸気を吹き込んで、洗浄液を加熱する。この給蒸中、液温センサ13により洗浄液の温度を監視し、洗浄液が減復圧パルス開始温度になると、給蒸弁46を閉じて次工程へ移行する。
<Heating process>
The heating step S2 is a step of heating the cleaning liquid in the cleaning tank 3 to the depressurization pressure start temperature. Specifically, the cleaning liquid is heated by the heating means 10 until the cleaning liquid reaches the depressurization pressure start temperature. In the first embodiment, the steam supply valve 46 is opened and steam is blown into the cleaning liquid in the cleaning tank 3 to heat the cleaning liquid. During this steaming, the temperature of the cleaning liquid is monitored by the liquid temperature sensor 13. When the cleaning liquid reaches the depressurization pressure start temperature, the steam supply valve 46 is closed and the process proceeds to the next step.

減復圧パルス開始温度は、特に問わないが、被洗浄物2の汚れが血液汚れの場合、60℃を超えるとタンパク質が熱変形し固着するので、そのような被洗浄物2の場合には、減復圧パルス開始温度は60℃以下が好ましく、50℃以下がより好ましい。本実施例1では、減復圧パルス開始温度は、たとえば50℃に設定される。   The starting pressure of the decompression pressure pulse is not particularly limited. However, when the dirt of the article 2 to be washed is blood dirt, the protein is thermally deformed and fixed when the dirt exceeds 60 ° C. The decompression pressure starting temperature is preferably 60 ° C. or lower, and more preferably 50 ° C. or lower. In the first embodiment, the depressurization pressure start temperature is set to 50 ° C., for example.

<減復圧パルス工程>
減復圧パルス工程(減圧沸騰洗浄工程と称することができる。)S3では、洗浄槽3内の洗浄液が減復圧パルス終了温度になるまで、洗浄液を沸騰させ続けるように洗浄槽3内の減圧が図られる。この間、洗浄液の沸騰中には、所定タイミングで洗浄槽3内を瞬時に復圧して、洗浄液の沸騰を一時的に中断させる操作が繰り返される。このようにして、減圧と瞬時の復圧とが繰り返される。減復圧パルス終了温度は、特に問わないが、洗浄温度が低くなると洗浄効果が低下するため、20℃以上が好ましく、25℃以上がより好ましい。
<Reducing pressure pulse process>
In the depressurization pressure pulse process (which can be referred to as a reduced pressure boiling cleaning process) S3, the depressurization in the cleaning tank 3 is continued so that the cleaning liquid continues to boil until the cleaning liquid in the cleaning tank 3 reaches the end pressure of the depressurization pressure pulse. Is planned. During this time, during the boiling of the cleaning liquid, the operation of instantaneously restoring the pressure in the cleaning tank 3 at a predetermined timing and temporarily interrupting the boiling of the cleaning liquid is repeated. In this way, the pressure reduction and the instantaneous return pressure are repeated. The end pressure of the decompression pressure pulse is not particularly limited. However, when the cleaning temperature is lowered, the cleaning effect is reduced, and therefore, the temperature is preferably 20 ° C. or higher, and more preferably 25 ° C. or higher.

より具体的に説明すると、減復圧パルス工程S3では、減圧手段6の作動を継続して、洗浄槽3内の圧力を徐々に低下させ、それにより洗浄液の沸騰の継続が図られる。但し、この間、液温センサ13により洗浄液の温度を監視し、洗浄液の温度が所定ずつ下がるたびに、復圧手段6により洗浄槽3内を一時的に復圧する。減圧手段6による洗浄槽3内の減圧は、給気弁44を閉じて、第二給水弁29および第三給水弁30を開いた状態で真空ポンプ24を作動させればよい。また、復圧手段7による設定圧力までの瞬時の復圧は、給気弁44を開けばよい。この復圧時にも、減圧手段6は作動させたままでよい。そして、給気弁44を開けて洗浄槽3内を復圧して、洗浄液の沸騰を中断させた後は、給気弁44を再び閉じて、洗浄槽3内の減圧とそれによる洗浄液の沸騰が図られる。   More specifically, in the depressurization pressure pulse step S3, the operation of the decompression means 6 is continued to gradually reduce the pressure in the cleaning tank 3, thereby continuing the boiling of the cleaning liquid. However, during this time, the temperature of the cleaning liquid is monitored by the liquid temperature sensor 13, and the pressure inside the cleaning tank 3 is temporarily restored by the decompression means 6 every time the temperature of the cleaning liquid decreases by a predetermined amount. The pressure in the cleaning tank 3 by the pressure reducing means 6 may be reduced by operating the vacuum pump 24 with the air supply valve 44 closed and the second water supply valve 29 and the third water supply valve 30 opened. Further, the instantaneous return pressure up to the set pressure by the return pressure means 7 may be performed by opening the air supply valve 44. Even during the return pressure, the decompression means 6 may remain activated. Then, after opening the air supply valve 44 to restore the pressure in the cleaning tank 3 and interrupting the boiling of the cleaning liquid, the air supply valve 44 is closed again to reduce the pressure in the cleaning tank 3 and the boiling of the cleaning liquid. Figured.

このような減復圧パルス工程S3を洗浄液が減復圧パルス終了温度になるまで行う。減復圧パルス終了温度は、特に問わないが、たとえば30℃に設定される。   Such a pressure reduction pulse step S3 is performed until the cleaning liquid reaches the pressure reduction pulse end temperature. The end pressure of the decompression pressure pulse is not particularly limited, but is set to 30 ° C., for example.

(減復圧パルス工程における本実施例1の作用・効果)
以上のように、減復圧パルス工程S3においては、減圧手段6の作動による減圧と復圧手段7の作動による復圧とが繰り返されて、洗浄槽3内の洗浄液が沸騰する。その洗浄液の沸騰の際に、洗浄液の微小液滴と、被洗浄物に付着していた微粒異物が、気体に含まれて洗浄槽3から熱交換器4へ向けて流出する。また、減圧時に洗浄液は、蒸気として洗浄槽3から流出する。
(Operation and effect of the first embodiment in the pressure reduction pulse process)
As described above, in the depressurization pressure pulse step S3, the depressurization due to the operation of the depressurization means 6 and the return pressure due to the operation of the depressurization means 7 are repeated, and the cleaning liquid in the cleaning tank 3 boils. When the cleaning liquid is boiled, fine droplets of the cleaning liquid and fine foreign matters adhering to the object to be cleaned flow out from the cleaning tank 3 toward the heat exchanger 4 in the gas. In addition, the cleaning liquid flows out from the cleaning tank 3 as a vapor during decompression.

洗浄槽3から流出する異物のうち径の大きいものは、まずプレフィルタ37により捕捉される。その結果、デミスタ8による異物の捕捉量が減少し、デミスタ8の再生時期を遅らせることができる。   Of the foreign matters flowing out from the cleaning tank 3, those having a large diameter are first captured by the pre-filter 37. As a result, the amount of foreign matter captured by the demister 8 is reduced, and the regeneration timing of the demister 8 can be delayed.

そして、プレフィルタ37により捕捉されずに流出した微粒異物は、デミスタ8により除去される。その結果、微粒異物によるプレート式熱交換器4の微小隙間の詰りが防止される。その結果、微小異物の詰まりによるプレート式熱交換器4の熱交換能力の低下が防止され、短時間で減圧を行うことができ、洗浄時間を短縮することができる。   The fine foreign matter that flows out without being captured by the prefilter 37 is removed by the demister 8. As a result, clogging of the minute gaps in the plate heat exchanger 4 due to fine foreign matters is prevented. As a result, a decrease in the heat exchange capability of the plate heat exchanger 4 due to clogging of minute foreign matter is prevented, pressure can be reduced in a short time, and the cleaning time can be shortened.

