JP2008177539A - 傾斜ハイブリッド非晶質シリコンナノワイヤー太陽電池 - Google Patents
傾斜ハイブリッド非晶質シリコンナノワイヤー太陽電池 Download PDFInfo
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- 239000002070 nanowire Substances 0.000 title abstract description 37
- 229910021417 amorphous silicon Inorganic materials 0.000 title description 14
- 239000004065 semiconductor Substances 0.000 claims abstract description 92
- 239000002086 nanomaterial Substances 0.000 claims abstract description 74
- 239000000203 mixture Substances 0.000 claims abstract description 63
- 239000000758 substrate Substances 0.000 claims abstract description 55
- 239000000463 material Substances 0.000 claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims description 32
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 23
- 239000010703 silicon Substances 0.000 claims description 23
- 239000002019 doping agent Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 14
- 239000011669 selenium Substances 0.000 claims description 14
- 239000002243 precursor Substances 0.000 claims description 13
- 238000000151 deposition Methods 0.000 claims description 12
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 11
- -1 GaInP Chemical compound 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 8
- 229910052714 tellurium Inorganic materials 0.000 claims description 8
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims description 6
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- 239000002082 metal nanoparticle Substances 0.000 claims description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 6
- 229910052711 selenium Inorganic materials 0.000 claims description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
- 238000004050 hot filament vapor deposition Methods 0.000 claims description 5
- 239000012780 transparent material Substances 0.000 claims description 5
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 4
- 239000005751 Copper oxide Substances 0.000 claims description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 4
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 4
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims description 4
- 229910017231 MnTe Inorganic materials 0.000 claims description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 4
- 229910007709 ZnTe Inorganic materials 0.000 claims description 4
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 claims description 4
- AQCDIIAORKRFCD-UHFFFAOYSA-N cadmium selenide Chemical compound [Cd]=[Se] AQCDIIAORKRFCD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 4
