JP2008242270A5 - - Google Patents

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Publication number
JP2008242270A5
JP2008242270A5 JP2007085305A JP2007085305A JP2008242270A5 JP 2008242270 A5 JP2008242270 A5 JP 2008242270A5 JP 2007085305 A JP2007085305 A JP 2007085305A JP 2007085305 A JP2007085305 A JP 2007085305A JP 2008242270 A5 JP2008242270 A5 JP 2008242270A5
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JP
Japan
Prior art keywords
external resonator
optical path
laser light
path length
signal
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JP2007085305A
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English (en)
Japanese (ja)
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JP4420051B2 (ja
JP2008242270A (ja
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Priority claimed from JP2007085305A external-priority patent/JP4420051B2/ja
Priority to JP2007085305A priority Critical patent/JP4420051B2/ja
Priority to TW097103263A priority patent/TW200900828A/zh
Priority to US12/012,681 priority patent/US7773643B2/en
Priority to EP08003897.9A priority patent/EP1975681B1/en
Priority to KR1020080028174A priority patent/KR101417061B1/ko
Priority to CN2008100898086A priority patent/CN101276125B/zh
Publication of JP2008242270A publication Critical patent/JP2008242270A/ja
Publication of JP2008242270A5 publication Critical patent/JP2008242270A5/ja
Publication of JP4420051B2 publication Critical patent/JP4420051B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007085305A 2007-03-28 2007-03-28 レーザ光発生装置 Expired - Fee Related JP4420051B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2007085305A JP4420051B2 (ja) 2007-03-28 2007-03-28 レーザ光発生装置
TW097103263A TW200900828A (en) 2007-03-28 2008-01-29 Laser light generating apparatus
US12/012,681 US7773643B2 (en) 2007-03-28 2008-02-05 Laser light generating apparatus
EP08003897.9A EP1975681B1 (en) 2007-03-28 2008-03-03 Laser light generating apparatus
KR1020080028174A KR101417061B1 (ko) 2007-03-28 2008-03-27 레이저광 발생 장치
CN2008100898086A CN101276125B (zh) 2007-03-28 2008-03-28 激光发生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007085305A JP4420051B2 (ja) 2007-03-28 2007-03-28 レーザ光発生装置

Publications (3)

Publication Number Publication Date
JP2008242270A JP2008242270A (ja) 2008-10-09
JP2008242270A5 true JP2008242270A5 (enExample) 2008-11-20
JP4420051B2 JP4420051B2 (ja) 2010-02-24

Family

ID=39365817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007085305A Expired - Fee Related JP4420051B2 (ja) 2007-03-28 2007-03-28 レーザ光発生装置

Country Status (6)

Country Link
US (1) US7773643B2 (enExample)
EP (1) EP1975681B1 (enExample)
JP (1) JP4420051B2 (enExample)
KR (1) KR101417061B1 (enExample)
CN (1) CN101276125B (enExample)
TW (1) TW200900828A (enExample)

