KR101369848B1 - Cleaning device and cleaning method - Google Patents

Abstract

The cleaning liquid is stored in the cleaning tank 3, and the object to be cleaned 2 is immersed in the cleaning liquid. The decompression means 5 sucks out and discharges the gas in the washing tank 3 to the outside to decompress the inside of the washing tank 3. The heating means 7 heats the cleaning liquid in the cleaning tank 3. The air supply means 6 introduces gas into the cleaning liquid in the cleaning tank 3 from below the object to be cleaned 2. After heating the washing | cleaning liquid to the preset temperature by the heating means 7, the pressure reduction means 5 depressurizes the inside of the washing | cleaning tank 3, and a washing | cleaning liquid is boiled. Introduce. As a result, the cleaning liquid can be boiled vigorously to increase the cleaning effect of the object to be cleaned 2.

Description

[0001] CLEANING DEVICE AND CLEANING METHOD [0002]

TECHNICAL FIELD The present invention relates to a cleaning apparatus and a cleaning method for cleaning electronic components, mechanical parts, and the like other than medical instruments. This application claims priority based on Patent Application No. 2009-128369, filed in Japan on May 28, 2009 and Patent Application No. 2010-043688, filed in Japan on March 1, 2010, and the contents thereof are hereby incorporated herein by reference. Use it.

Conventionally, as disclosed in Patent Literature 1 below, the washing water is filled into a chamber that seals the object to be cleaned, and the washing water is boiled by depressurizing the inside of the chamber. There is known a washing method for washing a substance to be cleaned by shaking motion. In this case, the lower layer of the washing water is less likely to boil than the upper layer due to the difference in the water pressure at the upper and lower positions of the washing water, and the amount of generation of bubbles decreases. Thus, the lower layer of the washing water is heated by the heater.

In addition, as disclosed in the following Patent Document 2, the supersaturation concentration in which one or more kinds of gases are dissolved is also used as the cleaning liquid, and the cleaning solution is circulated in a state in which the inside of the cleaning tank is kept at atmospheric pressure. BACKGROUND ART Cleaning methods include a cyclic cleaning step performed for a predetermined time, and an ultrasonic cleaning step in which ultrasonic cleaning is performed for a predetermined time by applying ultrasonic vibration to the cleaning liquid while the inside of the cleaning tank is kept at atmospheric pressure or under reduced pressure.

Japanese Unexamined Patent Publication No. 61-109567 Japanese Unexamined Patent Publication No. 2008-119642 (Paragraph No. 0061)

However, in the case of the invention described in Patent Document 1, a heater is required in order to eliminate the influence of the water pressure at the upper and lower positions of the washing water. In addition, it does not generate a "boiling nucleus" and cause boiling or explosive boiling. When the pressure is reduced while being heated by the heater or the like from the bottom of the washing tank, bubbles generated from the lower side of the washing water rise and melt in the surrounding washing liquid to shrink and break down finely. However, when such bubbles are raised, the effect of ejecting the washing liquid is not obtained. .

In addition, in the invention described in Patent Document 2, the bubbles are supplied to the cleaning liquid to clean the object to be cleaned, but the cleaning is performed at atmospheric pressure, and the cleaning liquid is not boiled.

The technical problem to be solved by the present invention is to achieve effective cleaning of the object to be cleaned by generating boiling by virtue of its simple configuration and control, and by causing vigorous boiling.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and the first invention provides a cleaning tank in which a cleaning solution is stored, and the object to be cleaned is immersed in the cleaning solution, and the gas inside the cleaning tank is suctioned and discharged to the outside to decompress the inside of the cleaning tank. Air supply which introduce | transduces gas in the washing | cleaning liquid in the said washing tank from below the to-be-cleaned object in the state which reduced the pressure of the gaseous-phase part in the said washing tank to below or just before the vapor pressure of the washing | cleaning liquid in the said washing tank by this decompression means. It is a washing | cleaning apparatus provided with a means.

According to the first aspect of the invention, in the state in which the object to be cleaned is immersed in the cleaning liquid in the cleaning tank, the inside of the cleaning tank is depressurized, the cleaning liquid is boiled, and the cleaning liquid can be cleaned by the shaking of the cleaning liquid. When boiling the cleaning liquid, boiling does not occur as a whole based on the difference of the water pressure at the upper and lower positions of the cleaning liquid or the difference of the liquid temperature according to the place, or the boiling is gentle and the explosive intense boiling does not occur, or even when such a violent boiling occurs. Although there is a possibility that it is also a degree that occurs sporadically, according to the first invention, such a problem can be prevented by introducing gas into the cleaning liquid by the air supply means. In other words, when gas is temporarily introduced from the bottom of the washing tank while boiling, the introduced gas becomes a nucleus of boiling, and intense boiling occurs in the boundary layer between the introduced gas and the washing liquid, especially the lower layer, and large bubbles are formed. As the bubbles formed greatly increase, the cleaning liquid is ejected greatly. Immediately after that, the jetted cleaning liquid falls. The explosive ejection of the cleaning liquid and the subsequent drop can cause the cleaning liquid in the cleaning tank to be greatly shaken, thereby effectively cleaning the object to be cleaned.

In addition to the constituent requirements of the first invention, the second invention further includes heating means for heating the cleaning liquid in the cleaning tank, and after heating the cleaning liquid to a set temperature by the heating means, in the cleaning tank by the decompression means. It is a washing | cleaning apparatus characterized by boiling down a pressure reducing pressure, and introducing a gas into a washing | cleaning liquid by the said air supply means during this boiling.

According to the second aspect of the invention, by heating the cleaning liquid to a predetermined temperature by the heating means in advance, it is possible to stably and reliably generate boiling to stabilize the cleaning effect. In addition, by introducing a gas into the cleaning liquid during boiling in at least a part of the cleaning liquid, the gas supplied in the cleaning liquid can be reliably generated by boiling and explosive intense boiling using the gas supplied in the cleaning liquid as a "boiling nucleus".

In addition to the constituent requirements of the second invention, the third invention includes a stop in which gas is introduced into the cleaning liquid by the air supply means and the inside of the cleaning tank until the cleaning liquid is re-boiled without reheating or reheating the cleaning liquid to the set temperature. It is a washing | cleaning apparatus characterized by repeating pressure reduction and gas introduction into the washing | cleaning liquid by the said air supply means in this boiling.

According to the third invention, it is possible to reliably clean the object to be cleaned by repeating the depressurization in the washing tank, the introduction of the gas into the washing liquid during boiling, and the stop of the introduction of the gas. Before the pressure reduction in a washing tank, you may heat a washing | cleaning liquid to a preset temperature, and it does not need to heat. The heating effect can be stabilized by heating up to the set temperature, and the cleaning time can be shortened by not heating up to the preset temperature.

