JP2008218254A5 - - Google Patents

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Publication number
JP2008218254A5
JP2008218254A5 JP2007055181A JP2007055181A JP2008218254A5 JP 2008218254 A5 JP2008218254 A5 JP 2008218254A5 JP 2007055181 A JP2007055181 A JP 2007055181A JP 2007055181 A JP2007055181 A JP 2007055181A JP 2008218254 A5 JP2008218254 A5 JP 2008218254A5
Authority
JP
Japan
Prior art keywords
plasma
electrode
opening
processing apparatus
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007055181A
Other languages
English (en)
Japanese (ja)
Other versions
JP5088667B2 (ja
JP2008218254A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007055181A priority Critical patent/JP5088667B2/ja
Priority claimed from JP2007055181A external-priority patent/JP5088667B2/ja
Publication of JP2008218254A publication Critical patent/JP2008218254A/ja
Publication of JP2008218254A5 publication Critical patent/JP2008218254A5/ja
Application granted granted Critical
Publication of JP5088667B2 publication Critical patent/JP5088667B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007055181A 2007-03-06 2007-03-06 プラズマ処理装置 Expired - Fee Related JP5088667B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007055181A JP5088667B2 (ja) 2007-03-06 2007-03-06 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007055181A JP5088667B2 (ja) 2007-03-06 2007-03-06 プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2008218254A JP2008218254A (ja) 2008-09-18
JP2008218254A5 true JP2008218254A5 (enExample) 2010-04-22
JP5088667B2 JP5088667B2 (ja) 2012-12-05

Family

ID=39838045

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007055181A Expired - Fee Related JP5088667B2 (ja) 2007-03-06 2007-03-06 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP5088667B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012079429A (ja) * 2010-09-30 2012-04-19 Ngk Insulators Ltd プラズマ処理装置
EP2960358A1 (en) * 2014-06-25 2015-12-30 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Plasma source and surface treatment method
EP3214204B1 (en) * 2014-10-29 2024-11-27 TMEIC Corporation Gas jetting device
DE112019000174B4 (de) * 2019-02-13 2024-02-01 Toshiba Mitsubishi-Electric Industrial Systems Corporation Aktivgas-Erzeugungsvorrichtung
CN119571293B (zh) * 2024-12-17 2025-07-29 佛山市屹博电子科技有限公司 一种等离子体射流喷头及等离子体增强化学气相沉积设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6228084A (ja) * 1985-07-30 1987-02-06 Akira Kanekawa プラズマ・ジエツト・ト−チ
WO1998040533A1 (fr) * 1997-03-13 1998-09-17 Komatsu Ltd. Dispositif et procede de traitement de surface
US5893985A (en) * 1997-03-14 1999-04-13 The Lincoln Electric Company Plasma arc torch
JPH11354290A (ja) * 1998-06-08 1999-12-24 Ishikawajima Harima Heavy Ind Co Ltd 微粉炭着火用プラズマトーチ
JP2005285520A (ja) * 2004-03-29 2005-10-13 Hiroshi Takigawa プラズマ発生用電極、プラズマ発生装置及びプラズマ処理装置

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