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US20100253769A1 (en) * 2008-09-04 2010-10-07 Laser Light Engines Optical System and Assembly Method
US8830564B2 (en) * 2009-01-23 2014-09-09 Ipg Photonics Corporation Apparatus for controlling resonant conditions within nonlinear resonator
US10678061B2 (en) 2009-09-03 2020-06-09 Laser Light Engines, Inc. Low etendue illumination
DE102010022585B4 (de) * 2010-06-03 2012-03-08 Bundesrepublik Deutschland, vertreten durch das Bundesministerium für Wirtschaft und Technologie, dieses vertreten durch den Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zum Erzeugen von phasenkohärenten Lichtfeldern mit vorgebbarem Wert ihrer Frequenz und optischer Frequenz-Synthesizer
KR101047171B1 (ko) 2011-01-11 2011-07-07 김영태 엔코더용 레이저조사장치
JP6166032B2 (ja) 2012-11-06 2017-07-19 浜松ホトニクス株式会社 半導体デバイス検査装置及び半導体デバイス検査方法
US9509112B2 (en) 2013-06-11 2016-11-29 Kla-Tencor Corporation CW DUV laser with improved stability
US9293882B2 (en) 2013-09-10 2016-03-22 Kla-Tencor Corporation Low noise, high stability, deep ultra-violet, continuous wave laser
JP6508058B2 (ja) * 2013-12-20 2019-05-08 ソニー株式会社 光源装置及び波長変換方法
CN103837166B (zh) * 2014-03-03 2016-01-20 中国人民解放军国防科学技术大学 光程差匹配的远程光纤干涉系统相位噪声抑制方法与装置
EP2990866A1 (en) * 2014-08-25 2016-03-02 Ludwig-Maximilians-Universität München Method and device for cavity-enhanced broadband intrapulse difference frequency generation
FR3047118B1 (fr) * 2016-01-22 2018-03-02 Centre National De La Recherche Scientifique - Cnrs - Dispositif de generation d’un faisceau de photons polychromatique et spatialement autoadapte
US10175555B2 (en) 2017-01-03 2019-01-08 KLA—Tencor Corporation 183 nm CW laser and inspection system
CN112005547B (zh) * 2018-04-26 2022-09-13 索尼半导体解决方案公司 光学相位控制装置和显示装置
KR102068125B1 (ko) * 2018-11-28 2020-01-20 주식회사 한화 파장 선택 장치
CN109346918B (zh) * 2018-12-26 2020-09-15 吉林大学 一种便携式阻抗自适应激光二极管驱动模块
KR102255408B1 (ko) * 2019-12-13 2021-05-24 주식회사 루트로닉 레이저 장치
US20240012203A1 (en) * 2020-11-19 2024-01-11 Telefonaktiebolaget Lm Ericsson (Publ) Optical filter and methods
CN114578323B (zh) * 2020-12-01 2025-05-13 上海禾赛科技有限公司 注入锁定控制方法、注入锁定控制装置及激光雷达
CN113189768B (zh) * 2021-04-12 2022-11-11 山西大学 一种提取真空边模的装置和方法
JP7192156B2 (ja) * 2021-05-21 2022-12-19 レーザーテック株式会社 光源装置及び検査装置
KR102773663B1 (ko) * 2022-12-23 2025-02-27 한국과학기술연구원 레이저 장치 및 그를 포함하는 레이저 시스템
CN116380424A (zh) * 2023-03-24 2023-07-04 浙江可胜技术股份有限公司 镜场反射光线大气传输损失率测量系统、方法及控制系统

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JPH07154381A (ja) * 1993-11-30 1995-06-16 Hitachi Ltd データ転送装置
JPH08116122A (ja) * 1994-10-18 1996-05-07 Sony Corp 連続発振紫外線レーザー光発生装置
JP3514073B2 (ja) * 1997-06-10 2004-03-31 株式会社ニコン 紫外レーザ装置及び半導体露光装置
JP3997450B2 (ja) * 1998-03-13 2007-10-24 ソニー株式会社 波長変換装置
JPH11317567A (ja) 1998-05-01 1999-11-16 Sony Corp レーザー光発生方法及びその装置
JP2001300301A (ja) 2000-04-24 2001-10-30 Nitto Denko Corp ガス吸着体及びその使用方法
JP2002099007A (ja) * 2000-09-21 2002-04-05 Sony Corp レーザ光発生装置およびそれを用いた光学装置
WO2002075874A1 (en) * 2001-03-16 2002-09-26 Intel Corporation (A Corporation Of Delaware) Method and apparatus for tuning a laser
JP3885511B2 (ja) 2001-04-11 2007-02-21 ソニー株式会社 レーザー光発生装置及び方法
JP3885529B2 (ja) 2001-08-06 2007-02-21 ソニー株式会社 レーザー光発生装置
US7110426B2 (en) * 2001-08-06 2006-09-19 Sony Corporation Laser beam generating apparatus
DE102005015497B4 (de) 2005-03-31 2008-10-16 Nlg-New Laser Generation Gmbh Stabilisierung kaskadierter optischer Resonatoren

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