In addition to the constituent requirements of the second invention or the third invention, the fourth invention further includes a pressure-reducing means for introducing gas into the gaseous-phase part in the cleaning tank depressurized by the pressure-reducing means to double-pressure the inside of the cleaning tank. After the heating means maintains the cleaning liquid to the set temperature by the heating means, the pressure reduction means in the cleaning tank is continued by the pressure reducing means so that the cleaning liquid continues to boil, and the outside air is introduced into the gas phase part in the cleaning tank during the pressure reduction. The pressure in the cleaning tank is temporarily repeated so that boiling of the cleaning liquid stops, and while the cleaning liquid is maintained at the set temperature, the decompression in the cleaning tank by the decompression means and the boiling of the cleaning liquid by the pressure reduction means are repeated. It is a washing | cleaning apparatus characterized by introducing gas by an air supply means.

According to the fourth aspect of the present invention, in addition to the air supply means for the liquid phase of the cleaning tank, the back pressure means for the gas phase portion of the cleaning tank is also provided, so that it can be used in combination with the following cleaning method. That is, the inside of a washing tank is pressure-reduced by a decompression means, and a washing liquid is boiled. During this boiling, the inside of a washing tank is pressure-reduced instantly by a pressure reduction means, and boiling of a washing liquid is stopped at once. The bubbles of water vapor generated in the cleaning liquid due to the boiling up to that time at the time of the double pressure condensate in an instant. Therefore, the washing liquid is agitated and conveyed by the pressure wave or pressure difference at the time of condensation, and the washing of the object to be cleaned is achieved. In addition, steam pools are generated in the tubes and holes of the object to be cleaned by depressurization in the cleaning tank, but such steam pools disappear instantaneously by the back pressure in the cleaning tank. Therefore, the cleaning liquid can be dripped in and out of the tube or the hole of the object to be cleaned, thereby cleaning the object to be cleaned. It is advisable to heat the cleaning solution to a set temperature before such a step, but in the meantime, if the cleaning of the object to be cleaned is carried out by decompression of the cleaning tank and introduction of gas into the cleaning solution during boiling, the heating holding time of the cleaning solution will be lost. There is no

In a fifth aspect of the invention, in addition to the constituent requirements of any one of the first to fourth inventions, the air supply means includes a pipe arranged in the transverse direction at the bottom of the cleaning tank, and the pipe has a gas discharge hole at a predetermined interval. It is a washing | cleaning apparatus characterized by the opening being formed downward.

According to the fifth aspect of the invention, a pipe is disposed at the bottom of the cleaning tank in the transverse direction, and the gas is drawn out of a hole formed at a predetermined interval in the circumferential side wall of the pipe, so that the gas is uniformly introduced into the cleaning liquid in the cleaning tank without any deviation, and the whole of the cleaning liquid is removed. Can cause boiling. In addition, since the hole formed in the pipe is opened only downward, the gas can be uniformly introduced into the cleaning liquid without any variation to cause boiling of the entire cleaning liquid.

A sixth aspect of the invention provides a cleaning method in which a substance to be cleaned is immersed in a cleaning liquid stored in a cleaning tank, and the cleaning is performed. It is a washing | cleaning method characterized by introducing gas in the washing | cleaning liquid in the said washing tank from below the said to-be-cleaned object in the state to which it lowered to.

According to the sixth invention, in the state in which the object to be cleaned is immersed in the cleaning liquid in the cleaning tank, the inside of the cleaning tank is depressurized, the cleaning liquid is boiled, and the cleaning liquid can be cleaned by the shaking of the cleaning liquid. When boiling the cleaning liquid, boiling does not occur as a whole based on the difference of the water pressure at the upper and lower positions of the cleaning liquid or the difference of the liquid temperature according to the place, or the boiling is gentle and the explosive intense boiling does not occur, or even when such a violent boiling occurs. Although there is a possibility that it is also a degree that occurs sporadically, according to the sixth invention, such a problem can be prevented by introducing gas into the cleaning liquid. In other words, when gas is temporarily introduced from the bottom of the washing tank while boiling, the introduced gas becomes a nucleus of boiling, and intense boiling occurs in the boundary layer between the introduced gas and the washing liquid, especially the lower layer, and large bubbles are formed. As the bubbles formed greatly increase, the cleaning liquid is ejected greatly. Immediately thereafter, the jetted cleaning liquid falls. The explosive ejection of the cleaning liquid and the subsequent drop can cause the cleaning liquid in the cleaning tank to be greatly shaken, thereby effectively cleaning the object to be cleaned.

Furthermore, in addition to the constituent requirements of the sixth invention, the seventh invention heats the cleaning liquid in the cleaning tank to a set temperature, depressurizes the inside of the cleaning tank to boil the cleaning liquid, and introduces gas into the cleaning liquid during the boiling. It is a washing method.

According to the seventh invention, by heating the cleaning liquid to a predetermined temperature in advance, it is possible to stably and reliably generate boiling to stabilize the cleaning effect. In addition, by introducing a gas into the cleaning liquid during boiling in at least a part of the cleaning liquid, the gas supplied in the cleaning liquid can be reliably generated by boiling and explosive intense boiling using the gas supplied in the cleaning liquid as a "boiling nucleus".

EFFECTS OF THE INVENTION [

According to the present invention, boiling can be generated by a simple configuration and control, and boiling can be caused vigorously to achieve effective cleaning of the object to be cleaned.

Brief Description of Drawings [Fig. 1] Fig. 1 is a schematic configuration diagram showing Example 1 of a washing apparatus of the present invention, and shows a part of it as a cross section.
FIG. 2 is a schematic cross-sectional view of the cleaning tank of the cleaning device of FIG. 1.
3 is a schematic longitudinal cross-sectional view in a part of FIG. 2.
4 is a diagram illustrating a modification of FIG. 2.
FIG. 5: is a schematic block diagram which shows Example 2 of the washing | cleaning apparatus of this invention, and shows one part as a cross section.
FIG. 6 is a view showing an example of a cleaning method using the cleaning device of FIG. 5, showing the relationship between the elapsed time from the start of cleaning and the pressure in the cleaning tank, and the relationship between the elapsed time from the start of cleaning and the temperature of the cleaning liquid. have.
FIG. 7 is a flowchart showing an example of a cleaning method using the cleaning device of FIG. 5.
FIG. 8 is a diagram showing a modification of the heating means in the cleaning apparatus of FIGS. 1 and 5, and omits the configuration other than the heating means.

Hereinafter, a specific embodiment of the present invention will be described in detail with reference to the drawings.

Example 1

Brief Description of Drawings [Fig. 1] Fig. 1 is a schematic configuration diagram showing Example 1 of a washing apparatus of the present invention, and shows a part of it as a cross section. 2 is a schematic cross-sectional view of the washing tank of this washing | cleaning apparatus. 3 is a schematic longitudinal cross-sectional view in a part of FIG. 2, illustrating a gas introduction state into the cleaning liquid.

