JP2008218565A - 半導体装置、ならびに外観検査方法および外観検査装置 - Google Patents
半導体装置、ならびに外観検査方法および外観検査装置 Download PDFInfo
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- JP2008218565A JP2008218565A JP2007051704A JP2007051704A JP2008218565A JP 2008218565 A JP2008218565 A JP 2008218565A JP 2007051704 A JP2007051704 A JP 2007051704A JP 2007051704 A JP2007051704 A JP 2007051704A JP 2008218565 A JP2008218565 A JP 2008218565A
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- H01L23/00—Details of semiconductor or other solid state devices
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- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/585—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries comprising conductive layers or plates or strips or rods or rings
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- G—PHYSICS
- G01—MEASURING; TESTING
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- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
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- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
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- H01L2223/5442—Marks applied to semiconductor devices or parts comprising non digital, non alphanumeric information, e.g. symbols
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- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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Abstract
【解決手段】半導体装置1は、回路形成領域90を有する半導体装置であって、配線層3中に設けられ、回路形成領域90を包囲するシールリング16と、配線層3中に設けられ、シールリング16の外側に位置するダミーメタルビア15と、を備えている。シールリング16の延在方向に垂直な断面において、ダミーメタルビア15の幅は、シールリング16の幅よりも小さい。
【選択図】図1
Description
が実現される。
2 半導体基板
3 配線層
7 ポリイミド膜
12 クラック
15 ダミーメタルビア
16 シールリング
17 十字マーク
18 外観検査装置
19 カメラ
20 全焦点画像
21 変更手段
22 画像処理手段
90 回路形成領域
Claims (9)
- 回路形成領域を有する半導体装置であって、
配線層中に設けられ、前記回路形成領域を包囲するガードリングと、
前記配線層中に設けられ、前記ガードリングの外側に位置するダミーメタルビアと、を備え、
前記ガードリングの延在方向に垂直な断面において、前記ダミーメタルビアの幅は、前記ガードリングの幅よりも小さいことを特徴とする半導体装置。 - 請求項1に記載の半導体装置において、
前記ダミーメタルビアは、前記回路形成領域の周囲の全体に渡って設けられている半導体装置。 - 請求項1または2に記載の半導体装置において、
前記ダミーメタルビアは、Al、CuまたはWによって構成されている半導体装置。 - 請求項1乃至3いずれかに記載の半導体装置において、
前記ダミーメタルビアは、ダマシン構造を有している半導体装置。 - 請求項1乃至4いずれかに記載の半導体装置の外観を検査する方法であって、
前記ダミーメタルビアの変位を確認するステップを含むことを特徴とする外観検査方法。 - 請求項5に記載の外観検査方法において、
前記ダミーメタルビアの変位の確認は、前記半導体装置の上方からの全焦点撮影方式により実行される外観検査方法。 - 請求項1乃至4いずれかに記載の半導体装置の外観を検査する装置であって、
前記ダミーメタルビアの変位を確認する確認手段を備えることを特徴とする外観検査装置。 - 請求項7に記載の外観検査装置において、
前記確認手段は、前記半導体装置の上方からの全焦点撮影方式により、前記ダミーメタルビアの変位を確認する外観検査装置。 - 請求項8に記載の外観検査装置において、
前記確認手段は、
前記ダミーメタルビアを撮像するカメラと、
前記カメラと前記半導体装置との間の距離を変更する変更手段と、
前記変更手段により変更された複数の相異なる前記距離で、前記カメラにより撮像された前記ダミーメタルビアの画像から、前記ダミーメタルビアの全焦点画像を生成する画像処理手段と、を含む外観検査装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007051704A JP5027529B2 (ja) | 2007-03-01 | 2007-03-01 | 半導体装置、ならびに外観検査方法 |
US12/040,950 US7919869B2 (en) | 2007-03-01 | 2008-03-03 | Semiconductor device and method of visual inspection and apparatus for visual inspection |
US13/030,717 US8211718B2 (en) | 2007-03-01 | 2011-02-18 | Semiconductor device and method of visual inspection and apparatus for visual inspection |
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JP2007051704A JP5027529B2 (ja) | 2007-03-01 | 2007-03-01 | 半導体装置、ならびに外観検査方法 |
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JP2008218565A true JP2008218565A (ja) | 2008-09-18 |
JP5027529B2 JP5027529B2 (ja) | 2012-09-19 |
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JP2007051704A Expired - Fee Related JP5027529B2 (ja) | 2007-03-01 | 2007-03-01 | 半導体装置、ならびに外観検査方法 |
