JP5729678B2 - Cleaning device - Google Patents

Cleaning device Download PDF

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JP5729678B2
JP5729678B2 JP2011060279A JP2011060279A JP5729678B2 JP 5729678 B2 JP5729678 B2 JP 5729678B2 JP 2011060279 A JP2011060279 A JP 2011060279A JP 2011060279 A JP2011060279 A JP 2011060279A JP 5729678 B2 JP5729678 B2 JP 5729678B2
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cleaning tank
liquid phase
pressure
liquid
flow rate
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JP2012192386A (en
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崇文 山崎
崇文 山崎
慎二 藤井
慎二 藤井
洋平 西原
洋平 西原
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Miura Co Ltd
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Description

本発明は、洗浄槽内に貯留した液体に被洗浄物を浸漬して洗浄を図る洗浄装置に関するものである。   The present invention relates to a cleaning apparatus that performs cleaning by immersing an object to be cleaned in a liquid stored in a cleaning tank.

出願人は、先に、下記特許文献1に開示されるように、洗浄槽内に液体を貯留して被洗浄物を浸漬し、その貯留液を設定温度まで加温後、洗浄槽内を減圧して貯留液を沸騰させた状態で、洗浄槽内の液相部に外気を導入することで、貯留液を突沸させて被洗浄物の洗浄を図る洗浄装置を提案している。   As disclosed in Patent Document 1 below, the applicant previously stored the liquid in the cleaning tank, immersed the object to be cleaned, heated the stored liquid to the set temperature, and then reduced the pressure in the cleaning tank. In the state where the stored liquid is boiled, a cleaning apparatus has been proposed in which the outside liquid is introduced into the liquid phase portion in the cleaning tank so that the stored liquid is bumped and the object to be cleaned is cleaned.

特開2011−5480号公報JP 2011-5480 A

しかしながら、洗浄槽内の液相部へ外気を導入する給気時に、給気流量を所定の流量範囲に収めなければ、洗浄性能にばらつきを生じたり、騒音が大きくなったりする。そこで、本発明が解決しようとする課題は、液相部への給気流量を所定範囲に収めることにより、騒音を抑制しながら、洗浄性能の低下を防止することにある。   However, when supplying the outside air to the liquid phase portion in the cleaning tank, if the supply air flow rate does not fall within a predetermined flow rate range, the cleaning performance varies and noise increases. Accordingly, the problem to be solved by the present invention is to prevent the deterioration of the cleaning performance while suppressing noise by keeping the supply air flow rate to the liquid phase part within a predetermined range.

本発明は、前記課題を解決するためになされたもので、請求項1に記載の発明は、液体を貯留して被洗浄物を浸漬する洗浄槽と、この洗浄槽内の気体を外部へ吸引排出して、前記洗浄槽内を減圧する減圧手段と、この減圧手段により減圧された前記洗浄槽内の液相部に外気を導入する液相給気手段とを備え、前記液相給気手段は、前記洗浄槽内への外気流入量を絞る流量制限手段を備え、前記流量制限手段は、開度調整可能な流量調整弁からなり、前記液相給気手段は、フィルタを介した外気を、前記流量調整弁および液相給気弁を介して、前記洗浄槽内底部の液相給気ノズルから前記洗浄槽内へ導入し、加温手段により前記洗浄槽内の貯留液を設定温度まで加温する操作、その後、前記減圧手段により前記洗浄槽内を減圧して貯留液を沸騰させる操作、この沸騰中に、前記洗浄槽内からの排気を継続したまま、前記液相給気手段により前記洗浄槽の内外の差圧を利用して前記洗浄槽内の液相部に外気を導入する操作、を繰り返す液相給気パルス制御を実行し、この液相給気パルス制御において、圧力センサまたは温度センサを用いて、前記洗浄槽内の圧力または温度を検出し、その検出信号に基づき前記流量調整弁の開度を調整して、液相部への給気流量を所定範囲に収めることを特徴とする洗浄装置である。 The present invention has been made to solve the above problems, and the invention according to claim 1 is a cleaning tank for storing a liquid and immersing an object to be cleaned, and a gas in the cleaning tank is sucked to the outside. A pressure reducing means for discharging and depressurizing the inside of the cleaning tank; and a liquid phase air supplying means for introducing outside air into the liquid phase portion in the cleaning tank decompressed by the pressure reducing means. Comprises a flow rate restricting means for restricting the amount of outside air flowing into the cleaning tank, the flow restricting means comprising a flow rate adjusting valve whose opening degree can be adjusted, and the liquid phase air supplying means Then, the liquid supply air is introduced into the cleaning tank from the liquid supply nozzle at the bottom of the cleaning tank through the flow rate adjusting valve and the liquid supply valve, and the stored liquid in the cleaning tank is set to a set temperature by the heating means. The operation of heating, and then the pressure in the cleaning tank is reduced by the pressure reducing means to boil the stored liquid. During the boiling, while the exhaust from the inside of the washing tank is continued, outside air is supplied to the liquid phase part in the washing tank using the differential pressure inside and outside the washing tank by the liquid phase air supply means. In this liquid phase air supply pulse control, a pressure sensor or a temperature sensor is used to detect the pressure or temperature in the washing tank, and the detection signal is used as the detection signal. The cleaning device is characterized in that, based on the opening of the flow rate adjusting valve, the supply air flow rate to the liquid phase part falls within a predetermined range .