The cleaning device 1 of the present embodiment includes a cleaning tank 3 in which a cleaning liquid is stored and the object to be cleaned 2 is immersed, a water supply means 4 for supplying the cleaning liquid into the cleaning tank 3, and a cleaning tank ( 3) pressure-reducing means 5 for suctioning and discharging the gas in the outside to depressurize the inside of the washing tank 3, the air supply means 6 for introducing gas into the washing liquid in the washing tank 3, and the washing tank 3 A heating means 7 for heating the washing liquid in the washing liquid, a drainage means 8 for discharging the washing liquid in the washing tank 3, a pressure sensor 9 for detecting the pressure of the gas phase part in the washing tank 3, and a washing tank. Control means for controlling each of said means 4-8 based on the liquid-temperature sensor 10 which detects the temperature of the liquid part in (3) (namely, the temperature of a washing | cleaning liquid), and the detection signals of these sensors 9 and 10, etc. (11) is provided. In addition, the temperature sensor (not shown) which detects the temperature of the gaseous-phase part in the washing tank 3 may be provided instead of or in addition to the pressure sensor 9 which detects the pressure of the gaseous-phase part in the washing tank 3.

Although the washing | cleaning liquid is boiling especially possible by the pressure reduction in the washing tank 3 by the pressure reduction means 5, it is water, for example. In this embodiment, the washing liquid is water containing about 0.5% of detergent. However, the cleaning liquid may be water containing no detergent other than water containing a detergent. The cleaning liquid may be any other liquid that can be used for cleaning, such as soft water, pure water, and a solvent.

The object to be cleaned 2 is an article to be cleaned, for example, a medical device, an electronic part, or a mechanical part. Although the washing | cleaning apparatus 1 of this embodiment aims at washing | cleaning the to-be-cleaned object 2 using the boiling of a washing | cleaning liquid, the to-be-cleaned object 2 may or may not have the location where the steam by boiling accumulates. That is, the object to be cleaned 2 may have a location where steam is accumulated, such as a tubular article or an article with holes, or may not have a location where steam is accumulated like a forceps.

The washing tank 3 is a hollow container that withstands the reduced pressure of the internal space. The cleaning tank 3 of this embodiment is provided with the main body 12 which opens upward and has a hollow part, and the cover 13 which opens and closes the opening part of this main body 12. As shown in FIG. In the state where the cover 13 is attached to the main body 12, the gap between the main body 12 and the cover 13 is sealed by the packing 14. Thereby, the hollow part of the main body 12 is sealed and the sealed space is formed in the washing tank 3.

The water supply means 4 which supplies the cleaning liquid in the washing tank 3 is connected to the washing tank 3. The water supply means 4 of this embodiment supplies the cleaning liquid into the cleaning tank 3 through the water supply passage 15. The water supply passage 15 is provided with a water supply valve 16, and the water supply valve 16 is opened when the water is supplied into the cleaning tank 3.

The pressure reduction means 5 which suctions and discharges the gas in the washing tank 3 to the outside, and pressure-reduces the inside of the washing tank 3 is connected to the washing tank 3. The pressure reduction means 5 of this embodiment is a vacuum generator 18 which sucks and discharges the gas in the washing tank 3 through the exhaust passage 17. Although the vacuum generating apparatus 18 is not specifically, but typically, it is equipped with the water seal type vacuum pump, and further includes an indirect heat exchanger which condenses the vapor | steam in the exhaust path 17 upstream by this vacuum pump. good.

It is preferable to provide the check valve 19 in the exhaust path 17 between the washing tank 3 and the vacuum generator 18. However, a vacuum valve may be provided instead of the check valve 19. In this case, the opening and closing of the vacuum valve is linked with the operation of the vacuum generator 18. That is, the vacuum valve is opened during the operation of the vacuum generator 18.

The cleaning tank 3 is provided with air supply means 6 for introducing gas into the cleaning liquid in the cleaning tank 3. The air supply means 6 of this embodiment introduces outside air into the cleaning liquid in the cleaning tank 3 under reduced pressure through the air supply passage 20. The air supply valve 20 is provided with the air supply valve 21. When the air supply valve 21 is opened while the cleaning tank 3 is decompressed, outside air can be introduced into the cleaning tank 3 by the differential pressure. It is preferable to provide the filter 22 in the air supply 20 at the upstream end rather than the air supply valve 21. In this case, air through the filter 22 is introduced into the washing liquid in the washing tank 3.

In this embodiment, the gas from the air supply passage 20 is introduced into the cleaning liquid through the air supply pipe 23 provided at the bottom of the cleaning tank 3. This air supply pipe 23 is arrange | positioned at the bottom part in the washing tank 3 in the horizontal direction. Specifically, although the air supply pipe 23 is the bottom in the washing tank 3, it is horizontally spaced apart from the bottom. In this embodiment, as shown in FIG. 2, the air supply pipe 23 is provided so that the bottom part in the washing tank 3 meanders. However, the configuration of the air supply pipe 23 is not limited to FIG. 2 and can be appropriately changed. For example, as shown in FIG. 4, you may arrange | position several plural straight air supply pipes 23, 23, ... in parallel at equal intervals. In that case, it is preferable that one end of each straight pipe-type air supply pipe 23 is gathered as one as the air supply path 20.

The air supply pipe 23 is loop-shaped with one end connected to the air supply 20, the other end closed or connected to the one end, and the gas leading-out hole (nozzle) 24 at a set interval along the extension direction. Is formed. At this time, as shown in FIG. 3, the gas lead-out hole 24 is formed only opening downward. By opening the gas outlet hole 24 downward, gas can be introduced homogeneously in the cleaning liquid without variation. If the gas outlet hole 24 is opened upward, the discharge amount of the gas decreases toward the downstream side of the air supply pipe 23 to affect the cleaning effect, but as shown in this embodiment, the gas outlet hole 24 is directed downward. By opening, such a problem can be avoided.

The gas discharge hole 24 is disposed on the bottom surface of the cleaning tank 3 without fail. Specifically, when it is assumed that the bottom surface of the cleaning tank 3 is partitioned into a grid of 100 mm on one side, at least one gas outlet hole 24 is formed in each grid. At this time, the number of the gas discharge holes 24 is more preferable. And it is preferable that all of these gas discharge | release holes 24 open downward as mentioned above. In addition, the air supply pipe 23 in which the gas discharge hole 24 is formed is disposed below the object to be cleaned 2. In addition, although the diameter of the gas lead-out hole 24 is irrespective, it is 1 mm in this Example, for example.

By the way, in the present Example, although the air supply means 6 was made the structure which introduces air in the washing | cleaning liquid in the washing tank 3, you may make it the structure which introduces gas other than air. That is, the gas introduced into the cleaning liquid by the air supply means 6 may be, for example, nitrogen, carbon dioxide, steam, or the like in addition to air. The gas introduced into the cleaning liquid is more preferably a gas that is difficult to dissolve in the cleaning liquid in order to be a nucleus for boiling the cleaning liquid. Even when gas other than air is used, the gas is introduced into the cleaning liquid from the gas discharge hole 24 through the air supply valve 21 and the air supply pipe 23.