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JP (1) | JP5027529B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011134893A (ja) * | 2009-12-24 | 2011-07-07 | Renesas Electronics Corp | 半導体装置 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7951704B2 (en) * | 2008-05-06 | 2011-05-31 | Spansion Llc | Memory device peripheral interconnects and method of manufacturing |
US8669597B2 (en) | 2008-05-06 | 2014-03-11 | Spansion Llc | Memory device interconnects and method of manufacturing |
CN102668050B (zh) * | 2009-11-25 | 2015-12-02 | 英特尔公司 | 穿硅过孔保护环 |
US9269676B2 (en) | 2009-11-25 | 2016-02-23 | Intel Corporation | Through silicon via guard ring |
WO2013100897A1 (en) * | 2011-12-27 | 2013-07-04 | Intel Corporation | Damage monitor structure for through-silicon via (tsv) arrays |
CN102866161A (zh) * | 2012-09-04 | 2013-01-09 | 华南理工大学 | 一种smt模板视觉检测装置 |
EP3002786B1 (en) * | 2014-10-03 | 2021-05-26 | Sensirion AG | Semiconductor chip |
US9594021B2 (en) * | 2015-08-12 | 2017-03-14 | National Applied Research Laboratories | Apparatus of detecting transmittance of trench on infrared-transmittable material and method thereof |
KR20170051085A (ko) * | 2015-11-02 | 2017-05-11 | 삼성전자주식회사 | 3차원 크랙 검출 구조물을 포함하는 반도체 장치 및 크랙 검출 방법 |
KR102385105B1 (ko) * | 2018-02-27 | 2022-04-08 | 삼성전자주식회사 | 크랙 검출용 칩 및 이를 이용한 크랙 검출 방법 |
US11300610B1 (en) | 2020-12-30 | 2022-04-12 | Winbond Electronics Corp. | Integrated circuit, crack status detector and crack status detection method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2004097917A1 (ja) * | 2003-04-30 | 2004-11-11 | Fujitsu Limited | 半導体装置の製造方法、半導体ウエハおよび半導体装置 |
JP2007500944A (ja) * | 2003-07-28 | 2007-01-18 | インターナショナル・ビジネス・マシーンズ・コーポレーション | Icチップ用のクラック・ストップおよびそれを形成するための方法(低k誘電体用のクラック・ストップ) |
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JP2004153015A (ja) * | 2002-10-30 | 2004-05-27 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2005260059A (ja) | 2004-03-12 | 2005-09-22 | Renesas Technology Corp | 半導体装置、半導体ウェハおよび半導体装置の製造方法 |
JP2005277338A (ja) | 2004-03-26 | 2005-10-06 | Nec Electronics Corp | 半導体装置及びその検査方法 |
DE102006004428B4 (de) * | 2006-01-31 | 2017-12-21 | Globalfoundries Inc. | Technik zum zerstörungsfreien Überwachen der Metallablösung in Halbleiterbauelementen |
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2007
- 2007-03-01 JP JP2007051704A patent/JP5027529B2/ja not_active Expired - Fee Related
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2008
- 2008-03-03 US US12/040,950 patent/US7919869B2/en not_active Expired - Fee Related
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2011
- 2011-02-18 US US13/030,717 patent/US8211718B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004097917A1 (ja) * | 2003-04-30 | 2004-11-11 | Fujitsu Limited | 半導体装置の製造方法、半導体ウエハおよび半導体装置 |
JP2007500944A (ja) * | 2003-07-28 | 2007-01-18 | インターナショナル・ビジネス・マシーンズ・コーポレーション | Icチップ用のクラック・ストップおよびそれを形成するための方法(低k誘電体用のクラック・ストップ) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011134893A (ja) * | 2009-12-24 | 2011-07-07 | Renesas Electronics Corp | 半導体装置 |
Also Published As
Publication number | Publication date |
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US20080211109A1 (en) | 2008-09-04 |
JP5027529B2 (ja) | 2012-09-19 |
US7919869B2 (en) | 2011-04-05 |
US20110141268A1 (en) | 2011-06-16 |
US8211718B2 (en) | 2012-07-03 |
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