TW200833950A - A thin film pump - Google Patents

A thin film pump

Info

Publication number
TW200833950A
TW200833950A TW096104724A TW96104724A TW200833950A TW 200833950 A TW200833950 A TW 200833950A TW 096104724 A TW096104724 A TW 096104724A TW 96104724 A TW96104724 A TW 96104724A TW 200833950 A TW200833950 A TW 200833950A
Authority
TW
Taiwan
Prior art keywords
thin film
pump
cavity
working fluid
primary
Prior art date
Application number
TW096104724A
Other languages
English (en)
Chinese (zh)
Other versions
TWI326742B (enExample
Inventor
xiao-kang Ma
Chang-Hung Peng
Bo-Ren Hou
Hong-Yun Wu
Ming-Chien Kuo
Original Assignee
Cooler Master Co Ltd
xiao-kang Ma
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cooler Master Co Ltd, xiao-kang Ma filed Critical Cooler Master Co Ltd
Priority to TW096104724A priority Critical patent/TW200833950A/zh
Priority to DE102007060026A priority patent/DE102007060026A1/de
Priority to JP2008015829A priority patent/JP2008196485A/ja
Publication of TW200833950A publication Critical patent/TW200833950A/zh
Application granted granted Critical
Publication of TWI326742B publication Critical patent/TWI326742B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
TW096104724A 2007-02-09 2007-02-09 A thin film pump TW200833950A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW096104724A TW200833950A (en) 2007-02-09 2007-02-09 A thin film pump
DE102007060026A DE102007060026A1 (de) 2007-02-09 2007-12-13 Membranpumpe und Vorrichtung mit einer solchen
JP2008015829A JP2008196485A (ja) 2007-02-09 2008-01-28 薄膜ポンプ及び薄膜ポンプを備える装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096104724A TW200833950A (en) 2007-02-09 2007-02-09 A thin film pump

Publications (2)

Publication Number Publication Date
TW200833950A true TW200833950A (en) 2008-08-16
TWI326742B TWI326742B (enExample) 2010-07-01

Family

ID=39597728

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104724A TW200833950A (en) 2007-02-09 2007-02-09 A thin film pump

Country Status (3)

Country Link
JP (1) JP2008196485A (enExample)
DE (1) DE102007060026A1 (enExample)
TW (1) TW200833950A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384738B (zh) * 2009-08-10 2013-02-01 Pegatron Corp 壓電式幫浦

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI412664B (zh) * 2010-10-12 2013-10-21 Micorjet Technology Co Ltd 流體輸送裝置
CN102797667A (zh) * 2012-09-01 2012-11-28 安徽理工大学 一种基于超磁致伸缩薄膜驱动器的微型泵
CN107420291B (zh) * 2017-07-13 2019-04-23 西安电子科技大学 一种基于可变弹性模量的复合薄膜压电微泵
CN112049781A (zh) * 2020-09-29 2020-12-08 长春工业大学 一种具有放大机构的被动阀压电泵

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3634939A1 (de) * 1986-10-14 1988-04-28 Du Pont Deutschland Verfahren zum aufzeichnen von quasihalbtonbildern
JP2600180B2 (ja) * 1987-07-13 1997-04-16 日本電気株式会社 圧電型マイクロポンプ
JPH03149370A (ja) * 1989-11-07 1991-06-25 Toshiba Corp 圧電振動体およびそれを用いた圧電式ポンプ
JPH05263763A (ja) * 1992-03-19 1993-10-12 Hitachi Ltd 圧電ポンプおよびその運転方法
JP3663704B2 (ja) * 1995-11-15 2005-06-22 いすゞ自動車株式会社 過給機を備えた内燃機関の排気ガス再循環装置
JPH09253470A (ja) * 1996-03-25 1997-09-30 Able Kk 流れ発生装置、これを用いた推進装置、反応槽及び培養槽
JP4403000B2 (ja) * 2004-03-30 2010-01-20 Ｈｏｙａ株式会社 マイクロチップ及びマイクロポンプ
JP4567408B2 (ja) * 2004-09-29 2010-10-20 シーケーディ株式会社 電磁弁マニホールド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384738B (zh) * 2009-08-10 2013-02-01 Pegatron Corp 壓電式幫浦

Also Published As

Publication number Publication date
DE102007060026A1 (de) 2008-08-14
TWI326742B (enExample) 2010-07-01
JP2008196485A (ja) 2008-08-28

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees