JP2008277824A5 - - Google Patents

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Publication number
JP2008277824A5
JP2008277824A5 JP2008115543A JP2008115543A JP2008277824A5 JP 2008277824 A5 JP2008277824 A5 JP 2008277824A5 JP 2008115543 A JP2008115543 A JP 2008115543A JP 2008115543 A JP2008115543 A JP 2008115543A JP 2008277824 A5 JP2008277824 A5 JP 2008277824A5
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JP
Japan
Prior art keywords
exposure apparatus
gas
specific object
moving body
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008115543A
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English (en)
Japanese (ja)
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JP2008277824A (ja
Filing date
Publication date
Priority claimed from US12/109,069 external-priority patent/US8749753B2/en
Application filed filed Critical
Publication of JP2008277824A publication Critical patent/JP2008277824A/ja
Publication of JP2008277824A5 publication Critical patent/JP2008277824A5/ja
Pending legal-status Critical Current

Links

JP2008115543A 2007-04-27 2008-04-25 移動体装置、露光装置及び光学系ユニット、並びにデバイス製造方法 Pending JP2008277824A (ja)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US92405907P 2007-04-27 2007-04-27
US92406007P 2007-04-27 2007-04-27
US92413707P 2007-05-01 2007-05-01
US92414307P 2007-05-01 2007-05-01
US92414207P 2007-05-01 2007-05-01
US12/109,069 US8749753B2 (en) 2007-04-27 2008-04-24 Movable body apparatus, exposure apparatus and optical system unit, and device manufacturing method

Publications (2)

Publication Number Publication Date
JP2008277824A JP2008277824A (ja) 2008-11-13
JP2008277824A5 true JP2008277824A5 (enExample) 2011-05-26

Family

ID=39638887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008115543A Pending JP2008277824A (ja) 2007-04-27 2008-04-25 移動体装置、露光装置及び光学系ユニット、並びにデバイス製造方法

Country Status (3)

Country Link
US (1) US8749753B2 (enExample)
JP (1) JP2008277824A (enExample)
WO (1) WO2008140027A1 (enExample)

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JP5532175B1 (ja) * 2013-07-02 2014-06-25 日本精工株式会社 テーブル装置、及び搬送装置
CN103592824B (zh) * 2013-11-29 2015-04-22 中国科学院光电技术研究所 一种二自由度高精度大行程气浮工件台
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CN110892333B (zh) * 2017-07-28 2023-05-16 Asml荷兰有限公司 颗粒抑制系统和方法
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KR20240030249A (ko) 2022-08-30 2024-03-07 삼성전자주식회사 조명 보정 장치 및 이를 포함하는 euv 노광 장치

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