TW200833950A - A thin film pump - Google Patents

A thin film pump

Info

Publication number
TW200833950A
TW200833950A TW096104724A TW96104724A TW200833950A TW 200833950 A TW200833950 A TW 200833950A TW 096104724 A TW096104724 A TW 096104724A TW 96104724 A TW96104724 A TW 96104724A TW 200833950 A TW200833950 A TW 200833950A
Authority
TW
Taiwan
Prior art keywords
thin film
pump
cavity
working fluid
primary
Prior art date
Application number
TW096104724A
Other languages
English (en)
Other versions
TWI326742B (zh
Inventor
xiao-kang Ma
Chang-Hung Peng
Bo-Ren Hou
Hong-Yun Wu
Ming-Chien Kuo
Original Assignee
Cooler Master Co Ltd
xiao-kang Ma
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cooler Master Co Ltd, xiao-kang Ma filed Critical Cooler Master Co Ltd
Priority to TW096104724A priority Critical patent/TW200833950A/zh
Priority to DE102007060026A priority patent/DE102007060026A1/de
Priority to JP2008015829A priority patent/JP2008196485A/ja
Publication of TW200833950A publication Critical patent/TW200833950A/zh
Application granted granted Critical
Publication of TWI326742B publication Critical patent/TWI326742B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
TW096104724A 2007-02-09 2007-02-09 A thin film pump TW200833950A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW096104724A TW200833950A (en) 2007-02-09 2007-02-09 A thin film pump
DE102007060026A DE102007060026A1 (de) 2007-02-09 2007-12-13 Membranpumpe und Vorrichtung mit einer solchen
JP2008015829A JP2008196485A (ja) 2007-02-09 2008-01-28 薄膜ポンプ及び薄膜ポンプを備える装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096104724A TW200833950A (en) 2007-02-09 2007-02-09 A thin film pump

Publications (2)

Publication Number Publication Date
TW200833950A true TW200833950A (en) 2008-08-16
TWI326742B TWI326742B (zh) 2010-07-01

Family

ID=39597728

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104724A TW200833950A (en) 2007-02-09 2007-02-09 A thin film pump

Country Status (3)

Country Link
JP (1) JP2008196485A (zh)
DE (1) DE102007060026A1 (zh)
TW (1) TW200833950A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384738B (zh) * 2009-08-10 2013-02-01 Pegatron Corp 壓電式幫浦

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI412664B (zh) * 2010-10-12 2013-10-21 Micorjet Technology Co Ltd 流體輸送裝置
CN102797667A (zh) * 2012-09-01 2012-11-28 安徽理工大学 一种基于超磁致伸缩薄膜驱动器的微型泵
CN107420291B (zh) * 2017-07-13 2019-04-23 西安电子科技大学 一种基于可变弹性模量的复合薄膜压电微泵
CN112049781A (zh) * 2020-09-29 2020-12-08 长春工业大学 一种具有放大机构的被动阀压电泵

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3634939A1 (de) * 1986-10-14 1988-04-28 Du Pont Deutschland Verfahren zum aufzeichnen von quasihalbtonbildern
JP2600180B2 (ja) * 1987-07-13 1997-04-16 日本電気株式会社 圧電型マイクロポンプ
JPH03149370A (ja) * 1989-11-07 1991-06-25 Toshiba Corp 圧電振動体およびそれを用いた圧電式ポンプ
JPH05263763A (ja) * 1992-03-19 1993-10-12 Hitachi Ltd 圧電ポンプおよびその運転方法
JP3663704B2 (ja) * 1995-11-15 2005-06-22 いすゞ自動車株式会社 過給機を備えた内燃機関の排気ガス再循環装置
JPH09253470A (ja) * 1996-03-25 1997-09-30 Able Kk 流れ発生装置、これを用いた推進装置、反応槽及び培養槽
JP4403000B2 (ja) * 2004-03-30 2010-01-20 Ｈｏｙａ株式会社 マイクロチップ及びマイクロポンプ
JP4567408B2 (ja) * 2004-09-29 2010-10-20 シーケーディ株式会社 電磁弁マニホールド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384738B (zh) * 2009-08-10 2013-02-01 Pegatron Corp 壓電式幫浦

Also Published As

Publication number Publication date
JP2008196485A (ja) 2008-08-28
TWI326742B (zh) 2010-07-01
DE102007060026A1 (de) 2008-08-14

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees