JP2008291329A - Bridge-less etching product, and method for producing the same - Google Patents
Bridge-less etching product, and method for producing the same Download PDFInfo
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Abstract
Description
本発明は、ブリッジレスのエッチング製品およびその製造方法に関する。 The present invention relates to a bridgeless etching product and a manufacturing method thereof.
従来、金属エッチング製品を製造するにあたり、製造効率を向上し、生産コストを低減するために、枚葉、或いは、長尺状の金属シートに、複数の金属エッチング製品を多面付けして製造されている。そのため、通常、金属エッチング製品は、個別の単体製品が製造中に、金属シートから脱落しないよう、しかもバラバラにならないよう、個別の各単体製品に、ブリッジ(タブ)をつけて相互に、或いは、金属シートに、連結一体化して、金属シート内に配置している。しかし、単体製品に切り離す際、ブリッジ部分が直線に切断されなかったり、バリが生じたりする。また、切り離し時に、製品が変形することもある。
そこで、ブリッジの無い製品を作製するために、ブリッジのないブリッジレスのパターンを形成したパターン露光用フォトマスクを用いて、整面、レジストコートした金属シートに、露光、現像を行った後に、金属シートの片面に粘着テープを貼り、片面エッチングを行い、レジストを剥離、水洗、乾燥した後、部品単体を一個づつ粘着テープから剥がして製品にしている。或いは、もう一つの方法として、金属シートの片面に粘着テープを貼り、金属シートの他方の面をハーフエッチングし、水洗、乾燥後、レジストが付いた状態で、エッチング面に粘着テープを貼り、既に貼ってあるテープを剥がし再度反対側からエッチングし、レジストを剥離することも行われている。
このように、レジストが付いた状態でテープに貼られた個別の製品単体を一個づつテープから剥がし、これを籠、バットのような容器に入れて、剥離液を入れて、レジストを剥離、水洗し、乾燥している(特許文献1)。
Therefore, in order to produce a product without a bridge, after using a photomask for pattern exposure in which a bridgeless pattern without a bridge is formed, a metal sheet that has been flattened and resist-coated is exposed and developed, and then the metal is exposed. Adhesive tape is attached to one side of the sheet, single-sided etching is performed, the resist is peeled off, washed with water and dried, and then the individual parts are peeled off from the adhesive tape one by one to make a product. Alternatively, as another method, an adhesive tape is applied to one side of the metal sheet, the other side of the metal sheet is half-etched, washed with water, dried, and a resist is attached, and an adhesive tape is already applied to the etched surface. In some cases, the applied tape is peeled off and etched again from the opposite side to remove the resist.
In this way, the individual products attached to the tape with the resist attached are peeled off from the tape one by one, put in a container such as a bag or bat, put a stripping solution, strip the resist, and wash with water. And dried (Patent Document 1).
本発明の目的は、製造の作業性と検査の作業性が向上した切り離し時の変形がないブリッジレスのエッチング製品とその製造方法を提供することにある。この際、テープに貼った状態で客先に提供できるものとする。しかも、必要に応じ、任意に単体製品を配置できるものとする。 An object of the present invention is to provide a bridgeless etching product that has improved manufacturing workability and inspection workability and has no deformation at the time of separation, and a manufacturing method thereof. At this time, it can be provided to the customer in a state of being stuck on a tape. Moreover, a single product can be arbitrarily arranged as necessary.
このような目的は、複数のエッチング製品単体を個別に相互に間隔を置いて離間して設けられており、これに、UV粘着消失テープを貼り付けられていることを特徴とするブリッジレスのエッチング製品によって達成される。
この場合、UV粘着消失テープは、長尺のシート状またはロール状であることが好ましい。そして、金属板に、UV粘着消失テープを貼り付け、この金属板の金属面に、フォトレジストをコートし、露光、現像、エッチング剥離を行って、複数の製品単体パターンを相互に間隔をおいて離間して設けたブリッジレスのエッチング製品を得ることが好ましい。また、これをそのまま客先に提供することも好ましい。この場合、長尺のシート状またはロール状であることが好ましい。そして、さらに、外観検査を行うことが好ましい。さらに、UV光を全面照射し、UV粘着消失テープを剥膜して、個別の単体製品を得ることが好ましい。
The purpose of this is to provide a bridgeless etching characterized in that a plurality of etching products are provided separately and spaced apart from each other, and a UV adhesive disappearing tape is attached thereto. Achieved by the product.