デミスタ8により捕捉された微粒異物が所定量に達すると、第二蓋39を開いて、デミスタ8を第二本体38外へ取り出し、洗浄することで、微粒異物を除去する。デミスタ8の洗浄の代わりに、洗浄済みか新品のデミスタ8を第二本体38へ装着してもよい。   When the fine foreign matter captured by the demister 8 reaches a predetermined amount, the second lid 39 is opened, the demister 8 is taken out of the second main body 38 and washed to remove the fine foreign matter. Instead of cleaning the demister 8, a cleaned or new demister 8 may be mounted on the second body 38.

プレフィルタ37も、洗浄槽3の第一蓋16を外して、定期的に洗浄して再生する。   The pre-filter 37 is also periodically cleaned and regenerated by removing the first lid 16 of the cleaning tank 3.

また、洗浄槽3から流出した洗浄液,洗浄液の微小液滴は、気液分離器9のデミスタ8により捕捉されて、気体から洗浄液が分離される。分離された洗浄液は、液滴となって落下し、第二容器本体37の底部に貯留される。貯留された洗浄液は、サイフォンの原理で、洗浄槽3へ還流されて、洗浄に使用される。こうしたデミスタ8による洗浄液分離機能と分離した洗浄液の還流使用機能により、装置外へ無駄に排出される洗浄液および洗浄剤の量を減少でき、洗浄液の補充量を削減でき、洗浄液および洗浄剤の使用量を大幅に減少させることができる。   In addition, the cleaning liquid and the microdroplet of the cleaning liquid flowing out from the cleaning tank 3 are captured by the demister 8 of the gas-liquid separator 9 and the cleaning liquid is separated from the gas. The separated cleaning liquid falls as droplets and is stored at the bottom of the second container body 37. The stored cleaning liquid is returned to the cleaning tank 3 by the principle of siphon and used for cleaning. With the function of separating the cleaning liquid by the demister 8 and the function of refluxing the separated cleaning liquid, it is possible to reduce the amount of cleaning liquid and cleaning agent that are wasted out of the apparatus, reduce the replenishment amount of the cleaning liquid, and use the cleaning liquid and the cleaning agent. Can be greatly reduced.

また、デミスタ8による洗浄液の分離機能により、洗浄液の気液分離器9下流側への流出が防止されるので、洗浄液によるプレート式熱交換器4の気体が流通する微小隙間の閉塞が防止され、洗浄液によるプレート式熱交換器4の伝熱面の減少が防止される。この伝熱面の減少の防止により、プレート式熱交換器4による蒸気凝縮能力低下が防止されて、真空ポンプ5による洗浄槽3の所定圧力までの減圧を短時間に行うことができる。その結果、洗浄時間を短縮することができる。また、所定圧力までの減圧を短時間に行うことができることにより、熱交換器4での冷却水使用量を減少させることができる。   Further, the cleaning liquid separating function by the demister 8 prevents the cleaning liquid from flowing out to the downstream side of the gas-liquid separator 9, thereby preventing the clogging of the minute gap through which the gas of the plate heat exchanger 4 flows due to the cleaning liquid, Reduction of the heat transfer surface of the plate heat exchanger 4 due to the cleaning liquid is prevented. By preventing the reduction of the heat transfer surface, a decrease in the steam condensation capacity by the plate heat exchanger 4 is prevented, and the vacuum pump 5 can reduce the pressure in the cleaning tank 3 to a predetermined pressure in a short time. As a result, the cleaning time can be shortened. Moreover, since the pressure reduction to a predetermined pressure can be performed in a short time, the amount of cooling water used in the heat exchanger 4 can be reduced.

また、特許文献1の減圧沸騰洗浄装置においては、飽和温度以上の洗浄液が真空ポンプへ吸い込まれるとキャビテーションを生ずるが、この実施例1においては、デミスタ8による洗浄液の分離機能により、飽和温度以上の洗浄液の気液分離器9下流側への流出が防止されるので、前記キャビテーションが防止され、真空ポンプ5の損傷が防止される。   In the vacuum boiling cleaning apparatus of Patent Document 1, cavitation occurs when a cleaning liquid having a temperature equal to or higher than the saturation temperature is sucked into the vacuum pump. In the first embodiment, the separation function of the cleaning liquid by the demister 8 is used. Since the outflow of the cleaning liquid to the downstream side of the gas-liquid separator 9 is prevented, the cavitation is prevented and the vacuum pump 5 is prevented from being damaged.