請求項1に記載の発明によれば、液相部への給気時の外気流入量を絞ることで、液相部への給気流量を所定範囲に収め、騒音を抑制しながら、洗浄性能の低下を防止することができる。   According to the first aspect of the present invention, by reducing the amount of outside air flowing into the liquid phase part when the air is supplied to the liquid phase part, the air supply flow rate to the liquid phase part is kept within a predetermined range, and the cleaning performance is suppressed while suppressing noise. Can be prevented.

請求項1に記載の発明によれば、流量調整弁の開度を調整することで、液相部への給気流量を所定範囲に収めることにより、騒音を抑制しながら、洗浄性能の低下を防止することができる。 According to the first aspect of the present invention, by adjusting the opening of the flow rate adjusting valve, the supply air flow rate to the liquid phase part is kept within a predetermined range, thereby suppressing noise and reducing the cleaning performance. Can be prevented.

本発明によれば、液相部への給気流量を所定範囲に収めることにより、騒音を抑制しながら、洗浄性能の低下を防止することができる。   According to the present invention, by reducing the supply air flow rate to the liquid phase part within a predetermined range, it is possible to prevent deterioration in cleaning performance while suppressing noise.

本発明の洗浄装置の一実施例を示す概略図であり、一部を断面にして示している。BRIEF DESCRIPTION OF THE DRAWINGS It is the schematic which shows one Example of the washing | cleaning apparatus of this invention, and shows a part in cross section. 図1の洗浄装置の変形例を示す図である。It is a figure which shows the modification of the washing | cleaning apparatus of FIG.

以下、本発明の具体的実施例を図面に基づいて詳細に説明する。
図1は、本発明の洗浄装置1の一実施例を示す概略図であり、一部を断面にして示している。
Hereinafter, specific embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic view showing an embodiment of the cleaning apparatus 1 of the present invention, and a part thereof is shown in cross section.

本実施例の洗浄装置1は、液体が貯留され被洗浄物2が浸漬される洗浄槽3と、この洗浄槽3内の貯留液を加温する加温手段4と、洗浄槽3内の気体を外部へ吸引排出して洗浄槽3内を減圧する減圧手段5と、減圧された洗浄槽3内の液相部へ外気を導入する液相給気手段6と、減圧された洗浄槽3内の気相部へ外気を導入する気相給気手段7と、これら各手段4〜7を制御する制御手段(図示省略)とを備える。   The cleaning apparatus 1 of this embodiment includes a cleaning tank 3 in which liquid is stored and an object to be cleaned 2 is immersed, heating means 4 for heating the stored liquid in the cleaning tank 3, and gas in the cleaning tank 3. Pressure reducing means 5 for reducing the pressure in the cleaning tank 3 by sucking and discharging the air, liquid phase air supplying means 6 for introducing outside air to the liquid phase part in the pressure reducing cleaning tank 3, and the pressure in the cleaning tank 3 reduced in pressure A gas-phase air supply means 7 for introducing outside air into the gas-phase portion, and a control means (not shown) for controlling these means 4 to 7.