The washing tank 3 is provided with heating means 7 for heating the washing liquid in the washing tank 3. The heating means 7 of this embodiment heats the cleaning liquid by blowing steam into the cleaning liquid in the cleaning tank 3. Specifically, steam can be supplied to the washing tank 3 through the sudden increase path 25 from steam supply sources, such as a boiler. By opening and closing the surge valve 26 provided in the surge path 25, the presence or absence of the steam supply to the washing tank 3 can be switched.

However, the heating means 7 not only blows steam directly into the washing | cleaning liquid in the washing tank 3, but also installs the electric heater in the washing tank 3, or separately installs the container equipped with the electric heater, and its container and washing tank (3) The cleaning liquid or the fruit is circulated by a circulation pump, or the cleaning tank 3 is made into a jacket structure (internal and external double structure), and the fruit such as steam is put in the hollow portion to clean the cleaning liquid in the cleaning tank 3. You may heat indirectly. However, from the viewpoint of energy efficiency and the simplification of the configuration of the washing tank 3, it is preferable to heat the washing liquid by blowing steam in the washing liquid as in the present embodiment.

The drainage means 8 which discharges the washing | cleaning liquid in the washing tank 3 is connected to the washing tank 3. The drain means 8 of this embodiment discharges the washing | cleaning liquid in the washing tank 3 from the bottom of the washing tank 3 through the drainage path 27. As shown in FIG. The drainage valve 27 is provided in the drainage path 27, and when the drainage valve 28 is opened in the state in which the washing | cleaning liquid is stored in the washing | cleaning tank 3, the washing | cleaning liquid can be naturally led out of the washing | cleaning tank 3.

The washing tank 3 is provided with a pressure sensor 9 for detecting the pressure of the gas phase part in the washing tank 3 and a liquid temperature sensor 10 for detecting the temperature of the washing liquid in the washing tank 3. In addition, a temperature sensor can be used instead of the pressure sensor 9 by converting pressure and temperature as desired.

The water supply means 4, the decompression means 5, the air supply means 6, the heating means 7, and the drainage means 8 are controlled by the control means 11. This control means 11 is the controller 29 which controls each said means 4-8 based on the detection signal etc. of each said sensor 9,10. Specifically, in addition to the water supply valve 16, the vacuum generator 18, the air supply valve 21, the surge valve 26, and the drain valve 28, the pressure sensor 9 and the liquid temperature sensor 10 include the controller 29. ) As described below, the controller 29 cleans the object 2 in the cleaning tank 3 in a predetermined order (program).

Hereinafter, the washing | cleaning method using the washing | cleaning apparatus 1 of a present Example is demonstrated. Here, the temperature raising step, the depressurizing step, the air supply step, and the drainage step are sequentially performed after the water pouring step.

The water pouring step is a step of pouring the washing liquid into the washing tank 3 by the water supply means 4. Specifically, the water supply valve 16 is opened, the cleaning liquid is placed in the cleaning tank 3, and when the desired amount of the cleaning liquid is stored in the cleaning tank 3, the water supply valve 16 is closed. In the water pouring step, the cleaning liquid is not filled in the washing tank 3 with the washing liquid, but the washing liquid is put to the middle of the washing tank 3. Thereby, the inside of the washing tank 3 is divided into the lower liquid part and the upper gas phase part.

The to-be-cleaned object 2 may be previously put in the washing tank 3 before putting a washing liquid into the washing tank 3, or may be put into the washing tank 3 after putting a washing liquid in the washing tank 3. In any case, the object to be cleaned 2 is immersed in the cleaning liquid in the cleaning tank 3. At this time, the object to be cleaned 2 is held in a mesh basket or the like above the air supply pipe 23. In this way, the cleaning liquid is stored in the cleaning tank 3 and the object to be cleaned 2 is immersed in the cleaning liquid. In addition, the lid 13 of the cleaning tank 3 is in a closed state.

A temperature raising process is a process of heating the washing | cleaning liquid in the washing tank 3 to predetermined temperature (for example, 50 degreeC). Specifically, the cleaning liquid is heated by the heating means 7 until the cleaning liquid reaches a set temperature. In this embodiment, the surge valve 26 is opened to exhale steam into the cleaning liquid in the cleaning tank 3 to heat the cleaning liquid. During the rapid increase, the temperature of the cleaning liquid is monitored by the liquid temperature sensor 10, and when the cleaning liquid reaches the set temperature, the surge valve 26 is closed to proceed to the next step.

When the cleaning liquid reaches the set temperature, the opening and closing of the surge valve 26 is controlled (maintenance process) based on the detection signal of the liquid temperature sensor 10 so as to maintain the temperature for a predetermined time, and then the surge valve 26 is closed to You may make it transfer to a process. The temperature of the washing liquid can be made constant by keeping the washing liquid at the set temperature.

The depressurization process is a process of depressurizing the inside of the washing tank 3 by the decompression means 5. Specifically, the vacuum generator 18 is operated to suck out the gas in the cleaning tank 3 to the outside. During the depressurization, the temperature of the cleaning liquid detected by the liquid temperature sensor 10 drops to a predetermined temperature (for example, 49.5 ° C), or the pressure in the cleaning tank 3 detected by the pressure sensor 9 reaches a predetermined pressure. The air supply process starts when the lowering or a predetermined time elapses.

The predetermined temperature, the predetermined pressure, or the predetermined time is used to control any one of the above, and is used for control, but the cleaning liquid in the washing tank 3 is set to be in a boiling state. In other words, the pressure of the cleaning liquid in the cleaning tank 3 is reduced to a predetermined temperature, the predetermined pressure, or the predetermined time. That is, the pressure of the gaseous-phase part in the washing tank 3 will be in the state lowered to below or just before the vapor pressure of the washing | cleaning liquid in the washing tank 3. In this state, boiling is usually generated in at least a part of the cleaning liquid in the cleaning tank 3.

In addition, in order to make the washing | cleaning liquid in the washing tank 3 boilable, it is necessary basically to make the pressure of the gaseous-phase part in the washing tank 3 below the vapor pressure of the washing | cleaning liquid in the washing tank 3. However, in reality, even if the pressure is slightly higher than the vapor pressure of the cleaning liquid in the cleaning tank 3, a portion of the cleaning liquid is overheated, so that boiling may occur by introducing gas into the cleaning liquid in the air supply step described later. Therefore, the air supply process is started with the pressure of the gaseous phase portion in the washing tank 3 being lowered below the vapor pressure of the washing liquid in the washing tank 3 or in some cases just before.