<排水工程など>
その後の排水工程S4は、洗浄槽3内を大気圧まで復圧して、洗浄槽3内の洗浄水を排出する工程である。具体的には、給気弁44を開いて洗浄槽3内を大気圧まで復圧した後、排水弁47を開けて洗浄水を排水すればよい。その後は、所望により、被洗浄物2のすすぎがなされる。すすぎ工程後には、洗浄水を排水した後、乾燥工程を行うのがよい。乾燥工程では、洗浄槽3内に蒸気を供給して被洗浄物2の温度を上げた後、洗浄槽3内を減圧する。あるいは、蒸気との熱交換により洗浄槽3内へ暖かい空気を入れつつ、減圧手段6により洗浄槽3内からの真空引きを図ればよい。これにより、洗浄槽3内の被洗浄物2の乾燥が図られる。
<Drainage process, etc.>
The subsequent drainage step S4 is a step of returning the pressure in the cleaning tank 3 to atmospheric pressure and discharging the cleaning water in the cleaning tank 3. Specifically, after opening the air supply valve 44 and returning the pressure in the cleaning tank 3 to the atmospheric pressure, the drain valve 47 may be opened to drain the cleaning water. Thereafter, the object to be cleaned 2 is rinsed as desired. After the rinsing process, it is preferable to perform the drying process after draining the washing water. In the drying step, steam is supplied into the cleaning tank 3 to raise the temperature of the object to be cleaned 2, and then the pressure in the cleaning tank 3 is reduced. Alternatively, it is only necessary to evacuate the cleaning tank 3 by the decompression means 6 while warm air is put into the cleaning tank 3 by heat exchange with steam. Thereby, the to-be-cleaned object 2 in the washing tank 3 is dried.

つぎに、この発明の実施例2を図3および図4に基づき説明する。以下の説明では、実施例1と異なる構成を中心に説明し、同じ構成は、同じ符号を付して説明を省略する。   Next, a second embodiment of the present invention will be described with reference to FIGS. In the following description, the configuration different from that of the first embodiment will be mainly described, and the same configuration is denoted by the same reference numeral and the description thereof is omitted.

この実施例2において、実施例1と異なる点は、洗浄槽3内の液温を検出し、減復圧パルス工程S3において洗浄液の温度を制御するための液温センサ13を用いて、制御手段14が、液温センサ13の検出温度の変化勾配が設定値以下となると、デミスタ8の再生時期を表示器49により報知するように構成した点である。   The second embodiment is different from the first embodiment in that the liquid temperature in the cleaning tank 3 is detected, and the liquid temperature sensor 13 for controlling the temperature of the cleaning liquid is used in the depressurization pressure pulse step S3. Reference numeral 14 is configured to notify the regeneration timing of the demister 8 by the display device 49 when the change gradient of the temperature detected by the liquid temperature sensor 13 is equal to or less than the set value.