被洗浄物2は、洗浄を図りたい物品であり、たとえば、医療器具、電子部品または機械部品である。なお、洗浄とは、文字通りの洗浄の他、濯ぎや除染も含まれるものとする。   The article to be cleaned 2 is an article to be cleaned, and is, for example, a medical instrument, an electronic component, or a mechanical component. In addition, washing | cleaning shall include rinsing and decontamination other than literal washing.

洗浄槽3は、内部空間の減圧に耐える中空容器である。洗浄槽3は、上方へ開口して中空部を有する洗浄槽本体8と、この洗浄槽本体8の開口部を開閉するドア9とを備える。ドア9を閉じた状態では、洗浄槽本体8とドア9との隙間はパッキン10で封止される。   The cleaning tank 3 is a hollow container that can withstand pressure reduction in the internal space. The cleaning tank 3 includes a cleaning tank body 8 that opens upward and has a hollow portion, and a door 9 that opens and closes the opening of the cleaning tank body 8. When the door 9 is closed, the gap between the cleaning tank body 8 and the door 9 is sealed with the packing 10.

洗浄槽3には液体が供給されて貯留される。この液体は、その種類を特に問わないが、たとえば、洗剤を含んだ水、洗剤を含まない水の他、純水、軟水、溶剤などとされる。   The cleaning tank 3 is supplied with liquid and stored. The type of the liquid is not particularly limited. For example, pure water, soft water, a solvent, and the like are included in addition to water containing a detergent and water not containing a detergent.

洗浄槽3には、圧力センサ11と温度センサ12とが設けられる。圧力センサ11は、洗浄槽3内の気相部の圧力を検出し、温度センサ12は、洗浄槽3内の液相部の温度を検出する。   The cleaning tank 3 is provided with a pressure sensor 11 and a temperature sensor 12. The pressure sensor 11 detects the pressure of the gas phase part in the cleaning tank 3, and the temperature sensor 12 detects the temperature of the liquid phase part in the cleaning tank 3.

加温手段4は、洗浄槽3内の貯留液を加温する。加温手段4は、その構成を特に問わず、たとえば蒸気ヒータでもよいが、本実施例では電気ヒータ13とされる。この電気ヒータ13は、洗浄槽3内の底部に配置される。   The heating means 4 warms the stored liquid in the cleaning tank 3. The heating means 4 is not particularly limited in its configuration, and may be, for example, a steam heater, but is an electric heater 13 in this embodiment. The electric heater 13 is disposed at the bottom of the cleaning tank 3.

減圧手段5は、洗浄槽3内の気体を外部へ吸引排出して洗浄槽3内を減圧する。具体的には、減圧手段5は、真空発生装置14を備え、この真空発生装置14は、排気路15を介して、洗浄槽3内の気相部に接続されている。真空発生装置14は、その具体的構成を特に問わないが、典型的には水封式の真空ポンプを備え、この真空ポンプより上流側に、排気路15内の蒸気を凝縮させる熱交換器をさらに備えてもよい。   The decompression means 5 decompresses the inside of the cleaning tank 3 by sucking and discharging the gas in the cleaning tank 3 to the outside. Specifically, the decompression unit 5 includes a vacuum generator 14, and the vacuum generator 14 is connected to a gas phase portion in the cleaning tank 3 through an exhaust passage 15. The specific structure of the vacuum generator 14 is not particularly limited. Typically, the vacuum generator 14 includes a water-sealed vacuum pump, and a heat exchanger that condenses the vapor in the exhaust passage 15 is provided upstream of the vacuum pump. Further, it may be provided.