In this case, the UV adhesive disappearing tape is preferably in the form of a long sheet or roll. Then, a UV adhesive disappearing tape is attached to the metal plate, a photoresist is coated on the metal surface of the metal plate, exposure, development and etching peeling are performed, and a plurality of single product patterns are spaced from each other. It is preferable to obtain a bridgeless etching product provided at a distance. It is also preferable to provide this to the customer as it is. In this case, a long sheet or roll is preferable. Further, it is preferable to perform an appearance inspection. Furthermore, it is preferable to obtain an individual single product by irradiating the entire surface with UV light and peeling off the UV adhesive disappearing tape.
本発明によれば、金属板にUV粘着消失テープを貼り付けた状態で、レジストコート・露光・現像・エッチング剥離ができるので、金属箔を用いた場合でも変形をおこすことなく製造が可能である。しかも、UV粘着消失テープのエッチング工程でのエッチングおよび剥膜・洗浄・乾燥が、長尺のシートやロールで製造できるので、製造の作業性および製造効率が格段と向上する。さらに、UV光を照射するだけで粘着テープの粘着力が弱くなるか、或いは、消失し無くなって、容易にテープを剥離すことができるので、従来必要とされていた力を加えてのUV粘着消失テープからの製品の剥がしが不要となり、UV消失粘着テープの剥離の際の製品の変形も皆無となる。さらに、UV粘着消失テープに貼り付けた状態で客先に提供できるので、客先でUV照射を行い製品単体を自由に、個片にすることができる。そして、渦巻き型等の種々の形状の製品単体や金属箔ヒーター等の各種用途の製品単体の製造が可能となる。これら、ブリッジという余分な部分が無い分、空間的に余裕ができ、部品配置の自由度が増し、配置される部品・製品のピッチ等を自由に合わせられるのである。また、金属板への製品の画付け数を増やせるので、製品単価を下げられるという効果も発現する。 According to the present invention, resist coating / exposure / development / etching peeling can be performed in a state where a UV adhesive disappearing tape is attached to a metal plate, so that even when a metal foil is used, it can be manufactured without deformation. . In addition, etching and stripping / cleaning / drying in the etching process of the UV adhesive disappearing tape can be produced with a long sheet or roll, so that the workability and production efficiency of the production are remarkably improved. In addition, the adhesive strength of the adhesive tape weakens or disappears only by irradiating UV light, and the tape can be easily peeled off, so UV adhesive with the force required in the past can be applied. There is no need to peel off the product from the disappearing tape, and there is no deformation of the product when the UV disappearing adhesive tape is peeled off. Further, since it can be provided to the customer in a state of being attached to the UV adhesive disappearing tape, the customer can irradiate with UV and the product can be freely separated into individual pieces. In addition, it becomes possible to manufacture a single product of various shapes such as a spiral mold or a single product of various uses such as a metal foil heater. Since there is no extra portion called a bridge, a space can be afforded, the degree of freedom of component arrangement increases, and the pitch of the components / products to be arranged can be freely adjusted. Moreover, since the number of product paintings on the metal plate can be increased, the effect of lowering the unit price of the product is also exhibited.
本発明においては、UV粘着消失テープを用いる。用いるUV粘着消失テープは、通常は、粘着力を有するが、UV光(紫外線光)照射により、粘着力が低下する接着剤を基材上に塗布したものである。例えば、公知のUV硬化型のアクリル樹脂系、エポキシ樹脂系、スチレン−ブタジエン系、SBS又はSIS系、イソプレン系、クロロプレン系、或いは、アクリルブタジエン系等のエラストマー重合体や各種ゴム等の感圧性接着剤を用いることができる。特に、アクリル樹脂系の感圧性の接着剤を用いることが好ましい。この接着剤が粘着力を有する時の初期剥離力は、0.05~30N/mmであることが好ましい。そして、UV照射後には、剥離力が0.05N/mm未満になることが好ましい。粘着消失テープの接着剤の厚さは、0.5〜20μmであることが好ましい。
本発明では、このようなUV粘着消失テープを金属板に貼り付ける。そして、貼り付け体に、公知のフォトエッチング法に従い、金属板表面にフォトレジストコートを行う。その後、公知のフォトエッチング法に従い、露光・現像・エッチング・剥離を施して、エッチング処理が行われて、ブリッジレスのエッチング製品が完成する。このようなエッチング処理によって作成されるエッチング製品は、複数の製品単体を相互に離間して、ブリッジレスの状態で配置されている。この場合、ブリッジレスの製品は、長尺のシート状、或いは、ロール状で、客先に提供されるものである。なお、特開2006−114779号公報には、UV粘着消失テープを金属板に貼り付けてエッチング処理を施す旨が開示されているが、しかし、この公報には、複数の製品単体を配置することも、それらを離間して、ブリッジレスの状態で配置することも、その後、何ら、処理を行わないでシート状、或いは、ロール状で、客先に、製品として提供すること等も、開示も示唆もされていない。このため、本発明による優れた効果についても示唆さへされていない。
そして、この次ぎに、このブリッジレスのエッチング製品は、必要に応じ、外観検査を行う。この外観検査は、出荷元が行う場合と客先で行う場合との双方がある。そして、客先では、UV光を全面照射すればよい。このUV光照射により、容易に一個づつの個別の製品単体を得ることができる。
In the present invention, a UV adhesive disappearing tape is used. The UV adhesive disappearing tape to be used is usually one in which an adhesive having adhesive strength but having an adhesive strength which is reduced by UV light (ultraviolet light) irradiation is applied onto a substrate. For example, known UV-curable acrylic resin, epoxy resin, styrene-butadiene, SBS or SIS, isoprene, chloroprene, acrylic butadiene, etc., pressure-sensitive adhesives such as elastomer polymers and various rubbers An agent can be used. In particular, it is preferable to use an acrylic resin-based pressure-sensitive adhesive. The initial peeling force when this adhesive has adhesive strength is preferably 0.05 to 30 N / mm. And after UV irradiation, it is preferable that peeling force will be less than 0.05 N / mm. It is preferable that the thickness of the adhesive of the tack disappearance tape is 0.5 to 20 μm.