この実施例2の作用、効果を図4に基づき説明する。図4を参照して、S21で、減復圧パルス工程S3の減圧が開始されたかどうかを判定する。YESが判定されると、S22にて、液温センサ13による検出温度の変化勾配が設定値以下かどうか,すなわち減圧による所期の液温低下が生じているかどうかを判定する。前記設定値は、予め実験によりデミスタ8の詰り具合との関係で定めておく。S22にて、YESが判定されると、制御手段14は、デミスタ8の詰りと推定して、S23へ移行して、表示器49によりデミスタ8の洗浄が必要なことをユーザーやメンテナンス員に知らせる。S23では、洗浄要の
報知と同時に洗浄装置の運転を自動的に停止する。この洗浄装置の運転の停止は、洗浄要の報知を先行させて、報知から所定時間遅れで停止を行うように構成することができる。
The operation and effect of the second embodiment will be described with reference to FIG. Referring to FIG. 4, in S21, it is determined whether or not the decompression of the depressurization pressure pulse process S3 is started. If YES is determined, in S22, it is determined whether or not the change gradient of the temperature detected by the liquid temperature sensor 13 is equal to or less than a set value, that is, whether or not the intended liquid temperature decrease due to the reduced pressure has occurred. The set value is previously determined in relation to the degree of clogging of the demister 8 through experiments. If YES is determined in S22, the control means 14 estimates that the demister 8 is clogged, moves to S23, and informs the user and maintenance personnel that the demister 8 needs to be cleaned by the display 49. . In S23, the operation of the cleaning device is automatically stopped simultaneously with the notification of the necessity of cleaning. The stop of the operation of the cleaning apparatus can be configured such that the notification of the necessity of cleaning is preceded and the stop is performed with a predetermined time delay from the notification.

この実施例2によれば、デミスタ8の再生または交換の時期を容易に知ることができ、洗浄装置の洗浄能力低下を防止できる。また、洗浄液の温度を制御するために用いる液温センサ13を使用して、洗浄要の報知に用いているので、洗浄装置の構成を簡素化できる。さらに、減圧時の洗浄液の温度低下勾配は、減圧性能を直接的に示すものであり、たとえデミスタ8の詰りが生じていても所定の減圧性能が確保されていれば、洗浄運転を継続できる。洗浄運転の継続という観点からは、差圧によりデミスタ8の洗浄時期を検出する方法と比較して、減圧時の洗浄液の温度低下勾配による検出の方が好ましい。   According to the second embodiment, it is possible to easily know the timing of regeneration or replacement of the demister 8, and it is possible to prevent the cleaning capability of the cleaning device from being lowered. Further, since the liquid temperature sensor 13 used for controlling the temperature of the cleaning liquid is used for notification of the necessity of cleaning, the configuration of the cleaning apparatus can be simplified. Furthermore, the temperature drop gradient of the cleaning liquid at the time of depressurization directly indicates the depressurization performance. Even if the demister 8 is clogged, the cleaning operation can be continued if the predetermined depressurization performance is ensured. From the viewpoint of continuation of the cleaning operation, detection based on the temperature decrease gradient of the cleaning liquid at the time of depressurization is more preferable than the method of detecting the cleaning time of the demister 8 by differential pressure.

つぎに、この発明の実施例3を図5に基づき説明する。以下の説明では、実施例1と異なる構成を中心に説明し、同じ構成は、同じ符号を付して説明を省略する。   Next, Embodiment 3 of the present invention will be described with reference to FIG. In the following description, the configuration different from that of the first embodiment will be mainly described, and the same configuration is denoted by the same reference numeral and the description thereof is omitted.

この実施例3において、実施例1と異なる点は、デミスタ8を気液分離器9から取り出すことなく、第二蓋39を外して、洗浄ホースなど洗浄手段50により異物除去のための洗浄液を噴出して、デミスタ8に付着した微粒異物を除去するように構成した点である。そして、この洗浄手段50を用いての洗浄の際に、排水弁48を開くことにより、除去された異物を連通管41−排水路47を通して排出するように、連通管41を排水路47の排水弁48の上流側に接続している。   The third embodiment is different from the first embodiment in that the demister 8 is not taken out from the gas-liquid separator 9, the second lid 39 is removed, and the cleaning liquid for removing foreign matters is ejected by the cleaning means 50 such as a cleaning hose. Thus, the configuration is such that the fine foreign particles adhering to the demister 8 are removed. When the cleaning means 50 is used for cleaning, the drainage valve 48 is opened to open the drainage valve 48, so that the removed foreign matter is discharged through the communication pipe 41-drainage path 47. It is connected to the upstream side of the valve 48.