- 229910000431 copper oxide Inorganic materials 0.000 claims description 4
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 239000011787 zinc oxide Substances 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052582 BN Inorganic materials 0.000 claims description 2
- 229910002601 GaN Inorganic materials 0.000 claims description 2
- 229910005540 GaP Inorganic materials 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- 238000000231 atomic layer deposition Methods 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- 229910052733 gallium Inorganic materials 0.000 claims description 2
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 claims 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 1
- 238000004070 electrodeposition Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 14
- 230000004807 localization Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 133
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- 239000010408 film Substances 0.000 description 9
- 239000010409 thin film Substances 0.000 description 8
- 239000012535 impurity Substances 0.000 description 7
- 239000002356 single layer Substances 0.000 description 7
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 238000002161 passivation Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 229910052698 phosphorus Inorganic materials 0.000 description 5
- 238000003491 array Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000000712 assembly Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
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- 239000012528 membrane Substances 0.000 description 3
- 230000005693 optoelectronics Effects 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 241000272194 Ciconiiformes Species 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical group [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 230000005855 radiation Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 239000002073 nanorod Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】光起電力デバイスを、(a)基板上に配設された複数の細長い半導体ナノ構造であって、第1のタイプのドーピングを有する複数の細長い半導体ナノ構造(ナノワイヤーはその1種である)と、b)細長い半導体ナノ構造上にコンフォーマルに設けられ、第2のタイプのドーピングを有する半導体材料の単一の非晶質層、により構成する。該非晶質層は、細長い半導体ナノ構造との界面においては実質的に真性組成とし、非晶質層の反対側においては実質的に導電性組成となるよう、第2のタイプのドーピングにより組成を傾斜させる。かかる組成傾斜非晶質層により、連続的に変化する局在化状態を有するバンドギャップが得られる。
【選択図】図1
Description
現在、シリコン(Si)は、太陽光を電気に変換するために使用されるような太陽電池の製造において最も普遍的に使われている材料である。単接合及び多接合のpn太陽電池がこの目的で使用されているが、いずれも生産及びこの技術の使用にかかるコストを大きく低減するほど十分に効率的ではない。その結果として、従来の電気源との競合により、かかる太陽電池技術の普及を妨げている。
