JP2008288243A - 固体撮像装置とその製造方法および撮像装置 - Google Patents
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Abstract
【解決手段】入射光のうちの可視光を受光して光電変換する第1画素11と、前記入射光のうちの可視光と近赤外光を受光して光電変換する第2画素12とを有し、かつ前記第1画素11に入射される入射光の光路の光入射側より、カラーフィルター層61と、赤外光を吸収もしくは反射して可視光を透過する赤外光フィルター層51とを有する固体撮像装置1において、前記赤外光フィルター層51は前記第2画素12に入射される入射光の光路が開口された開口部52を有し、前記開口部52より前記第2画素12方向に入射光を導く光導波路38が形成されていることを特徴とする。
【選択図】図1
Description
Claims (4)
- 入射光のうちの可視光を受光して光電変換する第1画素と、
前記入射光のうちの可視光と近赤外光を受光して光電変換する第2画素とを有し、
かつ前記第1画素に入射される入射光の光路の光入射側より、カラーフィルター層と、赤外光を吸収もしくは反射して可視光を透過する赤外光フィルター層とを有する固体撮像装置において、
前記赤外光フィルター層は前記第2画素に入射される入射光の光路が開口された開口部を有し、
前記開口部より前記第2画素方向に入射光を導く光導波路が形成されている
ことを特徴とする固体撮像装置。 - 前記赤外光フィルター層の下部より前記第1画素方向に通じる光導波路が形成されている
することを特徴とする請求項1記載の固体撮像装置。 - 基板に、入射光のうちの可視光を受光して光電変換する第1画素と、前記入射光のうちの可視光と近赤外光を受光して光電変換する第2画素とが形成され、さらに前記第1画素および前記第2画素を覆う光透過性の絶縁膜が形成された状態で、
前記絶縁膜上の前記第2画素に入射される入射光の光路を除く領域に赤外光を吸収もしくは反射して可視光を透過する赤外光フィルター層を形成する工程と、
前記赤外光フィルター層の前記第2画素に入射される入射光の光路に開口部を形成する工程と、
前記開口部を利用して前記絶縁膜に前記開口部より前記第2画素方向に入射光を導く光導波路を形成する工程とを有する
ことを特徴とする固体撮像装置の製造方法。 - 入射光を集光する集光光学部と、
前記集光光学部で集光した光を受光して光電変換する固体撮像装置と、
光電変換された信号を処理する信号処理部とを備え、
前記固体撮像装置は、
入射光のうちの可視光を受光して光電変換する第1画素と、
前記入射光のうちの可視光と近赤外光を受光して光電変換する第2画素とを有し、
かつ前記第1画素に入射される入射光の光路の光入射側より、カラーフィルター層と、赤外光を吸収もしくは反射して可視光を透過する赤外光フィルター層とを有していて、
前記赤外光フィルター層は前記第2画素に入射される入射光の光路が開口された開口部を有し、
前記開口部より前記第2画素方向に入射光を導く光導波路が形成されている
ことを特徴とする撮像装置。
Priority Applications (5)
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JP2007128992A JP2008288243A (ja) | 2007-05-15 | 2007-05-15 | 固体撮像装置とその製造方法および撮像装置 |
US12/081,531 US20080283728A1 (en) | 2007-05-15 | 2008-04-17 | Solid-state image pickup device and a method of manufacturing the same, and image pickup apparatus |
TW097114690A TWI368319B (en) | 2007-05-15 | 2008-04-22 | Solid-state image pickup device and a method of manufacturing the same, and image pickup apparatus |
KR1020080044373A KR20080101699A (ko) | 2007-05-15 | 2008-05-14 | 고체 촬상 장치와 그 제조 방법 및 촬상 장치 |
CNA2008100992656A CN101308860A (zh) | 2007-05-15 | 2008-05-15 | 固态摄像器件及其制造方法以及摄像设备 |
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JP2007128992A JP2008288243A (ja) | 2007-05-15 | 2007-05-15 | 固体撮像装置とその製造方法および撮像装置 |
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US (1) | US20080283728A1 (ja) |
JP (1) | JP2008288243A (ja) |
KR (1) | KR20080101699A (ja) |
CN (1) | CN101308860A (ja) |
TW (1) | TWI368319B (ja) |
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Also Published As
Publication number | Publication date |
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TWI368319B (en) | 2012-07-11 |
KR20080101699A (ko) | 2008-11-21 |
US20080283728A1 (en) | 2008-11-20 |
TW200849572A (en) | 2008-12-16 |
CN101308860A (zh) | 2008-11-19 |
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