液相給気手段6は、減圧手段5により所定圧力まで減圧された洗浄槽3内の液相部へ、液相給気路16を介して外気を導入する。液相給気路16には、洗浄槽3へ向けて順に、フィルタ17、オリフィス18および液相給気弁19が設けられている。オリフィス18は、洗浄槽3内への外気流入量を絞る流量制限手段である。   The liquid phase air supply means 6 introduces outside air into the liquid phase portion in the cleaning tank 3 decompressed to a predetermined pressure by the decompression means 5 via the liquid phase air supply path 16. In the liquid phase air supply path 16, a filter 17, an orifice 18, and a liquid phase air supply valve 19 are provided in order toward the cleaning tank 3. The orifice 18 is a flow restriction means for restricting the amount of outside air flowing into the cleaning tank 3.

このように、減圧手段5により洗浄槽3内が所定の圧力まで減圧されたら、液相給気手段6によって、洗浄槽3内の液相部へ、液相給気路16を介して外気を導入する。つまり、洗浄槽3内が減圧された状態で液相給気弁19を開くと、洗浄槽3の内外の差圧を利用して、フィルタ17を介した空気を洗浄槽3内の貯留液中に導入することができる。しかも、オリフィス18を設けていることで、液相部への給気流量を安定して給気することができるので、洗浄機能を維持した状態で、給気による騒音を低減することができる。オリフィス18で流量をどの程度絞るかは適宜に設定されるが、騒音がたとえば65dB以下になるよう設定される。   As described above, when the pressure in the cleaning tank 3 is reduced to a predetermined pressure by the pressure reducing means 5, the liquid phase air supply means 6 supplies the outside air to the liquid phase portion in the cleaning tank 3 through the liquid phase air supply path 16. Introduce. In other words, when the liquid-phase air supply valve 19 is opened in a state where the inside of the cleaning tank 3 is decompressed, the air through the filter 17 is stored in the stored liquid in the cleaning tank 3 using the pressure difference inside and outside the cleaning tank 3. Can be introduced. Moreover, since the orifice 18 is provided, the supply air flow rate to the liquid phase portion can be stably supplied, so that noise due to supply air can be reduced while maintaining the cleaning function. How much the flow rate is reduced by the orifice 18 is set as appropriate, but the noise is set to be, for example, 65 dB or less.

ところで、液相給気路16からの空気は、洗浄槽3内の底部に設けた液相給気ノズル20を介して、洗浄槽3内の貯留液中に導入される。液相給気ノズル20は、洗浄槽3内の底部に、横向きに配置されたパイプである。液相給気ノズル20は、洗浄槽3内の底部ではあるが底面から離隔して、水平に保持されている。そして、液相給気ノズル20には、パイプの延出方向へ沿って設定間隔で、パイプの周側壁にノズル孔21が下方へ開口して形成されている。   By the way, the air from the liquid phase air supply path 16 is introduced into the stored liquid in the cleaning tank 3 through the liquid phase air supply nozzle 20 provided at the bottom of the cleaning tank 3. The liquid-phase air supply nozzle 20 is a pipe disposed laterally at the bottom in the cleaning tank 3. The liquid-phase air supply nozzle 20 is held at a horizontal position apart from the bottom surface although it is a bottom portion in the cleaning tank 3. The liquid-phase air supply nozzle 20 is formed with nozzle holes 21 that are opened downward in the peripheral side wall of the pipe at set intervals along the pipe extending direction.

気相給気手段7は、減圧された洗浄槽3内の気相部へ、気相給気路22を介して外気を導入する。気相給気路22には、洗浄槽3へ向けて順に、フィルタ23および気相給気弁24が設けられている。従って、洗浄槽3内が減圧された状態で気相給気弁24を開くと、洗浄槽3の内外の差圧により、フィルタ23を介した空気を洗浄槽3内へ導入して、洗浄槽3内を復圧することができる。気相給気弁24を電磁弁から構成すれば、洗浄槽3内を瞬時に復圧することができ、気相給気弁24を電動弁から構成すれば、洗浄槽3内を徐々に復圧することができる。   The gas phase air supply means 7 introduces outside air into the gas phase portion in the decompressed cleaning tank 3 through the gas phase air supply path 22. In the gas-phase air supply path 22, a filter 23 and a gas-phase air supply valve 24 are provided in order toward the cleaning tank 3. Therefore, when the gas-phase air supply valve 24 is opened in a state where the pressure in the cleaning tank 3 is reduced, air through the filter 23 is introduced into the cleaning tank 3 due to a differential pressure inside and outside the cleaning tank 3, and the cleaning tank 3 The pressure inside 3 can be restored. If the gas-phase gas supply valve 24 is composed of an electromagnetic valve, the pressure inside the cleaning tank 3 can be instantaneously restored. If the gas-phase gas supply valve 24 is composed of an electric valve, the pressure inside the cleaning tank 3 is gradually restored. be able to.