つぎに、この発明の実施例4を図6に基づき説明する。以下の説明では、実施例1と異なる構成を中心に説明し、同じ構成は、同じ符号を付して説明を省略する。   Next, a fourth embodiment of the present invention will be described with reference to FIG. In the following description, the configuration different from that of the first embodiment will be mainly described, and the same configuration is denoted by the same reference numeral and the description thereof is omitted.

この実施例4において、実施例1と異なる点は、つぎの構成である。実施例1では、復圧手段7の給気路42を洗浄槽3に直接接続しているが、実施例4では、気液分離器9の第二容器本体38の出口側空間33に接続している。   The fourth embodiment is different from the first embodiment in the following configuration. In the first embodiment, the air supply path 42 of the decompression means 7 is directly connected to the cleaning tank 3, but in the fourth embodiment, it is connected to the outlet side space 33 of the second container body 38 of the gas-liquid separator 9. ing.

この実施例4の構成によれば、復圧時、外気が給気路42−出口側空間33−デミスタ8−気体入口34を順次通して洗浄槽3内へと流れる気流が形成される。その際、図6の一点差線矢示Aにて示す空気の流れにより、デミスタ8により捕捉された微粒異物の一部が除去されて、第二容器本体38内に落下する。こうして、復圧の度に、デミスタ8の気流による洗浄が行われるので、デミスタ8の再生または交換時期を遅らせることができる。   According to the configuration of the fourth embodiment, when the pressure is restored, an airflow is formed in which outside air sequentially flows through the air supply path 42, the outlet side space 33, the demister 8, and the gas inlet 34 into the cleaning tank 3. At that time, a part of the fine foreign matter captured by the demister 8 is removed by the air flow indicated by a one-dotted line arrow A in FIG. 6 and falls into the second container body 38. Thus, since the demister 8 is cleaned by the air flow every time the pressure is restored, the regeneration or replacement time of the demister 8 can be delayed.

本発明の洗浄装置は、前記実施例1〜4の構成に限らず、適宜変更可能である。特に、減復圧パルス工程S3における減圧と復圧との繰り返し方法は、適宜に変更可能である。   The cleaning apparatus of the present invention is not limited to the configurations of the first to fourth embodiments, and can be changed as appropriate. In particular, the method of repeating the decompression and the decompression in the decompression pressure pulse step S3 can be changed as appropriate.

また、前記実施形態の洗浄装置において、超音波振動による洗浄を付加してもよい。すなわち、洗浄槽3にさらに超音波振動子を設置してもよい。そして、たとえば、加熱工程S2において、超音波振動による洗浄を図るのがよい。加熱工程S2は、洗浄液を加熱するだけで洗浄には寄与していないため、この工程において洗浄液に超音波振動を与えることで、被洗浄物2を超音波洗浄して、洗浄効果を一層向上することができる。   In the cleaning device of the above embodiment, cleaning by ultrasonic vibration may be added. That is, an ultrasonic vibrator may be further installed in the cleaning tank 3. For example, in the heating step S2, cleaning by ultrasonic vibration is preferably performed. The heating step S2 only heats the cleaning liquid and does not contribute to cleaning. Therefore, by applying ultrasonic vibration to the cleaning liquid in this step, the object to be cleaned 2 is ultrasonically cleaned and the cleaning effect is further improved. be able to.

1 洗浄装置
2 被洗浄物
3 洗浄槽
4 熱交換器
5 真空ポンプ
6 減圧手段
7 復圧手段
8 デミスタ
9 気液分離器
13 液温センサ
14 制御手段
31 容器
32 入口側空間
33 出口側空間
34 気体入口
35 気体出口
36 液体出口
42 給気路
49 表示器
DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Object to be cleaned 3 Cleaning tank 4 Heat exchanger 5 Vacuum pump 6 Pressure reducing means
7 Pressure recovery means 8 Demister 9 Gas-liquid separator 13 Liquid temperature sensor 14 Control means 31 Container 32 Inlet side space 33 Outlet side space 34 Gas inlet 35 Gas outlet 36 Liquid outlet 42 Air supply path
49 Display

Claims (2)