The air supply step is performed by the pressure reducing means 5 from the lower part of the cleaning object 2 than the to-be-cleaned object 2 in a state in which the pressure of the gaseous phase part in the cleaning tank 3 is lowered to or below (or immediately before) the vapor pressure of the cleaning liquid in the cleaning tank 3. It is a process of introducing gas into the washing | cleaning liquid in (3). Thereby, the washing liquid can be boiled vigorously and vigorously and the cleaning of the object to be cleaned 2 can be achieved.

When boiling the cleaning liquid, boiling does not occur as a whole based on the difference of the water pressure at the upper and lower positions of the cleaning liquid or the difference of the liquid temperature according to the place, or the boiling is gentle and the explosive intense boiling does not occur, or even when such a violent boiling occurs. Although there is a possibility that it is also a degree that occurs sporadically, such a problem can be prevented by introducing gas into the cleaning liquid by the air supply means 6. That is, when gas is temporarily introduced from the bottom of the washing tank 3 while boiling, the introduced gas becomes a nucleus of boiling, and intense boiling occurs in the boundary layer between the introduced gas and the cleaning liquid, especially the lower layer, and large bubbles are formed. . As the bubbles formed greatly increase, the cleaning liquid is ejected greatly. Immediately thereafter, the jetted cleaning liquid falls. This explosive ejection of the cleaning liquid and the subsequent drop can cause the cleaning liquid in the cleaning tank 3 to be greatly shaken, and the cleaning of the object to be cleaned 2 can be effectively performed.

The air supply process ends when a predetermined time or a predetermined pressure is reached. This end is measured by, for example, the timer of the controller 29, or detected and detected by the pressure sensor 9.

By the way, the operation of the decompression means 5 disclosed in the decompression step may be terminated or continued at the same time as the end of the air supply step. That is, as described later, when the above steps are repeated, the operation of the pressure reduction means 5 may be continued.

After completion of the air supply step, the temperature raising step, the decompression step, and the air supply step described above are repeated as desired. For example, it is good to return to a temperature raising process, reheat a washing | cleaning liquid to a predetermined temperature (for example, 50 degreeC), depressurize the inside of the washing tank 3 to a predetermined pressure as a pressure reduction process, and introduce | transduce gas into a washing | cleaning liquid as an air supply process. However, the temperature reduction step may be omitted, and the depressurization step and the air supply step may be repeated. In this case, the pressure in the washing tank 3 gradually falls every time the depressurization step. For example, in the first depressurization process, when the cleaning liquid was decompressed until the first predetermined temperature (for example, 49.5 ° C), the next depressurization process was performed until the cleaning liquid became the second predetermined temperature (for example, 49 ° C). Decompression

The subsequent drainage step is a step of evacuating the inside of the washing tank 3 to atmospheric pressure and discharging the washing liquid in the washing tank 3. In order to pressurize the inside of the washing tank 3 to atmospheric pressure, you may introduce outside air into the washing tank 3 by the air supply means 6, but the pressure receiving means (not shown) which introduces outside air to the gaseous-phase part in the washing tank 3 further It may be provided, and the pressure in the washing tank 3 may be reduced to atmospheric pressure by this pressure recovering means. In this way, the pressure inside the cleaning tank 3 is restored to atmospheric pressure, and then the drain valve 28 is opened to drain the cleaning liquid. After that, you may rinse the to-be-cleaned object 2 as needed, and you may further plan to dry the to-be-cleaned object 2 after that. In addition, rinsing means washing | cleaning washing | cleaning liquid etc. which remained in the to-be-cleaned object 2 using another washing | cleaning liquid. Also in this rinsing step, gas is introduced into the washing liquid in the washing tank 3 while the washing liquid in the washing tank 3 is depressurized until the washing liquid in the washing tank 3 can be boiled, and the washing liquid is boiled vigorously to clean the object to be cleaned 2. You may plan.

Example 2

FIG. 5: is a schematic block diagram which shows Example 2 of the washing | cleaning apparatus 1 of this invention, and shows one part as a cross section. The cleaning device 1 of the second embodiment is basically the same as that of the first embodiment. Therefore, below, it demonstrates centering around the difference of both, and attaches | subjects the same code | symbol to the corresponding location, and demonstrates.

The cleaning device 1 of the second embodiment includes a cleaning tank 3 in which a cleaning liquid is stored and the object to be cleaned 2 is immersed, a water supply means 4 for supplying the cleaning liquid into the cleaning tank 3, Pressure-reducing means (5) for suctioning and discharging the gas in the tank (3) to the outside to depressurize the inside of the washing tank (3), and introducing the outside air into the gas phase part in the pressure-reducing washing tank (3) to recover the pressure inside the washing tank (3). The back pressure means 30, the air supply means 6 for introducing gas into the liquid portion (that is, the cleaning liquid) in the pressure-reduced cleaning tank 3, and the heating means 7 for heating the cleaning liquid in the cleaning tank 3. ), The drain means 8 for discharging the cleaning liquid in the cleaning tank 3, the pressure sensor 9 for detecting the pressure of the gas phase part in the cleaning tank 3, and the temperature of the liquid phase in the cleaning tank 3 (that is, And a liquid temperature sensor 10 for detecting the temperature of the cleaning liquid) and a control means 11 for controlling the respective means 4 to 8 and 30 based on detection signals of the sensors 9 and 10 and the like. In addition, the temperature sensor (not shown) which detects the temperature of the gaseous-phase part in the washing tank 3 may be provided instead of or in addition to the pressure sensor 9 which detects the pressure of the gaseous-phase part in the washing tank 3.

Since the pressure sensor 9 and the liquid temperature sensor 10 in addition to the cleaning tank 3, the water supply means 4, the air supply means 6, the heating means 7, and the drainage means 8 are the same as those of the first embodiment. Description is omitted.

When the pressure reduction means 5 is described, the specific configuration of the pressure reduction means 5 is not particularly limited as in the first embodiment, but in the second embodiment, the exhaust path 17 is sequentially disposed from the side of the cleaning tank 3. The check valve 19, the heat exchanger 31, the check valve 32, and the water-sealed vacuum pump 33 are provided. The heat exchanger 31 cools and condenses the vapor in the exhaust path 17. Therefore, water is supplied to the heat exchanger 31 through the heat bridge water supply valve 34 and discharged. By condensing the vapor in the exhaust path 17 in advance, the load on the subsequent vacuum pump 33 can be reduced to effectively reduce the pressure in the cleaning tank 3.

The well-sealed vacuum pump 33 operates by supplying water called a well water, as is well known. Therefore, water is supplied to the vacuum pump 33 through the seal water feed valve 35 and discharged. When operating the vacuum pump 33, the seal water feed valve 35 is opened in conjunction with the vacuum pump 33.

