JPS6419184A - Piezoelectric type micro-pump - Google Patents
Piezoelectric type micro-pumpInfo
- Publication number
- JPS6419184A JPS6419184A JP17510987A JP17510987A JPS6419184A JP S6419184 A JPS6419184 A JP S6419184A JP 17510987 A JP17510987 A JP 17510987A JP 17510987 A JP17510987 A JP 17510987A JP S6419184 A JPS6419184 A JP S6419184A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- bimorphs
- pump
- providing
- need
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Reciprocating Pumps (AREA)
Abstract
PURPOSE:To eliminate the need for using a check valve by providing two or more bimorph forming parts which are partly formed in a fixed condition in a fluid passage so as to cause displacement in directions in which a fluid feeding part and a fluid discharging port exist. CONSTITUTION:Two independent bimorphs 13, 14 in each of which electrodes 12 are formed in three layers are provided in a fluid passage 11. A fluid feeding port 15 and a fluid discharging port 16 are provided on the sides to which the bimorphs 13, 14 are displaced. Hence, the bimorphs 13 and 14 can be independently driven, and with difference in time between the two. Thereby, a fluid can be made flow in a defined direction, entirely eliminating the need for providing a valve for preventing backward flow.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62175109A JP2600180B2 (en) | 1987-07-13 | 1987-07-13 | Piezoelectric micro pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62175109A JP2600180B2 (en) | 1987-07-13 | 1987-07-13 | Piezoelectric micro pump |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6419184A true JPS6419184A (en) | 1989-01-23 |
JP2600180B2 JP2600180B2 (en) | 1997-04-16 |
Family
ID=15990422
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62175109A Expired - Lifetime JP2600180B2 (en) | 1987-07-13 | 1987-07-13 | Piezoelectric micro pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2600180B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008196485A (en) * | 2007-02-09 | 2008-08-28 | Cooler Master Co Ltd | Thin film pump and device equipped therewith |
WO2013084579A1 (en) * | 2011-12-09 | 2013-06-13 | オムロンヘルスケア株式会社 | Electronic sphygmomanometer |
WO2019130754A1 (en) * | 2017-12-26 | 2019-07-04 | 株式会社村田製作所 | Pump device |
CN112177903A (en) * | 2020-09-29 | 2021-01-05 | 长春工业大学 | Rectangular cavity flexible membrane double-vibrator valveless piezoelectric pump |
CN112196769A (en) * | 2020-09-29 | 2021-01-08 | 长春工业大学 | Valveless piezoelectric pump with pectoral fin imitating structure |
CN113187702A (en) * | 2021-05-11 | 2021-07-30 | 上海芯物科技有限公司 | Valveless piezoelectric pump and manufacturing method thereof |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541050A (en) * | 1977-04-22 | 1979-01-06 | Rca Corp | Light control device using bimorph element |
JPS6291676A (en) * | 1985-10-15 | 1987-04-27 | Nec Corp | Micropump |
-
1987
- 1987-07-13 JP JP62175109A patent/JP2600180B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541050A (en) * | 1977-04-22 | 1979-01-06 | Rca Corp | Light control device using bimorph element |
JPS6291676A (en) * | 1985-10-15 | 1987-04-27 | Nec Corp | Micropump |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008196485A (en) * | 2007-02-09 | 2008-08-28 | Cooler Master Co Ltd | Thin film pump and device equipped therewith |
WO2013084579A1 (en) * | 2011-12-09 | 2013-06-13 | オムロンヘルスケア株式会社 | Electronic sphygmomanometer |
JP2013121370A (en) * | 2011-12-09 | 2013-06-20 | Omron Healthcare Co Ltd | Electronic sphygmomanometer |
US9723999B2 (en) | 2011-12-09 | 2017-08-08 | Omron Healthcare Co., Ltd. | Electronic blood pressure meter |
WO2019130754A1 (en) * | 2017-12-26 | 2019-07-04 | 株式会社村田製作所 | Pump device |
CN111480005A (en) * | 2017-12-26 | 2020-07-31 | 株式会社村田制作所 | Pump device |
JPWO2019130754A1 (en) * | 2017-12-26 | 2020-11-19 | 株式会社村田製作所 | Pump device |
US11959472B2 (en) | 2017-12-26 | 2024-04-16 | Murata Manufacturing Co., Ltd. | Piezoelectric pump device |
CN112177903A (en) * | 2020-09-29 | 2021-01-05 | 长春工业大学 | Rectangular cavity flexible membrane double-vibrator valveless piezoelectric pump |
CN112196769A (en) * | 2020-09-29 | 2021-01-08 | 长春工业大学 | Valveless piezoelectric pump with pectoral fin imitating structure |
CN113187702A (en) * | 2021-05-11 | 2021-07-30 | 上海芯物科技有限公司 | Valveless piezoelectric pump and manufacturing method thereof |
Also Published As
Publication number | Publication date |
---|---|
JP2600180B2 (en) | 1997-04-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080129 Year of fee payment: 11 |