WO2007114912A3 - Check valve diaphragm micropump - Google Patents

Check valve diaphragm micropump Download PDF

Info

Publication number
WO2007114912A3
WO2007114912A3 PCT/US2007/008280 US2007008280W WO2007114912A3 WO 2007114912 A3 WO2007114912 A3 WO 2007114912A3 US 2007008280 W US2007008280 W US 2007008280W WO 2007114912 A3 WO2007114912 A3 WO 2007114912A3
Authority
WO
Grant status
Application
Patent type
Prior art keywords
wafer
check valve
define
valve diaphragm
chamber
Prior art date
Application number
PCT/US2007/008280
Other languages
French (fr)
Other versions
WO2007114912A2 (en )
Inventor
Jianke Kang
Gregory W Auner
Original Assignee
Univ Wayne State
Jianke Kang
Gregory W Auner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezo-electric drive
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00General characteristics of the apparatus
    • A61M2205/02General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0244Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M2205/00General characteristics of the apparatus
    • A61M2205/02General characteristics of the apparatus characterised by a particular materials
    • A61M2205/0272Electro-active or magneto-active materials
    • A61M2205/0294Piezoelectric materials
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142Pressure infusion, e.g. using pumps
    • A61M5/14212Pumping with an aspiration and an expulsion action
    • A61M5/14224Diaphragm type
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/206Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218Means to regulate or vary operation of device
    • Y10T137/2191By non-fluid energy field affecting input [e.g., transducer]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/206Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218Means to regulate or vary operation of device
    • Y10T137/2202By movable element
    • Y10T137/2213Electrically-actuated element [e.g., electro-mechanical transducer]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/206Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
    • Y10T137/218Means to regulate or vary operation of device
    • Y10T137/2202By movable element
    • Y10T137/2218Means [e.g., valve] in control input
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49229Prime mover or fluid pump making
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49229Prime mover or fluid pump making
    • Y10T29/49236Fluid pump or compressor making

Abstract

A micropump device including a first wafer and a second wafer attached to the first wafer. The first and second wafers are configured to define a chamber therebetween having a predetermined volume. A third wafer is attached to the second wafer to define an inlet section and an outlet section in fluid communication with the chamber. At least one of the second and third wafers are formed to define a moveable diaphragm configured to change the predetermined volume of the chamber for pumping a fluid between the inlet section and the outlet section.
PCT/US2007/008280 2006-03-30 2007-03-30 Check valve diaphragm micropump WO2007114912A3 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US78733206 true 2006-03-30 2006-03-30
US60/787,332 2006-03-30

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12239919 US8475144B2 (en) 2006-03-30 2008-09-29 Check valve diaphragm micropump
US13906405 US9103336B2 (en) 2006-03-30 2013-05-31 Check valve diaphragm micropump

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12239919 Continuation US8475144B2 (en) 2006-03-30 2008-09-29 Check valve diaphragm micropump

Publications (2)

Publication Number Publication Date
WO2007114912A2 true WO2007114912A2 (en) 2007-10-11
WO2007114912A3 true true WO2007114912A3 (en) 2007-11-29

Family

ID=38512662

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/008280 WO2007114912A3 (en) 2006-03-30 2007-03-30 Check valve diaphragm micropump

Country Status (2)

Country Link
US (2) US8475144B2 (en)
WO (1) WO2007114912A3 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007114912A3 (en) 2006-03-30 2007-11-29 Univ Wayne State Check valve diaphragm micropump
DE102007035721A1 (en) * 2007-07-30 2009-02-05 Robert Bosch Gmbh Microvalve method of making a microvalve and micropump
US9333297B2 (en) 2008-05-08 2016-05-10 Minipumps, Llc Drug-delivery pump with intelligent control
US8231608B2 (en) 2008-05-08 2012-07-31 Minipumps, Llc Drug-delivery pumps and methods of manufacture
DK2320989T3 (en) 2008-05-08 2015-06-22 Minipumps Llc Implantable pumps and needles thereof
JP5708786B2 (en) * 2011-02-23 2015-04-30 富士通株式会社 Actuator, micropumps, and electronic apparatus
WO2012159672A1 (en) * 2011-05-25 2012-11-29 Hach Lange Gmbh Fluid analysis device
JP5900155B2 (en) * 2011-09-06 2016-04-06 株式会社村田製作所 Fluid control device
US8956325B2 (en) * 2011-12-07 2015-02-17 Stmicroelectronics, Inc. Piezoelectric microfluidic pumping device and method for using the same
US9334858B2 (en) * 2012-04-19 2016-05-10 Kci Licensing, Inc. Disc pump with perimeter valve configuration
KR20140118542A (en) * 2013-03-29 2014-10-08 삼성전기주식회사 Micro pump
CN108061024A (en) * 2016-11-09 2018-05-22 英业达(重庆)有限公司 Airflow generation device and airflow generation method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0465229A1 (en) * 1990-07-02 1992-01-08 Seiko Epson Corporation Micropump and process for manufacturing a micropump
US5085562A (en) * 1989-04-11 1992-02-04 Westonbridge International Limited Micropump having a constant output
WO1997001055A1 (en) * 1995-06-21 1997-01-09 Pharmacia Biotech Ab Method for the manufacture of a membrane-containing microstructure
US6395638B1 (en) * 1997-05-12 2002-05-28 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Method for producing a micromembrane pump body
US20020098097A1 (en) * 2001-01-22 2002-07-25 Angad Singh Magnetically-actuated micropump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0518524B1 (en) * 1991-05-30 1996-09-04 Hitachi, Ltd. Valve and semiconductor fabricating equipment using the same
DE4135655C2 (en) * 1991-09-11 1993-08-05 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
US5317452A (en) * 1992-11-17 1994-05-31 Harvard University Aligning and attaching a lens to a source of emitted light using light pressure force
US5529279A (en) * 1994-08-24 1996-06-25 Hewlett-Packard Company Thermal isolation structures for microactuators
WO1999061507A1 (en) * 1998-05-26 1999-12-02 Asahi Kasei Kogyo Kabushiki Kaisha Method of regulating molecular weight distribution of polyether glycol
JP2000314381A (en) * 1999-03-03 2000-11-14 Ngk Insulators Ltd pump
WO2002012116A3 (en) * 2000-08-03 2002-04-04 Analog Devices Inc Bonded wafer optical mems process
US6520477B2 (en) * 2001-02-01 2003-02-18 William Trimmer Micro pump
US6841848B2 (en) * 2003-06-06 2005-01-11 Analog Devices, Inc. Composite semiconductor wafer and a method for forming the composite semiconductor wafer
US7258533B2 (en) * 2004-12-30 2007-08-21 Adaptivenergy, Llc Method and apparatus for scavenging energy during pump operation
US7323355B2 (en) * 2005-03-23 2008-01-29 Freescale Semiconductor, Inc. Method of forming a microelectronic device
WO2007114912A3 (en) 2006-03-30 2007-11-29 Univ Wayne State Check valve diaphragm micropump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5085562A (en) * 1989-04-11 1992-02-04 Westonbridge International Limited Micropump having a constant output
EP0465229A1 (en) * 1990-07-02 1992-01-08 Seiko Epson Corporation Micropump and process for manufacturing a micropump
WO1997001055A1 (en) * 1995-06-21 1997-01-09 Pharmacia Biotech Ab Method for the manufacture of a membrane-containing microstructure
US6395638B1 (en) * 1997-05-12 2002-05-28 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Method for producing a micromembrane pump body
US20020098097A1 (en) * 2001-01-22 2002-07-25 Angad Singh Magnetically-actuated micropump

Also Published As

Publication number Publication date Type
US9103336B2 (en) 2015-08-11 grant
WO2007114912A2 (en) 2007-10-11 application
US20090188576A1 (en) 2009-07-30 application
US20130263449A1 (en) 2013-10-10 application
US8475144B2 (en) 2013-07-02 grant

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