Referring to the pressure reducing means 30, in the second embodiment, the pressure reducing means 30 which introduces outside air into the gas phase part in the cleaning tank 3 under reduced pressure and pressurizes the inside of the cleaning tank 3 to reduce the pressure. Is installed. That is, the pressure return means 30 introduces outside air into the washing tank 3 under reduced pressure through the vacuum releasing passage 36. A vacuum releasing valve 37 is provided in the vacuum releasing passage 36. When the vacuum releasing valve 37 is opened while the washing tank 3 is depressed, the outside air is introduced into the washing tank 3 by the differential pressure. The inside of the washing tank 3 can be pressure-reduced.

The water supply means 4, the pressure reduction means 5, the pressure return means 30, the air supply means 6, the heating means 7, and the drainage means 8 are controlled by the control means 11. This control means 11 is the controller 29 which controls each said means 4-8,30 based on the detection signal etc. of each said sensor 9,10. Specifically, the water supply valve 16, the thermal bridge water supply valve 34, the water supply water supply valve 35, the vacuum pump 33, the vacuum release valve 37, the air supply valve 21, the surge valve 26, and the drainage water In addition to the valve 28, the pressure sensor 9 and the liquid temperature sensor 10 are connected to the controller 29. As described below, the controller 29 cleans the object 2 to be cleaned in the cleaning tank 3 in a predetermined order (program).

Hereinafter, the washing | cleaning method using the washing | cleaning apparatus 1 of Example 2 is demonstrated concretely. Fig. 6 is a diagram showing the cleaning method of the second embodiment, in which the line P represents the relationship between the elapsed time from the start of cleaning and the pressure in the cleaning tank 3, and the line T represents the elapsed time from the start of cleaning and the cleaning liquid. The relationship of temperature is shown. 7 is a flowchart showing the cleaning method of the second embodiment.

In the initial state, there is no cleaning liquid in the cleaning tank 3 and each valve 16, 19, 34, 35, 21, 26, 28 other than the vacuum release valve 37 is closed to operate the vacuum pump 33. It is stopping. From this initial state, the water injection step S1, the temperature raising step S2, the holding step S3, the damping pressure pulse step S4, and the drainage step S5 are performed in this order.

The water pouring step S1 is a step of pouring the washing liquid into the washing tank 3 by the water supply means 4. Specifically, when the water supply valve 16 is opened and the washing liquid is put into the washing tank 3, and the desired amount of washing liquid is stored in the washing tank 3, the feed water valve 16 is closed. In the water pouring step S1, when the lid 13 of the washing tank 3 is closed, the air in the washing tank 3 is discharged from the vacuum releasing passage 36 in accordance with the pouring water into the washing tank 3. . However, the pressure reducing means 5 may be operated instead of closing the vacuum releasing valve 37. In that case, the removal of the air from the inside of the washing tank 3 can be reliably achieved during the supply of the washing liquid into the washing tank 3.

The water to be cleaned 2 is put into the washing tank 3 prior to the water pouring step S1, and the lid 13 of the washing tank 3 is closed. However, the to-be-cleaned object 2 may be put in the washing tank 3 immediately after the water pouring process S1, and also in that case, after putting the to-be-cleaned object 2 in the washing tank 3, The lid 13 is closed. In any case, the object to be cleaned 2 is immersed in the cleaning liquid in the cleaning tank 3.

The temperature raising step S2 (S21, S22) is a step of heating the cleaning liquid in the washing tank 3 to a set temperature (for example, 50 ° C, hereinafter referred to as a reduction pressure pulse start temperature). Specifically, the cleaning liquid is heated by the heating means 7 until the cleaning liquid reaches a reduction pressure pulse start temperature. In the present embodiment, the soaring valve 26 is opened to exhale steam into the cleaning liquid in the cleaning tank 3 to heat the cleaning liquid (S21). During this rapid increase, the temperature of the cleaning liquid is monitored by the liquid temperature sensor 10, and when the cleaning liquid reaches the reduction pressure pulse starting temperature (S22).

By the way, in the temperature raising process S2, as shown in FIG. 6, you may perform pressure_reduction | reduced_pressure in the washing | cleaning tank 3, and its back pressure once or several times. That is, the pressure reduction means 5 depressurizes the inside of the washing tank 3 to the desired degree while heating the washing liquid by the heating means 7, and then repressurizes the inside of the washing tank 3 to near atmospheric pressure by the pressure-reducing means 30. You may perform once or multiple times.

Decompression in the washing tank 3 by the decompression means 5 operates the vacuum pump 33 in a state in which the vacuum release valve 37 is closed to open the heat bridge water supply valve 34 and the seal water supply valve 35. good. This decompression stops to the pressure which does not boil a washing | cleaning liquid. It is preferable that the decompression target pressure is lower unless the washing liquid is boiled. Since the cleaning liquid is not boiled, the cleaning liquid is prevented from being cooled. On the other hand, the pressure reduction by the pressure reduction means 30 may open the vacuum release valve 37. At the time of this back pressure, the decompression means 5 may be operated or may be stopped.

In this way, simple washing | cleaning of the to-be-cleaned object 2 can be aimed at by changing the pressure in the washing tank 3 in a temperature raising process S2. In particular, when the object to be cleaned 2 has a tube or a hole, the air remaining inside them can be inflated or compressed so that the air can be removed or the cleaning solution can be washed out.

Holding process S3 is a process of holding | maintaining the washing | cleaning liquid in the washing tank 3 at the reduction pressure pulse start temperature for a predetermined time. Specifically, opening / closing of the surge valve 26 is controlled based on the detection temperature by the liquid temperature sensor 10 so that the cleaning liquid in the cleaning tank 3 maintains the reduction pressure pulse start temperature. In this way, after controlling the cleaning liquid to be maintained at the reduced pressure pulse start temperature for a predetermined time, the surge valve 26 is closed to proceed to the next step. The temperature of the cleaning liquid can be kept constant regardless of the location by maintaining the cleaning liquid at the reduction pressure pulse start temperature for a predetermined time.

By the way, in the holding | maintenance process S3, as shown in FIG. 6, the pressure reduction process and the air supply process in the washing | cleaning method of the said Example 1 are performed. That is, the inside of the washing tank 3 is pressure-reduced by the pressure reduction means 5 first. Specifically, the vacuum pump 33 may be operated while the vacuum release valve 37 is closed to open the heat bridge water supply valve 34 and the sealed water supply valve 35. And the temperature of the washing | cleaning liquid detected by the liquid temperature sensor 10 during this decompression falls to predetermined temperature (for example, 49.5 degreeC), or the pressure in the washing tank 3 detected by the pressure sensor 9 is predetermined pressure. The gas is introduced into the cleaning liquid by the air supply means 6 when the temperature decreases or when a predetermined time elapses. This predetermined temperature, predetermined pressure, or predetermined time is the same as that of the first embodiment in that the cleaning liquid in the washing tank 3 is set to be in a boiling state.

