JP2010056525A - 太陽電池及びその製造方法 - Google Patents
太陽電池及びその製造方法 Download PDFInfo
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- JP2010056525A JP2010056525A JP2009138596A JP2009138596A JP2010056525A JP 2010056525 A JP2010056525 A JP 2010056525A JP 2009138596 A JP2009138596 A JP 2009138596A JP 2009138596 A JP2009138596 A JP 2009138596A JP 2010056525 A JP2010056525 A JP 2010056525A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 30
- 239000004065 semiconductor Substances 0.000 claims abstract description 70
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 49
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 13
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 12
- 238000007743 anodising Methods 0.000 claims description 8
- 238000007639 printing Methods 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 230000001788 irregular Effects 0.000 abstract description 5
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000002835 absorbance Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 description 10
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 238000010248 power generation Methods 0.000 description 4
- 238000002048 anodisation reaction Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910004613 CdTe Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910021480 group 4 element Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
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- H—ELECTRICITY
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/03529—Shape of the potential jump barrier or surface barrier
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/047—PV cell arrays including PV cells having multiple vertical junctions or multiple V-groove junctions formed in a semiconductor substrate
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/0543—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means comprising light concentrating means of the refractive type, e.g. lenses
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/0547—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means comprising light concentrating means of the reflecting type, e.g. parabolic mirrors, concentrators using total internal reflection
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
【解決手段】本発明に係る太陽電池は、一面に複数のホールが形成された基板と、ホール内壁及び基板の一面に形成された金属層と、金属層にコーティングされたp型半導体と、ホールの内部及び基板の一面に形成されたn型半導体と、n型半導体上に形成された透明電極と、p型半導体及び透明電極に形成された電極端子と、を含むことを特徴とする。
【選択図】図9
Description
15 ホール
20 金属層
30 p型半導体
40 n型半導体
50 透明電極
51 第1インク液滴
52 第2インク液滴
60 電極端子
Claims (13)
- 基板の一面に複数のホールを形成する工程と、
前記ホールの内壁及び前記基板の一面に金属層を形成する工程と、
前記金属層上にp型半導体をコーティングする工程と、
前記ホールの内部及び前記基板の一面にn型半導体を形成する工程と、
前記n型半導体に透明電極を形成する工程と、
前記p型半導体及び前記透明電極に電極端子を形成する工程と、
を含む、太陽電池の製造方法。 - 前記ホールを形成する工程は、陽極酸化処理する工程を含む、請求項1に記載の太陽電池の製造方法。
- 前記陽極酸化処理はフッ酸溶液で行われる、請求項2に記載の太陽電池の製造方法。
- 前記基板はp型シリコンウェハーである、請求項2に記載の太陽電池の製造方法。
- 前記透明電極はマイクロレンズ状である、請求項1に記載の太陽電池の製造方法。
- 前記透明電極を形成する工程は、インクジェット方式を用いて、前記透明電極を構成する材料を含んだインクを前記n型半導体上にプリントする工程を含む、請求項5に記載の太陽電池の製造方法。
- 前記透明電極を形成する工程は、
前記n型半導体上に前記透明電極を構成する材料を含んだ第1インク液滴を吐出する工程と、
前記第1インク液滴を硬化させる工程と、
前記第1インク液滴に隣接して前記透明電極を構成する材料を含んだ第2インク液滴を吐出する工程と、
を含む、請求項6に記載の太陽電池の製造方法。 - 前記n型半導体を形成する工程は、インクジェット方式で行われる、請求項1に記載の太陽電池の製造方法。
- 前記電極端子を形成する工程は、インクジェット方式で導電性インクをプリントする工程を含む、請求項1に記載の太陽電池の製造方法。
- 一面に複数のホールが形成された基板と、
前記ホールの内壁及び前記基板の一面に形成された金属層と、
前記金属層にコーティングされたp型半導体と、
前記ホールの内部及び前記基板の一面に形成されたn型半導体と、
前記n型半導体上に形成された透明電極と、
前記p型半導体及び前記透明電極に形成された電極端子と、
を含む、太陽電池。 - 前記基板は、p型シリコンウェハーである、請求項10に記載の太陽電池。
- 前記透明電極は、マイクロレンズ形状である、請求項10に記載の太陽電池。
- 前記複数のホールは、そのサイズが一定であり、各ホール間の間隔も一定である、請求項10に記載の太陽電池。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080084701A KR101002682B1 (ko) | 2008-08-28 | 2008-08-28 | 태양전지 및 그 제조방법 |
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JP2010056525A true JP2010056525A (ja) | 2010-03-11 |
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JP2009138596A Ceased JP2010056525A (ja) | 2008-08-28 | 2009-06-09 | 太陽電池及びその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8148796B2 (ja) |
JP (1) | JP2010056525A (ja) |
KR (1) | KR101002682B1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20220135700A (ko) * | 2021-03-31 | 2022-10-07 | 한국항공대학교산학협력단 | 투명한 태양전지 및 그 제작방법 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8933526B2 (en) * | 2009-07-15 | 2015-01-13 | First Solar, Inc. | Nanostructured functional coatings and devices |
US10121925B2 (en) * | 2010-06-18 | 2018-11-06 | University Of Florida Research Foundation, Inc. | Thin film photovoltaic devices with microlens arrays |
TWI455333B (zh) * | 2012-04-09 | 2014-10-01 | Sino American Silicon Prod Inc | 太陽能電池 |
US20150228815A1 (en) * | 2014-02-12 | 2015-08-13 | Tsmc Solar Ltd. | High efficiency solar cells with micro lenses and method for forming the same |
CN113224191B (zh) * | 2021-04-28 | 2022-11-11 | 宜兴市昱元能源装备技术开发有限公司 | 一种光伏电池基板及其制备方法 |
KR20230029286A (ko) | 2021-08-24 | 2023-03-03 | 최철민 | 상업등기 정보제공 시스템 및 이의 운용방법 |
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JP2000286432A (ja) | 1999-03-30 | 2000-10-13 | Toshiba Corp | 太陽電池素子用基板、太陽電池素子及び太陽電池素子の製造方法 |
JP2000323732A (ja) * | 1999-05-14 | 2000-11-24 | Fuji Electric Co Ltd | 薄膜太陽電池とその製造方法 |
US6969897B2 (en) * | 2002-12-10 | 2005-11-29 | Kim Ii John | Optoelectronic devices employing fibers for light collection and emission |
JP2011511464A (ja) * | 2008-02-03 | 2011-04-07 | ンリテン エナジー コーポレイション | 薄膜光起電力デバイスおよび関連製造方法 |
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2008
- 2008-08-28 KR KR1020080084701A patent/KR101002682B1/ko not_active IP Right Cessation
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2009
- 2009-05-28 US US12/457,001 patent/US8148796B2/en not_active Expired - Fee Related
- 2009-06-09 JP JP2009138596A patent/JP2010056525A/ja not_active Ceased
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KR20220135700A (ko) * | 2021-03-31 | 2022-10-07 | 한국항공대학교산학협력단 | 투명한 태양전지 및 그 제작방법 |
KR102515398B1 (ko) * | 2021-03-31 | 2023-03-29 | 한국항공대학교산학협력단 | 투명한 태양전지 및 그 제작방법 |
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US20100051104A1 (en) | 2010-03-04 |
KR101002682B1 (ko) | 2010-12-21 |
US8148796B2 (en) | 2012-04-03 |
KR20100025943A (ko) | 2010-03-10 |
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