In the present invention, such a UV adhesive disappearing tape is attached to a metal plate. Then, a photoresist coating is applied to the surface of the metal plate according to a known photoetching method. Thereafter, according to a known photoetching method, exposure, development, etching, and peeling are performed and etching is performed to complete a bridgeless etching product. Etched products produced by such an etching process are arranged in a bridgeless state with a plurality of individual products separated from each other. In this case, the bridgeless product is provided to the customer in the form of a long sheet or roll. Japanese Patent Laid-Open No. 2006-114779 discloses that a UV adhesive disappearing tape is attached to a metal plate to perform an etching process. However, in this publication, a plurality of single products are arranged. However, they can be arranged in a bridgeless state apart from each other, or can be provided as a product to the customer in the form of a sheet or roll without any further processing, and also disclosed. There is no suggestion. For this reason, the excellent effect by this invention is not suggested.
Subsequently, the bridgeless etching product is subjected to an appearance inspection as necessary. This appearance inspection is performed both by the shipping company and at the customer. Then, the customer may irradiate the entire surface with UV light. By this UV light irradiation, individual individual products can be easily obtained one by one.
図1には、本発明の第1の実施例が示される。図1に示される例は、金属板の板厚が0.3mm以下と薄い場合の例である。この場合は、図1(a)に示されるように、金属板1の脱脂および整面を行う。次いで、図1(b)に示されるように、この金属板1の一方の面に、UV粘着消失テープ2を貼り付ける。その後、図1(c)に示されるように、金属板の表面にフォトレジスト3をコートする。次に、図1(d)に示されるように、フォトマスク4を配置する。そして、図1(e)に示されるように、露光を行い、さらに、図1(f)に示されるように、現像を行い、図1(g)に示されるように、エッチングが完了して、エッチング製品が完成する。その後、図1(h)に示されるように、必要に応じ外観検査を行い、UV光を照射して、テープを剥膜すればよい。
図2には、本発明の第2の実施例が示される。図2に示される例は、金属板の板厚が0.3mmより大であって、板厚が厚い場合の例である。金属板の板厚が薄い場合は、一方の面からのエッチングで、金属板に貫通パターンを形成できる。しかし、金属板が厚くなると、一方の面側からのエッチングだけでは、精度の良い貫通パターンが得られなくなる。第2の実施例では、金属板が厚い場合でも精度の良いパターンが得られるのである。この場合も、図2(a)に示されるように、金属板1の脱脂および整面を行う。この場合は、次いで、図2(b)に示されるように、この金属板1の両方の面に、フォトレジスト3,3をコートする。次に、図2(c)、(d)に示されるように、露光して、図2(e)に示されるように、現像を行う。その後、図2(f)に示されるように、現像後の一方の面に、UV粘着消失テープ2を貼り付ける。その後、図2(g)に示されるように、片面をエッチングして、その後に、図2(h)に示されるように、エッチング面を剥離した後に、UV照射を行い、UV粘着消失テープを剥膜して、さらに、図2(i)に示されるように、再び、UV粘着消失テープ2を逆側の面に貼り付けて、図2(j)に示されるように、エッチングを行なった後に、レジストを剥膜すれば、エッチング製品が得られる。その後、前記と同様に、必要に応じて図2(k)に示されるように、UV照射して、テープの剥膜を行えばよい。
図3には、本発明の適用例が示される。本発明は、図3(a)に示されるような矩形や図3(b)に示されるようなリング状や、図3(e)に示されるような渦巻き状や図3(d)に示されるようなスパイラル状等種々の形状の単体製品に適用可能である。しかも、UV粘着消失テープへのエッチングは、シート状、ロール状等の長尺シートに行うことができるので、製造上有利である。
FIG. 1 shows a first embodiment of the present invention. The example shown in FIG. 1 is an example where the thickness of the metal plate is as thin as 0.3 mm or less. In this case, the metal plate 1 is degreased and leveled as shown in FIG. Next, as shown in FIG. 1 (b), the UV adhesive disappearing tape 2 is attached to one surface of the metal plate 1. Thereafter, as shown in FIG. 1C, a photoresist 3 is coated on the surface of the metal plate. Next, as shown in FIG. 1D, a photomask 4 is disposed. Then, exposure is performed as shown in FIG. 1 (e), development is further performed as shown in FIG. 1 (f), and etching is completed as shown in FIG. 1 (g). The etching product is completed. Thereafter, as shown in FIG. 1 (h), appearance inspection may be performed as necessary, UV light may be irradiated, and the tape may be peeled off.