制御手段は、前記各センサ11,12の検出信号などに基づき、前記各手段4〜7を制御する制御器である。具体的には、電気ヒータ13、真空発生装置14、液相給気弁19、気相給気弁24の他、圧力センサ11および温度センサ12は、制御器に接続されている。そして、制御器は、以下に述べるように、所定の手順(プログラム)に従い、洗浄槽3内の被洗浄物2の洗浄を図る。   The control means is a controller that controls the means 4 to 7 based on the detection signals of the sensors 11 and 12. Specifically, in addition to the electric heater 13, the vacuum generator 14, the liquid phase supply valve 19, and the gas phase supply valve 24, the pressure sensor 11 and the temperature sensor 12 are connected to a controller. Then, as described below, the controller cleans the article 2 to be cleaned in the cleaning tank 3 according to a predetermined procedure (program).

洗浄装置1の具体的な運転方法は、特に問わないが、たとえば次のように運転される。まず、洗浄槽本体8に被洗浄物2を入れた後、洗浄槽3のドア9を気密に閉じる。その後、被洗浄物2が液体に浸漬されるまで、洗浄槽3内には液体が貯留される。   Although the specific operating method of the washing | cleaning apparatus 1 is not ask | required in particular, For example, it drive | operates as follows. First, after putting the article 2 to be cleaned into the cleaning tank body 8, the door 9 of the cleaning tank 3 is closed in an airtight manner. Thereafter, the liquid is stored in the cleaning tank 3 until the object to be cleaned 2 is immersed in the liquid.

そして、加温手段4により洗浄槽3内の貯留液を設定温度まで加温後、減圧手段5により洗浄槽3内を減圧して貯留液を沸騰させ、この沸騰中に、洗浄槽3内からの排気を継続したまま、液相給気手段6により洗浄槽3の内外の差圧を利用して洗浄槽3内の液相部に外気を導入する。このようにして貯留液を突沸させ、貯留液の爆発的な噴上げとそれに続く落下とによって、貯留液を大きく揺動させることができ、被洗浄物2の洗浄を効果的に図ることができる。その後、洗浄槽3内の貯留液を再び設定温度まで加温し、洗浄槽3内を減圧後に洗浄槽3内の液相部に外気を導入することを繰り返すのがよい(液相給気パルス制御)。なお、このような制御では、液相部への給気時の洗浄槽3内の圧力は、洗浄槽3内の貯留液の飽和圧力になるので、貯留液の温度で決まることになる。この温度は、本実施例ではたとえば50℃(12.3kPa)であり、この条件に対して、騒音の低減と洗浄能力の維持とを図れるように、オリフィス18の径が定められる。   Then, after warming the stored liquid in the cleaning tank 3 to the set temperature by the heating means 4, the pressure in the cleaning tank 3 is reduced by the decompression means 5 to boil the stored liquid. The liquid phase air supply means 6 introduces the outside air into the liquid phase portion in the cleaning tank 3 by utilizing the pressure difference between the inside and the outside of the cleaning tank 3 while continuing the exhausting. In this way, the stored liquid can be bumped, and the stored liquid can be greatly swung by the explosive ejection of the stored liquid and the subsequent drop, and the object to be cleaned 2 can be effectively cleaned. . Thereafter, the stored liquid in the cleaning tank 3 is again heated to the set temperature, and it is preferable to repeat introduction of outside air to the liquid phase part in the cleaning tank 3 after the pressure in the cleaning tank 3 is reduced (liquid phase air supply pulse). control). In such control, the pressure in the cleaning tank 3 at the time of supplying air to the liquid phase portion is the saturation pressure of the stored liquid in the cleaning tank 3, and is thus determined by the temperature of the stored liquid. This temperature is, for example, 50 ° C. (12.3 kPa) in the present embodiment, and the diameter of the orifice 18 is determined so that noise can be reduced and cleaning performance can be maintained under this condition.