Thus, the object to be cleaned by the air supply means 6 in a state where the pressure of the gaseous phase portion in the cleaning tank 3 is lowered to the vapor pressure or lower (or immediately before) of the cleaning liquid in the cleaning tank 3 by the pressure reducing means 5. The gas is introduced into the cleaning liquid in the cleaning tank 3 from below. As a result, the cleaning liquid can be boiled and heated vigorously, and the cleaning of the object to be cleaned 2 can be achieved. Subsequently, after reheating the washing liquid to the reduction pressure pulse start temperature as desired, the incidence of dolby due to the introduction of the gas into the washing liquid in a boiling state by the reduced pressure up to the predetermined pressure and the reduced pressure is repeated several times [ Typically, the maintenance step (S3) is completed]. And if this holding process S3 is performed for a predetermined time, it will transfer to a next process.

In the reduction pressure pulse process S4 (S41 to S45), the cleaning liquid in the cleaning tank 3 is boiled and continued until the cleaning liquid in the cleaning tank 3 reaches the reduction pressure pulse end temperature (for example, 30 ° C). Decompression is attained (S41, S42). During this time, during the boiling of the washing liquid, the operation of pressing the inside of the washing tank 3 instantaneously at a predetermined timing and stopping the boiling of the washing liquid is repeated (S43, S44). In this manner, the reduced pressure and the instantaneous pressure reduction are repeated.

More specifically, in the reduction pressure pulse process S4, the operation of the pressure reducing means 5 is continued, and the pressure in the cleaning tank 3 is gradually lowered, thereby continuing the boiling of the cleaning liquid (S41, S42). ). However, during this time, the temperature of the cleaning liquid is monitored by the liquid temperature sensor 10, and whenever the temperature of the cleaning liquid decreases by a predetermined amount, the pressure recovery means 30 temporarily restores the pressure inside the cleaning tank 3 (S43, S44). Decompression in the washing tank 3 by the decompression means 5 operates the vacuum pump 33 in a state in which the vacuum release valve 37 is closed to open the heat bridge water supply valve 34 and the seal water supply valve 35. good. In addition, the instantaneous pressure return to the set pressure by the pressure return means 30 may open the vacuum releasing valve 37 which consists of a solenoid valve. The decompression means 5 may be operated also at this time of pressure reduction. After the vacuum release valve 37 is opened to repressurize the inside of the cleaning tank 3 to stop boiling of the cleaning liquid, the vacuum release valve 37 is closed again to reduce the pressure in the cleaning tank 3 and thereby the cleaning liquid. Boiling is planned (S41).

In the damping pressure pulse step S4, the timing of the back pressure is not particularly limited as long as the back pressure is made during boiling of the cleaning liquid. In the present embodiment, the temperature of the cleaning liquid is monitored on the basis of the liquid temperature sensor 10, and the pressure is reduced every time the temperature decreases by a predetermined temperature. However, the pressure in the cleaning tank 3 is monitored on the basis of the pressure sensor 9 to monitor the pressure. You may return pressure every time this predetermined pressure falls. Alternatively, a temperature sensor may be provided in the gas phase in the cleaning tank 3, and the temperature sensor may be monitored based on this temperature sensor, and the pressure may be reduced whenever the temperature decreases by a predetermined temperature.

Although the said predetermined temperature (the said predetermined pressure is similarly determined according to this) as a pressure reduction timing in the reduction pressure pulse process S4 is set suitably, for example, 2 degreeC is employ | adopted in this embodiment. Therefore, when the washing liquid is heated up to 50 ° C. in the temperature raising step S2, the first pressure is restored when the washing liquid reaches 48 ° C. On the other hand, instantaneous abdominal pressure is made to the pressure which stops boiling of a washing | cleaning liquid. The pressure below atmospheric pressure may be sufficient as it is the pressure at which boiling of a washing | cleaning liquid stops, and it is rather preferable from the viewpoint of shortening of processing time. The pressure in the cleaning tank 3 can also be obtained by introducing gas into the liquid phase portion by the air supply means 6, but instantaneous pressure reduction is realized by introducing gas into the gas phase portion by the pressure reduction means 30.

As described above, in the reduction pressure pulse step S4, the inside of the washing tank 3 is reduced in pressure, and the washing liquid is boiled. During this boiling, the inside of the washing tank 3 is pressured back to the set pressure at an instant to stop the boiling of the washing liquid at once. . Therefore, the bubbles of water vapor generated in the cleaning liquid due to the boiling up to that time at the time of the compression are condensed in an instant. The washing liquid is agitated and conveyed by the pressure wave and the pressure difference at the time of condensation, and the washing of the object to be cleaned 2 is achieved. In addition, when the to-be-cleaned object 2 has a pipe | tube or a hole, a steam flow will generate | occur | produce in the pipe | tube or a hole of the to-be-cleaned object 2 by pressure reduction in the washing tank 3, but by the double pressure in the washing tank 3, Such steam flows off instantaneously. Therefore, the cleaning liquid can be blown in and out of the tube and the hole of the object to be cleaned 2, thereby cleaning the object to be cleaned 2.

This reduction pressure pulse process S4 is performed until the washing | cleaning liquid becomes the reduction pressure pulse end temperature (S42). When the cleaning liquid reaches the reduction pressure pulse end temperature, the operation of the pressure reducing means 5 is stopped. After that, the vacuum release valve 37 may be opened, and the inside of the washing tank 3 may be returned to atmospheric pressure to finish the cleaning, but the setting from the temperature raising step S2 to the reduction pressure pulse step S4 may be repeated a plurality of times. (S45).

That is, when the cleaning liquid reaches the reduction pressure pulse end temperature, the cleaning liquid may be reheated until the reduction pressure reaches the reduction pressure pulse start temperature, and the pressure reduction and the pressure reduction may be repeated until the cleaning liquid reaches the reduction pressure pulse end temperature. And it is good to set the cycle which consists of heating of the washing | cleaning liquid until the washing | cleaning liquid reaches the reduction pressure pulse start temperature, and the repetition of the reduction pressure in the washing tank 3 until the washing | cleaning liquid becomes the reduction pressure pulse end temperature. . In one cycle, the cleaning liquid temperature gradually decreases due to repeated reduction in pressure, and for example, the fat may harden and the cleaning effect may become thin.However, by increasing the cleaning liquid temperature and repeating the reduction pressure, more reliable and stable cleaning is performed. Can be done.

In addition, although the pressure reduction and the pressure reduction in the washing tank 3 were repeated until the washing liquid reached the reduction pressure pulse end temperature, the washing tank 3 became the reduction pressure pulse end pressure, or the washing tank 3 received the reduction pressure pulse end temperature. You may repeat pressure reduction and double pressure in the washing tank 3 until it turns to.