pn接合ダイオードアレイにおけるシリコンナノワイヤーは既に記載されている(Pengら、“Fabrication of large−Area Silicon Nanowire pn Junction Diode Arrays,” Adv.Mater.,2004,vol.16,pp.73−76)。しかし、かかるアレイは光起電力デバイスに使用するために構成されたものではないし、かかるアレイが太陽電池の効率増大にいかに役立ち得るか示唆してもいない。
構造上の不完全又は不純物原子に起因する欠陥状態は、単結晶半導体の表面上及びバルク内部にに存在する可能性がある。加えて、多結晶半導体材料は粒界を有するランダムに配向した結晶粒からなり、この粒界は多数のバルク及び表面欠陥状態を誘発する。電荷担体は欠陥部位で再結合することができ、従って電流担体として失われるので、欠陥は通例太陽電池のような電子及び/又は光電子デバイスの動作又は性能に悪影響を与える。従って、単結晶又は多結晶半導体基板の表面は、表面欠陥のマイナスの影響を最小限にするために、デバイス製造中に不動態化することが多い。表面不動態化のための1つの方法は、単結晶又は多結晶半導体基板上に真性(ドープされてない)非晶質半導体材料の層を形成することである。これは、基板表面における電荷担体の再結合を減少させ、デバイスの性能を改善する。
図1を参照して、幾つかの実施形態では、本発明は、(a)基板102上に配置され、第1のタイプのドーピングを有する複数の細長い半導体ナノ構造101と、(b)細長い半導体ナノ構造上にコンフォーマルに設けられた半導体材料の非晶質層103とからなる組成傾斜ハイブリッドナノ構造系光起電力デバイスに関し、非晶質層と細長い半導体ナノ構造との間には界面があり、非晶質層は界面における実質的に真性組成から非晶質層の反対側上における実質的に導電性の組成まで組成が傾斜しており、非晶質層の傾斜組成は第2のタイプのドーピングにより提供されている。かかる実施形態では、組成傾斜非晶質層は連続的に変化する局在化状態を有するバンドギャップを提供し、非晶質半導体層が半導体ナノワイヤーと反対の導電型に組成傾斜している場合ヘテロ接合が形成される。幾つかのかかる実施形態では、透明な導電性材料(TCM)の層104が非晶質層103上に設けられる。また、通例、デバイスを外部回路に接続するように動作可能な上部接点105及び下部接点が設けられており、ここで下部電極は通例(常にということはない)基板と一体化される(下記参照)。
幾つかの実施形態では、本発明は上記組成傾斜ハイブリッドナノ構造系光起電力デバイスを作成する方法に関し、かかる方法は次の段階からなる。(段階501)基板上に複数の細長い半導体ナノ構造を準備する。この細長い半導体ナノ構造は第1のタイプのドーピングを有する。(段階502)その細長い半導体ナノ構造上にコンフォーマルに半導体材料の非晶質層を設けて、界面を形成する。ここで、この非晶質層は、界面における実質的に真性のものから、非晶質層の反対側における実質的に導電性のものまで組成が傾斜しており、非晶質層のこの傾斜組成は第2のタイプのドーピングによってもたらされる。(段階503)非晶質層上に1つの層として導電性で透明な材料を付着させる。(段階504)デバイスを外部回路に接続するように動作可能な上部及び下部の接点を確立する。
幾つかの実施形態では、本発明は、1以上の組成傾斜ハイブリッドナノワイヤー系光起電力デバイスを含む太陽電池パネルに関し、この太陽電池パネルはかかるデバイスをその周囲の大気環境から隔離し、電気出力の発生を可能にする。
伝統的な(従来技術の)ハイブリッド光起電力デバイスは、1つの導電型の半導体基板と、その基板と接触して配置されてヘテロ接合を形成する反対の導電型の非晶質半導体層とからなる。この基板はn−タイプ又はp−タイプの単結晶又は多結晶半導体材料であり得る。
本実施例は、本発明の幾つかの実施形態に従って組成が傾斜したハイブリッドナノワイヤー光起電力デバイスを製造するプロセス段階を例証するものである。
この実施例は、本発明の幾つかの実施形態に従って光起電力デバイス100(又はその変形)を使用することができる代表的な応用を例証するものである。
Siナノワイヤーが上記した実施形態の多くで使用されているが、これは広範な半導体系の細長いナノ構造の単なる代表である。従って、当業者には認識されるように、上記実施形態の多くを変化させて、シリコン以外の材料を含む細長いナノ構造を使用することができる。かかる変形実施形態は、対応して(シリコンとは)異なる組成傾斜の非晶質層を有する。
要約すると、幾つかの実施形態では、本発明は、細長い半導体ナノ構造と、その厚さを横切って実質的に真性ののものから実質的に導電性のものまで連続的に傾斜したドーピング濃度を有する非晶質半導体単一層とからなる組成傾斜ハイブリッドナノ構造系光起電力デバイスに関する。他の実施形態では、本発明は、かかる光起電力デバイスを作成する方法、及びかかるデバイスを利用する応用(例えば、太陽電池モジュール)に関する。
101 細長い半導体ナノ構造
102 層状基板
102a 基板支持体
102b 導電性層
102c ナノ多孔質テンプレート
103 半導体材料の非晶質層
104 透明な導電性材料(TCM)
105 接点
403 非晶質層
404 透明な導電性材料(TCM)
段階501 半導体の細長いナノ構造を基板上に準備する
段階502 組成が傾斜した非晶質半導体層をナノ構造/基板上にコンフォーマルに蒸着する
段階503 導電性の透明な材料を蒸着する
段階504 上部及び下部接点を設ける
Claims (24)
- a)基板上に配設された複数の細長い半導体ナノ構造であって、第1のタイプのドーピングを有する複数の細長い半導体ナノ構造と、