あるいは、加温手段4により洗浄槽3内の貯留液を設定温度まで加温後、所定の終了条件を満たすまで、減圧手段5による洗浄槽3内からの排気を継続して洗浄槽3内の圧力を低下させる過程で、この減圧による貯留液の沸騰中に気相給気手段7により洗浄槽3内を貯留液の沸騰が止むまで瞬時に一時的に復圧することを繰り返してもよい(気相給気パルス制御)。   Alternatively, after the stored liquid in the cleaning tank 3 is heated to the set temperature by the heating means 4, the exhaust from the cleaning tank 3 by the decompression means 5 is continued until the predetermined end condition is satisfied. In the process of lowering the pressure, during the boiling of the stored liquid due to this reduced pressure, the gas-phase air supply means 7 may repeatedly return the pressure in the cleaning tank 3 instantaneously until the boiling of the stored liquid stops. Phase air supply pulse control).

あるいは、前述した気相給気パルス制御と液相給気パルス制御とを所望順序で実行するなど、洗浄槽3内の減圧や復圧、バブリング(液相部への給気)などを適宜組み合わせて、被洗浄物の洗浄を図ってもよい。   Alternatively, the above-described gas-phase air supply pulse control and liquid-phase air supply pulse control are executed in a desired order, and the decompression and return pressure in the cleaning tank 3 and bubbling (air supply to the liquid-phase part) are appropriately combined. Thus, the object to be cleaned may be cleaned.

図2は、図1の洗浄装置1の変形例を示す図である。図1の洗浄装置1では、流量制限手段としてオリフィス18を用いたが、図2の洗浄装置1では、開度調整可能な流量調整弁25が用いられる。   FIG. 2 is a view showing a modification of the cleaning apparatus 1 of FIG. In the cleaning device 1 of FIG. 1, the orifice 18 is used as the flow rate limiting means. However, in the cleaning device 1 of FIG. 2, a flow rate adjustment valve 25 whose opening degree can be adjusted is used.

前述した液相給気パルス制御を行う場合、液相部への空気流量を増やすと、洗浄力は増すが騒音が大きくなり、液相部への空気流量を減らすと、騒音は小さくなるが洗浄力が低下するおそれがある。そこで、本変形例の洗浄装置1では、被洗浄物2の種類や汚れ具合など、用途に合わせて、流量調整弁25の開度を変えることで、多様な洗浄に対応することができる。また、洗浄槽3内の液面の高さや、液相部への給気直前の洗浄槽3内の圧力に応じて、流量調整弁25の開度を変えてもよい。さらに、圧力センサ11または温度センサ12を用いて、洗浄槽3内の圧力または温度を検出し、その検出信号に基づき流量調整弁25の開度を調整して、液相部への給気流量を適正値に保つように制御してもよい。   When performing the above-described liquid phase air supply pulse control, increasing the air flow rate to the liquid phase increases the cleaning power but increases noise, and reducing the air flow rate to the liquid phase decreases noise but reduces the cleaning. The power may be reduced. Therefore, in the cleaning apparatus 1 of the present modification, various types of cleaning can be handled by changing the opening of the flow rate adjustment valve 25 in accordance with the application, such as the type of the object to be cleaned 2 and the degree of contamination. Further, the opening degree of the flow rate adjusting valve 25 may be changed according to the height of the liquid level in the cleaning tank 3 and the pressure in the cleaning tank 3 immediately before supplying air to the liquid phase part. Further, the pressure or temperature in the cleaning tank 3 is detected using the pressure sensor 11 or the temperature sensor 12, and the opening degree of the flow rate adjusting valve 25 is adjusted based on the detection signal, so that the supply air flow rate to the liquid phase part May be controlled so as to be kept at an appropriate value.