FIG. 2 shows a second embodiment of the present invention. The example shown in FIG. 2 is an example where the plate thickness of the metal plate is larger than 0.3 mm and the plate thickness is thick. When the metal plate is thin, a through pattern can be formed in the metal plate by etching from one surface. However, when the metal plate is thick, an accurate penetrating pattern cannot be obtained only by etching from one surface side. In the second embodiment, an accurate pattern can be obtained even when the metal plate is thick. Also in this case, the metal plate 1 is degreased and leveled as shown in FIG. In this case, photoresists 3 and 3 are then coated on both surfaces of the metal plate 1 as shown in FIG. Next, exposure is performed as shown in FIGS. 2C and 2D, and development is performed as shown in FIG. Thereafter, as shown in FIG. 2 (f), the UV adhesive disappearing tape 2 is attached to one surface after development. Thereafter, as shown in FIG. 2 (g), one side is etched, and then, as shown in FIG. 2 (h), after the etched surface is peeled off, UV irradiation is performed to remove the UV adhesive disappearing tape. The film was peeled off, and as shown in FIG. 2 (i), the UV adhesive disappearing tape 2 was again attached to the opposite surface, and etching was performed as shown in FIG. 2 (j). Later, if the resist is stripped, an etched product can be obtained. Thereafter, as described above, as shown in FIG. 2 (k), the tape may be stripped by UV irradiation as necessary.
FIG. 3 shows an application example of the present invention. The present invention can be applied to a rectangle as shown in FIG. 3A, a ring shape as shown in FIG. 3B, a spiral shape as shown in FIG. The present invention can be applied to a single product having various shapes such as a spiral shape. Moreover, the etching to the UV adhesive disappearing tape can be performed on a long sheet such as a sheet or roll, which is advantageous in production.
実施例1
金属板として、厚さ0.05mmのステンレス箔を用意した。このステンレス箔に、上述した図1に示される工程に従い、日立化成工業株式会社製の品番HAE-1606のUV粘着消失テープを貼付けて、これに、フォトレジストコート・露光・現像を行い、間隔0.5mmで、0.5mm幅の形状のストライプをエッチングした。その後、テープを剥膜した。その結果、良好なエッチング製品が完成していた。
このような結果は、図2に示される板厚0.3mm超の場合も同様に実現した。
Example 1
A stainless steel foil having a thickness of 0.05 mm was prepared as a metal plate. In accordance with the process shown in FIG. 1 described above, a UV adhesive disappearance tape of product number HAE-1606 manufactured by Hitachi Chemical Co., Ltd. is applied to this stainless steel foil, and this is subjected to photoresist coating / exposure / development. A stripe with a shape of 0.5 mm and a width of 0.5 mm was etched. Thereafter, the tape was peeled off. As a result, a good etching product was completed.
Such a result was also realized in the case where the plate thickness exceeded 0.3 mm shown in FIG.
製造の作業性と検査の作業性が向上したブリッジレスのエッチング製品を製造するに際し、その作業性と検査の作業性が向上する。この際、テープに貼った状態で客先に提供でき、しかも、必要に応じ、任意に単体製品を配置できる。 When manufacturing a bridgeless etching product with improved manufacturing workability and inspection workability, the workability and inspection workability are improved. At this time, it can be provided to the customer in a state of being affixed to a tape, and a single product can be arbitrarily arranged as required.
1金属板
2UV粘着消失テープ
1 metal plate 2 UV disappearance tape
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CN113774381A (en) * | 2020-08-28 | 2021-12-10 | 株式会社万代 | Method for manufacturing metal member and metal foil |
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