The subsequent drainage step S5 is a step of evacuating the inside of the washing tank 3 to atmospheric pressure and discharging the washing liquid in the washing tank 3. Specifically, the vacuum release valve 37 may be opened to return the inside of the washing tank 3 to atmospheric pressure, and then the drain valve 28 may be opened to drain the washing liquid. After that, a rinsing or drying step of the object to be cleaned 2 is performed as desired.

The washing | cleaning apparatus and washing | cleaning method of this invention are not limited to the structure of each said Example, It can change suitably. For example, although the air supply means 6 and / or the back pressure means 30 introduces outside air (air), as described above, other than air may be introduced.

In addition, although heating of the washing | cleaning liquid by the heating means 7 was stopped in the depressurization process and air supply process in the said Example 1, you may continue heating of the washing | cleaning liquid by the heating means 7. In that case, the washing | cleaning method of this invention can also be implemented, maintaining a washing | cleaning liquid at a preset temperature, or heating up a washing liquid.

In addition, in the said Example 1, a temperature raising process can also be abbreviate | omitted. In this case, the vapor pressure of the cleaning liquid is grasped based on the detection temperature of the liquid temperature sensor 10, and the cleaning of the object to be cleaned 2 can be achieved by the depressurizing process or the air supply process.

In each of the above embodiments, the air supply pipe 23 is provided at the bottom of the cleaning tank 3 as the air supply means 6, and gas is introduced into the cleaning liquid from the gas discharge hole 24 of the air supply pipe 23. Although it was set as the structure, the gas introduction method into a washing | cleaning liquid can be changed suitably. For example, the bottom part of the washing tank 3 may be partitioned with a plate formed with a large number of small holes such as a punching plate, so that the bottom surface of the washing tank 3 may have a double structure and gas may be introduced therein. In this case, gas can be introduced upward from a plurality of holes formed in the plate.

In the above embodiments, the heating means 7 is configured to directly blow steam into the cleaning liquid to heat the cleaning liquid. However, as shown in FIG. The cleaning liquid may be heated by indirect heat exchange with the cleaning liquid and steam. In this case, the condensed water of steam supplied from the sudden increase path 25 to the indirect heat exchanger 38 is discharged through the steam trap 39. In such a structure, the cleaning object 2 can be dried by supplying steam to the indirect heat exchanger 38 after discharging the cleaning liquid from the cleaning tank 3. 8, only the washing tank 3 and the heating means 7 are shown, and the other structure is abbreviate | omitted and shown.

In addition, in Example 2, although the washing | cleaning method which consists of water injection process (S1), a temperature raising process (S2), the holding process (S3), the damping pressure pulse process (S4), and the drainage process (S5) was demonstrated, the washing | cleaning of this invention The method is not limited to this. In particular, when the holding step (S3) is included, the contents of each step can be changed as appropriate except for the presence or absence of other steps and the addition and deletion of other steps. In other words, a step of introducing a gas into the cleaning liquid in the cleaning tank 3 and boiling it vigorously in a darkened state until the cleaning liquid in the cleaning tank 3 can be boiled can be included.

Moreover, you may combine the washing | cleaning method of each said Example. That is, after performing the washing | cleaning method of the said Example 1, you may implement the washing | cleaning method of the said Example 2, and you may aim to wash | clean the to-be-cleaned object 2. In that case, combined use of the decompression process and the air supply process in the washing | cleaning method of the said Example 1 in the holding process S3 may be abbreviate | omitted.

Finally, in each of the above embodiments, in the state immediately after receiving the object to be cleaned 2 into the cleaning tank 3, it is not necessary that all of the objects to be cleaned 2 are necessarily immersed in the cleaning liquid. For example, when accommodating the rack into which the to-be-cleaned object 2 is put into the washing tank 3 in multiple stages up and down, the rack of the uppermost stage does not need to be immersed. Even in this case, the cleaning liquid can be cleaned by bringing the cleaning liquid into contact with all the objects to be cleaned 2 by boiling of the cleaning liquid (particularly, the dolby due to the introduction of air into the liquid phase). Thus, the to-be-cleaned object 2 is not immersed in the washing | cleaning liquid before boiling of the washing | cleaning liquid in the washing | cleaning tank 3, but when it wash | cleans the washing | cleaning liquid in the washing | cleaning tank 3 or ejects the washing | cleaning liquid by introducing gas into the washing | cleaning liquid, It can also be placed in the locked position. In this case, the installation space of the to-be-cleaned object 2 can be increased, and more washing | cleaning of the to-be-cleaned object 2 is attained by one operation. In addition, since the liquid level can be lowered and operated, the amount of the cleaning liquid used is suppressed.

1: Cleaning device 2: Cleansed object
3: washing tank 4: water supply means
5: decompression means 6: air supply means
7: heating means 8: draining means
9: pressure sensor 10: liquid temperature sensor
11: control means 20: air supply
21: air supply valve 22: filter
23: supply pipe 24: gas extraction hole
30: abdominal pressure means

Claims (8)

A cleaning tank in which a cleaning solution is stored and the object to be cleaned is immersed in the cleaning solution;
Pressure-reducing means for suctioning and discharging the gas in the cleaning tank to outside to depressurize the inside of the cleaning tank, and
And an air supply means for introducing gas into the cleaning liquid in the cleaning tank from below the to-be-cleaned object in a state where the pressure of the gaseous phase portion in the cleaning tank is lowered to or below the vapor pressure of the cleaning liquid in the cleaning tank by the decompression means. As a cleaning device,
And heating means for heating the cleaning liquid in the cleaning tank,
After heating the cleaning liquid to the set temperature by this heating means, the inside of the cleaning tank is decompressed by the decompression means to boil the cleaning liquid, and during the boiling, gas is introduced into the cleaning liquid by the air supply means.
Stopping the introduction of gas into the cleaning liquid by the air supply means, reducing the pressure in the cleaning tank until the cleaning liquid is reheated to the set temperature or reboiling without reheating, and into the cleaning liquid by the air supply means during boiling. Repeat the gas introduction of,
And a pressure reducing means for introducing gas into the gaseous phase portion in the cleaning tank depressurized by the pressure reducing means to restore the pressure in the cleaning tank.
After the heating means maintains the cleaning liquid to the set temperature by the heating means, the pressure reduction means is continued in the cleaning tank by the pressure reducing means so that the cleaning liquid continues to boil, and the pressure reducing means moves to the gas phase part in the cleaning tank during the pressure reduction. Introducing the outside air and temporarily repressurizing the inside of the cleaning tank at a moment to stop boiling of the cleaning liquid,
While maintaining the cleaning liquid at the set temperature, depressurization in the cleaning tank by the decompression means and gas introduction by the air supply means during boiling of the cleaning liquid thereby;
The air supply means is provided with a pipe disposed in the transverse direction at the bottom of the cleaning tank,
The pipe | tube is formed in this pipe, and the gas discharge | release hole is opened downward at the set interval, The washing | cleaning apparatus characterized by the above-mentioned. delete delete delete delete delete delete delete

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