b)細長い半導体ナノ構造にコンフォーマルに設けられた半導体材料の非晶質層であって、非晶質層と細長い半導体ナノ構造との間に界面を有しており、非晶質層が界面における実質的に真性組成から非晶質層の反対側における実質的に導電性の組成まで組成が傾斜しており、非晶質層の傾斜組成が第2のタイプのドーピングによってもたらされる、非晶質層と
を含んでなる光起電力デバイス。 - 組成傾斜非晶質層が、局在化状態の連続的変化を伴うバンドギャップを与える、請求項1記載の光起電力デバイス。
- さらに、非晶質層の上に層として配置された透明な導電性材料を含んでいる、請求項1記載の光起電力デバイス。
- さらに、デバイスを外部回路に接続するように動作可能な上部及び下部接点を含んでいる、請求項1記載の光起電力デバイス。
- さらに、基板上にあるか、又は基板と一体になっているナノ多孔質テンプレートを含んでおり、そこから細長い半導体ナノ構造が出ている、請求項1記載の光起電力デバイス。
- 細長い半導体ナノ構造が、シリコン(Si)、SiGe、ガリウムヒ素(GaAs)、ガリウムリン(GaP)、インジウムリン(InP)、GaInP、ゲルマニウム(Ge)、GaInAs、アルミニウムガリウムヒ素(AlGaAs)、酸化亜鉛(ZnO)、窒化ガリウム(GaN)、窒化アルミニウム(AlN)、窒化インジウム(InN)、窒化ホウ素(BN)、セレン(Se)、セレン化カドミウム(CdSe)、テルル化カドミウム(CdTe)、Cd−O−Te、Cd−Mn−O−Te、ZnTe、Zn−O−Te、Zn−Mn−O−Te、MnTe、Mn−O−Te、銅の酸化物、炭素、Cu−In−Ga−Se、Cu−In−Se、及びこれらの組合せからなる群から選択される材料からなる、請求項1記載の光起電力デバイス。
- 細長い半導体ナノ構造が100nm〜100μmの範囲の長さ、及び5nm〜1μmの範囲の幅を有する、請求項1記載の光起電力デバイス。
- 細長い半導体ナノ構造がp−ドープである、請求項1記載の光起電力デバイス。
- 非晶質層が、シリコン、GaAs、GaP、InP、GaInP、Ge、SiGe、GaInAs、AlGaAs、ZnO、GaN、AlN、InN、BN、Se、CdSe、CdTe、CdS、Cd−O−Te、Cd−Mn−O−Te、ZnTe、Zn−O−Te、Zn−Mn−O−Te、MnTe、Mn−O−Te、銅の酸化物、炭素、酸化チタン、Cu−In−Ga−Se、Cu−In−Se、及びこれらの組合せからなる群から選択される材料からなる、請求項1記載の光起電力デバイス。
- 非晶質層が20〜200Åの範囲の相対的厚さからなる、請求項1記載の光起電力デバイス。
- 透明な導電性材料がITO、ZnO及びZnAlOからなる群から選択され、透明な導電性材料層が約0.05〜約1μmの厚さを有する、請求項3記載の光起電力デバイス。
- 基板が下部電極を含む、請求項4記載の光起電力デバイス。
- a)第1のタイプのドーピングを有する複数の細長い半導体ナノ構造を基板上に準備し、
b)細長い半導体ナノ構造上にコンフォーマルに半導体材料の非晶質層を界面を形成するようにして設ける
段階を含んでなり、
非晶質層が、界面における実質的に真性組成から非晶質層の反対側における実質的に導電性の組成まで組成が傾斜しており、非晶質層の傾斜組成が第2のタイプのドーピングによってもたらされる、光起電力デバイスを製造する方法。 - さらに、非晶質層上に導電性の透明な材料を付着させることを含んでいる、請求項13記載の方法。
- さらに、デバイスを外部回路に接続するために動作可能な上部及び下部接点を確立することを含んでいる、請求項14記載の方法。
- 細長いナノ構造を、CVD、MOCVD、PECVD、HWCVD、原子層蒸着、電気化学蒸着、溶液化学蒸着、及びこれらの組合せからなる群から選択される方法によって成長させることによって得る、請求項13記載の方法。
- 細長いナノ構造を、金属ナノ粒子から触媒的に成長させることによって得る、請求項13記載の方法。
- 金属ナノ粒子がナノ多孔質テンプレート中に存在する、請求項17記載の方法。
- 金属ナノ粒子が、金(Au)、インジウム(In)、ガリウム(Ga)、及び鉄(Fe)からなる群から選択される金属からなる、請求項17記載の方法。
- コンフォーマルに非晶質層を設ける段階を、CVD、MOCVD、PECVD、HWCVD、スパッタリング、及びこれらの組合せからなる群から選択される技術を用いて行う、請求項13記載の方法。
- 蒸着の際にドーパント種に分解するドーパント前駆体でドーピングすることにより非晶質層を組成が傾斜させ、この際非晶質層が蒸着されるにつれてドーパント前駆体濃度を次第に増大することにより蒸着中に傾斜様式でドーピングを与える、請求項13記載の方法。
- 下部接点が基板によってもたらされる、請求項15記載の方法。
- 上部接点が導電性で透明な材料の層によってもたらされる、請求項15記載の方法。
- 請求項1記載の光起電力デバイスを1以上含んでいる太陽電池パネルであって、かかるデバイスをその周囲の大気環境から隔離し、電気出力の生成を可能にする、前記太陽電池パネル。
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KR20080044181A (ko) | 2008-05-20 |
EP1923918A2 (en) | 2008-05-21 |
CN101183689B (zh) | 2012-08-01 |
US20080135089A1 (en) | 2008-06-12 |
CN101183689A (zh) | 2008-05-21 |
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