JPS6419184A - Piezoelectric type micro-pump - Google Patents

Piezoelectric type micro-pump

Info

Publication number
JPS6419184A
JPS6419184A JP17510987A JP17510987A JPS6419184A JP S6419184 A JPS6419184 A JP S6419184A JP 17510987 A JP17510987 A JP 17510987A JP 17510987 A JP17510987 A JP 17510987A JP S6419184 A JPS6419184 A JP S6419184A
Authority
JP
Japan
Prior art keywords
fluid
bimorphs
pump
providing
need
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17510987A
Other languages
Japanese (ja)
Other versions
JP2600180B2 (en
Inventor
Teruyuki Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62175109A priority Critical patent/JP2600180B2/en
Publication of JPS6419184A publication Critical patent/JPS6419184A/en
Application granted granted Critical
Publication of JP2600180B2 publication Critical patent/JP2600180B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)

Abstract

PURPOSE:To eliminate the need for using a check valve by providing two or more bimorph forming parts which are partly formed in a fixed condition in a fluid passage so as to cause displacement in directions in which a fluid feeding part and a fluid discharging port exist. CONSTITUTION:Two independent bimorphs 13, 14 in each of which electrodes 12 are formed in three layers are provided in a fluid passage 11. A fluid feeding port 15 and a fluid discharging port 16 are provided on the sides to which the bimorphs 13, 14 are displaced. Hence, the bimorphs 13 and 14 can be independently driven, and with difference in time between the two. Thereby, a fluid can be made flow in a defined direction, entirely eliminating the need for providing a valve for preventing backward flow.
JP62175109A 1987-07-13 1987-07-13 Piezoelectric micro pump Expired - Lifetime JP2600180B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62175109A JP2600180B2 (en) 1987-07-13 1987-07-13 Piezoelectric micro pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62175109A JP2600180B2 (en) 1987-07-13 1987-07-13 Piezoelectric micro pump

Publications (2)

Publication Number Publication Date
JPS6419184A true JPS6419184A (en) 1989-01-23
JP2600180B2 JP2600180B2 (en) 1997-04-16

Family

ID=15990422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62175109A Expired - Lifetime JP2600180B2 (en) 1987-07-13 1987-07-13 Piezoelectric micro pump

Country Status (1)

Country Link
JP (1) JP2600180B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008196485A (en) * 2007-02-09 2008-08-28 Cooler Master Co Ltd Thin film pump and device equipped therewith
WO2013084579A1 (en) * 2011-12-09 2013-06-13 オムロンヘルスケア株式会社 Electronic sphygmomanometer
WO2019130754A1 (en) * 2017-12-26 2019-07-04 株式会社村田製作所 Pump device
CN112177903A (en) * 2020-09-29 2021-01-05 长春工业大学 Rectangular cavity flexible membrane double-vibrator valveless piezoelectric pump
CN112196769A (en) * 2020-09-29 2021-01-08 长春工业大学 Valveless piezoelectric pump with pectoral fin imitating structure
CN113187702A (en) * 2021-05-11 2021-07-30 上海芯物科技有限公司 Valveless piezoelectric pump and manufacturing method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541050A (en) * 1977-04-22 1979-01-06 Rca Corp Light control device using bimorph element
JPS6291676A (en) * 1985-10-15 1987-04-27 Nec Corp Micropump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541050A (en) * 1977-04-22 1979-01-06 Rca Corp Light control device using bimorph element
JPS6291676A (en) * 1985-10-15 1987-04-27 Nec Corp Micropump

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008196485A (en) * 2007-02-09 2008-08-28 Cooler Master Co Ltd Thin film pump and device equipped therewith
WO2013084579A1 (en) * 2011-12-09 2013-06-13 オムロンヘルスケア株式会社 Electronic sphygmomanometer
JP2013121370A (en) * 2011-12-09 2013-06-20 Omron Healthcare Co Ltd Electronic sphygmomanometer
US9723999B2 (en) 2011-12-09 2017-08-08 Omron Healthcare Co., Ltd. Electronic blood pressure meter
WO2019130754A1 (en) * 2017-12-26 2019-07-04 株式会社村田製作所 Pump device
CN111480005A (en) * 2017-12-26 2020-07-31 株式会社村田制作所 Pump device
JPWO2019130754A1 (en) * 2017-12-26 2020-11-19 株式会社村田製作所 Pump device
US11959472B2 (en) 2017-12-26 2024-04-16 Murata Manufacturing Co., Ltd. Piezoelectric pump device
CN112177903A (en) * 2020-09-29 2021-01-05 长春工业大学 Rectangular cavity flexible membrane double-vibrator valveless piezoelectric pump
CN112196769A (en) * 2020-09-29 2021-01-08 长春工业大学 Valveless piezoelectric pump with pectoral fin imitating structure
CN113187702A (en) * 2021-05-11 2021-07-30 上海芯物科技有限公司 Valveless piezoelectric pump and manufacturing method thereof

Also Published As

Publication number Publication date
JP2600180B2 (en) 1997-04-16

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