本発明の洗浄装置1は、前記実施例の構成に限らず適宜変更可能である。特に、前述した洗浄装置1の運転方法は、一例であり、適宜に変更可能なことは言うまでもない。また、流量制限手段として、オリフィス18や流量調整弁25を用いたが、洗浄槽3内の液相部への外気流入量を絞ったり変更したりできるのであれば、その構成は適宜に変更可能である。   The cleaning device 1 of the present invention is not limited to the configuration of the above embodiment, and can be changed as appropriate. In particular, the operation method of the cleaning device 1 described above is an example, and it goes without saying that it can be changed as appropriate. Further, although the orifice 18 and the flow rate adjusting valve 25 are used as the flow rate restricting means, the configuration can be appropriately changed as long as the outside air inflow amount to the liquid phase portion in the cleaning tank 3 can be reduced or changed. It is.

1 洗浄装置
2 被洗浄物
3 洗浄槽
4 加温手段
5 減圧手段
6 液相給気手段
7 気相給気手段
17 フィルタ
18 オリフィス(流量制限手段)
20 液相給気ノズル
25 流量調整弁(流量制限手段)
DESCRIPTION OF SYMBOLS 1 Cleaning apparatus 2 Object to be cleaned 3 Cleaning tank 4 Heating means 5 Depressurizing means 6 Liquid phase air supply means 7 Gas phase air supply means 17 Filter 18 Orifice (flow rate limiting means)
20 Liquid phase air supply nozzle 25 Flow rate adjustment valve (flow rate limiting means)

Claims (1)

液体を貯留して被洗浄物を浸漬する洗浄槽と、
この洗浄槽内の気体を外部へ吸引排出して、前記洗浄槽内を減圧する減圧手段と、
この減圧手段により減圧された前記洗浄槽内の液相部に外気を導入する液相給気手段とを備え、
前記液相給気手段は、前記洗浄槽内への外気流入量を絞る流量制限手段を備え
前記流量制限手段は、開度調整可能な流量調整弁からなり、
前記液相給気手段は、フィルタを介した外気を、前記流量調整弁および液相給気弁を介して、前記洗浄槽内底部の液相給気ノズルから前記洗浄槽内へ導入し、
加温手段により前記洗浄槽内の貯留液を設定温度まで加温する操作、その後、前記減圧手段により前記洗浄槽内を減圧して貯留液を沸騰させる操作、この沸騰中に、前記洗浄槽内からの排気を継続したまま、前記液相給気手段により前記洗浄槽の内外の差圧を利用して前記洗浄槽内の液相部に外気を導入する操作、を繰り返す液相給気パルス制御を実行し、
この液相給気パルス制御において、圧力センサまたは温度センサを用いて、前記洗浄槽内の圧力または温度を検出し、その検出信号に基づき前記流量調整弁の開度を調整して、液相部への給気流量を所定範囲に収める
ことを特徴とする洗浄装置。
A cleaning tank for storing liquid and immersing an object to be cleaned;
Vacuuming means for sucking and discharging the gas in the cleaning tank to the outside, and reducing the pressure in the cleaning tank;
Liquid phase air supply means for introducing outside air into the liquid phase portion in the cleaning tank decompressed by the pressure reducing means,
The liquid phase air supply means includes a flow rate limiting means for reducing the amount of outside air flowing into the cleaning tank ,
The flow rate limiting means is composed of a flow rate adjustment valve whose opening degree can be adjusted,
The liquid phase supply means introduces outside air through a filter from the liquid phase supply nozzle at the bottom of the cleaning tank into the cleaning tank through the flow rate adjustment valve and the liquid phase supply valve .
An operation of heating the stored liquid in the cleaning tank to a set temperature by a heating means, and then an operation of reducing the pressure in the cleaning tank by the pressure reducing means to bring the stored liquid to a boil. Liquid phase air supply pulse control that repeats the operation of introducing the outside air into the liquid phase portion in the cleaning tank using the differential pressure inside and outside the cleaning tank by the liquid phase air supply means while continuing the exhaust from Run
In this liquid phase air supply pulse control, the pressure or temperature sensor is used to detect the pressure or temperature in the cleaning tank, and the opening of the flow rate adjustment valve is adjusted based on the detection signal to A cleaning device characterized in that the air supply flow rate to the inside is within a predetermined range .
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