JP2008196485A - 薄膜ポンプ及び薄膜ポンプを備える装置 - Google Patents
薄膜ポンプ及び薄膜ポンプを備える装置 Download PDFInfo
- Publication number
- JP2008196485A JP2008196485A JP2008015829A JP2008015829A JP2008196485A JP 2008196485 A JP2008196485 A JP 2008196485A JP 2008015829 A JP2008015829 A JP 2008015829A JP 2008015829 A JP2008015829 A JP 2008015829A JP 2008196485 A JP2008196485 A JP 2008196485A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- water supply
- hollow
- pump according
- hollow body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW096104724A TW200833950A (en) | 2007-02-09 | 2007-02-09 | A thin film pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2008196485A true JP2008196485A (ja) | 2008-08-28 |
Family
ID=39597728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008015829A Pending JP2008196485A (ja) | 2007-02-09 | 2008-01-28 | 薄膜ポンプ及び薄膜ポンプを備える装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2008196485A (enExample) |
| DE (1) | DE102007060026A1 (enExample) |
| TW (1) | TW200833950A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102797667A (zh) * | 2012-09-01 | 2012-11-28 | 安徽理工大学 | 一种基于超磁致伸缩薄膜驱动器的微型泵 |
| CN112049781A (zh) * | 2020-09-29 | 2020-12-08 | 长春工业大学 | 一种具有放大机构的被动阀压电泵 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI384738B (zh) * | 2009-08-10 | 2013-02-01 | Pegatron Corp | 壓電式幫浦 |
| TWI412664B (zh) * | 2010-10-12 | 2013-10-21 | Micorjet Technology Co Ltd | 流體輸送裝置 |
| CN107420291B (zh) * | 2017-07-13 | 2019-04-23 | 西安电子科技大学 | 一种基于可变弹性模量的复合薄膜压电微泵 |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177654A (ja) * | 1986-10-14 | 1988-07-21 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 半中間調像を記録する方法 |
| JPS6419184A (en) * | 1987-07-13 | 1989-01-23 | Nec Corp | Piezoelectric type micro-pump |
| JPH03149370A (ja) * | 1989-11-07 | 1991-06-25 | Toshiba Corp | 圧電振動体およびそれを用いた圧電式ポンプ |
| JPH05263763A (ja) * | 1992-03-19 | 1993-10-12 | Hitachi Ltd | 圧電ポンプおよびその運転方法 |
| JPH09137754A (ja) * | 1995-11-15 | 1997-05-27 | Isuzu Motors Ltd | 過給機を備えた内燃機関の排気ガス再循環装置 |
| JPH09253470A (ja) * | 1996-03-25 | 1997-09-30 | Able Kk | 流れ発生装置、これを用いた推進装置、反応槽及び培養槽 |
| JP2005283331A (ja) * | 2004-03-30 | 2005-10-13 | Pentax Corp | マイクロチップ及びマイクロポンプ |
| JP2006097784A (ja) * | 2004-09-29 | 2006-04-13 | Ckd Corp | 空気圧制御装置及び電磁弁マニホールド |
-
2007
- 2007-02-09 TW TW096104724A patent/TW200833950A/zh not_active IP Right Cessation
- 2007-12-13 DE DE102007060026A patent/DE102007060026A1/de not_active Withdrawn
-
2008
- 2008-01-28 JP JP2008015829A patent/JP2008196485A/ja active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63177654A (ja) * | 1986-10-14 | 1988-07-21 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 半中間調像を記録する方法 |
| JPS6419184A (en) * | 1987-07-13 | 1989-01-23 | Nec Corp | Piezoelectric type micro-pump |
| JPH03149370A (ja) * | 1989-11-07 | 1991-06-25 | Toshiba Corp | 圧電振動体およびそれを用いた圧電式ポンプ |
| JPH05263763A (ja) * | 1992-03-19 | 1993-10-12 | Hitachi Ltd | 圧電ポンプおよびその運転方法 |
| JPH09137754A (ja) * | 1995-11-15 | 1997-05-27 | Isuzu Motors Ltd | 過給機を備えた内燃機関の排気ガス再循環装置 |
| JPH09253470A (ja) * | 1996-03-25 | 1997-09-30 | Able Kk | 流れ発生装置、これを用いた推進装置、反応槽及び培養槽 |
| JP2005283331A (ja) * | 2004-03-30 | 2005-10-13 | Pentax Corp | マイクロチップ及びマイクロポンプ |
| JP2006097784A (ja) * | 2004-09-29 | 2006-04-13 | Ckd Corp | 空気圧制御装置及び電磁弁マニホールド |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102797667A (zh) * | 2012-09-01 | 2012-11-28 | 安徽理工大学 | 一种基于超磁致伸缩薄膜驱动器的微型泵 |
| CN112049781A (zh) * | 2020-09-29 | 2020-12-08 | 长春工业大学 | 一种具有放大机构的被动阀压电泵 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102007060026A1 (de) | 2008-08-14 |
| TWI326742B (enExample) | 2010-07-01 |
| TW200833950A (en) | 2008-08-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101028 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110404 |