洗浄液が貯留され、その洗浄液に被洗浄物が浸漬される洗浄槽と、前記洗浄槽内の気体を凝縮する熱交換器および前記熱交換器の下流に設けた真空ポンプを含み、前記気体を外部へ吸引排出して前記洗浄槽内を減圧する減圧手段と、減圧された前記洗浄槽内へ外気を導入して、前記洗浄槽内を復圧する復圧手段と、前記減圧手段および前記復圧手段を制御して前記減圧と前記復圧とを繰り返して前記洗浄槽内の洗浄液を沸騰させる制御手段とを備える洗浄装置において、
前記熱交換器は、冷却水により前記気体を冷却するプレート式熱交換器にて構成され、
前記熱交換器の上流側に、デミスタにより洗浄液,前記気体に含まれる洗浄液の微小液滴および微粒異物を前記気体から分離し、分離した液体を前記洗浄槽へ戻す気液分離器を備え、
前記気液分離器は、前記熱交換器と別体に構成された容器と、この容器内を入口側空間と出口側空間とに仕切るように配置されたデミスタとを備え、前記容器は、前記洗浄槽からの気体を前記入口側空間へ導入する気体入口と、前記デミスタにより洗浄液,洗浄液の微小液滴および微粒異物を分離した後の気体を前記熱交換器へ向けて流出させる気体出口と、前記デミスタにより分離された液体を前記洗浄槽へ還流させる液体出口とを備え、前記デミスタを再生または交換可能に構成し、
前記洗浄槽内の液温を検出する液温センサを備え、
前記制御手段は、前記減圧時の前記液温センサの検出温度の変化勾配が設定値以下となると、前記デミスタの再生または交換時期を報知する
ことを特徴とする洗浄装置。
A cleaning tank in which the cleaning liquid is stored, and an object to be cleaned is immersed in the cleaning liquid; a heat exchanger that condenses the gas in the cleaning tank; and a vacuum pump provided downstream of the heat exchanger; Pressure reducing means for sucking and discharging to the inside of the cleaning tank, pressure reducing means for introducing outside air into the pressure-reduced cleaning tank and returning the pressure inside the cleaning tank, the pressure reducing means and the pressure reducing means In a cleaning apparatus comprising: control means for controlling the boiling of the cleaning liquid in the cleaning tank by controlling the reduced pressure and the return pressure by controlling
The heat exchanger is composed of a plate heat exchanger that cools the gas with cooling water,
Upstream of the heat exchanger, the cleaning solution, the micro-droplets and fine foreign matter of the cleaning liquid contained in the gas is separated from the gas by the demister, e Bei the gas-liquid separator to return the separated liquid to the cleaning tank,
The gas-liquid separator includes a container configured separately from the heat exchanger, and a demister arranged so as to partition the inside of the container into an inlet side space and an outlet side space, A gas inlet for introducing the gas from the cleaning tank into the inlet side space, and a gas outlet for flowing the gas after separating the cleaning liquid, cleaning liquid microdroplets and fine foreign matters by the demister toward the heat exchanger; A liquid outlet for returning the liquid separated by the demister to the washing tank, and configured to regenerate or replace the demister,
A liquid temperature sensor for detecting the liquid temperature in the cleaning tank is provided,
The cleaning apparatus according to claim 1, wherein when the change gradient of the temperature detected by the liquid temperature sensor at the time of the pressure reduction becomes equal to or less than a set value, the control unit notifies the regeneration or replacement timing of the demister .
前記復圧手段の給気路を前記出口側空間に接続し、前記給気路,前記出口側空間,前記デミスタ、前記気体入口を順次通して前記洗浄槽内を復圧することを特徴とする請求項1に記載の洗浄装置。 Claims wherein connecting the air supply passage of pressure recovery section to the outlet side space, the air supply passage, said outlet space, the demister, characterized in that pressure recovery the cleaning tank the gas inlet sequentially through to the Item 2. The cleaning device according to Item 1 .
JP2009196356A 2009-08-27 2009-08-27 Cleaning device Expired - Fee Related JP5370921B2 (en)

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